Edwards STP-iXA3306C Manual de usuario

MT-82E-001-H

STP Series Turbomolecular Pumps

STP-iXA3306 Series

Instruction Manual

Read through the Safety Precautions and

each section of this Manual carefully before

using the STP pump.

Keep this Manual in a place where you can

quickly access it at any time.

This product has been manufactured under a quality management system certified to ISO 9001:2008

Declaration of Conformity

We,

Manufacture: Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan

EU Representative: Edwards

Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to

assemble the technical file, that the product(s)

Product Name: Turbomolecular pump

Model Number: STP-iXA3306 series

Accessories Covered: Display Unit: iDT-001, TMS Unit,

Communication Interface (LonWorks, Profibus, Device Net, EtherCAT)

to which this declaration relates is in conformity with the following standard(s) or other normative

document(s)

EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps.

Safety Requirements. Vacuum Pumps

EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.

EMC requirements. General requirements

(Immunity: Industrial locations, Emission: Class A)

EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.

Immunity for industrial environments

EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency

disturbance characteristics (Group1, Class A)

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic

Products with respect to the Restriction of Hazardous Substances

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive

2014/35/EU Low Voltage Directive

2014/30/EU Electromagnetic Compatibility (EMC) Directive

2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for

cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not

legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

VI-DOC-82-004

anufacture:

uji Kato, TMP Technical Senior Manager

Edwards Japan

Limited

June

. 201

Yachiyo

Date and Place

EU representative:

Ian Stones

Vice President, Technology

, Edwards

June

. 201

, Burgess Hill

Date and Place

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page i

PAGE

CONTENTS

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 2

1.3.1 Warranty period 2

1.3.2 Item warranted 3

1.3.3 Disclaimer 3

1.3.4 Spare parts 4

1.4 Precautions for safe operation of the STP pump 5

1.4.1 Usable gases 5

1.5 Maintenance and inspection precautions 6

1.6 Labels 6

1.7 Operation principle of the STP pump 8

1.8 STP pump specification 10

2 TECHNICAL DATA 13

2.1 STP pump specifications 13

2.2 Maximum gas flow-rate 14

2.2.1 STP-iXA3306C/CV 14

2.2.2 STP-iXA3306B/BV 15

2.3 Water cooling use condition 16

2.4 Control unit 17

2.5 External appearance of the STP pump 19

2.6 Label affixing positions 20

3 INSTALLATION OF THE STP PUMP 21

3.1 Precautions before installation 21

3.1.1 Operating environment 21

3.1.2 Installation area 23

3.1.3 Bench 24

3.1.4 Insulation test 24

3.2 Unpacking 25

3.2.1 Unpacking the STP pump 25

3.3 Name and function of each part 29

3.3.1 Name and function of the pump 29

3.3.2 Name and function of the control unit 30

3.4 How to install the STP pump 33

3.4.1 Cleaning the seal 34

3.4.2 STP pump installation positions 35

3.4.3 Secure the STP pump 36

3.4.4 Legs for securing the base 40

3.4.5 Power cable 41

3.4.6 How to connect the power cable 43

3.5 Precautions of vacuum piping 45

3.5.1 Vacuum piping method 45

3.6 Connecting the purge port 46

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page ii

PAGE

CONTENTS (CONTINUED)

Section Title Page

3.7 Connecting the water cooling pipe 47

3.8 Attaching a baking heater 48

3.9 Installation of the TMS unit 49

3.9.1 TMS unit specification 49

3.9.2 Configuration of the STP pump with the TMS 50

3.9.3 TMS heater 51

3.9.4 Connecting the TMS heater cable 51

3.9.5 TMS valve 51

3.9.6 Connecting the pump and TMS valve 52

3.10 Connecting to semiconductor equipment 53

3.10.1 Connecting to power 53

3.10.2 Emergency off circuit (EMO circuit) 53

4 OPERATION 55

4.1 Gas pumping, cooling and baking the STP pump 55

4.1.1 Gas pumping 55

4.1.2 How to introduce a purge gas 56

4.2 Cooling the STP pump 56

4.2.1 Water-cooling method 56

4.3 Baking the STP pump 57

4.4 Before starting the STP pump 58

4.4.1 Confirmation before starting 58

4.4.2 Confirmation of vacuum system 58

4.5 Powering ON 59

4.6 Pump operation 59

4.6.1 Input operation port setting 59

4.6.2 Starting/stopping the STP pump 60

4.7 How to start/stop the STP pump 62

4.7.1 Starting the STP pump after stopping 62

4.7.2 Starting the STP pump after a safety function operates 62

4.7.3 Powering OFF 62

4.8 LED 63

4.9 Parallel port input/output signal 64

4.9.1 Input signal pins 64

4.9.2 Input operation port setting 71

4.9.3 Rotation INHIBIT signal 72

4.9.4 Second speed option 73

4.9.5 Output signal pins 74

4.10 Operating the TMS unit (for use with the TMS unit) 78

4.10.1 Before starting 78

4.10.2 Starting/Stopping 78

4.10.3 Setting the TMS unit function 78

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page iii

PAGE

iii

CONTENTS (CONTINUED)

