Pfeiffer Vacuum HIPACE 80 MINI Manual de usuario

OPERATING INSTRUCTIONS

Translation of the Original

HIPACE 80 MINI

Turbopump

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Related documents 7

1.1.2 Variants 7

1.2 Target group 7

1.3 Conventions 7

1.3.1 Instructions in the text 7

1.3.2 Pictographs 8

1.3.3 Stickers on product 8

1.3.4 Abbreviations 9

1.4 Trademark proof 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety precautions 14

2.4 Limits of use of product 14

2.5 Proper use 15

2.6 Foreseeable improper use 15

2.7 Personnel qualification 15

2.7.1 Ensuring personnel qualification 16

2.7.2 Personnel qualification for maintenance and repair 16

2.7.3 Advanced training with Pfeiffer Vacuum 16

3 Product description 17

3.1 Function 17

3.1.1 Cooling 17

3.1.2 Rotor bearing 17

3.1.3 Drive 17

3.2 Identifying the product 17

3.2.1 Product types 18

3.2.2 Product features 18

3.3 Scope of delivery 18

4 Transportation and Storage 19

4.1 Transport 19

4.2 Storage 19

5 Installation 20

5.1 Preparatory work 20

5.2 Fastening turbopump to bottom part 20

5.3 Connecting the high vacuum side 21

5.3.1 Requirements for dimensioning a counter flange 21

5.3.2 Considering earthquake protection 22

5.3.3 Using splinter shield or protective screen 22

5.3.4 Using the vibration compensator 23

5.3.5 Mounting orientations 23

5.3.6 Attaching ISO-K flange onto ISO-K 23

5.3.7 Installation of ISO-K flange onto ISO-F 24

5.4 Connecting fore-vacuum side 25

5.5 Connecting accessories 26

5.6 Connecting the electrical supply 27

5.6.1 Earthing the turbopump 27

5.6.2 Establishing electric connection 28

6 Operation 30

6.1 Commissioning 30

Table of contents

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6.2 Operating modes 31

6.2.1 Operation without operating unit 31

6.2.2 Operation via multi-function connection "X3" 31

6.2.3 Operation via Pfeiffer Vacuum control unit 31

6.2.4 Operation via field bus 31

6.3 Operation monitoring 32

6.3.1 Operating mode display via LED 32

6.3.2 Temperature monitoring 32

6.4 Switching off and venting 32

6.4.1 Switching off 32

6.4.2 Venting 33

7 Maintenance 34

7.1 General maintenance information 34

7.2 Maintenance intervals and responsibilities 34

7.3 Replace operating fluid reservoir 35

7.3.1 Removing the operating fluid reservoir 35

7.3.2 Assembling operating fluid reservoir 36

7.4 Replacing electronic drive unit 37

7.5 Confirming speed specification 38

8 Decommissioning 40

8.1 Shutting down for longer periods 40

8.2 Recommissioning 40

9 Recycling and disposal 41

9.1 General disposal information 41

9.2 Dispose of turbopumps 41

10 Malfunctions 42

11 Service solutions by Pfeiffer Vacuum 44

12 Spare parts HiPace 80 mini 46

13 Accessories 47

13.1 Accessory information 47

13.2 Ordering accessories 47

14 Technical data and dimensions 49

14.1 General 49

14.2 Technical Data 49

14.3 Dimensions 51

EC Declaration of Conformity 52

UK Declaration of Conformity 53

Table of contents

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List of tables

Tbl. 1: Abbreviations used in this document 9

Tbl. 2: Permissible ambient conditions 15

Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 18

Tbl. 4: Turbopump features 18

Tbl. 5: Requirements for fastening the turbopumps to the bottom part 21

Tbl. 6: Requirements for dimensioning high vacuum connection supplied by cus-

tomer

Tbl. 7: Effect of splinter shield or protective screen on pumping speed 22

Tbl. 8: Factory setting of the electronic drive unit for turbopumps when delivered 30

