Agilent Technologies FRG-700 Manual de usuario

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Contents

Product Identification 5

Validity 5

Intended Use 6

Functional Principle 6

1Safety 7

1.1 Symbols Used 7

1.2 Personnel Qualifications 7

1.3 General Safety Instructions 7

1.4 Liability and Warranty 9

2Technical Data 10

3Installation 17

3.1 Vacuum Connection 177

3.2 Power Connection 18

4Operation 233

4.1 Gas Type Dependence 233

4.2 Ignition Delay 23

4.3 Adjusting the Gauge 244

5Deinstallation 277

6Maintenance, Troubleshooting 288

7Returning the Product 299

8Disposal 30

9Literature 31

For cross-references within this document, the symbol (XY) is used,

for cross-references to further documents, listed under literature, the

symbol ([Z]).

Inverted Magnetron Pirani Gauge FRG-700 FRG-702

Product Identification

In all communications with Agilent, please specify the infor-

mation given on the product nameplate. For convenient refer-

ence copy that information into the space provided below.

Model:

PN:

SN:

V Hz VA

Made in Liechtenstein

Agilent Technologies

Validity

This document applies to products with the following part num-

bers:

FRG-700 (FPM sealed)

FRG-702 (all-metal)

FRG700KF25 (DN 25 ISO-KF)

FRG702KF25 (DN 25 ISO-KF)

FRG700CF35 (DN 40 CF-F)

FRG702KF40 (DN 40 ISO-KF)

FRG702CF35 (DN 40 CF-F)

The part number (PN) can be taken from the product nameplate.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702

If not indicated otherwise in the legends, the illustrations in this

document correspond to the product with part number

FRG700KF25. They apply to the other products by analogy.

Wereserve the right to make technical changes without prior

notice.

All dimensions in mm.

Intended Use

The Inverted Magnetron Pirani Gauges FRG-700 and FRG-702

have been designed for vacuum measurement of gases in the

pressure range of 5×10-9 …1000 mbar.

They must not be used for measuring flammable or combustible

gases in mixtures containing oxidants (e.g. atmospheric oxygen)

within the explosion range.

The gauges can be operated in connection with an Agilent

AGC-100 Vacuum Gauge Controller, an Agilent Turbo AG Rack

Controller, or with another controller.

Functional Principle

The gauges consist of two separate measurement systems

(Pirani and cold cathode system) the signals of which are

combined in such a way that one measurement signal is output.

The Pirani measurement circuit is always on.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ-

mental damage.

Caution

Information on correct handling or use. Disregard can lead to

malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by

persons who have suitable technical training and the neces-

sary experience or who have been instructed by the end-user

of the product.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702

1.3 General Safety Instructions

Adhere to the applicable regulations and take the necessary

precautions for the process media used.

Consider possible reactions with the product materials.

Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the

safety instructions in this document.

Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations

and take the necessary precautions when handling contamin-

ated parts.

DANGER

DANGER: magnetic fields

Strong magnetic fields can disturb electronic

devices like heart pacemakers or impair their

function.

Maintain a safety distance of ≥10 cm between the

magnet and the heart pacemaker or prevent the

influence of strong magnetic fields by antimagnetic

shielding.

Communicate the safety instructions to all other users.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702

1.4 Liability and Warranty

Agilent assumes no liability and the warranty becomes null and

void if the end-user or third parties

disregard the information in this document

use the product in a non-conforming manner

make any kind of interventions (modifications, alterations etc.)

on the product

use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the

process media used.

Gauge failures due to contamination or wear and tear, as well as

expendable parts (e.g. seals, filament), are not covered by the

warranty.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702

2 Technical Data

Measuring range (air, N2)

5×10-9 …1000 mbar

Accuracy

±30% (in the range

1×10-8 …100 mbar)

Repeatability

±5% (in the range

1×10-8 …100 mbar)

Output signal (measuring signal)

Voltage range

0 …+10.5 V

Measurement range

1.82 …8.6 V

Voltage vs. pressure

logarithmic , 0.6 V/decade

Error signal

<0.5 V no supply

>9.5 V Pirani sensor de-

fective (filament rupture)

Output impedance

2×10 

Minimum loaded impedance

10 k, short-circuit proof

Response time

p > 10-6 mbar

(pressure dependent)

<10 ms

p = 10-8 mbar

1000 ms

Identification gauge

85 k, referenced to

supply common

Status

pin 6

p > 10-2 mbar

Pirani-only mode

Low = 0 V

p < 10-2 mbar

Cold cathode not ignited

Pirani-only mode

Low = 0 V

p < 10-2 mbar

Cold cathode ignited

Combined Pirani / cold

cathode mode

High = 15 …30 VDC

LED

High voltage on (LED on)

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