Keysight Technologies B1505A Manual de usuario

Keysight Technologies B1505A

Power Device Analyzer/Curve Tracer

Configuration and

Connection Guide

Notices

No part of this manual may be reproduced in

any form or by any means (including elec-

tronic storage and retrieval or translation into

a foreign language) without prior agreement

and written consent from Keysight Technolo-

gies as governed by United States and inter-

national copyright laws.

Manual Part Number

B1505-90090

Edition

Edition 1, June 2009

Edition 2, November 2009

Edition 3, May 2010

Edition 4, August 2010

Edition 5, February 2011

Edition 6, September 2012

Edition 7, April 2013

Edition 8, September 2015

Edition 9, November 2015

Edition 10, December 2015

Published by:

Keysight Technologies International Japan

G.K.

9-1, Takakura-cho, Hachioji-shi, Tokyo

192-0033 Japan

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disclaims all warranties, either express

or implied, with regard to this manual

and any information contained herein,

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for a particular purpose. Keysight shall

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the user have a separate written agree-

ment with warranty terms covering the

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with these terms, the warranty terms in

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Technology Licenses

The hardware and/or software described in

this document are furnished under a license

and may be used or copied only in accor-

dance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of a

U.S. Government prime contract or subcon-

tract, Software is delivered and licensed as

“Commercial computer software” as defined

in DFAR 252.227-7014 (June 1995), or as a

“commercial item” as defined in FAR 2.101(a)

or as “Restricted computer software” as

defined in FAR 52.227-19 (June 1987) or any

equivalent agency regulation or contract

clause. Use, duplication or disclosure of Soft-

ware is subject to Keysight Technologies’

standard commercial license terms, and non-

DOD Departments and Agencies of the U.S.

Government will receive no greater than

Restricted Rights as defined in FAR 52.227-

19(c)(1-2) (June 1987). U.S. Government

users will receive no greater than Limited

Rights as defined in FAR 52.227-14 (June

1987) or DFAR 252.227-7015 (b)(2) (Novem-

ber 1995), as applicable in any technical

data.

In This Document

This document provides the following information about Keysight B1505A Power Device

Analyzer/Curve Tracer.

1. Configuration Guide

Describes how to configure the B1505A.

2. N1259A Connection Guide

Describes how to connect the B1505A, the N1259A Test Fixture, and a device under test

(DUT).

3. N1265A Connection Guide

Describes how to connect the B1505A, the N1265A Test Fixture, and a device under test

(DUT).

4. N1272A and N1273A Connection Guide

Describes how to connect the B1505A, the N1273A Capacitance Test Fixture, and a device

under test (DUT).

5. Connection Guide for Wafer Prober and Your Own Test Fixture

Describes how to connect the B1505A, accessories, and a DUT interface such as wafer prober

and your own test fixture.

6. Accessory Dimensions

Describes dimensions and weight of accessories.

7. Connection and Ordering Examples

Describes prober connection and ordering examples.

Contents

Keysight B1505A Configuration and Connection Guide

1. Configuration Guide

Measurement Resources . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

B1505A Mainframe Furnished Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

B1505A Modules and Mainframe Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

Module type and locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

N1259A Test Fixture for Power Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11

N1265A Ultra High Current Expander/Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17

N1266A High Voltage Source Monitor Unit Current Expander . . . . . . . . . . . . . . . . . . . . .1-25

N1266A Compatibility with Fixture and Module Selector . . . . . . . . . . . . . . . . . . . . . . .1-27

N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit

Fast Switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-29

N1268A Ultra High Voltage Expander. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-31

N1271A Thermal Test Enclosure and Related Accessories . . . . . . . . . . . . . . . . . . . . . . . .1-35

Measurement Capability on Thermal Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-39

Information of inTEST Thermal Plate and Thermostream. . . . . . . . . . . . . . . . . . . . . . . .1-39

Pre-configured Power Device Analyzer/Curve Tracer (B1505A with

Modules/Fixture) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-40

Accessories for Wafer Prober and Your Own Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . .1-48

Other Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-57

Retrofit Products for B1505A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-61

Conversion Kit from B1500A to B1505A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-64

Upgrade Kit for N1259AU Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-65

Upgrade Kit for N1265AU Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-69

Note for 4142B Users . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-74

2. N1259A Connection Guide

Input Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

To Connect Interlock Circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4

Output Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8

To Connect DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9

To Use Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12

N1259A-010 Inline Package Socket module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-19

N1259A-011 Universal Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20

N1259A-012 Blank PTFE Board. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-21

N1259A-013 Curve Tracer Test Adapter Socket Module . . . . . . . . . . . . . . . . . . . . . . .2-22

Keysight B1505A Configuration and Connection Guide

Contents

N1259A-014 Gate Charge Socket Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

3. N1265A Connection Guide

Input Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

To Connect Interlock Circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5

Output Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9

To Connect DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Inline Package Socket module (N1265A-010) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

Universal Socket Module (N1265A-011) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Curve Tracer Test Adapter Socket Module (N1265A-013) . . . . . . . . . . . . . . . . . . . . . 3-19

Gate Charge Socket Module (N1265A-014) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

Blank Silicon Plate (N1265A-002) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

Universal R-Box (N1265A-035) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

Protection Adapter (N1265A-040). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

Container (N1265A-045) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

Prober System Cable (N1254A-524) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

4. N1272A and N1273A Connection Guide

Input Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

To Connect Interlock Circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

N1272A Device Capacitance Selector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

