Pfeiffer Vacuum Adixen ATH 500 M Manual de usuario

Translated from original versionBetriebBtib

Operating instructions

Translated from original version

BetriebB

ATH 500 M/MT

Magnetically levitated turbopumps

GB 03357 - Edition 04 - June 12

1/2

ATH 500 M-MT

Magnetically levitated turbo pumps

Welcome

Dear Customer,

You have just purchased

an adixen magnetically

levitated turbo pump.

We would like to thank

you and are proud to

count you as one of our

customers.

This product has benefited

from adixen Vacuum

Products many years of

experience in the field

of turbomolecular pump

design.

In order to ensure the best

possible performance of

the equipment and your

complete satisfaction in

using it, we advise you to

read this manual carefully

before any intervention

on your pump and to pay

particular attention to the

equipment installation

and start-up section.

This pumping component is designed to gererate vacuum by pumping

on gases, but no liquids neither solids. It is dedicated for running in

industrial environments.

The integrator of this component must provide all operator safety

measures mainly against hot surfaces.

This pumping component must not operate in an area with risk of

explosion. Consult us to study a solution.

SEMICONDUCTOR APPLICATIONS : plasma etching, Ion implantation,

sputtering, plasma deposition.

OTHER APPLICATIONS: research and development, high energy

physics, space simulation, accelerators.

OTHER INDUSTRIES: glass-coating, flat panel display, leds, deposition

coating, hard disk manufacturing.

ADVANTAGES:

High throughput - Quiet and clean vacuum - Corrosion proof -

High MTBF - Minimum size, volume and weight -

Smart and compact electronic controller - Reliability -

Maintenance free - Battery free - Easy integration.

APPLICATIONS:

adixen Vacuum Products - Operating instructions - ATH 500 M-MT

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ATH 500 M-MT

Magnetically levitated turbo pumps

GB 03357 - Edition 04 - June 12

The use of adixen products are subject to copyright and

intellectual property rights in force in any jurisdiction.

or any part without prior written authorization from adixen

Vacuum Products.

Specifications and information are subject to change without

notice by adixen Vacuum Products.

This product complies with the requirements of European

Directives, listed in the Declaration of Conformity contained in

G 100 of this Manual.

adixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03358 - Edition 04 - June 12

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Manual reference: 114436

Edition: 04 - June 2012 General contents

ATH 500 M-MT Operating instructions

Translated from

original version

Chapter A INTRODUCTION

A 150 - Introduction to the ATH 500 M-MT

A 200 - Control loop of the pump

A 210 - The pump operating principle

A 400 - The technical characteristics

A 510 - The accessories of the pump

Chapter B START-UP

B 100 - Safety instructions for installation

B 201 - Unpacking and storage of the controller

B 300 - Pump connections to an installation

B 310 - Inlet connections

B 330 - Nitrogen connection on the purge port

B 333 - Assembly of the purge kit

B 340 - Water cooling connection

B 350 - Air cooling connection

B 400 - Safety instructions and electrical connections

B 430 - «Remote control» connection wiring

B 450 - RS 232 or RS 485 link wiring

Chapter C OPERATION

C 100 - Safety instructions for product use

C 200 - The front panel with operating status

C 300 - Configuring the ATH500 M-MT pump for the application

C 800 - Detailed description of RS232 and RS485 commands

Chapter D MAINTENANCE

D 100 - Safety instructions for product maintenance

D 150 - Maintenance frequency

D 200 - Diagnosis and troubleshooting

Chapter E MAINTENANCE INSTRUCTIONS

E 100 - Shipping procedure for contaminated pumps

Chapter F MAINTENANCE COMPONENTS

F 000 - Spare parts - Instructions of use

F 200 - First level maintenance parts

Chapter G APPENDIX

G 100 - Declaration of conformity

G 150 - Pumping curves

G 200 - Safety Questionnaire

G 1000 - Hand Held Remote (HHR)

adixen Vacuum Products - Operating instructions - ATH 500 M-MT

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General contents

ATH 500 M-MT Operating instructions

GB 03358 - Edition 04 - June 12

Manual reference: 114436

Edition: 04 - June 2012

Translated from

original version

Indicated an imminently hazardous situation that, if not avoided, will result

in death or severe injury (extreme situations).

The performance and operational safety of this product are guaranteed pro-

vided it is used normally in the operating conditions defined in this manual.

