Edwards STP Series Manual de usuario

MT-00E-001-B

Applicable Models:

STP-603/1003 series

STP-H301/H451 series

STP-H803/H1303 series

STP-A803/A1303 series

STP-A1603 series

STP-A2203 series

STP-A2503/A3003 series

STP-A2803/A3503 series

STP-F2203 series

STP-XH2603P/XH3203P series

STP-XA2703/XA3203 series

STP-XA4503 series

STP-XW3503 series

STP Series Turbomolecular Pumps

Generic Instruction Manual

Instruction Manual (A)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A):

(This Instruction Manual)

STP pump generic Instruction Manual

Instruction Manual (B): STP pump specific information

Instruction Manual (C): STP control unit Instruction Manual

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link (except for SCU-750)

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

STP Series Turbomolecular Pump

March 10 i Issue 1-b

PAGE

CONTENTS

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 2

1.3.1 Warranty period 2

1.3.2 Item warranted 2

1.3.3 Disclaimer 3

1.3.4 Spare parts 3

1.4 Precautions for safe operation of the STP pump 4

1.4.1 Usable gases 4

1.5 Maintenance and inspection precautions 5

1.6 Labels 5

1.7 Operation principle of the STP pump 8

1.8 Temperature management system 9

1.9 Name of the STP pump 10

2 INSTALLATION OF THE STP PUMP 13

2.1 Precautions before installation 13

2.1.1 Operating environment 13

2.1.2 Installation area 14

2.1.3 Bench 15

2.2 Unpacking 16

2.2.1 Unpacking the STP pump 16

2.3 How to install the STP pump 18

2.3.1 Cleaning the seal 20

2.3.2 STP pump installation positions 21

2.3.3 Secure the STP pump 22

2.3.4 Precautions of vacuum piping 22

2.3.5 Vacuum piping method 23

2.3.6 Connecting the purge port 24

2.3.7 Connecting the water cooling pipe 24

2.3.8 Attaching a baking heater 25

2.3.9 Installation of the air cooling unit 25

2.3.10 Installation of the TMS unit 26

3 INSTALLATION OF THE STP CONTROL UNIT 27

3.1 STP control unit 27

3.1.1 SCU-800 27

3.1.2 SCU-750 28

3.1.3 SCU-1400 28

3.1.4 SCU-1500 29

3.1.5 SCU-1600 29

3.2 Cable connection 30

3.2.1 STP connection cable 30

3.2.2 Power cable 31

3.3 How to connect the cables 32

STP Series Turbomolecular Pump

March 10 ii Issue 1-b

PAGE

CONTENTS

Section Title Page

4 OPERATION 35

4.1 Before starting the STP pump 35

4.1.1 Tuning 35

4.1.2 Operation of vacuum system 36

4.2 Pump operation 36

4.2.1 LED indication during operation 36

4.2.2 Starting the STP pump after a safety function operates 37

4.3 Gas pumping, cooling and baking the STP pump 37

4.3.1 Gas pumping 37

4.3.2 How to introduce a purge gas 38

4.4 Cooling the STP pump 38

4.4.1 Water-cooling method 38

4.4.2 Air-cooling method 39

4.5 Baking the STP pump 39

4.6 How to use the TMS unit 40

4.6.1 Parameter set mode 40

4.6.2 Starting/stopping the TMS unit 40

4.6.3 Temperature control 40

5 SAFETY FUNCTIONS 41

5.1 Safety functions 41

5.1.1 Power failure 41

5.1.2 Operation after a power recovery 41

5.1.3 Abnormal state of magnetic bearing 42

5.1.4 Excessive vibration 42

5.1.5 Motor driver overload 42

5.1.6 Overheating inside the STP pump 42

5.1.7 Overheating inside the STP control unit 43

5.1.8 Overspeed 43

5.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 43

5.1.10 Failure of the air-cooling fan (for SCU-800 only) 43

6 MAINTENANCE AND INSPECTION 45

6.1 Maintenance and inspection 45

6.2 Cleaning 46

6.3 Inspecting the deposit 46

6.4 Overhaul 47

6.5 Transporting for repair or overhaul 48

7 STORAGE AND DISPOSAL 49

7.1 Storage of the STP pump 49

7.2 Disposal 50

STP Series Turbomolecular Pump

March 10 iii Issue 1-b

PAGE

iii

CONTENTS

Section Title Page

8 SERVICE, SPARES AND ACCESSORIES 51

8.1 Introduction 51

8.2 Service 51

8.3 Spares 51

8.4 Accessories 52

STP Series Turbomolecular Pump

March 10 iv Issue 1-b

PAGE

iv ILLUSTRATIONS

Figure Title Page

1 STP pump installation warning label 5

2 Hot surface warning label 5

3 Heavy product caution label 6

4 Connector caution label 6

5 Caution label 6

6 TMS heater surface caution label 7

7 Rotation instruction label 7

8 Cross sectional view of the STP pump 8

9 Configuration of the STP pump (Typical pump model) 10

10 Example of lifting the STP pump 16

11 Example of lifting the STP pump (horizontal positioning) 17

12 Installation of the STP pump to the vacuum equipment 19

13 STP pump installation positions 21

14 Positions of the outlet port on the horizontally

or slanted installed STP pump 21

15 Positions of the cooling water port and baking heater 24

16 SCU-800 27

17 SCU-750 28

18 SCU-1400 28

19 SCU-1500 29

20 SCU-1600 29

21 SCU-750/SCU-800 STP connection cable 30

22 SCU-1400/SCU-1500/SCU-1600 STP connection cable 30

23 SCU-750 power cable 31

24 SCU-800 power cable 31

25 SCU-1400/SCU-1500/SCU-1600 power cable 31

STP Series Turbomolecular Pump

March 10 1 Issue 1-b

INTRODUCTION

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards

Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). In this manual, the

control unit for the turbomolecular pump is referred to as the "STP control unit". You must use the

STP pump as specified in this manual.

