Keysight Technologies E5260 Series Manual de usuario

Keysight Technologies E5260/E5270

Series of Parametric Measurement

Solutions

User’s Guide

Notices

No part of this manual may be reproduced in

any form or by any means (including elec-

tronic storage and retrieval or translation into

a foreign language) without prior agreement

and written consent from Keysight Technolo-

gies as governed by United States and inter-

national copyright laws.

Manual Part Number

E5260-90000

Edition

Edition 1, October 2004

Edition 2, July 2005

Edition 3, July 2007

Edition 4, September 2009

Edition 5, August 2011

Edition 6, September 2015

Printed in:

Printed in Malaysia

Published by:

Keysight Technologies Japan K.K.

9-1, Takakura-cho, Hachioji-shi, Tokyo

192-8550 Japan

Technology Licenses

The hardware and/or software described in

this document are furnished under a license

and may be used or copied only in accordance

with the terms of such license.

Declaration of Conformity

Declarations of Conformity for this product

and for other Keysight products may be

downloaded from the Web. Go to http://

www.keysight.com/go/conformity and click

on “Declarations of Conformity.” You can then

search by product number to find the latest

Declaration of Conformity.

U.S. Government Rights

The Software is “commercial computer soft-

ware,” as defined by Federal Acquisition Reg-

ulation (“FAR”) 2.101. Pursuant to FAR 12.212

and 27.405-3 and Department of Defense FAR

Supplement (“DFARS”) 227.7202, the U.S.

government acquires commercial computer

software under the same terms by which the

software is customarily provided to the public.

Accordingly, Keysight provides the Software

to U.S. government customers under its stan-

dard commercial license, which is embodied

in its End User License Agreement (EULA), a

copy of which can be found at

http://www.keysight.com/find/sweula. The

license set forth in the EULA represents the

exclusive authority by which the U.S. govern-

ment may use, modify, distribute, or disclose

the Software. The EULA and the license set

forth therein, does not require or permit,

among other things, that Keysight: (1) Furnish

technical information related to commercial

computer software or commercial computer

software documentation that is not customar-

ily provided to the public; or (2) Relinquish to,

or otherwise provide, thegovernment rights

in excess of these rights customarily provided

to the public to use, modify, reproduce,

release, perform, display, or disclose com-

mercial computer software or commercial

computer software documentation. No addi-

tional government requirements beyond those

set forth in the EULA shall apply, except to the

extent that those terms, rights, or licenses are

explicitly required from all providers of com-

mercial computer software pursuant to the

FAR and the DFARS and are set forth specifi-

cally in writing elsewhere in the EULA. Key-

sight shall be under no obligation to update,

revise or otherwise modify the Software.With

respect to any technical data as defined by

FAR 2.101, pursuant to FAR 12.211 and

27.404.2 and DFARS 227.7102, the U.S. gov-

ernment acquires no greater than Limited

Rights as defined in FAR 27.401 or DFAR

227.7103-5 (c), as applicable in any technical

data.

Warranty

THE MATERIAL CONTAINED IN THIS DOCU-

MENT IS PROVIDED “AS IS,” AND IS SUBJECT

TO BEING CHANGED, WITHOUT NOTICE, IN

FUTURE EDITIONS. FURTHER, TO THE MAXI-

MUM EXTENT PERMITTED BY APPLICABLE

LAW, KEYSIGHT DISCLAIMS ALL WARRAN-

TIES, EITHER EXPRESS OR IMPLIED, WITH

REGARD TO THIS MANUAL AND ANY INFOR-

MATION CONTAINED HEREIN, INCLUDING

BUT NOT LIMITED TO THE IMPLIED WAR-

RANTIES OF MERCHANTABILITY AND FIT-

NESS FOR A PARTICULAR PURPOSE.

KEYSIGHT SHALL NOT BE LIABLE FOR

ERRORS OR FOR INCIDENTAL OR CONSE-

QUENTIAL DAMAGES IN CONNECTION WITH

THE FURNISHING, USE, OR PERFORMANCE

OF THIS DOCUMENT OR OF ANY INFORMA-

TION CONTAINED HEREIN. SHOULD KEY-

SIGHT AND THE USER HAVE A SEPARATE

WRITTEN AGREEMENT WITH WARRANTY

TERMS COVERING THE MATERIAL IN THIS

DOCUMENT THAT CONFLICT WITH THESE

TERMS, THE WARRANTY TERMS IN THE SEP-

ARATE AGREEMENT SHALL CONTROL.

Latest Information

To get the latest firmware/software/electronic

manuals/specifications/support information,

go to www.keysight.com and type in the prod-

uct number in the Search field at the top of the

page.

