Aerotech ABL9000 Series Manual de usuario

ABL/ABLH9000 Series Stage

User’s Manual

P/N: EDS104 (Revision 1.01.00)

Dedicated to the Science of Motion

Aerotech, Inc.

101 Zeta Drive,

Pittsburgh, PA, 15238

Phone: 412-963-7470

Fax: 412-963-7459

www.aerotech.com

Product Registration Register online at: http://www.-

aerotech.com/prodreg.cfm

Technical Support United States Headquarters:

Phone: (412) 967-6440

Fax: (412) 967-6870

Email: service@aerotech.com

United Kingdom:

Phone: +44 118 940 9400

Fax: +44 118 940 9401

Email: service@aerotech.co.uk

Germany:

Phone: +49 911 967 9370

Fax: +49 911 967 93720

Email: service@aerotechgmbh.de

Japan:

Phone: +81(0)47-489-1741 (Sales)

Phone: +81(0)47-489-1742 (Service)

Fax: +81(0)47-489-1743

Email: service@aerotechkk.com.jp

China:

Phone: +852-3793-3488

Email: saleschina@aerotech.com

Revision History Revision 1.01.00 February 28, 2011

Revision 1.00.00 February 9, 2006

Product names mentioned herein are used for identification purposes only and may be trademarks of

their respective companies.

ABL/ABLH9000 Series Stage User's Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures v
List of Tables vii
Chapter 1: Overview 1
1.1. Standard Features 2
1.1.1. Optional Features 3
1.2. Safety Procedures and Warnings 4
1.3. EC Declaration of Incorporation 6
Chapter 2: Installation 7
2.1. Unpacking and Handling the Stage 7
2.2. Preparing the Mounting Surface 8
2.3. Securing the Stage to the Mounting Surface 8
2.4. Attaching the Payload to the Stage 9
2.5. Electrical Installation 9
2.6. Air Requirements 9
Chapter 3: Operating Specifications 11
3.1. Environmental Specifications 11
3.2. Basic Specifications 12
3.3. Load Capability [TBD] 16
3.4. Limit Switch Wiring 16
3.4.1. Limit Switch Operation 16
3.4.2. Limit Switch Wiring 16
3.5. Standard Motor Wiring 17
3.6. Vacuum Operation 17
Chapter 4: Maintenance 19
4.1. Service and Inspection Schedule 19
4.2. Cleaning and Lubrication 19
4.2.1. Recommended Cleaning Solvents 19
4.2.2. Cleaning Process 20
Appendix A: Warranty and Field Service 21
Appendix B: Technical Changes 23
Index 25
Reader's Comments 27
www.aerotech.com iii

Table of Contents ABL/ABLH9000 Series Stage User's Manual

iv www.aerotech.com

ABL/ABLH9000 Series Stage User's Manual List Of Figures
List of Figures
Figure 1-1: Typical ABL/ABLH9000 Series Positioning Stage 1
Figure 1-2: ABL/ABLH9000 Series Stage 2
Figure 3-1: Velocity vs. resolution as a function of system data rate (ABL/ABLH9000 with LTAS or
LNAS encoder)
14
Figure 3-2: Normally Closed (NC) and Normally Open (NO) Limit Switch Wiring 16
Figure 4-1: Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 20
www.aerotech.com v

List of Figures ABL/ABLH9000 Series Stage User's Manual

vi www.aerotech.com

ABL/ABLH9000 Series Stage User's Manual List of Tables
List of Tables
Table 1-1: Model Numbers and Ordering Options 3
Table 3-1: Environmental Specifications 11
Table 3-2: ABL/ABLH9000 Series Specifications 12
Table 3-3: ABL/ABLH9000 Series Resolution Information 14
Table 3-4: ABL/ABLH9000 Motor Specifications 15
Table 4-1: Recommended Cleaning Solvents 19
Table B-1: Current Changes (1.01.00) 23
Table B-2: Archived Changes 24
www.aerotech.com vii

List of Tables ABL/ABLH9000 Series Stage User's Manual

viii www.aerotech.com

ABL/ABLH9000 Series Stage User's Manual Overview

Chapter 1: Overview

This manual describes Aerotech’s ABL/ABLH9000 series of air bearing positioning stages. Figure 1-1 shows

a typical ABL9000 positioning stage.