The procedures in this manual must be followed before you install, operate and maintain the STP

pump. Important safety information is highlighted as WARNING and CAUTION instructions; these

instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:

WARNING

Warnings are given where failure to observe the instruction could result in serious injury

or death to people.

CAUTION

Cautions are given where failure to observe the instruction could result minor personal injury in

damage to the equipment, associated equipment and/or process.

Note: Items you must follow during operation and maintenance.

Throughout this manual, page, figure and table numbers are sequential.

The units used throughout this manual conform to the SI international system of units of

measurement; US equivalent units of measurement are also given.

The following IEC warning labels/symbols appear on the STP Pump Instruction Manual:

Warning - refer to

accompanying documentation.

Warning - risk of electric shock.

Warning - heavy object.

Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are

displayed on the LCD of the STP control unit. Note that the words "WARNING" and

"CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions

during the operation. They do not have the same meaning as the much more serious

symbols for "WARNING" and "CAUTION" used in the instruction manual.

STP Series Turbomolecular Pump

March 10 2 Issue 1-b

INTRODUCTION

1.2 Applied standards

The STP pump conforms to the following directives and standards:

1. Applied Directives

•EC Machinery Directive

•EC Electromagnetic Compatibility Directive

•EC Low Voltage Directive

2. Applied Standards

•EN1012-2

•EN61010-1

•EN61326 (class A)

•EN61000-6-2

3. Applied Standards (Only some model. Contact Edwards about recognized model.)

•UL61010-1, 2nd Edition (Electrical Equipment for Laboratory Use; Part 1: General

Requirements)

1.3 Limited warranty

This WARRANTY applies to the customer to whom Edwards has delivered this product.

1.3.1 Warranty period

Edwards warrants this product against defects for a period of two (2) years from the date of delivery

or during the period specified in the agreement made by and between the customer and Edwards.

1.3.2 Item warranted

1. This warranty applies only to the product delivered from Edwards to the customer.

2. If any defect is found during this period, Edwards will, at its option, repair or recondition the

product free of charge. The costs for repair or replacement of the product after the warranty

period has passed will be at your own charge.

STP Series Turbomolecular Pump

March 10 3 Issue 1-b

INTRODUCTION

1.3.3 Disclaimer

Edwards makes no warranty with respect to any damage occurred due to any of the following during

the warranty period:

1. Handling, operation or maintenance other than that specified herein.

2. Failure to follow any of the warnings or cautions enumerated in this manual.

3. Installation, operation or maintenance using parts which are not specified by Edwards.

4. Maintenance personnel other than those authorized by Edwards or Service office have

disassembled, reconditioned, or tampered the product.

5. Defect resulting from the not-specified use of the product.

6. When the product is used under special conditions without obtaining the written consent of

Edwards (particular gases, strong magnetic field and the radiation are added to the product).

7. Defect resulting from deposit.

8. Water cooling system defect resulting from water quality used.

9. Defect resulting from the installation of the product (exclude the installation by authorized

personnel).

10. Deterioration in the external because of use (discoloration, scratches and so forth).

11. Product damage occurred during transport or other factors not attributable to Edwards.

12. Product breakage or damage due to natural disasters, fire or other external factors.

13. Deterioration in the basic performance due to the use of the product beyond limits of the use.

14. Any direct, incidental or consequential damage resulting from the use of the product.

15. When continuously operated without overhaul after the WARNING indication ("WARNING"

message) on the LCD.

16. Overhaul and replacement of maintenance parts.

1.3.4 Spare parts

•Touch down bearing.

(Touch down bearing should be replaced at Edwards, contact Edwards).

•Heater

STP Series Turbomolecular Pump

March 10 4 Issue 1-b

INTRODUCTION

1.4 Precautions for safe operation of the STP pump

1.4.1 Usable gases

1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the

following gases, contact Edwards.

•Gases including alkaline metals except Li gas.

•Gases including Ga, Hg, In, or Sn.

•HBr gas.

2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system

gases.

WARNING

To prevent an accident, confirm the characteristics of gases to be used, referring to the

Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS

and a safety advice of gas supplier.

WARNING

Warn of the danger of the gas with the warning label when the use gas is hazardous

WARNINGchemical material.

WARNING

Secure safety by wearing personal protective equipment when using the gas which

might influence damage health. In addition, take appropriate measure for depending

upon the properties of the gas to be used.

CAUTION

NEVER use any gas that is not specified as usable in this Manual. The use of such gas may

CAUTION corrode the STP pump and damage it.

CAUTION

Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or

corrosive gas. The use of reactive or corrosive gas may result in product damage.

CAUTION

Cool the STP pump to prevent the STP pump from overheating when pumping gases.

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