COMPLIANCE WITH GERMAN NOISE REQUIREMENTS

This is to declare that this product is in conformance with the German Regulation on Noise

Declaration for Machines (Lärmangabe nach der Maschinenlärminformation-Verordnung

-3.GSGV Deutschland).

• Herstellerbescheinigung

GERÄUSCHEMISSION

Lpa < 70 dB

am Arbeitsplatz

normaler Betrieb

nach DIN 45635 T. 19

• Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION

Lpa < 70dB

operator position

normal operation

per ISO 7779

South Korean Class A EMC declaration

This equipment is Class A suitable for professional use and is for use in electromagnetic

environments outside of the home.

Safety Summary

The following general safety precautions must be observed during all phases of operation,

service, and repair of this instrument. Failure to comply with these precautions or with

specific warnings elsewhere in this manual may impair the protections provided by the

instrument. In addition, it violates safety standards of design, manufacture, and intended

use of the instrument. Keysight Technologies assumes no liability for customer’s failure to

comply with these requirements.

Product manuals may be provided on CD-ROM or in printed form. Printed manuals are an

option for many products. Manuals may also be available on the Web. Go to

www.keysight.com and type the product model number in the Search field at the top of the

page.

NOTE Do not use this instrument in any manner not specified by the manufacturer. The protective

features of this instrument may be impaired if it is used in a manner not specified in the

operation instructions.

This instrument is an INDOOR USE product.

This product complies with OVERVOLTAGE CATEGORY II for mains input and POLLUTION

DEGREE 2 defined in IEC 61010-1.

If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with a

measurement category, its measurement terminals must not be connected to line-voltage

mains.

Safety of any system incorporating the equipment is the responsibility of the assembler of

the system.

WARNING Hazardous voltage of up to the instrument’s maximum voltage may appear at High Force,

Guard, and High Sense terminals if Interlock terminal is closed. Open the Interlock terminal

when the High Force, Guard, and High Sense terminals are accessible. Voltage applied to

the terminals will be limited up to ±42 V.

Do not work the interlock function intentionally in order to bring the output voltage to the

safe level. While the high voltage indicator is lit, the dangerous voltage by the output

voltage or the residual charge appears on the measurement terminal.

•DANGEROUS PROCEDURE WARNINGS

Warnings, such as WARNING on the previous page, shall be complied. Procedures

throughout in this manual prevent you from potentially hazard. Their instructions

contained in the warnings must be followed.

•BEFORE APPLYING POWER

Verify that all safety precautions are taken. Make all connections to the instrument

before applying power. Note the instrument's external markings described under

“Safety Symbols”.

•GROUND THE INSTRUMENT

This is Safety Class I instrument. To minimize shock hazard, the instrument chassis and

cabinet must be connected to an electrical ground. The power terminal and the power

cable must meet International Electrotechnical Commission (IEC) safety standards.

•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

Do not operate the instrument in the presence of flammable gases or fumes. Operation

of any electrical instrument in such an environment constitutes a definite safety hazard.

•DO NOT REMOVE COVERS

No operator serviceable parts inside. Refer servicing to qualified personnel. To prevent

electrical shock do not remove covers.

•IN CASE OF DAMAGE

Instruments that appear damaged or defective should be made inoperative and

secured against unintended operation until they can be repaired by qualified service

personnel. Return the instrument to a Keysight Technologies sales or service office for

services and repair to ensure that safety features are maintained.

•USE ONLY THE SPECIFIC ACCESSORIES

Specific accessories satisfy the requirements for specific characteristics for using the

instrument. Use the specific accessories, cables, adapters, and so on for safety

reasons.

Safety Symbols

The general definitions of safety symbols used on equipment or in manuals are listed below.

Direct current.

Alternating current.

Earth ground terminal.

Protective conductor terminal. For protection against electrical shock in case of a fault.

Used with field wiring terminals to indicate the terminal which must be connected to

ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which

normally includes all exposed metal structures.

Grounded terminal which indicates the earth potential.

On supply.

Off supply.

Standby supply. The equipment will be marked with this symbol is not completely

disconnected from AC mains when power switch is in the standby position.

In position of a bi-stable push switch.

Out position of a bi-stable push switch.

Hazardous voltage and potential for electrical shock. Do not touch terminals that have this

symbol when the equipment is on.

Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.

Low temperature or freezing conditions. Avoid contact. Surfaces are cold and may cause

personal injury if touched.

Caution, refer to accompanying documentation. The equipment will be marked with this

symbol when it is necessary for the user to refer to the instruction manual.

Read operator's manual. To indicate that the operator's manual or card should be read

before continuing the operation.

IEC Measurement Category I

The CE mark shows that the product complies with all applicable European Directives.