Section Title Page

5 SERIAL COMMUNICATION PROTOCOL 79

5.1 Introduction 79

5.2 Connection and setting up 80

5.2.1 Signal connection 80

5.2.2 Connecting the RS485 82

5.2.3 Communication parameter setting 83

5.2.4 Input operation port setting 84

5.2.5 Serial communication timeout setting 85

5.2.6 Recommended items about communication cable installation 86

5.3 Protocol specifications 89

5.3.1 General description 89

5.3.2 Standard transmission frame 90

5.3.3 Control command

(in the RS232/RS485 single point connection) 91

5.3.4 Query command

(in the RS232/RS485 single point connection) 92

5.3.5 Transmission data format 93

5.3.6 Frame control (checksum) 94

5.3.7 Error control 94

5.3.8 Transmission frame in the RS485 multi-point connection 94

5.3.9 Control command in the RS485 multi-point connection 96

5.3.10 Query command in the RS485 multi-point connection 97

5.3.11 Broadcasting command in the RS485 multi-point connection 98

5.3.12 Application note 99

5.4 Command specifications 103

5.4.1 Command list 103

5.4.2 ReadMeas 104

5.4.3 Command 104

5.4.4 ReadFailMess 105

5.4.5 ReadModFonct 109

5.4.6 ReadVersion 111

5.4.7 ReadCounters 112

5.4.8 ReadSetPoint 113

5.4.9 ReadMotorTemp 113

5.4.10 ReadStatus 114

5.4.11 ReadEvents 115

5.4.12 SetSpeedSetPoint 116

5.4.13 ReadSpeedSetPoint 117

5.4.14 ReadModFonctWithWarning 118

5.4.15 ReadMeasValue 121

5.4.16 ReadOptionFunc 123

5.4.17 SetOptionFunc 126

5.4.18 ReadCondition 128

5.4.19 ReadEventsWithTime 130

5.4.20 SetOptions 134

5.4.20.1 Second speed option setting 134

5.4.20.2 Second speed selection 135

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page iv

PAGE

CONTENTS (CONTINUED)

Section Title Page

5.4.21 ReadOptions 136

5.4.21.1 Second speed function setting 136

5.4.21.2 Second speed select 137

6 STP-LINK AND DISPLAY UNIT 139

6.1 STP-Link 139

6.2 Display unit 140

7 SAFETY FUNCTIONS 141

7.1 Safety functions 141

7.1.1 Power Failure 141

7.1.2 Operation after a power recovery 142

7.1.3 Abnormal state of magnetic bearing (Disturbance) 143

7.1.4 Excessive vibration (Disturbance) 143

7.1.5 Motor driver overload (DRV Overload) 143

7.1.6 Overheating inside the STP pump (MOTOR Overheat) 143

7.1.7 Overheating inside the control unit (CNT Overheat) 143

7.1.8 Overspeed 144

7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 144

7.2 "WARNING" function 145

7.2.1 "WARNING" function 145

7.3 Contents of WARNING function 147

7.3.1 First Damage limit 147

7.3.2 Second Damage Limit 147

7.3.3 Pump run time over 147

7.3.4 Pump Overload 148

7.3.5 Imbalance 148

7.4 WARNING function setting 149

7.5 Troubleshooting immediately after failure occurs 150

7.5.1 After power failure 150

7.5.2 After other abnormality/error 150

7.6 Troubleshooting 151

7.6.1 Indication of "FAILURE" LED (red) 151

7.6.2 Indication of "FAILURE" LED (green) 158

7.6.3 No Indication of the "FAILURE" LED 158

8 MAINTENANCE AND INSPECTION 159

8.1 Maintenance and inspection 159

8.2 Cleaning 160

8.3 Inspecting the deposit 160

8.4 Maintenance 161

8.4.1 Recommended overhaul intervals 161

8.4.2 Standard replacement parts 161

8.4.3 Recommended maintenance intervals for main parts 162

8.5 Transporting for repair or overhaul 163

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page v

PAGE

CONTENTS (CONTINUED)

