Edwards STP-iXA2205 Series Manual de usuario

MT-63E-001-H

Read through the Safety Precautions and

each section of this Manual carefully before

using the STP pump.

Keep this Manual in a place where you can

quickl

access it at an

time.

Nov. 2010

Instruction Manual

STP Series Turbomolecular Pumps

STP-iXA2205 Series

(Issue 1-h)

Declaration of Conformity

We,

Manufacture: Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan

EU Representative: Edwards Limited

Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised

to assemble the technical file, that the product(s)

Product Name: Turbomolecular pump

Model Number: STP-iXA2205 series

Accessories Covered: Power Unit: iPS-1200(A), Display Unit: iDT-001, TMS Unit, TMS Box,

Communication Interface (LonWorks, Profibus, Device Net)

to which this declaration relates is in conformity with the following standard(s) or other

normative document(s)

EN1012-2:1996, A1:2009 Compressors and vacuum pumps - Safety requirements -

Part 2: Vacuum pumps

EN61010-1:2001 Safety requirements for electrical equipment for measurement,

control and laboratory Use. General requirements

EN61326-1:2006 Electrical equipment for measurement, control & laboratory Use.

EMC requirements. General requirements

(Immunity: Industrial locations, Emission: Class A)

EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.

Immunity for industrial environments

EN61000-6-4:2007 Electromagnetic compatibility (EMC). Generic standards.

Emission standard for industrial environments

EN55011:2007, A2:2007 Industrial, scientific and medical (ISM) radio-frequency equipment.

Electromagnetic disturbance characteristics (Group1, Class A)

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive

2004/108/EC Electromagnetic Compatibility (EMC) Directive

2002/95/EC* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for

cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates

only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this

statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply

to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.

VI-DOC-63-002

EU representative:

Barrie D Brewster, Technical Manager, Edwards Limited

This product has been manufactured under a quality system registered to ISO9001

Manufacture:

Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited

25t

Dec. 2009, Yachiyo

Date and Place

30t

Dec. 2009,

Burgess Hill

Date and Place

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 i Issue 1-h

PAGE

CONTENTS

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 2

1.3.1 Warranty period 2

1.3.2 Item warranted 2

1.3.3 Disclaimer 3

1.3.4 Spare parts 3

1.4 Precautions for safe operation of the STP pump 4

1.4.1 Usable gases 4

1.5 Maintenance and inspection precautions 5

1.6 Labels 5

1.7 Operation principle of the STP pump 8

1.8 STP pump specification 10

2 TECHNICAL DATA 13

2.1 STP pump specifications 13

2.2 Maximum gas flow-rate 14

2.3 Water cooling use condition 14

2.4 Control unit 15

2.5 Power unit 16

2.6 External appearance of the STP pump 17

2.7 External appearance of the power unit 20

2.8 Label affixing positions 21

3 INSTALLATION OF THE STP PUMP 23

3.1 Precautions before installation 23

3.1.1 Operating environment 23

3.1.2 Installation area 25

3.1.3 Bench 26

3.1.4 Insulation test 26

3.2 Unpacking 27

3.2.1 Unpacking the STP pump 27

3.3 Name and function of each part 32

3.3.1 Name and function of the pump 32

3.3.2 Name and function of the control unit 33

3.3.3 Name and function of the power unit 35

3.4 How to install the STP pump 37

3.4.1 Cleaning the seal 39

3.4.2 STP pump installation positions 40

3.4.3 Secure the STP pump 41

3.4.4 Legs for securing the base 46

3.5 Installation of the power unit 47

3.6 External power supply unit 48

3.7 DC cable for external power supply unit 48

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 ii Issue 1-h

PAGE

ii CONTENTS (CONTINUED)

