Edwards ESDP30A Manual de usuario

A710-99-880

Issue A

Edwards High Vacuum International

Manor Royal, Crawley, West Sussex, RH10 2LW, UK

Telephone: (01293) 528844 Fax: (01293) 533453 Telex: 87123 Edivac G

ESDP30A Scroll Pump

Description Item Number

ESDP30A Scroll Pump, 3-phase, 200/208/230/380-460 V, 50/60 Hz A710-03-908

ESDP30A Scroll Pump, 1-phase, 100/115/200/230 V, 50/60 Hz A710-03-910

Instruction Manual

CONTENTS

Section Title Page

1INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Description 1

2 TECHNICAL DATA 3

2.1 Mechanical data 3

2.2 Performance and operating conditions 3

2.3 Electrical data 3

2.4 Noise and vibration data 3

2.5 Materials exposed to vacuum 3

3 INSTALLATION 7

3.1 Safety 7

3.2 System requirements 7

3.3 Unpack and inspect 8

3.4 Reconfigure the pump (optional) 8

3.5 Locate the pump 9

3.6 Connect the electrical supply 9

3.6.1 Introduction 9

3.6.2 Connect to 3-phase pumps 9

3.6.3 Connect to 1-phase pumps 10

3.7 Check the direction of motor rotation 13

3.8 Connect the pump-inlet to the vacuum system 13

3.9 Connect the pump-outlet 14

3.10 Leak test the pump installation 14

4 OPERATION 15

4.1 Start-up 15

4.2 Shut-down 15

5 MAINTENANCE 16

5.1 Introduction 16

5.2 Inspect the inlet screen 16

5.3 Service 16

6 STORAGE AND DISPOSAL 17

6.1 Storage 17

6.2 Disposal 17

7 SPARES AND ACCESSORIES 17

7.1 Introduction 17

7.2 Accessories 17

RETURN OF EDWARDS EQUIPMENT

DBW 5644-96

ESDP30A Scroll Pump i

Illustrations

Figure Title Page

1 The ESDP30A Scroll Pump (3-phase pump shown) 2

2 Dimensions (mm): 3-phase pump shown 5

3 Pumping speed (m3h-1)6

4 Pumping speed (cfm) 6

5 Motor terminal-box low-voltage configuration: 3-phase pumps 11

6 Motor terminal-box high-voltage configuration: 3-phase pumps 11

7 Motor terminal-box low-voltage configuration: 1-phase pumps 12

8 Motor terminal-box high-voltage configuration: 1-phase pumps 12

Tables

Table Title Page

1 Full load current ratings and motor speed: 3-phase pumps 4

2 Full load current ratings and motor speed: 1-phase pumps 4

ii ESDP30A Scroll Pump

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards

ESDP30A Scroll Pump. You must use the pump as specified in this manual.

Read this manual before you install and operate the pump. Important safety information is

highlighted as WARNING and CAUTION instructions; you must obey these instructions. The

use of WARNINGS and CAUTIONS is defined below.

WARNING

Warnings are given where failure to observe the instruction could result in injury or death

to people.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the

equipment, associated equipment and process.

The units used throughout this manual conform to the SI international system of units of

measurement. For displacement and pumping speed, the term ’cfm’ is also used to mean

ft3min-1.

1.2 Description

Refer to Figure 1 in the following description.

TheESDP30AScrollPumpisacompact,reliablevacuumpump whichis suitableforuseonclean

processes. The ESDP30A pump is not suitable for use with explosive, flammable, toxic or

corrosive substances, or substances which contain particulates, or powders.

The body of the pump includes stationary scrolls (2) and an orbiting scroll. The orbiting scroll

is driven by the electricmotor through an eccentric cam on the motor drive shaft. The movement

of the orbiting scroll, meshed with the stationary scrolls, forms successive crescent shaped

volumes in the pump. Gas which enters the pump through the inlet (3) is compressed by the

movement of the orbiting scroll and swept towards the centre of the stationary scrolls. The

compressed gas enters the exhaust-port near the centre of the stationary scrolls and is exhausted

from the pump through the outlet (7).

The inlet of the pump (3) has an inlet screen which prevents the entry of debris into the pump.

The pump is air-cooled and has an electric motor and an hours counter (6) which operates when

the electrical supply to the pump is switched on.