CAT I

The CSA mark is a registered trademark of the Canadian Standards Association.

The RCM mark is a registered trademark of the Australian Communications Authority. This

signifies compliance with the Australian EMC Framework Regulations under the terms of

the Radio communications Act.

This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme à la norme NMB-001 du Canada.

This ISM device complies with Canadian ICES-001 Class A.

Cet appareil ISM est conforme à la norme NMB-001 classe A du Canada.

This is the symbol for an Industrial, Scientific and Medical, Group 1 Class A product. (CISPR

11)

The UKCA mark shows that the product complies with all applicable UK regulations.

Korea’s safety and EMC mark

China RoHS - Environmentally Green Product Label

China RoHS - Product with Toxic Substance 40 yr EPUP

The Chinese mark for paper-based packaging materials; Paperboard and Corrugated

Fiberboard

Plastic Material Coding Identification

WARNING A WARNING notice denotes a hazard. It calls attention to an operating procedure, practice,

or the like that, if not correctly performed or adhered to, could result in personal injury or

death. Do not proceed beyond a WARNING notice until the indicated conditions are fully

understood and met.

CAUTION A CAUTION notice denotes a hazard. It calls attention to an operating procedure, practice,

or the like that, if not correctly performed or adhered to, could result in damage to the

product or loss of important data. Do not proceed beyond a CAUTION notice until the

indicated conditions are fully understood and met.

Power Supply and Measurement Safety

• Power Supply Safety

This instrument can output high currents and voltages. Make sure that the load or

device under test can safely handle the output current and voltage. Also, make sure

that the connection leads can safely withstand the expected currents and are insulated

for the expected voltages.

The instrument outputs may be connected so as to float relative to earth ground.

Isolation or floating voltage ratings are indicated on the instrument, near the output

terminal or the Circuit Common terminal. There is the danger of electric shock by

touching the floated measurement terminals. Keep in mind it to protect yourself. And it

is a reason of using the recommended accessories.

• Voltage/Current Measurement Safety

Multimeters and other instruments capable of measuring high voltages and currents

are subject to specific safety concerns because of the circuits to which they may be

connected. To safely use these instruments, you need to understand the markings on

the instrument near the input terminals, which include the Protection Limits and the

IEC Measurement Category.

• Protection Limits

Keysight multimeters and other voltage measurement instruments provide protection

circuitry to prevent damage to the instrument and to protect against the danger of

electric shock, provided the Protection Limits are not exceeded. To ensure safe

operation of the instrument, do not exceed the Protection Limits shown on the input

terminals.

•Source/MonitorTerminals

Source/monitor unit, SMU, can simultaneously perform DC voltage or current output

and measurement. Typical SMU has the Force, Guard, Sense, and Circuit Common

terminals as shown below. Normally the Force, Guard, and Sense terminals are the

same potential. Voltage marked around the terminals indicates the Protection Limits.

Force and Sense must be connected to a terminal of a device under test for the Kelvin

connection which is effective for high current measurement and low resistance

measurement. For the non-Kelvin connection to ease the connections, connect Force

only. Do not connect Sense. It must be opened.

Guard should be extended to around the device terminal for reducing leakage current

caused by a coaxial cable used. Guard must be never connected to anything at the

device side.

Circuit Common should be connected to shielding of the coaxial cable used.

The following image is the Kelvin triaxial connector of High Power SMU.

Force Sense Guard

Circuit Common

Guard

High Voltage Shock Hazard

Keysight E5260/E5270 can force dangerous voltages (±200 V for HPSMU and ±100 V for

MPSMU/HRSMU) at the Force, Guard, and Sense terminals. To prevent electric shock

hazard, the following safety precautions must be observed during the use of Keysight

E5260/E5270.

• Use a three-conductor AC power cable to appliance coupler (inlet) and the instrument

to an electric ground (safety ground).

• Prepare shielding box which covers interface to a device under test and equipped with

interlock circuit that opens when the door is opened.

• Before performing measurement, connect the interlock circuit to the Interlock terminal

of this instrument.

• Confirm periodically that the interlock function works normally.

• Before touching the connections of the Force, Guard, and Sense terminals, turn the

instrument off and discharge any capacitors of the measurement path. If you do not

turn the instrument off, complete “all” of the following items, regardless of any

instrument’s settings.

• Terminate measurement by pressing the OutCh and On/Off keys, confirm that the

Output status indicator is not lit.

• Confirm that the HIGH VOLTAGE indicator is not lit.

• Open the shielding box access door (open the Interlock terminal).

• Discharge any capacitors if the capacitance is connected to an SMU.

• Warn workers in the vicinity of the instrument about hazardous conditions.

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