Section Title Page

3.8 Cable connection 50

3.8.1 DC cable 50

3.8.2 Power cable 51

3.8.3 How to connect the cables 53

3.9 Precautions of vacuum piping 55

3.9.1 Vacuum piping method 55

3.10 Connecting the purge port 56

3.11 Connecting the water cooling pipe 57

3.12 Attaching a baking heater 58

3.13 Installation of the TMS unit 59

3.13.1 Configuration of the STP pump with the TMS 59

3.13.2 TMS heater 61

3.13.3 TMS valve 61

3.13.4 Installation of the TMS unit 61

3.13.5 Connecting the TMS heater cable 61

3.13.6 Connecting the pump and TMS valve 62

3.13.7 TMS unit specification 62

3.14 Connecting to semiconductor equipment 63

3.14.1 Connecting to power 63

3.14.2 Emergency off circuit (EMO circuit) 63

4 OPERATION 65

4.1 Gas pumping, cooling and baking the STP pump 65

4.1.1 Gas pumping 65

4.1.2 How to introduce a purge gas 66

4.2 Cooling the STP pump 66

4.2.1 Water-cooling method 66

4.3 Baking the STP pump 67

4.4 Before starting the STP pump 68

4.4.1 Confirmation before starting 68

4.4.2 Confirmation of vacuum system 68

4.5 Powering ON 69

4.6 Pump operation 69

4.6.1 Input operation port setting 69

4.6.2 Starting/stopping the STP pump 70

4.7 How to start/stop the STP pump 72

4.7.1 Starting the STP pump after stopping 72

4.7.2 Starting the STP pump after a safety function operates 72

4.7.3 Powering OFF 72

4.8 LED 73

4.9 Parallel port input/output signal 74

4.9.1 Input signal pins 74

4.9.2 Input operation port setting 81

4.9.3 Rotation INHIBIT signal 82

4.9.4 OUTPUT SIGNAL PINS 83

4.10 Operating the TMS unit (for use with the TMS unit) 87

4.10.1 Before starting 87

4.10.2 Starting/Stopping 87

4.10.3 Setting the TMS unit function 87

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 iii Issue 1-h

PAGE

iii

CONTENTS (CONTINUED)

Section Title Page

5 SERIAL COMMUNICATION PROTOCOL 89

5.1 Introduction 89

5.2 Connection and setting up 90

5.2.1 Signal connection 90

5.2.2 Connecting the RS485 92

5.2.3 Communication parameter setting 93

5.2.4 Input operation port setting 94

5.2.5 Serial communication timeout setting 95

5.3 Protocol specifications 96

5.3.1 General description 96

5.3.2 Standard transmission frame 97

5.3.3 Control command

(in the RS232/RS485 single point connection) 98

5.3.4 Query command

(in the RS232/RS485 single point connection) 99

5.3.5 Transmission data format 100

5.3.6 Frame control (checksum) 101

5.3.7 Error control 101

5.3.8 Transmission frame in the RS485 multi-point connection 101

5.3.9 Control command in the RS485 multi-point connection 103

5.3.10 Query command in the RS485 multi-point connection 104

5.3.11 Broadcasting command in the RS485 multi-point connection 105

5.4 Command specifications 106

5.4.1 Command list 106

5.4.2 ReadMeas 107

5.4.3 Command 107

5.4.4 ReadFailMess 108

5.4.5 ReadModFonct 112

5.4.6 ReadVersion 114

5.4.7 ReadCounters 115

5.4.8 ReadSetPoint 116

5.4.9 ReadMotorTemp 116

5.4.10 ReadStatus 117

5.4.11 ReadEvents 118

5.4.12 SetSpeedSetPoint 119

5.4.13 ReadSpeedSetPoint 120

5.4.14 ReadModFonctWithWarning 121

5.4.15 ReadMeasValue 124

5.4.16 ReadOptionFunc 126

5.4.17 SetOptionFunc 129

5.4.18 ReadCondition 131

5.4.19 ReadEventsWithTime 133

6 STP-LINK AND DISPLAY UNIT 137

6.1 STP-Link 137

6.2 Display unit 138

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 iv Issue 1-h

PAGE

iv CONTENTS (CONTINUED)