Output Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8

To Connect DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8

3-pin Inline Package Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9

N1273A-011 Universal Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

N1273A-013 Curve Tracer Test Adapter Socket Module . . . . . . . . . . . . . . . . . . . . . . 4-14

Accessories for Connecting a DUT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

5. Connection Guide for Wafer Prober and Your Own Test Fixture

Connection Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

To Connect High Voltage R-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

To Use Universal R-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

To Connect HCSMU Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

To Connect Dual HCSMU Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20

To Connect 16493S-020 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20

To Connect 16493S-021 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

To Connect Protection Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

To Connect High Voltage Bias Tee. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

Contents

Keysight B1505A Configuration and Connection Guide

To Connect Module Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27

To Connect HVSMU/HCSMU Fast Switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32

To Connect HVSMU Current Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-34

To Connect Ultra High Current Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-36

Connecting System Cable to N1265A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-37

To Connect Ultra High Voltage Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-38

To Connect Device Capacitance Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-40

To Connect Gate Charge Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-43

To Connect N1274A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-44

To Connect N1275A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-45

To Install an Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-47

Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-48

To Connect Interlock Circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-49

About Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-50

To Make Connection to Reduce Leakage Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-51

To Make Connection to Measure Low Resistance . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-52

To Connect UHVU/HVSMU/HVMCU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-53

6. Accessory Dimensions

7. Connection and Ordering Examples

Package Device Measurement Configuration Examples . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3

3kV, 20A Configuration (B1505AP-H20 equivalent). . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4

3kV, 20A with Capacitance Measurement Configuration (B1505AP-H21

equivalent) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6

3 kV, 500 A or 1500 A Configuration (B1505AP-H50 or B1505AP-H70 equivalent). . .7-8

3 kV, 500 A or 1500 A with Capacitance Measurement Configuration

(B1505AP-H51 or B1505AP-H71 equivalent) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-10

10 kV, 500 A or 1500 A Configuration (B1505AP-U50 or B1505AP-U70

equivalent) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-12

Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU)

Capability to 3 kV, 20 A Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14

3 kV, 20A, High Voltage Medium Current Configuration . . . . . . . . . . . . . . . . . . . . . . . .7-16

3 kV, 40 A Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-18

Add High Resolution Measurement Capability (10 fA resolution with MPSMU

or HPSMU) to 3 kV, 500A Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-21

10 kV, 500 A, High Voltage Medium Current Configuration . . . . . . . . . . . . . . . . . . . . .7-23

Configuration Examples for Lateral Device Measurement with Wafer Prober . . . . . . . . .7-25

3 kV, 20 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . . . .7-26

Keysight B1505A Configuration and Connection Guide

Contents

3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device . . . . . . . . . . . . . 7-30

Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU)

Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device . . 7-33

3 kV, 40 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . . . 7-35

3 kV, 500 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . . 7-38

3 kV, 500 A, Capacitance Measurement for On-Wafer Lateral Device . . . . . . . . . . . . 7-40

3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer

Lateral Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

10 kV, 500 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . 7-44

Configuration Examples for Vertical Device Measurement with Wafer Prober. . . . . . . . 7-46

3 kV, 20 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . . 7-47

3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device. . . . . . . . . . . . . 7-51

Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU)

Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device. . 7-54

3 kV, 40 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . . 7-56

3 kV, 500 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . 7-59

3 kV, 500 A, Capacitance Measurement for On-Wafer Vertical Device. . . . . . . . . . . . 7-60

3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer

Vertical Device. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-62

10 kV, 500 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . 7-64

GaN Current Collapse / Dynamic On-Resistance Measurement System

using the N1267A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-66

Non-Kelvin Connection with the N1259A Test Fixture for Package Device . . . . . . . . 7-66

Kelvin Connection with the N1259A Test Fixture for Package Device . . . . . . . . . . . . 7-68

Non-Kelvin Connection with Prober for On-Wafer Lateral Device . . . . . . . . . . . . . . . 7-70

Kelvin Connection with Prober for On-Wafer Lateral Device . . . . . . . . . . . . . . . . . . . . 7-72

Upgrading from existing B1505A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-74

Example of how to upgrade existing B1505A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-76

1 Configuration Guide

1-2 Keysight B1505A Configuration and Connection Guide

Configuration Guide

Keysight B1505A Power Device Analyzer/Curve Tracer can meet the requirements of

modern power devices evaluations. You can configure a B1505A system from a wide

variety of measurement resources that best meets your needs today and also permits

expansion in future. Please specify the B1505A’s module configuration and accessories

you desire properly.

This chapter is a guide for configuring your B1505A system, and consists of the following

sections.

•"Measurement Resources"

•"B1505A Mainframe Furnished Accessories"

•"B1505A Modules and Mainframe Options"

•"N1259A Test Fixture for Power Device"

•"N1265A Ultra High Current Expander/Fixture"

•"N1266A High Voltage Source Monitor Unit Current Expander"

•"N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast

Switch"

•"N1268A Ultra High Voltage Expander"

•"N1271A Thermal Test Enclosure and Related Accessories"

•"Pre-configured Power Device Analyzer/Curve Tracer (B1505A with

Modules/Fixture)"

•"Accessories for Wafer Prober and Your Own Test Fixture"

•"Other Accessories"

•"Retrofit Products for B1505A"

•"Conversion Kit from B1500A to B1505A"

•"Upgrade Kit for N1259AU Test Fixture"

•"Upgrade Kit for N1265AU Test Fixture"

•"Note for 4142B Users"

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