Aerotech PLANAR HD Series Manual de usuario

Planar HD Series Stage

User’s Manual

P/N: EDS144 (Revision 1.01.00)

Dedicated to the Science of Motion

Aerotech, Inc.

101 Zeta Drive,

Pittsburgh, PA, 15238

Phone: 412-963-7470

Fax: 412-963-7459

www.aerotech.com

Product Registration Register online at: http://www.-

aerotech.com/prodreg.cfm

Technical Support United States Headquarters:

Phone: (412) 967-6440

Fax: (412) 967-6870

Email: service@aerotech.com

United Kingdom:

Phone: +44 118 940 9400

Fax: +44 118 940 9401

Email: service@aerotech.co.uk

Germany:

Phone: +49 911 967 9370

Fax: +49 911 967 93720

Email: service@aerotechgmbh.de

Japan:

Phone: +81(0)47-489-1741 (Sales)

Phone: +81(0)47-489-1742 (Service)

Fax: +81(0)47-489-1743

Email: service@aerotechkk.com.jp

China:

Phone: +852-3793-3488

Email: saleschina@aerotech.com

Revision History Revision 1.01.00 November 10, 2010

Revision 1.00.00 July 6, 2009

Product names mentioned herein are used for identification purposes only and may be trademarks of

their respective companies.

Planar HD Series Stage User's Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures v
List of Tables vii
Chapter 1: Overview 1
1.1. Standard Features 2
1.1.1. Optional Features 3
1.2. Dimensions 4
1.3. Safety Procedures and Warnings 5
1.4. EC Declaration of Incorporation 7
Chapter 2: Installation 9
2.1. Perparing the Mounting Frame or Mechanics 10
2.2. Unpacking and Handling the Stage 10
2.3. Air/Vacuum Requirements 12
2.4. Water Cooling Requirements 13
2.5. Attaching the Payload to the Stage 14
2.6. Electrical Installation 15
2.6.1. Optical Limit Swtiches 15
Chapter 3: Operating Specifications 17
3.1. Environmental Specifications 17
3.2. Accuracy and Temperature Effects 17
3.3. Basic Specifications 18
3.4. Limit Switches 20
3.4.1. Limit Switch Operation 20
3.4.2. Limit Switch Wiring 21
3.5. Standard Motor Wiring 22
3.6. Vacuum Operation 24
Chapter 4: Maintenance 25
4.1. Service and Inspection Schedule 25
4.2. Cleaning and Lubrication 25
4.2.1. Recommended Cleaning Solvents 25
4.2.2. Cleaning Process 26
Appendix A: Warranty and Field Service 29
Appendix B: Technical Changes 31
Index 33
Reader's Comments 35
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Table of Contents Planar HD Series Stage User's Manual

iv www.aerotech.com

Planar HD Series Stage User's Manual List Of Figures
List of Figures
Figure 1-1: Typical Planar HD Series Positioning Stage 1
Figure 1-2: Planar HD Series Stage Components 2
Figure 1-3: Planar HD Outline Dimensions and Axes Information 4
Figure 2-1: Planar HD With Lifting Inserts and Shipping Clamps Shown 11
Figure 2-2: Planar HD Air, Water, and Vacuum Connections 13
Figure 3-1: View of a Typical Planar HD Showing Limit Switches 20
Figure 3-2: Normally Closed (NC) and Normally Open (NO) Limit Switch Wiring 21
Figure 3-3: Limit and Encoder Wiring for Standard Planar HD Stages 22
Figure 3-4: Motor Wiring Connector for all Planar HD Stages 23
Figure 4-1: Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 26
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List of Figures Planar HD Series Stage User's Manual

vi www.aerotech.com

Planar HD Series Stage User's Manual List of Tables
List of Tables
Table 1-1: Model Numbering System 3
Table 3-1: Environmental Specifications 17
Table 3-2: Planar HD Series Specifications 18
Table 3-3: Motor Specifications 19
Table 3-4: Limit/Motor Wiring Pin Descriptions 24
Table 4-1: Recommended Cleaning Solvents 25
Table B-1: Current Changes (1.01.00) 31
Table B-2: Archived Changes 32
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List of Tables Planar HD Series Stage User's Manual

viii www.aerotech.com

Planar HD Series Stage User's Manual Overview

Chapter 1: Overview

This manual describes Aerotech’s Planar HD series of air bearing positioning stages. Figure 1-1 shows a typ-

ical Planar HD positioning stage.

This chapter introduces standard and optional features of the Planar HD stages and gives general safety pre-

cautions. The Planar HD is a full air-bearing planar positioning system, available in various sizes up to 650

mm by 650 mm.

Figure 1-1: Typical Planar HD Series Positioning Stage

N O T E : Aerotech continually improves its product offerings, and listed options may be superseded at any

time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current

product information at www.aerotech.com.

www.aerotech.com Chapter 1 1

Overview Planar HD Series Stage User's Manual

1.1. Standard Features

The Planar HD series stages all incorporate completely non-contact air bearing surfaces, linear motors, and

feedback devices to provide a maintenance free stage. There is no mechanical contact to wear or require

lubrication, making these stages ideal for clean room and medical applications.

The Planar HD incorporates air-on-air preload in the lateral bearing directions of each axis. The opposing

thin-film pressure maintains the bearing nominal gap tolerance. Non-contact magnetic or vacuum loads pre-

load the vertical air bearing directions. These designs, in addition to the large air-bearing surfaces that dis-

tributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy

loads or high accelerations.

The brushless linear motor uses an ironless forcer, which means there is zero cogging and there are no

attractive forces – resulting in unsurpassed smoothness of motion. This is especially useful in applications

where velocity control is important.

The trackless cable guides are enclosed in a Teflon sheath in all sections that experience motion. This elim-

inates particle generation due to alternative cable guiding systems making it ideal for clean room application.

The lack of linked cable guiding systems also produces extremely smooth motion and velocity control.

A water-cooled circuit isolates the forcer and magnet tracks of each axis, minimizing the effects of heat gen-

eration due to high duty cycles. This allows maximum throughput while maintaining a high degree of accu-

racy.

Optical limit switches and mechanical end stops, which protect the carriage from over-travel, are also stand-

ard.

Figure 1-2: Planar HD Series Stage Components

2 Chapter 1 www.aerotech.com

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