Edwards STP Series Manual de usuario
MT-21E-0A3-D
STP Series Turbomolecular Pumps (extract)
STP-301H/451H
STP-L301H/L451H
(Third Edition - d)
Instruction Manual
Copyright 2021 Edwards Japan Limited. All rights reserved. Printed in Japan.
This Manual has extracted the difference of
the STP-301/451 series and STP-301H/451H,
the STP-L301/L451 series and STP-
L301H/L451H.
For the "Safety Precautions", installation,
operation and maintenance, read the "STP-
301/451 Series Instruction Manual" or "STP-
L301/L451 Series Instruction Manual".
Keep this Manual in a place where you can
quickly access it at any time.
Sep. 2021
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
1
INTRODUCTION
Thank you very much for purchasing Edwards’turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust
gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the turbomolecular pump:
Model Name Specification
•STP-301H High-vacuum type
•STP-451H High-vacuum type
•STP-L301H Low-vibration type, High-vacuum type
•STP-L451H Low-vibration type, High-vacuum type
For the specifications of other models, contact Edwards.
In this manual, the above STP pump series is collectively called the "STP pump".
This manual picks up the points of difference between the STP-301/451 series and
STP-301H/451H, the STP-L301/L451 series and STP-L301H/L451H. For the "Safety
Precautions", installation, operation and maintenance, read the "STP-301/451 Series
Instruction Manual" or "STP-L301/L451 Series Instruction Manual".
The points of difference are as follows:
Item
Points of difference
Reference
"CON4" connector
Standard equipment
Sec 1
Chassis
Optional accessory by
order specifications
Sec 2
Size of inlet port flange
(Only STP-301H/STP-L301H)
ISO100 special type
See "External Appearance of
the STP Pump"
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
2
TABLE of CONTENTS
INTRODUCTION
1“CON4” Connector ..........................................................................3
2Installation of the Chassis (Optional Accessory)..............................3
2.1 Name and Function Each Part............................................................................................. 3
2.2 Attaching the Chassis Front Panel to a Rack...................................................................... 4
2.3 Cable Connection ................................................................................................................ 5
2.3.1 Name and Dimensions of Cable................................................................................. 5
2.3.2 How to Connection the Cable..................................................................................... 5
3External Appearance of the STP pump ...........................................7
FIGURE
Figure 2.1 Chassis......................................................................................................................... 3
Figure 2.2 Example of Securing the Chassis................................................................................ 4
Figure 2.3 External Appearance of Power Cable.......................................................................... 5
Figure 2.4 External Appearance of the Chassis (with STP Control Unit) ..................................... 6
Figure 3.1 External Appearance of STP-301H.............................................................................. 7
Figure 3.2 External Appearance of STP-L301H............................................................................ 8
TABLES
Table 2.1 Connecting the Power Cable......................................................................................... 5
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
3
1 "CON4" Connector
STP-301H/451H and STP-L301H/L451H include "CON4" connector as standard equipment.
Refer to Section 7, "How to Start/Stop the STP Pump" and Section 8, "Remote Input/Output
Signal Terminal Block" in "STP-301/451 Series Instruction Manual" or "STP-L301/L451
Series Instruction Manual".
2 Installation of the Chassis (Optional Accessory)
The size of the STP control unit attached to the chassis that is full-rack size is the same as
that of STP-300H.
2.1 Name and Function Each Part
(1) Distribution Cable for Power
⚫For distribution of power
(2) AC POWER Connector
⚫For primary power input.
⚫Power cable for STP-300H can be connected to this connector.
Figure 2.1 Chassis
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
4
2.2 Attaching the Chassis Front Panel to a Rack
The dimensions of the chassis front panel conform to EIA Standard. Therefore, this panel can
be attached to any type of commercially-available racks.
Attach the front panel unit to the rack according to the following steps:
•Attach the front panel to a rack using the screw holes for the front panel.
•Also support the chassis from the bottom using a support angle or a similar tool.