ESDP30A Scroll Pump 1

Figure 1 - The ESDP30A Scroll Pump (3-phase pump shown)

9. Cooling-fins

10. Coupling-cover bolts (5 off)

11. Locating dowels (2 off)

12. Direction of rotation arrow

13. Motor end-cover

14. Mounting-holes (4 off)

15. Base-plate

16. Jacking hole

1. Fan cover

2. Stationary scrolls

3. Inlet-port and inlet screen (in the inlet-port)

4 Lifting-eye

5. Motor terminal-box

6. Hours counter

7. Outlet-port

8. Bolts (4 off)

2ESDP30A Scroll Pump

2TECHNICALDATA

2.1 Mechanical data

Overall dimensions See Figure 2

Mass

3-phase pump 40 kg

1-phase pump 46 kg

Inlet connection NW40

Outlet connection NW25

2.2 Performance and operating conditions

Ambient operating temperature range 5 to 40 oC

Ambient storage temperature range -20 to 60 oC

Ultimate pressure 1 x 10-2 mbar, 1 Pa

Maximum inlet pressure 1000 mbar, 1 x 105Pa, 0 psig

Maximum outlet pressure 1150 mbar, 1.15 x 105Pa, 2 psig

Leak tightness better than 1 x 10-4 mbar.ls-1,

1 x 10-2 Pa.ls-1

Displacement (swept volume)

50 Hz 30 m3h-1 (17.6 cfm)

60 Hz 36 m3h-1 (21.2 cfm)

Pumping speed See Figures 3 and 4

Peak pumping speed

50 Hz 25 m3h-1 (14.7 cfm)

60 Hz 30 m3h-1 (17.6 cfm)

2.3 Electrical data

Electrical supply See Tables 1 and 2

Full load current ratings See Tables 1 and 2

2.4 Noise and vibration data

Noise level (at 1 m from the pump)

3-phase pump < 60 dB(A)

1-phase pump < 62 dB(A)

Vibration velocity < 1.5 mm.s-1

2.5 Materials exposed to vacuum

PTFE (polytetrafluoroethylene) impregnated aluminium , stainless steel, steel bearings, PFPE

(perfluoropolyether) grease, fluoroelastomer seals.

ESDP30A Scroll Pump 3

Electrical supply voltage

200 208 230 380 415 460

Full load current rating: A 50Hz2.7 - -1.571.63-

60 Hz 2.6 2.5 2.5 - - 1.47

Motor rotational speed: r.min-1 50 Hz 1460 - - 1470 1470 -

60 Hz 1740 1750 1760 - - 1770

Table 1 - Full load current ratings and motor speed: 3-phase pumps

Electrical supply voltage

100 115 200 230

Full load current rating: A 50 Hz 8.5 - 4.3 3.9

60 Hz 7.7 6.7 3.9 3.4

Motor rotational speed: r.min-1 50 Hz 1430 - 1430 1450

60 Hz 1720 1740 1720 1740

Table 2 - Full load current ratings and motor speed: 1-phase pumps

4ESDP30A Scroll Pump

1. Inlet-port (NW40)

2. Alternative inlet-port position

3. Outlet-port (NW25)

4. Alternative outlet-port position

5. 4 x mounting holes for M8 bolts

Figure 2 - Dimensions (mm): 3-phase pump shown

Pump A B

1-phase 443 194

3-phase 372 123

ESDP30A Scroll Pump 5

Figure 3 - Pumping speed/pressure graph (m3h-1)

Figure 4 - Pumping speed/pressure graph (cfm)

1. 60 Hz

2. 50 Hz

1. 60 Hz

2. 50 Hz

1. 60 Hz

2. 50 Hz

1. 60 Hz

2. 50 Hz

6ESDP30A Scroll Pump

3INSTALLATION

3.1 Safety

WARNING

Obey the safety instructions given below and take note of appropriate precautions. If you

do not, you can cause injury to people and damage to equipment.

•A suitably trained and supervised technician must install your ESDP30A pump.

•Ensure that the installation of the pump conforms with all the requirements of your local

and national safety standards. Ensure that your control system is configured so that the

pumping system is safe if the electrical supply fails.

•Ensure that the installation technician is familiar with the safety precautions for the gases

processed by the pumping system. Wear the appropriate safety-clothing when you come

into contact with contaminated components. Vent and purge the pumping system before

you start installation work.

•Disconnect the other components in the pumping system from the electrical supply so that

they cannot be operated accidentally.

•Do not reuse ’O’ rings and Co-Seals if they are damaged.

3.2 System requirements

Consider the following points when you design your pumping system:

•Support the vacuum pipelines to stop the transmission of stress to the pipeline joints.

•You must be able to isolate the pump inlet and outlet from the atmosphere and from your

vacuum system if you have pumped dangerous gases.

ESDP30A Scroll Pump 7

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