The ABL/ABLH9000 series supports travel distances ranging up to 1m x 1m. Designed to meet the exacting

requirements of wafer, flat panel display, and optical inspection and fabrication, the ABL/ABLH9000 sets new

standards of performance.

This chapter introduces standard and optional features of the ABL/ABLH9000 stages and gives general

safety precautions.

Figure 1-1: Typical ABL/ABLH9000 Series Positioning Stage

N O T E : Aerotech continually improves its product offerings, and listed options may be superseded at any

time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current

product information at www.aerotech.com.

www.aerotech.com Chapter 1 1

Overview ABL/ABLH9000 Series Stage User's Manual

1.1. Standard Features

The ABL/ABLH9000 series stages all incorporate completely non-contact air bearing surfaces, linear

motors, and feedback devices to provide a maintenance free stage. There is no mechanical contact to wear

or require lubrication, making these stages ideal for clean room and medical applications.

The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing

thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bear-

ing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness

that is ideal for heavy or offset loading.

The brushless linear motor uses an ironless forcer, which means there is zero cogging and no attractive

forces – resulting in unsurpassed smoothness of motion. This is especially useful in applications where

velocity control is important.

Figure 1-2: ABL/ABLH9000 Series Stage

2 Chapter 1 www.aerotech.com

Este manual sirve para los siguientes modelos

Tabla de contenidos

Otros manuales de Controladores de Aerotech

Aerotech

Aerotech Soloist MP Manual de usuario

Aerotech

Aerotech Ensemble QLAB Manual de usuario

Aerotech

Aerotech 6020HRJ Manual de usuario

Aerotech

Aerotech A3200 Series Manual de usuario

Aerotech

Aerotech ECO165SL Series Manual de usuario

Aerotech

Aerotech ADRS Series Manual de usuario

Aerotech

Aerotech PLANAR HD Series Manual de usuario

Aerotech

Aerotech HPe 150 Manual de usuario

Aerotech

Aerotech Automation1 GI4 Galvo Manual de usuario

Aerotech

Aerotech Ensemble QLe Series Manual de usuario

Aerotech

Aerotech A3200 Series Manual de usuario

Aerotech

Aerotech APR200DR Series Manual de usuario

Aerotech

Aerotech UNIDEX 500 Manual de usuario

Aerotech

Aerotech UNIDEX 600 Series Manual de usuario

Aerotech

Aerotech SOLOIST Manual de usuario

Aerotech

Aerotech Automation1 XL4s Manual de usuario

Aerotech

Aerotech Automation1 SI4-2P1 Manual de usuario

Aerotech

Aerotech MPG Manual de usuario

Aerotech

Aerotech A3200 Series Manual de usuario

Aerotech

Aerotech UNIDEX 511 Manual de usuario

Aerotech

Aerotech Ensemble HLe Manual de usuario

Aerotech

Aerotech APR100DR Series Manual de usuario

Aerotech

Aerotech UNIDEX 11 Manual de usuario

Aerotech

Aerotech PRO165SLE Series Manual de usuario

Manuales populares de Controladores de otras marcas

Digiplex

Digiplex DGP-848 Instrucciones de funcionamiento

YASKAWA

YASKAWA SGM series Manual de usuario

Sinope

Sinope Calypso RM3500ZB Manual de usuario

Isimet

Isimet DLA Series Style 2 Manual de instalación

LSIS

LSIS sv-ip5a Manual de usuario

Rockwell Automation

Rockwell Automation 1769-L31 Manual de usuario

Airflow

Airflow Uno hab Manual de usuario

ABB

ABB ACS580-01 drives Manual de usuario

Panasonic

Panasonic GM1 Series Manual de usuario

Emerson

Emerson SW93 Manual de usuario

AutoAqua

AutoAqua Smart ATO micro SATO-120P Manual de usuario

Panasonic

Panasonic FP? Positioning Unit RTEX Manual de usuario

Samson

Samson Type 5824 Manual de servicio

Alpha IP

Alpha IP MIOB 21001 Manual de usuario

Siemens

Siemens OpenAir GMA 1 Series Manual de usuario

Surecom

Surecom SR-629 Manual de usuario

Fishman

Fishman TriplePlay Manual de usuario

Regulus

Regulus SRS1 T Manual de usuario