•To protect the chassis during transport, remove the rubber foot from the bottom and
attach the chassis to the rack using the screw holes for the rubber foot.
◇The chassis cannot be supported with only the screws on the front panel (the
STP control unit and chassis are heavy products).
Always support it from the bottom.
◇When installing the STP control unit and chassis, DO NOT block the ventilation
port of the STP control unit by the support angle or other things. It causes the
control unit to overheat.
◇For the dimensions of the front panel and positions of screw holes for the rubber
foot, see "External Appearance of the chassis (with STP Control Unit)".
Figure 2.2 Example of Securing the Chassis
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
5
2.3 Cable Connection
2.3.1 Name and Dimensions of Cable
STP Control Unit Side Power Side (Primary)
3pin (socket)
PE( )
L(L1)
N(L2)
Distribution Part of Chassis
3pin (socket-type)
Power cable for STP-300H
A Power cable is not included with shipment.
Use the power cable for STP-300H.
Figure 2.3 External Appearance of Power Cable
2.3.2 How to Connection the Cable
1) Connecting the Power (Primary Side) Cable
Connect the power cable to the "AC POWER" connector on the chassis as shown in Table 2.1.
Table 2.1 Connecting the Power Cable
CON1
Pin No.
Remakes
1
2
3
Chassis
Outline of AC POWER
connector
1
Single phase 200 to 240VAC
(for 200V specification)
Single phase 100 to 120VAC
(for 100V specification)
50/60Hz
2
3
Ground
◇Confirm the power voltage on the name plate.
◇Connect the primary power cable securely to prevent incorrect wiring.
◇DO NOT apply surge voltage exceeding 1kV to the input power line.
◇Always ground the primary power cable to prevent electric shock.
◇Allowable input voltage fluctuation is -/+ 10 %.
◇A Power cable is not included with shipment. Use the power cable for
STP-300H.
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
6
132.6
31.3 209.7
482.6
14.7 453.2
21.9 88.9
27.3 78
38
50 309
26.3 430 26.3
200 9.85
3.8 125
117.7
41.75 346.5 41.75
430
12 406
5
15 5
470
508
Screw hole for
rubber foot
(M4x4)
Handle (2pcs)
(Fixed with flat-head
screw(M5x8))
14.7
21.8
35 3
Figure 2.4 External Appearance of the Chassis (with STP Control Unit)
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
7
3 External Appearance of the STP pump
The size of the inlet port flange of STP-301H and STP-L301H is different from that of STP-301 and STP-L301.
STP-301H/STP-L301H
STP-301/STP-L301
Size of inlet port flange
ISO100 special type
ISO100
External Appearance
Figure 3.1, Figure 3.2
Ｂ
99.5
108
φ115 4.1
5
2.4
2
R1.5
5
φ125
25ﾟ
20ﾟ
φ130
φ112
φ156
φ180
(33) 197
φ128
Min.230
34 12
9
33
(8) 50 (1) 171
230
35ﾟ
Ａ
φ160
Detail A
(Bending dimension of
the STP connection cable)
Inlet port flange
(ISO100 special type)
Figure 3.1 External Appearance of STP-301H
STP-301H/451H Instruction Manual (extract)
STP-L301H/L451H Instruction Manual (extract)
8
(33)
(8)
Min.227
B
99.5
108
φ160
25ﾟ
20ﾟ
20ﾟ
φ180
(73)
66
A
Detail A
7.5ﾟ
37.5ﾟ
15ﾟ
5
2
φ107
207
φ130
83
240
φ115
φ148.5
φ115
4.1
2.4
φ128
φ156
φ180
166
(Bending dimension of
the STP connection cable)
Figure 3.2 External Appearance of STP-L301H
Copyright 2021 Edwards Japan Limited. All rights reserved.
For more information, contact the nearest Service Office.
( http://www.edwardsvacuum.com/ )
Manufacturer:
Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN
Telephone: Domestic 047-458-8853
International +81-47-458-8853
Facsimile: Domestic 047-458-8048
International +81-47-458-8048
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