Edwards STP Series Manual de usuario

MT-92E-1A1-D

Model name Voltage

STP-XF813Y1BV155 / XF1313Y1BV155 200 - 240 V AC

STP-XF813Y2CV155 / XF1313Y2CV155 200 - 240 V AC

STP Series Turbomolecular Pumps

STP-XF813/XF1313 series

Pump Specific Information

Instruction Manual (B)

STP pump consists of the four-volumed Instruction Manuals.

Instruction Manual (A):

STP pump generic Instruction Manual

Instruction Manual (B):

(This Instruction Manual)

STP pump specific information

Instruction Manual (C):

STP control unit Instruction Manual

Instruction Manual (D):

STC-U eTMS unit for Turbomolecular Pump

2023.08

Declaration of Conformity

This product has been manufactured under a quality management system certified to ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

This declaration of conformity is issued under the sole responsibility of the manufacturer:

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 76-85 3

Japan

Documentation Officer

Jana Sigmunda 300

Lutín , 78349

Czech Republic

T: +4 (0) 580 58 7 8

[email protected]

Product Name:

urbomolecular pump

Model Number:

STP

XF803

series

XF1303 series

STP-XF813 series, XF1313 series

Is in conformity with the relevant requirements of European CE legislation:

006/4 /EC

Machinery directive

Note: The safety objectives of the Low Voltage Directive 2014/35/ U were

complied with in accordance with Annex 1 No. 1.5.1 of this directive.

014/30/EU

Electromagnetic compatibility (EMC) directive

Class A Emissions, Industrial Immunity

011/65/EU

Restriction of certain hazardous s

ubstances (RoHS)

irective

as amended by Delegated Directive (EU) 015/863

Based on the relevant requirements of harmonised standards:

EN ISO 1 100: 010

Safety of machinery. General principles for design. Risk assessment and risk

reduction

EN 101

:1996 +A1: 009

Compressors and vacuum pumps. Safety requirements. Vacuum

pumps

EN 613 6

1: 013

Electrical equipment for measurement, control and laboratory use. EMC

requirements

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 11th-Oct- 0

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Martin Tollner

President, Semiconductor Chamber Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

Declaration of Conformity

This product has been manufactured under a quality management system certified to ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 76-85 3

Japan

Documentation Officer

Innovation Drive

Burgess Hill

West Sussex

RH15 9TW

[email protected]

This declaration of conformity is issued under the sole responsibility of the manufacturer.

Product Name:

urbomolecular pump

Model Number:

STP

XF803

series

XF1303 series

STP-XF813 series, XF1313 series

The object of the declaration described above is in conformity with relevant statutory requirements:

Supply of Machinery (Safety) Regulations 008

The objectives of the lectrical quipment (Safety) Regulations 2016 are governed by Annex 1 1.5.1 of this regulation.

Electromagnetic Compatibility Regulations 016

Class A Emissions, Industrial Immunity

Restriction of the Use of Certain Hazardous Substances in Electrical and

Electronic Equipment Regulations 01

Relevant designated standards or technical specifications are as follows:

EN ISO 1 100: 010

Safety of machinery. General principles for design. Risk assessment and risk

reduction

EN 101

:1996 +A1: 009

Compressors and vacuum pumps. Safety requirements. Vacuum pumps

EN 613 6

1: 013

Electrical equipment for measurement, control and laboratory use. EMC

requirements. General requirements. Class A Emissions, Industrial Immunity

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 11th-Oct- 0

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Signed for and on behalf of Edwards Ltd

Martin Tollner

President, Semiconductor Chamber Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

This product has been manufactured under a quality management system certified to ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION

RoHS (EU, UK): Material Exe ption Infor ation

This product is compliant with the following Exemptions

Annex III:

• 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight

• 6(c) Copper alloy containing up to 4% lead by weight

• 7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more lead)

• 7(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in

capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound

REACH (EU, UK)

This product is a complex article which is not designed for intentional substance release. To the best of our knowledge

the materials used comply with the requirements of REACH. The product manual provides information and instruction

to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.

Article 33.1 Declaration:

This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the

015 European Court of Justice ruling in case C-106/14.

• Lead (Pb)

This substance is present in certain steel / aluminium / brass / electrical or electronic components.

ASTE

RAMEWORK

IRECTIVE

(EU)

This product has been manufactured under a quality management system certified to ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

材料成分声明

China Material Content Declaration

有害物质

Hazardous Substances

部件名称

Part name

铅

Lead

(Pb)

汞

Mercury

(Hg)

镉

Cadmium

(Cd)

六价铬

Hexavalent

Chromium

(Cr VI)

多溴联苯

Polybrominated

biphenyls

(PBB)

多溴二苯醚

Polybrominated

diphenyl ethers

(PBDE)

铸铝及铝合金制品

Aluminium alloys

× 〇〇〇〇〇

铜管管件

Brass pipe fitting

× 〇〇〇〇〇

电缆/电线/连接器

Cable/wire/connector

× 〇〇〇〇〇

电子元件和控件

Electronics and

Controls

× 〇〇〇〇〇

表示该有害物质在该部件的所有均质材料中的含量低于

GB/T 657

标准规定的限量要求

。

O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit

requirement in GB/T 657 .

表示该有害物质在该部件的至少一种均质材料中的含量超出

GB/T 657

标准规定的限量要求

。

X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is

above the limit requirement of GB/T 657 .