Section Title Page

9 STORAGE AND DISPOSAL 165

9.1 Storage of the STP pump 165

9.2 Disposal 166

10 SERVICE, SPARES AND ACCESSORIES 167

10.1 Introduction 167

10.2 Service 167

10.3 Spares 167

10.4 Accessories 168

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page vi

PAGE

ILLUSTRATIONS

Figure Title Page

1 STP pump installation warning label 6

2 Hot surface warning label 6

3 Heavy product caution label 7

4 High voltage device caution label 7

5 Rotation instruction label 7

6 Cross sectional view of the STP pump 8

7 External appearance of STP-iXA3306C(V)/iXA3306B(V) 19

8 Label affixing positions 20

9 Space around the STP pump 23

10 Example of lifting the STP pump 25

11 Example of lifting the STP pump (horizontal positioning) 26

12 Jack-up the STP pump 27

13 Control unit bottom face 27

14 Prohibited matter 28

15 STP pump with eyebolts 28

16 Configuration of the STP pump 29

17 Control unit (Front panel) 30

18 Installation of the STP pump to the vacuum equipment 33

19 STP pump installation positions 35

20 Positions of the outlet port on the horizontally

or slanted installed STP pump 35

21 Shape of reduced diameter shank bolts 39

22 Methods of securing the STP pump 39

23 Screw holes for securing the base 40

24 Power cable 41

25 Connecting method of the power cable 42

26 Connecting the purge port 46

27 Positions of the cooling water port 47

28 Baking heater installation position 48

29 Configuration of the TMS 50

30 TMS valve connection 52

31 Pump operation method 1 (contact input) 60

32 Pump operation method 2 (contact input) 60

33 Pump operation method 1 (voltage input) 61

34 Pump operation method 2 (voltage input) 61

35 "ROTATION" LED Indication 63

36 X2 REMOTE connector 64

37 X2 REMOTE input signal pins (contact input) 67

38 X2 REMOTE input signal pins (voltage input) 70

39 X2 REMOTE output signal pins 76

40 Serial port 79

41 X3/X4 connector (D-Sub9) 81

42 RS485 connections 82

43 Grounding example (Both ends grounding) 86

44 Grounding example (single point grounding) 86

45 Example of ring ferrite core installation 87

46 Example of cable installation in metallic duct 87

47 Example of differential signal waveform 88

48 PC to SIM communication 89

49 Block diagram of communication process example 99

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page vii

PAGE

vii

ILLUSTRATIONS (CONTINUED)

Figure Title Page

50 Example of answer resending process 100

51 Example of response when the command is sent continuously100

52 Example of command sending during answer data reply 100

53 Example of communication cycle process 101

54 Example of command sending process 102

55 Example of answer receiving process 102

56 Display unit iDT-001 140

57 WARNING output 146

58 Failure output 151

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page viii

PAGE

viii

TABLES

Table Title Page

1 Maximum gas flow-rate (STP-iXA3306C) 14

2 Maximum gas flow-rate (STP-iXA3306CV) 14

3 Maximum gas flow-rate (STP-iXA3306B) 15

4 Maximum gas flow-rate (STP-iXA3306BV) 15

5 Environmental requirements for installation 22

6 Eyebolt size 25

7 Pump functions 29

8 Control unit front panel functions 31

9 Control unit front panel functions (continued) 32

10 Tightening torque of bolt 36

11 Maximum torque predicted and recommended securing bolt

for inlet port flange 37

12 Power cable 41

13 TMS unit specification 49

14 Starting/stopping the STP pump

using contact input (X2 REMOTE) 60

15 Starting/stopping the STP pump

using voltage input (X2 REMOTE) (voltage input) 61

16 Reset Operation (X2 REMOTE) 62

17 LED Indications for each state 63

18 X2 REMOTE input signal pins 65

19 X2 REMOTE input signal pins (continued) 66

20 X2 REMOTE input signal pins (voltage input) 68

21 X2 REMOTE input signal pins (voltage input) (continued) 69

22 Input operation port setting 71

23 Rotation INHIBIT signal input 72

24 Second speed function 73

25 X2 REMOTE output signal pins 75

26 X2 REMOTE output signal pins (continued) 76

27 Rated contacts for relays CR1 to CR8 77

28 X3/X4 pin position 80

29 Communication parameters 83

30 Input operation port 84

31 Serial communication time out setting 85

32 Transmission control characters 90

33 Pump operation commands 98

34 Command list 103

35 Pump operation commands 105

36 Error message values 107

37 Error message values (continued) 108

38 Pump operation mode 110

39 Remote mode 115

40 Warning value bit assign 119

41 Parameter setting value 124

42 Option function number and parameter list 134

43 Option function number and parameter list 136

44 Functions of STP-Link 139

45 States of LEDs and X2 REMOTE output signals

at power failure 142

46 WARNING function 145

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