It is the customer’s task to:

- train operators to use the product if they do not speak the language the

manual is written in,

- ensure operators know the safe practices to apply when using the pro-

duct.

Before switching on the appliance, study the user’s manual and make sure

you follow the safety instructions it gives. You can recognise these by the

‘Caution’, ‘Warning’ and ‘Danger’ symbols.

Good practice tips and manufacturer’s recommendations are in a blue box.

Indicates a potentially hazardous situation which, if not avoided, could

result in death or severe injury.

Indicates a potentially hazardous situation which, if not avoided, could

result in property damage.

Indicates a potentially hazardous situation which, if not avoided, could

result in moderate or minor injury. It may also be used to alert against

unsafe practices.

adixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03358 - Edition 04 - June 12

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Manual reference: 114436

Edition: 04 - June 2012 General contents

ATH 500 M-MT Operating instructions

Translated from

original version

Symbols, labels Description

Warning : hot surface

Warning : hazardous voltage

Caution : risk of danger. Refer to the operating

instructions before use

Operating status

48 V 12 A Power supply

Do not touch when the pump is running

Use of glove is recommended

Moving parts present

Heavy object

LOCK

Lock the electrical connector before using the

pump and during operation

Purge Purge port

Pump exhaust Exhaust of the pump

Water Water cooling circuit connection

Water max Pr.7 bar/101 psi Max. cooling water pressure

PWR Pump power on

Direction of rotation of the pump

adixen Vacuum Products - Operating instructions - ATH 500 M-MT

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Introduction

ATH 500 M-MT User’s Manual

Detailed contents

A 150 Introduction to the ATH 500 M-MT

A 200 Control loop of the pump

- 5 active axis

- Unbalanced force rejection control

A 210 The pump operating principle

- Pumping principle

- The hybrid-turbo pump in an installation

- The back-up bearings

- Variation of the pump rotational speed

A 400 The technical characteristics

- The performances of the pump

- The technical characteristics of the electronic

- The dimensions

A 510 The accessories of the pump

adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

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A 150

Introduction to the ATH 500 M-MT

A magnetically

levitated hybrid

turbo pump

Five active axes

Rotor position control in 5 directions.

Unbalanced force rejection control

Lowest possible levels of noise and vibration.

Compensation for any unbalance of the rotor.

Maintenance free

Inert gas purge

Eliminate corrosion of the motor and magnetic bearing coils.

Battery free

In case of a power failure, the pump motor acts like a generator

to transform the rotor energy into electrical power to supply the

electronic.

ATH 500 M with

integrated electronic

Electrical power supply 48 V DC (accessory) A 510.

adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

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A 150

Introduction to the ATH 500 M-MT

GB 03360 - Edition 03 - May 11

ATH 500 M Model For OEM version, see its own specific technical sheet.

Integrated

electronic

6 7

54 8

Exhaust port DN25 ISO KF

Integrated purge (50 sccm) 1/8 ‘‘BSPP female equipped with a filter

B 330

Water fittings 1/8 NPT female B 340

Service Used by service and HHR.

RS232 or RS485 serial links The serial link RS 232 or RS 485 is used

to monitor and control the pump from a

computer.

The serial link RS 485 allows the installation

and the control of many pumps in a network.

B 450 and C 800

Remote connector The remote control connector is used for

the remote control of START/STOP/STANDBY

functions to allow the copy of pump status

via dry contact outputs. B 430

Pump status indicator

lights C 200

Power supply connector Used to plug a 48 VDC power supply

B 400

Profibus- Devicenet

connectors

Industrial network connectors and indicator

areas (Profibus - Devicenet)

adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03360 - Edition 03 - May 11

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A 150

Introduction to the ATH 500 M-MT

ATH 500 MT Model

Exhaust port DN40 ISO KF

Integrated purge (50 sccm) 1/4 VCR B 330

Water fittings 1/4 double ring B 340

Service Idem ATH 500 M

RS232 or RS485 serial links Idem ATH 500 M

Remote connector Idem ATH 500 M

Pump status indicator

lights Idem ATH 500 M

Power supply connector Idem ATH 500 M

Heater band

The heating band keeps the inner surface of

the pump up to 65 °C to avoid condensation

effects. The temperature is controlled by the

controller.

Supply heater band Connect the heater band to the controller

Supply water valve Connect the water valve to the controller

Water out

Water in

adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

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