The description of this product consists of the four-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

•STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

•STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System (TMS)

Instruction Manual (C)

•STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link

•EdCentra (for SCU-801 series only）

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Instruction Manual (D)

•STC-U eTMS unit for Turbomolecular Pump:

•Introduction

•Technical data

•Installation

•Operation

•Maintenance and inspection

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

 
STP-XF813/XF1313 series Turbomolecular Pump 
 
MT-92E-1A1-D 
Page i 
PAGE 
i 
CONTENTS 
Section Title Page 
1TECHNICAL DATA 1 
1.1 Applicable pump specifications 1 
1.1.1 STP pump specifications 1 
1.1.1.1 STP-XF813Y1BV155/XF1313Y1BV155 2 
1.1.1.2 STP-XF813Y2CV155/XF1313Y2CV155 4 
1.1.1.3 Condition for the water-cooling unit 6 
1.1.2 Safety function of blade temperature sensor 7 
1.2 External appearance of the STP pump 8 
1.3 Label affixing positions 10 
1.4 Accessories 11 
2HOW TO SECURE THE STP PUMP 13 
3TEMPERATURE MANAGEMENT SYSTEM (TMS) 17 
3.1 Configuration of the STP pump with the TMS 17 
3.2 TMS heater 18 
3.3 TMS valve 18 
3.4 Outlet port heater 18 
3.5 Installation of the TMS unit 18 
3.5.1 Connecting cables to the TMS unit 18 
3.5.2 Connecting the pump and TMS valve 19 
3.6 Specification of TMS unit 20 
3.7 Condition for the TMS unit 21 
3.8 Accessories 22 

STP-XF813/XF1313 series Turbomolecular Pump

MT-92E-1A1-D

Page ii

TECHNICAL DATA

PAG

PAGE

ILLUSTRATIONS

Figure Title Page

1 STP- XF813 / XF1313 series 8

2 Label affixing positions for the STP pump 10

3 Methods of securing the STP pump 15

4 Configuration of the TMS 17

5 Water cooling pipe piping diagram 19

TABLES

Table Title Page

1 Tightening torque of bolt 13

2 Destructive torque and recommended securing bolt

for inlet port flange 14

STP-XF813/XF1313 series Turbomolecular Pump

MT-92E-1A1-D

Page 1

TECHNICAL DATA

1 TECHNICAL DATA

1.1 Applicable pump specifications

Model Name

Specification

Applicable Control unit

STP-XF813Y1BV155 / XF1313Y1BV155

Extreme High-flow type

Corrosion resistant type*1

High-emissivity coating type*2

TMS unit*4

SCU-800/801 *5

STP-XF813Y2CV155 / XF1313Y2CV155

Extreme High-flow type

Corrosion resistant type*1

Special material/coating type*3

TMS unit*4

SCU-800/801 *5

*1 Corrosion resistant: STP pump with anti-corrosive treatment.

*2 High-emissivity coating: STP pump with rotor covered with high-emissivity coating.

*3 Special material / coating: STP pump with special material and coating.

*4 Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the

temperature with the thermistor in the turbomolecular pump, and performing the TMS heater ON/OFF control in order to

maintain a constant temperature of the STP pump.

*5 The dedicated control unit for STP-XF803/XF1303/XF813/XF1313 series.

1.1.1 STP pump specifications

The following specifications are available for STP-XF813 / XF1313 series pumps.

TMS Heater

set point （⁰C）

TMS Valve

set point （⁰C）

Rated speed

（rpm）

Remarks

STP-XF813Y1BV155

STP-XF1313Y1BV155

150

28,000

Section 1.1.1.1

STP-XF813Y2CV155

STP-XF1313Y2CV155

140

28,000

Section 1.1.1.2

STP-XF813/XF1313 series Turbomolecular Pump

MT-92E-1A1-D

Page 2

TECHNICAL DATA

PAG

1.1.1.1 STP-XF813Y1BV155/XF1313Y1BV155

The values shown below are typical. They are not guaranteed.

Item

STP-XF813Y1BV155

STP-XF1313Y1BV155

Flange size

Inlet port flange

VG150/ISO160F

ICF203

VG200/ISO200F

ICF253

Outlet port flange

KF40

Maximum pumping

speed

L/s

800

1,300

L/s

670

1,100

L/s

550

600

Maximum compression

ratio

2.0×107

7.0×107

3.3×102

Ultimate pressure

Pa (Torr)

10-7 (10-9) order [after baking]

Maximum backing pressure *1

Pa (Torr)

200 (1.5)

Allowable flow backing pressure *2

Pa (Torr)

97(0.73)

Critical operating backing pressure *3

Pa (Torr)

160 (1.2)

Enable exhaust gas

Chlorine or fluorine system gases can be used.

When you use the following gases, contact

Edwards.

・Gases including alkaline metals except Li gas.

・Gases including Ga, Hg, ln, or Sn.

・Gases including HBr

・Gases including CLF3

Flow rate of purge gas <N2>

Pa·m3/s

(SCCM)

5.91×10-1 ±8.45×10-2 (350±50)*4

Rated speed

rpm

28,000

Backup rotational speed *5

rpm

Approximately 8,000

Starting time

min

≦9

Stopping time

min

≦11

Noise

<50 (at 28,000 rpm)

Temperature Management System (TMS)

Available

Baking temperature

°C

<120

Rotor temperature

sensor

Precision

°C

±3 *6

Safety function

Available *7

Lubricating oil

Not necessary

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