Section Title Page

7 SAFETY FUNCTIONS 139

7.1 Safety functions 139

7.1.1 Power Failure 139

7.1.2 Operation after a power recovery 140

7.1.3 Abnormal state of magnetic bearing (Disturbance) 141

7.1.4 Excessive vibration (Disturbance) 141

7.1.5 Motor driver overload (DRV Overload) 141

7.1.6 Overheating inside the STP pump (MOTOR Overheat) 141

7.1.7 Overheating inside the control unit (CNT Overheat) 141

7.1.8 Overspeed 142

7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 142

7.2 "WARNING" function 143

7.2.1 "WARNING" function 143

7.3 Contents of WARNING function 145

7.3.1 First Damage limit 145

7.3.2 Second Damage Limit 145

7.3.3 Pump run time over 145

7.3.4 Pump Overload 146

7.3.5 Imbalance 146

7.4 WARNING function setting 147

7.5 Troubleshooting immediately after failure occurs 148

7.5.1 After power failure 148

7.5.2 After other abnormality/error 148

7.6 Troubleshooting 149

7.6.1 Indication of "FAILURE" LED (red) 149

7.6.2 Indication of "FAILURE" LED (green) 156

7.6.3 No Indication of the "FAILURE" LED 156

8 MAINTENANCE AND INSPECTION 157

8.1 Maintenance and inspection 157

8.2 Cleaning 158

8.3 Inspecting the deposit 158

8.4 Overhaul 159

8.5 Transporting for repair or overhaul 160

9 STORAGE AND DISPOSAL 163

9.1 Storage of the STP pump 163

9.2 Disposal 164

10 SERVICE, SPARES AND ACCESSORIES 165

10.1 Introduction 165

10.2 Service 165

10.3 Spares 165

10.4 Accessories 166

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 v Issue 1-h

PAGE

ILLUSTRATIONS

Figure Title Page

1 STP pump installation warning label 5

2 Hot surface warning label 5

3 Tip over caution label 6

4 Heavy product caution label 6

5 High voltage device caution label 6

6 Water caution label 7

7 Rotation instruction label 7

8 Cross sectional view of the STP pump 8

9 External appearance of STP-iXA2205C(V):

VG250/ISO250F/ICF305 17

10 External appearance of STP-iXA2205CP(V):

VG250/ISO250F/ICF305 18

11 External appearance of STP-iXA2205CIP:

VG250/ISO250F/ICF305 19

12 External appearance of power unit iPS-1200 20

13 Label affixing positions 21

14 Space around the STP pump 25

15 Example of lifting the STP pump 27

16 Example of lifting the STP pump (horizontal positioning) 28

17 Jack-up the STP pump 29

18 Control unit bottom face 29

19 Prohibited matter 30

20 STP pump with dedicated legs 30

21 STP pump with eyebolts 31

22 Configuration of the STP pump 32

23 Control unit (Front panel) 33

24 Power unit (connector panel) 35

25 Power unit (front panel) 36

26 Installation of the STP pump to the vacuum equipment

(STP-iXA2205C[V]) 37

27 Installation of the STP pump to the vacuum equipment

(STP-iXA2205CP[V]/CIP) 38

28 STP pump installation positions 40

29 Positions of the outlet port on the horizontally

or slanted installed STP pump 40

30 Shape of reduced diameter shank bolts 44

31 Methods of securing the STP pump 44

32 Shape of reduced diameter shank bolts 45

33 Screw holes for securing the base (STP-iXA2205C[V]) 46

34 Screw holes for legs (STP-iXA2205CP[V]/CIP) 46

35 Fixed screw hole potion for the power unit 47

36 DC cable 48

37 External appearance of DC cable (STP-iXA2205C[V]) 50

38 External appearance of DC cable (STP-iXA2205CP[V]/CIP) 50

39 Power cable 51

40 Connecting method of the power cable 52

41 Connecting the purge port 56

42 Positions of the cooling water port 57

43 Baking heater installation position 58

44 Configuration of the TMS (STP-iXA2205CV) 59

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 vi Issue 1-h

PAGE

vi ILLUSTRATIONS (CONTINUED)

Figure Title Page

45 Configuration of the TMS (STP-iXA2205CPV) 60

46 TMS valve connection 62

47 Pump operation method 1 (contact input) 70

48 Pump operation method 2 (contact input) 70

49 Pump operation method 1 (voltage input) 71

50 Pump operation method 2 (voltage input) 71

51 "ROTATION" LED Indication 73

52 X2 REMOTE connector 74

53 X2 REMOTE input signal pins (contact input) 77

54 X2 REMOTE input signal pins (voltage input) 80

55 X2 REMOTE output signal pins 85

56 Serial port 89

57 X3/X4 connector (D-Sub9) 91

58 RS485 connections 92

59 PC to SIM communication 96

60 Display unit iDT-001 138

61 WARNING output 144

62 Failure output 149

63 Method for sealing ventilation port 161

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 vii Issue 1-h

PAGE

vii

TABLES

Table Title Page

1 Environmental requirements for installation 24

2 Eyebolt size 27

3 Pump functions 32

4 Control unit front panel functions 34

5 Power unit connector panel connection 35

6 Power unit front panel function 36

7 Tightening torque of bolt 41

8 Maximum torque predicted

and recommended securing bolt for inlet port flange 42

9 Shape of reduced diameter shank bolts 45

10 Suitable parts for DC cable 48

11 Pin assignment for connector X1 49

12 Power cable 51

13 TMS unit specification 62

14 Starting/stopping the STP pump

using contact input (X2 REMOTE) 70

15 Starting/stopping the STP pump

using voltage input (X2 REMOTE) (voltage input) 71

16 Reset Operation (X2 REMOTE) 72

17 LED Indications for each state 73

18 X2 REMOTE input signal pins 75

19 X2 REMOTE input signal pins (continued) 76

20 X2 REMOTE input signal pins (voltage input) 78

21 X2 REMOTE input signal pins (voltage input) (continued) 79

22 Input operation port setting 81

23 Rotation INHIBIT signal input 82

24 X2 REMOTE output signal pins 84

25 Rated contacts for relays CR1 to CR8 86

26 X3/X4 pin position 90

27 Communication parameters 93

28 Input operation port 94

29 Serial communication time out setting 95

30 Transmission control characters 97

31 Pump operation commands 105

32 Command list 106

33 Pump operation commands 108

34 Error message values 110

35 Error message values (continued) 111

36 Pump operation mode 113

37 Remote mode 118

38 Warning value bit assign 122

39 Parameter setting value 127

40 Functions of STP-Link 137

41 States of LEDs and X2 REMOTE output signals

at power failure 140

42 WARNING function 143

43 Default setting of WARNING function 147

44 Factory Setting and Variable Range 147

45 Priority of failure signal 149

46 Error List 150

STP-iXA2205 Series Turbomolecular Pump

Nov. 10 viii Issue 1-h

PAGE

viii TABLES (CONTINUED)

Table Title Page

47 Error List (continued) 151

48 Error List (continued) 152

49 Error List (continued) 153

50 Error List (continued) 154

51 Error List (continued) 155

52 Troubleshooting with no indication of the "FAILURE" LED 156

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