A41
9-00-880 Issue K
n
0 5.2
:::J
5.3
,......
5.4
Flammable
and
toxic gases
(EPX
Nseries pumps)
...............
.
....................
.
............................
54
Start-up
............
.
.....
.
........
..
...
......
.
..........
.
...
.
..........
...
........
.
...
.
.....................
..
...
......
.. 54
Manual shut-down
................................
.
.........................
.
...................
.
.....
.
.................
55
('() 5.5 Status and
fault
indications
..............................
.
............................................................
55
:::J
5.6 Unplanned shutdown and alarms
.........
.
.....................
.
.....................................................
55
,......
6
(,/')
Ma
intenan
ce
...
....
......
..
........
...
.......
...
..........
......
....
......
....
......
...
......
....
57
6.1 Safety .
...
.
......
...
..................
.
......
.
..
...
.
......
...
........
.
.....
.
........
.
.....
..
.......
...
........
...
........
.. 58
6.2
Maintenance plan
.......
.
.........................................................................
.
.....................
58
6.3 Inspect
the
pipelines and connections
........................................
..
........................
..
..........
59
6.4
Cleaning
the
pump .
..........
.
..................
.
........................................
.
..............................
59
6.5
Service
the
EPX
pump
..........................
.
....................................
.
.......
.
..........................
59
6.6
Fault finding
..................
.....
..............
.
...................
.
........
.
.......................
.
...
.
..............
60
7 Storage and disp
osa
l ...
........
..
....
......
....
......
....
......
....
..........
......
...
.......
..
63
7.1 Storage
....
.
......
...
..............
...
......
...
...
.
......
.
........
...
.....
.
........
...
........
.
..............
.
......
...
...63
7.2
Disposal
..
.
.......................
.
.......................
.
...
.
........
..
...
.
............
.
........
..
........
.
................
64
8 Service,
spares
and
accessor
i
es
..............................................................
65
8.1
Introduction
...........
.
....
.
....................
.
.......................
.
...............................................
65
8.2 Service
...
.
.....................
.
...
.
.....................
.
............
.
............
.
............
.
......
.
..................
65
For
retum
of
equipment,
complete
the
HS
Forms
at
the
end
of
this manual.
Illustrations
Figure
Page
1 Process compatibility
chart
.........................
..
.................................................................
2
2 The
EPX
Ldry vacuum pump
..........................................................................................
. 5
3
EPX
twin 180L installation details · position
of
additional exhaust port
for
EP
Xtwin variants
.............
6
4
EPX
Llabels (refer
to
Table 3)
............
..
....................
.
...................................................
.
..
8
5
EPX
Edry pump
.....................................
.
...................................................................
10
6
EPX
Nseries dry pump
..........
.
...........................
.
.........................
.
................................
11
7
End
User Controller
(EUC
) display ..
........
.....
....
.
.....
.
......
...
...
.
............
.
...................
.
...
..
.....
..
12
8 Speed curve (mbar • Pa)
..................
.
...............
.
.....
.
...........................
.
.................
.
.....
.
..
18
9 Speed curve (Torr)
......
.
........
.
.....
.
....................
..
..........
.
...
.
.........
..
..........
.
...
.
.................
18
10 Speed curve (mbar • Pa)
EPX
and
EPX
Twin .
........
.
......................................................
..
......
19
11 Speed curve (Torr)
EPX
and
EPX
Twin
...............................................................................
19
12
EPX
Linstallation dimensions
(EPX500L
shown)
...
.
................
.
...
.
.....................
.
...
.
....
.
............
20
13
EPX
LE
installation dimensions (
EPX500LE
shown)
......................
..
.........................................
21
14
EPX
Ninstallation dimensions
(EPX500N
shown)
.................
.
.........................
.
.......................
22
15
EPX
NE
installation dimensions
(EPX500NE
shown)
................................................................
23
16 Location
of
the
pump
centre
of
gravity from
centre
of
the
top
of
the
inlet flange
........
..
................
24
17 Gas module schematic ..
........
.
...............................
.
...................
.
.....
......
....................
...25
18
Schematic diagram
of
emergency stop facility
....................
..
..............................................
33
19
EUC
and
PDT
menu logic
....
...............................
..
..................................................
..
......
43
20 Switch on menu
........................................
.
................................................................
44
21
Switch off menu
.........
.
.........................
.
....
.
................
.
........
.
.....................
.
...
.
..........
..44
22 Normal menu
.......
..
........................
.
.........
...
............
...
........
...
.........................
.
........
..45
23 Status menu
............................................
.
..........
.
..............
.
....................................
..46
24 Control menu
.......................
.
............
.
.......................................................................
47
25 Setup menu (
sheet
1
of
2)
..........
.
......
.
.......
....
...
..
.........
.....
..........
...
........
...
........
...
...
.
......
48
26 Software version .....
...
.
........
.
..
...
..
.........
.
....
.
..................
.
...........................
.
.................
50
27 Select units menu
.......
.
.............................................
...
.......................
.
............
.
..........
51
28 Select line menu
.................
..
....
..
.............................
.
................
.
........
.
.......................
52
Page
ii
©Edwards Limited 2017.
All
rights reserved.
Edwards and
the
Edwards logo
are
trademarks
of
Edwards Limited.