Tbl. 9: Behavior and meaning of the LEDs on the electronic drive unit 32

Tbl. 10: Factory settings for delayed venting in turbopumps 33

Tbl. 11: Characteristic nominal rotation speeds of the turbopumps 39

Tbl. 12: Troubleshooting turbopumps 43

Tbl. 13: Overview of the spare parts available for the HiPace 80 mini 46

Tbl. 14: Accessories 48

Tbl. 15: Conversion table: Pressure units 49

Tbl. 16: Conversion table: Units for gas throughput 49

Tbl. 17: HiPace 80 mini | DN63 ISO-K 50

List of tables

5/54

List of figures

Fig. 1: Position of the stickers on the product 8

Fig. 2: Design of HiPace 80 mini 17

Fig. 3: Example: Securing against displacement and tipping caused by external vi-

brations

Fig. 4: Recommended alignment of the fore-vacuum connection when using oil-

sealed backing pumps

Fig. 5: Flange connection ISO-K to ISO-F, bracket screws 24

Fig. 6: Example of fore-vacuum connection to HiPace 80 mini 26

Fig. 7: Example of accessory connection via adapter TCS 12 27

Fig. 8: Example: Connecting the grounding cable 28

Fig. 9: Connecting electronic drive unit to power supply pack 28

Fig. 10: Removing the operating fluid reservoir 36

Fig. 11: Insert capillary rods and install operating fluid reservoir 37

Fig. 12: Installing and removing the electronic drive unit TC 110 38

Fig. 13: Spare parts HiPace 80 mini 46

Fig. 14: HiPace 80 mini | TC 110 | DN 63 ISO-K 51

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions

describe the functions of the named product and provide the most important information for the safe use

of the device. The description is written in accordance with the valid directives. The information in these

operating instructions refers to the product's current development status. The document shall remain

valid provided that the customer does not make any changes to the product.

1.1.1 Related documents

Document Number

Electronic drive unit TC 110. standard PT 0204 BN

Electronic drive unit TC 110 PB, profibus PT 0245 BN

Electronic drive unit TC 110 E74, to Semi E74 PT 0301 BN

Electronic drive unit TC 110 RS PT 0351 BN

Declaration of conformity A component of this manual

Current documents are available from the Pfeiffer Vacuum Download Center.

1.1.2 Variants

●HiPace 80 mini, DN 63 ISO-K

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

About this manual

7/54

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Stickers on product

This section describes all the stickers on the product along with their meanings.

Oil

S/N

Mod.

HiPace 80 Mini

PM PXX XXX

- - - - - - - -

P/N

n, f

Mass

PM XXX XXX -T

90000 1/min, 1500 Hz

_._ kg

D-35614 Asslar Berliner Str. 43

Made in Germany 2023/07

C US

UL / CSA 61010-1

TÜV Rheinland

Type 12

IP44

Rating plate (example)

The rating plate of the turbopump is located on the lower part

of the vacuum pump.

Rating plate of the electronic drive unit

The electronic drive unit rating plate is located on the top

warranty seal

Warranty seal

The product is sealed ex factory. Damaging or removing a war-

ranty seal results in loss of the warranty.

Protection class

The sticker describes protection class 1 for the product. The

positioning indicates the position for the ground connection.

Fig. 1: Position of the stickers on the product

1 Operating instructions note 4 Rating plate of the turbopump

2 Rating plate for electronic drive unit 5 Information regarding ground connection

3 Warranty seal

About this manual

8/54

1.3.4 Abbreviations

Abbreviation Meaning in this document

CF Flange: Metal-sealed connector in accordance with ISO 3669

dDiameter value (in mm)

DC Direct current

DN Nominal diameter as size description

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

HPU Handheld Programming Unit. Aid for control and monitoring of pump parameters

HV High vacuum flange, high vacuum side

ISO Flange: Connection in accordance with ISO 1609 and ISO 2861

LED Light emitting diode

FE Functional earth

FKM Fluoropolymer rubber

[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in

square brackets. Frequently displayed in conjunction with a short description.

Example: [P:312] software version

WAF Width Across Flats

TTemperature (in °C)

TC Turbopump electronic drive unit (turbo controller)

TPS Voltage supply (turbo power supply)

VV Fore-vacuum flange, fore-vacuum connection

X3 15-pole D-Sub connecting socket on the turbopump electronic drive unit

Tbl. 1: Abbreviations used in this document

1.4 Trademark proof

●Torx® is a trademark of Acument Intellectual Properties, LLC.

●Profibus® is a trademark of Profibus Nutzerorganisation e.V.

About this manual

9/54

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-

ble, all life cycle phases of the product were taken into account.

Risks during transport

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►Take particular care and pay special attention when transporting products manually.

►Do not stack the products.

►Wear protective equipment, e.g. safety shoes.

Safety

10/54

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