Edwards STP Series Manual de usuario

MT-39E-101-F

Model name Voltage

STP-603/1003 series 200 - 240 Va.c.

100 -120 Va.c.

STP Series Turbomolecular Pumps

STP-603/1003 Series

Pump Specific Information

Instruction Manual (B)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A): STP pump generic Instruction Manual

Instruction Manual

(B)

(This Instruction Manual)

STP

ump specific information

Instruction Manual (C): STP control unit Instruction Manual

This product has been manufactured under a quality management system certified to ISO 9001:2008

Declaration of Conformity

We,

Manufacture: Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan

EU Representative: Edwards

Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to

assemble the technical file, that the product(s)

Product Name: Turbomolecular pump

Model Number: STP-603/1003 series

Accessories Covered: Communication Interface (LonWorks, EtherCAT)

to which this declaration relates is in conformity with the following standard(s) or other normative

document(s)

EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps.

Safety Requirements. Vacuum Pumps

EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.

EMC requirements. General requirements

(Immunity: Industrial locations, Emission: Class A)

EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.

Immunity for industrial environments

EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency

disturbance characteristics (Group1, Class A)

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic

Products with respect to the Restriction of Hazardous Substances

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive

2014/35/EU Low Voltage Directive

2014/30/EU Electromagnetic Compatibility (EMC) Directive

2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for

cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not

legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

VI-DOC-39-009

anufacture:

uji Kato, TMP Technical Senior Manager

Edwards Japan Limited

June

. 201

Yachiyo

Date and Place

EU representative:

Ian Stones

Vice President, Technology

, Edwards

June

. 201

, Burgess Hill

Date and Place

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

Introduction

Installation of the STP pump

Installation of the STP control unit

Operation

Safety functions

Maintenance and inspection

Storage and disposal

Service, Spares and accessories

Instruction Manual (B)

STP Pump specific information:

Technical data

How to Secure the STP pump

Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

Introduction

Technical data

Installation

Operation

Serial communication protocol

STP-Link

Maintenance

Storage, transportation and disposal

Service, spares, and accessories

Keep the manuals in an easily accessible location.

This page intentionally blank.

STP-603/1003 Series Turbomolecular Pump

MT-39E-101-F

Page i

PAGE

CONTENTS

Section Title Page

1 TECHNICAL DATA 1

1.1 Applicable pump specifications 1

1.1.1 STP pump specifications 2

1.1.2 Condition for the water-cooling unit 3

1.2 External appearance of the STP pump 4

1.3 Label affixing positions 9

1.4 Accessories 10

2 HOW TO SECURE THE STP PUMP 11

2.1 When securing the inlet port with bolts 12

2.2 When securing the inlet port flange with claw clamps 14

2.3 When installing the damper in the inlet port flange 15

STP-603/1003 Series Turbomolecular Pump

MT-39E-101-F

Page ii

PAGE

ii ILLUSTRATIONS

Figure Title Page

1 STP-603 series: ICF203/VG150 4

2 STP-603 series: ISO160/ISO160F 5

3 STP-1003 series: ICF253/VG200 6

4 STP-1003 series: ISO200/ISO200F 7

5 STP-1003 series: ISO250/ISO250F 8

6 Label affixing positions for the STP pump 9

7 Example of securing the STP pump

(when securing the inlet port with bolts) 13

8 Example of securing the STP pump

(when securing the inlet port flange with claw clamps) 14

9 Example of securing the STP pump

(when installing the damper in the inlet port flange) 15

TABLES

Table Title Page

1 Tightening torque of bolt 11

2 Maximum torque predicted and recommended securing bolt

for inlet port flange 12

3 Number of claw clamps for flange size 14

STP-603/1003 Series Turbomolecular Pump

MT-39E-101-F

Page 1

TECHNICAL DATA

1 TECHNICAL DATA

1.1 Applicable pump specifications

Model Name Specification Applicable Control unit

STP-603/1003 series Ultra high-vacuum type SCU-800

Naming convention:

"C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-603C).

*1 Corrosion resistant: STP pump with anti-corrosive treatment.

STP-603/1003 Series Turbomolecular Pump

MT-39E-101-F

Page 2

TECHNICAL DATA

PAG

1.1.1 STP pump specifications

The values shown below are typical. They are not guaranteed.

Item 603 series 1003 series

Flange size Inlet port flange ICF203/VG150/

ISO160/ISO160F

ICF253/VG200/ISO200/

ISO200F/ISO250/ISO250F

Outlet port flange KF40 KF40

Pumping speed N2L/s

650 1000

H2L/s

550 800

Compression ratio

>108

105

Ultimate pressure Non-corrosion

resistant type Pa (Torr)

10-8 (10-10) order: ICF flange

10-7 (10-9) order: VG/ISO flange

Corrosion

resistant type Pa (Torr)

10-7 (10-9) order: ICF flange

6.5×10-6 (5×10-8) or less: VG/ISO flange

Maximum working pressure*1Pa (Torr)

1.3×10-2 (1×10-4): Natural air-cooling

Allowable backing pressure*1Pa (Torr)

13 (0.1): Natural air-cooling

Flow rate of purge gas <N2>

Pa·m3/s (SCCM)

1.7×10-2 (10): Corrosion resistant type only

Rated speed rpm

35,000

Backup rotational speed*2 rpm

Approximately 8,500

Starting time min

Stopping time min

Noise dB

<50 (at 35,000 rpm)

Temperature Management System (TMS) N/A

Baking temperature °C

<120

Lubricating oil

Not necessary

Installation position

Free

Cooling method

Natural air cooling (Water cooling, Air cooling:

At baking and gas pumping)

Recommended backing-pump L/min

>1,300

Mass*3kg

Ambient temperature range °C

0 to 40

Storage temperature range °C

-25 to 55

Applicable Control unit

SCU-800

STP-603/1003 Series Turbomolecular Pump

MT-39E-101-F

Page 3

TECHNICAL DATA

*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping

speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be

exhausted. Consult Edwards about conditions.

*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).

1.1.2 Condition for the water-cooling unit

The water-cooling unit is an optional accessory.

Item Specification

Port type

Rc 1/4 (Female) *1

Flow rate L/min

Water temperature °C

5 to 25

Water pressure MPa (kgf/cm2)

0.3 (3)

*1 Standard type

STP-603/1003 Series Turbomolecular Pump

MT-39E-101-F

Page 4

TECHNICAL DATA

PAG

1.2 External appearance of the STP pump

Figure 1 - STP-603 series: ICF203/VG150

No.

Item Description

1 Inlet port flange ICF*1203

2 Inlet port flange VG*2150

3 Height of the purge port (only for corrosion resistant type)

4 Bending dimension of the STP

connection cable

5 Screw hole of legs M10*2 depth 20

6 Outlet port flange KF*240

7 STP connector

8 Screw hole for legs 8-M10*2 depth 24

9 Purge port KF*210 (only for corrosion

resistant type)

Viewed from arrow A

*1 JVIS

*2 JIS

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