Pfeiffer Vacuum ATP 1603 M Manual de usuario

OPERATING INSTRUCTIONS

Translation of the Original

ATP 1603 M

Magnetically levitated turbomolecular pump

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Products concerned 7

1.2 Target group 7

1.3 Conventions 7

1.3.1 Instructions in the text 7

1.3.2 Pictographs 7

1.3.3 Labels 8

1.3.4 Abbreviations 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety instructions relating to flammable/pyrophoric materials 12

2.4 Precautions 13

2.5 Intended use 14

2.6 Misuse 14

3 Transportation and Storage 15

3.1 Receipt of the product 15

3.2 Handling the pump 15

3.3 Storage 16

4 Product description 17

4.1 Product identification 17

4.1.1 Scope of delivery 17

4.1.2 Product applications 17

4.2 Human/Machine interface 18

5 Installation 19

5.1 Equipment installation conditions 19

5.1.1 Installation specifications 19

5.1.2 Securing the equipment and the frame 21

5.2 Positioning the pump 21

5.3 Connecting to the pumping line 23

5.3.1 Pump inlet connection 24

5.3.2 Pump exhaust connection 24

5.4 Connecting the water circuit 25

5.4.1 Procedure for assembling connectors 25

5.4.2 Connecting the pump to the water circuit 26

5.5 Nitrogen circuit connection 26

5.6 Connection of the air inlet solenoid valve 28

5.7 Check that the installation is leaktight 28

5.8 Electrical connection 29

5.8.1 Customer electrical installation protection 30

6 Operation 31

6.1 Preliminary precautions for use 31

6.2 Starting the pump 31

6.2.1 Powering on 31

6.2.2 Pumping start-up 32

6.2.3 Restarting the pump after an emergency equipment stop 32

6.3 Shutting down the pump 33

6.3.1 Pumping shutdown 33

6.3.2 Powering off 34

6.3.3 Prolonged stoppage 34

Table of contents

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6.4 Operation monitoring 34

7 Maintenance 35

7.1 Maintenance safety instructions 35

7.2 Maintenance frequency 36

7.3 On-site maintenance 37

7.4 Exchange procedure by a replacement product 37

7.4.1 Disconnecting the pump from the installation 37

7.4.2 Draining the water circuit 38

7.4.3 Preparing the pump for shipping 38

8 Decommissioning 40

8.1 Shutting down for longer periods 40

8.2 Recommissioning 40

8.3 Disposal 40

9 Service solutions by Pfeiffer Vacuum 41

10 Accessories 43

11 Spare parts 44

12 Technical data and dimensions 45

12.1 General 45

12.2 Technical characteristics 45

12.3 Environmental characteristics 46

12.4 Cooling water characteristics 46

12.5 Nitrogen characteristics 47

12.6 Electrical characteristics 47

12.7 Dimensions and weight 48

Declaration of conformity 50

Table of contents

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List of tables

Tbl. 1: Loads exerted on the equipment 20

Tbl. 2: Securing the high vacuum flange (inlet flange) 21

Tbl. 3: Conversion table: Pressure units 45

Tbl. 4: Conversion table: Units for gas throughput 45

Tbl. 5: Environmental characteristics 46

Tbl. 6: Cooling water characteristics 47

Tbl. 7: Nitrogen characteristics 47

Tbl. 8: Electrical characteristics of the pump 47

Tbl. 9: Electrical characteristics of the customer’s network 47

List of tables

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List of figures

Fig. 1: Mechanical connection of the pump to the equipment 19

Fig. 2: Graph of the loads exerted on the equipment 20

Fig. 3: Operating positions 22

Fig. 4: Horizontal pump installation 22

Fig. 5: Installing the pump inlet facing up 23

Fig. 6: Purge flow diagram 27

Fig. 7: Dimensions ATP 1603 M with OBC 48

Fig. 8: Dimensions of Purge solenoid valve 49

Fig. 9: Dimensions of Air inlet solenoid valve 49

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Document Part Number

OBC V4 Operating instructions 124470

Declaration of conformity included with these operating instructions

1.1.2 Products concerned

This document applies to products with the following part numbers:

Part Number Description

TMDBAXX4XXXX

TMDBBXX4XXXX

TMDBFXX4XXXX

TMDBDXX4XXXX

ATP 1603 M pumps for light gas pumping on clean applications

1.2 Target group

This user manual is intended for all persons in charge of transport, installation, commissioning/decom-

missioning, use, maintenance or storage of the product.

The work described in this document must only be carried out by persons with suitable technical training

(specialized staff) or persons who have undergone Pfeiffer Vacuum training.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

About this manual

7/52

Note

Tip

1.3.3 Labels

PURGE Purge circuit connection

PUMP EXHAUST Pump exhaust

WATER MAX Pr 7 bar/101 psi Maximum water circuit pressure

WATER Connecting the water circuit

Functional grounding connection

LOCK

Locking the connector before using the pump. Do not disconnect

before the pump has stopped

Direction of rotation of the pump rotor

41kg 37000rpm; M:44Vrms 1300Hz 7A

00000000

AHE1410 ATP1603M

2019

Product rating plate (example)

This label indicates that certain internal components carry an

electric charge and can cause electric shock if touched: be-

fore working on the pump, always either disconnect it, or lock

out/tag out the installation breaker in the appropriate manner.

This label indicates that the product should not be handled

manually due to its weight and that appropriate handling devi-

ces should always be used.

Don’t remove the pump

connector when the pump is

running

This label means that the user must lock the connector before

using the pump. Do not disconnect before the pump has stop-

ped.

DO NOT TOUCH WHEN

THE PUMP IS RUNNING

This label warns users about the risk of crushing or cutting

due to moving parts: keep a safe distance and/or keep your

hands away from the moving parts.

SEE MANUAL BEFORE USE

Any person responsible for installation or operation of the

product must first refer to the operating manual.

The product comes with a sheet of labels including other

language versions. The installer must stick these labels

to the most appropriate and visible place on the pump to

warn the operator about potential hazards.

About this manual

8/52

This label warns users that they risk being injured if their

hands come into contact with a hot surface: protective gloves

must be worn at all times when working on the pump.

Exposure may result in severe injury or death.

Preventive maintenance must be done by trained

personnel only.

This label warns users about pumped process gases that can

be dangerous or toxic and lead to severe injury or death. It

specifies that only trained personnel should perform preven-

tive maintenance operations.

1.3.4 Abbreviations

AMB Active magnetic bearings

Exh. Exhaust

HHR Hand Held Remote

IN Inlet flange

LEL Lower Explosive Limit

MPump version without Temperature Management System (no TMS)

OBC Electronic drive unit mounted to an active magnetic bearing turbopump

About this manual

9/52

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-

ble, all life cycle phases of the product were taken into account.

WARNING

Risk of crushing when the product is slung

Given the heaviness of the product, there is a risk of crushing during handling operations involving

lifting devices. Under no circumstances shall the manufacturer be liable if the following instructions

are not followed:

►Only qualified staff trained in handling heavy objects are authorized to handle the product.

►The lifting devices provided must be used and the procedures set out in this document must be

followed.

Safety

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