Agilent Technologies UHV-24 Manual de usuario
DRAFT
Vacuum Products Division
UHV-24/UHV-24p
Ionization Gauge
Manual No. 699905505
Revision F
January 2014
INSTRUCTION MANUAL
DRAFT 1/6/14
Copyright 2014
Agilent, Inc.
UHV-24/UHV-24p Ionization Gauge
3
UHV-24/UHV-24p Ionization Gauge
DRAFT 1/6/14
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, replace, or refund an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or
adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means of
transportation. When any Product is returned for examination and inspection, or for any other reason,
Customer shall be responsible for all damage resulting from improper packing or handling, and for loss
in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller’s determination with regard
thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer’s expense; in addition, a charge for testing and
examination may be made on Products so returned.
3/1/00
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5
Contents
Preface .............................................................................................................................................. 7
Hazard and Safety Information ...................................................................................................... 7
Contacting Agilent ........................................................................................................................ 9
UHV-24/UHV-24p Ionization Gauge .............................................................................................. 11
Principles of Operation ................................................................................................................ 11
Installation ................................................................................................................................... 12
Operating Specifications .............................................................................................................. 13
Maintenance: Filament Replacement ........................................................................................... 17
Appendix A. Gas Correction Factor Table ................................................................................... 19
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DRAFT
UHV-24/UHV-24p Ionization Gauge
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Preface
Hazard and Safety Information
This product must only be operated and maintained by trained personnel.
This manual uses the following standard safety protocols:
WARNING Warnings indicate a particular procedure or practice, which
if not followed correctly, could lead to serious injury.
CAUTION Cautions indicate a particular procedure or practice, which if
not followed, could cause damage to the equipment.
NOTE Notes contain important information.
Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Agilent. Be aware of the hazards associated with this
equipment, know how to recognize potentially hazardous conditions, and how to avoid
them. Read carefully and strictly observe all cautions and warnings. The consequences of
unskilled, improper, or careless operation of the equipment can be serious.
In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Agilent office.
UHV-24/UHV-24p Ionization Gauge
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Grounding the Multi-Gauge and senTorr Controllers
Be certain that your UHV-24/UHV-24p Ion Gauge Controller and vacuum system are
separately grounded to a common ground.
WARNING ❑Do not place a ground wire between the vacuum chamber
and the controller chassis; large continuous currents could
flow through it.
❑Personnel can be killed by high voltages (160 to 900 V may
be present in an improperly grounded system).
❑Make absolutely sure that your vacuum system is grounded
as shown in Figure 1.
❑Test the system ground to be sure that it is complete and
capable of supporting at least 10 A.
Figure 1 Ion Gauge and Vacuum System Connections
Use with Combustibles and Mixtures
WARNING As with all ionization gauges, this device is not intrinsically
safe. Exercise extreme care when using this vacuum gauge
while pumping or backfilling a system or in any other system
condition which contains combustible gases or mixtures. The
filament, the end of a hot filament ion gauge and the high
voltage discharge of a cold cathode gauge can be ignition
sources.
When such a gas or mixture is present, do not turn on any such
vacuum gauge. Failure to follow this instruction could result in
serious injury to personnel and damage to equipment.
Ion Gauge Controller Vacuum System
Power Distribution
Breaker Box
Power Common or
Safety Ground Lead
Do not make direct chassis to
vacuum system Connection!
Note:
are not shown.
Other power leads
UHV-24/UHV-24p Ionization Gauge
9
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing any vacuum equipment.
CAUTION Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox. AIconox is not
compatible with aluminum and will cause damage.
NOTE Normally, it is unnecessary to use vacuum grease. However, if it
must be used, do not use silicone types, and use it sparingly.
Apiezon L grease is recommended (Agilent Part Number
695400004).
Contacting Agilent
In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the
back cover of this manual for a listing of our sales and service offices.
Visit our web site at: http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/
pages/default.aspx.
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