Agilent Technologies UHV-24 Manual de usuario

DRAFT

Vacuum Products Division

UHV-24/UHV-24p

Ionization Gauge

Manual No. 699905505

Revision F

January 2014

INSTRUCTION MANUAL

DRAFT 1/6/14

Agilent, Inc.

UHV-24/UHV-24p Ionization Gauge

DRAFT 1/6/14

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve

(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty

claims is limited, at the option of Seller, to repair, replace, or refund an equitable portion of the

purchase price of the Product. Items expendable in normal use are not covered by this warranty. All

warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of

Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of

the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired

portion of the original warranty period applicable to the repaired or replaced parts. After expiration of

the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,

and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any

warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements

made by any person, including representatives of Seller, which are inconsistent or in conflict with the

terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an

officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,

and must be received within the applicable warranty period by Seller or its authorized representative.

Such claims should include the Product serial number, the date of shipment, and a full description of

the circumstances giving rise to the claim. Before any Products are returned for repair and/or

adjustment, written authorization from Seller or its authorized representative for the return and

instructions as to how and where these Products should be returned must be obtained. Any Product

returned to Seller for examination shall be prepaid via the means of transportation indicated as

acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and

any warranty claim on any item that has been altered or has been returned by non-acceptable means of

transportation. When any Product is returned for examination and inspection, or for any other reason,

Customer shall be responsible for all damage resulting from improper packing or handling, and for loss

in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole

responsibility for determining the cause and nature of failure, and Seller’s determination with regard

thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will

be notified and the Product returned at Customer’s expense; in addition, a charge for testing and

examination may be made on Products so returned.

3/1/00

UHV-24/UHV-24p Ionization Gauge

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DRAFT 1/6/14

UHV-24/UHV-24p Ionization Gauge

DRAFT

Contents

Preface .............................................................................................................................................. 7

Hazard and Safety Information ...................................................................................................... 7

Contacting Agilent ........................................................................................................................ 9

UHV-24/UHV-24p Ionization Gauge .............................................................................................. 11

Principles of Operation ................................................................................................................ 11

Installation ................................................................................................................................... 12

Operating Specifications .............................................................................................................. 13

Maintenance: Filament Replacement ........................................................................................... 17

Appendix A. Gas Correction Factor Table ................................................................................... 19

UHV-24/UHV-24p Ionization Gauge

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DRAFT

UHV-24/UHV-24p Ionization Gauge

Preface

Hazard and Safety Information

This product must only be operated and maintained by trained personnel.

This manual uses the following standard safety protocols:

WARNING Warnings indicate a particular procedure or practice, which

if not followed correctly, could lead to serious injury.

CAUTION Cautions indicate a particular procedure or practice, which if

not followed, could cause damage to the equipment.

NOTE Notes contain important information.

Before operating or servicing equipment, read and thoroughly understand all operation/

maintenance manuals provided by Agilent. Be aware of the hazards associated with this

equipment, know how to recognize potentially hazardous conditions, and how to avoid

them. Read carefully and strictly observe all cautions and warnings. The consequences of

unskilled, improper, or careless operation of the equipment can be serious.

In addition, consult local, state, and national agencies regarding specific requirements and

regulations. Address any safety, operation, and/or maintenance questions to your nearest

Agilent office.

UHV-24/UHV-24p Ionization Gauge

Grounding the Multi-Gauge and senTorr Controllers

Be certain that your UHV-24/UHV-24p Ion Gauge Controller and vacuum system are

separately grounded to a common ground.

WARNING ❑Do not place a ground wire between the vacuum chamber

and the controller chassis; large continuous currents could

flow through it.

❑Personnel can be killed by high voltages (160 to 900 V may

be present in an improperly grounded system).

❑Make absolutely sure that your vacuum system is grounded

as shown in Figure 1.

❑Test the system ground to be sure that it is complete and

capable of supporting at least 10 A.

Figure 1 Ion Gauge and Vacuum System Connections

Use with Combustibles and Mixtures

WARNING As with all ionization gauges, this device is not intrinsically

safe. Exercise extreme care when using this vacuum gauge

while pumping or backfilling a system or in any other system

condition which contains combustible gases or mixtures. The

filament, the end of a hot filament ion gauge and the high

voltage discharge of a cold cathode gauge can be ignition

sources.

When such a gas or mixture is present, do not turn on any such

vacuum gauge. Failure to follow this instruction could result in

serious injury to personnel and damage to equipment.

Ion Gauge Controller Vacuum System

Power Distribution

Breaker Box

Power Common or

Safety Ground Lead

Do not make direct chassis to

vacuum system Connection!

Note:

are not shown.

Other power leads

UHV-24/UHV-24p Ionization Gauge

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing any vacuum equipment.

CAUTION Do not use silicone oil or silicone grease.

Use powder-free butyl or polycarbonate gloves to prevent skin

oils from getting on vacuum surfaces.

Do not clean any aluminum parts with Alconox. AIconox is not

compatible with aluminum and will cause damage.

NOTE Normally, it is unnecessary to use vacuum grease. However, if it

must be used, do not use silicone types, and use it sparingly.

Apiezon L grease is recommended (Agilent Part Number

695400004).

Contacting Agilent

In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the

back cover of this manual for a listing of our sales and service offices.

Visit our web site at: http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/

pages/default.aspx.

UHV-24/UHV-24p Ionization Gauge

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