Edwards nEXT Manual de usuario
Vibraon Isolator
nEXT Turbomolecular Pumps
INSTRUCTION MANUAL
B80000860_A Original instrucons
edwardsvacuum.com
Copyright noce
©Edwards Limited 2021. All rights reserved.
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Associated publicaons
Publicaon tle Publicaon number
nEXT Turbomolecular Pumps nEXT240, nEXT300 and
nEXT400 B80000880
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.
Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3 Trained personnel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.1 Installaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.2 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.3 Install the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.1 Maintenance safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.2 Maintenance plan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
7.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . . 15
8. Legal declaraons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
09/2021 - ©Edwards Limited
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List of Figures
Figure 1: General view of the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Figure 2: Axial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Figure 3: Radial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Figure 4: Installaon orientaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
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1. Safety and compliance
1.1 Denion of Warnings and Cauons
NOTICE:
For safe operaon from the start, read these instrucons carefully before you install
or commission the equipment and keep them safe for future use.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the equipment.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
09/2021 - ©Edwards Limited
Page 5B80000860_A
B80000860_A - Safety and compliance
1.2 Safety symbols
The safety symbols on the products show the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Warning/Cauon
An appropriate safety instrucon must be followed or cauon to a po-
tenal hazard exists.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Heavy object
Idenes a possible hazard from a heavy object.
Warning - Moving parts present
Idenes parts that move. You must let the parts that turn stop before
you remove the electrical power.
Warning - Read the manual
Warning - Use protecve equipment
Use appropriate protecve equipment for the task.
1.3 Trained personnel
“Trained personnel” for the operaon of this pump are
▪ skilled workers with knowledge in the elds of mechanics, electrical engineering
and vacuum technology and
▪ personnel specially trained for the operaon of vacuum pumps.
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B80000860_A - Safety and compliance
2. Introducon
This manual provides installaon, operaon and maintenance instrucons for the
Vibraon Isolator which is an accessory for the nEXT pump.
If you use the vibraon isolator with any other item or isolators from dierent supplier,
the eciency of the equipment can not be guaranteed.
2.1 Overview
The Vibraon Isolator is used to reduce the transmission of the small amount of
vibraon generated by the pump to the vacuum system. You can install the Vibraon
Isolator to the inlet ange of the nEXT pump.
It consists of two anges and a damping mass between the anges. The anges and the
mass are separated by special O‑rings and rubber washers which manage the sealing
and also the damping.
The Vibraon isolator is designed for use only with the vercal oriented pumps.
Figure 1 General view of the Vibraon Isolator
1. Damping and sealing O-ring 2. Spacer
3. Damping block 4. ISO100 Flange
5. Screw 6. Damping mass
1. Damping and sealing O-ring 2. Spacer
3. Damping block 4. ISO100 Flange
5. Screw 6. Damping mass
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B80000860_A - Introducon
3. Technical data
Table 1
General technical data
Parameter Value
Item number B58053400
Flange size DN100ISO-K
Inside diameter (mm) 100
Overall length (mm) 145
Weight (kg) 10.7
Maximum tensile load (kg) 8
Minimum number of claw clamps 4
Table 2
Operang and storage condions
Parameter Value Units
Ambient operang temperature range 12 to +35 * °C
Ambient storage temperature range -10 to +60 C
Maximum operang humidity maximum 90
condensing at 40 °C % RH
Maximum operang altude No limit m
*Damping properes could be aected by operang temperature
Figure 2 Axial transmission funcon of isolator
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B80000860_A - Technical data
Figure 3 Radial transmission funcon of isolator
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Page 9B80000860_A
B80000860_A - Technical data
4. Storage
To store the vibraon isolator, do the steps that follows:
1. Put the protecve covers over the inlet and outlet anges.
2. Store the vibraon isolator in cool and dry condions unl required for use. Refer
to Table: Operang and storage condions for recommended storage
environment.
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B80000860_A - Storage
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