Edwards STP Series Manual de usuario

MT-50E-101-A

Model name Voltage

STP-F2203 series 200 - 240 Va.c.

STP Series Turbomolecular Pumps

STP-F2203 Series

Pump Specific Information

Instruction Manual (B)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A): STP pump generic Instruction Manual

Supplied with STP pump

Instruction Manual (B):

(This Instruction Manual)

STP pump specific information

Supplied with STP pump

Instruction Manual (C): STP control unit Instruction Manual

Supplied with STP control unit

This page intentionally blank

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

STP Pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link (except for SCU-750)

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

STP-F2203 Series Turbomolecular Pump

July 08 i Issue 1-a

PAGE

CONTENTS

Section Title Page

1 TECHNICAL DATA 1

1.1 Applicable pump specifications 1

1.1.1 STP pump specifications 2

1.1.2 Condition for the water-cooling unit 3

1.2 External appearance of the STP pump 3

1.3 Label affixing positions 6

1.4 Accessories 7

2 HOW TO SECURE THE STP PUMP 9

2.1 When securing the inlet port with bolts 9

3 TEMPERATURE MANAGEMENT SYSTEM (TMS) 13

3.1 Configuration of the STP pump with the TMS 13

3.2 TMS Connection cable 14

3.3 TMS heater 15

3.4 TMS valve 15

3.5 TMS sensor cable 15

3.6 Installation of the TMS unit 16

3.6.1 Connecting the TMS connection cable to the STP control unit 16

3.6.2 Connecting the pump and cables 16

3.6.3 Connecting TMS connection cable to STP pump 16

3.7 Condition for the TMS unit 17

3.8 Accessories 17

STP-F2203 Series Turbomolecular Pump

July 08 ii Issue 1-a

PAGE

ii ILLUSTRATIONS

Figure Title Page

1 STP-F2203 series: VG250/ISO250F 4

2 STP-F2203 series (with TMS unit): VG250/ISO250F 5

3 Label affixing positions for the STP pump 6

4 Example of securing the STP pump

(when securing the inlet port with bolts) 10

5 Shape of reduced diameter shank bolts 11

6 Bolt position for securing the flange (ISO250F) 12

7 Configuration of the STP pump with the TMS 13

8 External view of TMS connection cable 14

9 TMS sensor cable 15

TABLES

Table Title Page

1 Tightening torque of bolt 9

2 Maximum torque predicted and recommended securing bolt

for inlet port flange 10

3 Shape of reduced diameter shank bolts 11

STP-F2203 Series Turbomolecular Pump

July 08 1 Issue 1-a

TECHNICAL DATA

1 TECHNICAL DATA

1.1 Applicable pump specifications

Model Name Specification Applicable Control unit*1

STP-F2203 series High-flow type SCU-1500/SCU-1400

*1 Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400.

Refer to Section 1.1.1, "STP pump specifications" for the differences.

Naming convention:

•"C" following a pump model name indicates a corrosion resistant*2 type (e.g. STP-F2203C).

•"CV" indicates an enhanced corrosion resistant type with TMS*3 (e.g. STP-F2203CV).

*2 Corrosion resistant: STP pump with anti-corrosive treatment.

*3 Temperature Management System: TMS unit (optional accessory) maintains the temperature at the base of the

turbomolecular pump by monitoring the temperature with the temperature sensor in the

base of the turbomolecular pump, and performing the TMS valve and base heater

ON/OFF control.

STP-F2203 Series Turbomolecular Pump

July 08 2 Issue 1-a

TECHNICAL DATA

PAG

1.1.1 STP pump specifications

The values shown below are typical. They are not guaranteed.

Item F2203 series

Inlet port flange VG250/ISO250FFlange size

Outlet port flange KF40

N2L/s 2200Pumping speed

H2L/s 1200

N2>108Compression ratio

H2>103

Ultimate pressure Pa (Torr) 10-6 (10-8) order [after baking]

Allowable backing pressure*1 Pa (Torr) 500 (4): Water cooling/TMS unit used

Flow rate of purge gas <N2> Pa·m3/s (SCCM) 3.4×10-2 to 8.4×10-2 (20 to 50)

Rated speed rpm 27,000

Backup rotational speed*2 rpm Approximately 6,000

Starting time*3 min 7: with SCU-1500

8: with SCU-1400

Stopping time*3 min 8: with SCU-1500

10: with SCU-1400

Noise dB <50 (at 27,000r pm)

Temperature Management System (TMS) Available

Baking temperature °C <120

Lubricating oil Not necessary

Installation position Free

Cooling method Water cooling

Recommended backing-pump L/min >1,300

Mass*4 kg 61

Ambient temperature range °C 0 to 40

Storage temperature range °C -25 to 55

Applicable Control unit SCU-1500/SCU-1400

*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping

speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be

exhausted. Consult Edwards about conditions.

*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

*3 Time varies depending on the control unit used.

STP-F2203 Series Turbomolecular Pump

July 08 3 Issue 1-a

TECHNICAL DATA

*4 Mass is a value of state that the only standard accessory was installed (except the optional accessory).

Maximum gas flow-rate *5

Condition Maximum gas flow-rate *5

TMS SCU-1500 SCU-1400

Gas

Yes/No Set point

Cooling water Purge gas N2

gas flow rate Pa･m3/s

(SCCM)

Pa･m3/s

(SCCM)

No - 10 (6000) 8.5 (5000)

Yes 75°C 4.6 (2700) 4.6 (2700)

No - 4.7 (2800) 4.7 (2800)

Yes 75°C

Temperature:

5 to 25 °C

Flow rate:

2 L/min

3.4×10-2 to

8.4×10-2

(20 to 50)

1.4 (800) 1.4 (800)

*5 The maximum gas flow-rate is applicable under conditions that N2or Ar gas is vacuumed continuously and the backing

backing-pump (pumping speed: 6,500 L/min) is used. It is changed depending on condition. For example, when the gas is

exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.

1.1.2 Condition for the water-cooling unit

Item Specification

Port type Rc 1/4 (Female) *1

Flow rate L/min 2

Water temperature °C 5 to 25

Water pressure MPa (kgf/cm2) 0.3 (3)

*1 Standard type

1.2 External appearance of the STP pump

See the next page.

STP-F2203 Series Turbomolecular Pump

July 08 4 Issue 1-a

TECHNICAL DATA

PAG

φ207

φA

φ289

φ296

φ341

(3) I

Ａ

(8)

φ235

(4)

(6)

(7)

(5)

22.5ﾟ

154

(2)

(1)

90ﾟ

176

20ﾟ

45ﾟ

Figure 1 - STP-F2203 series: VG250/ISO250F

No. Item Description

1 Screw hole for legs 4-M16 depth 30

2 Screw hole of legs 4-M16 depth 32

3 Height of the purge port

4 Cooling water port 2-Rc*11/4

5 STP cable connector

6 Outlet port flange KF40

7 Purge port KF10

8 Viewed from arrow A

Inlet

port

flange

VG250 ISO250F

φA 350 335

B 18 20

C 431 457

D 414 440

E 406 432

F 372 398

G 138 164

H 295 321

I 376 402

*1 ISO

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