Edwards NEXT Manual de usuario

Vibraon Isolator

nEXT Turbomolecular Pumps

INSTRUCTION MANUAL

B80000860_A Original instrucons

edwardsvacuum.com

Trademark credit

Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,

Burgess Hill, West Sussex RH15 9TW.

Associated publicaons

Publicaon tle Publicaon number

nEXT Turbomolecular Pumps nEXT240, nEXT300 and

nEXT400 B80000880

Disclaimer

The content of this manual may change from me to me without noce. We accept

no liability for any errors that may appear in this manual nor do we make any

expressed or implied warranes regarding the content. As far as praccal we have

ensured that the products have been designed and constructed to be safe and without

risks when properly installed and used in accordance with their operang instrucons.

We accept no liability for loss of prot, loss of market or any other indirect or

consequenal loss whatsoever.

Product warranty and limit of liability are dealt with in our standard terms and

condions of sale or negoated contract under which this document is supplied.

You must use this product as described in this manual. Read the manual before you

install, operate, or maintain the product.

Contents

1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.3 Trained personnel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

4. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

5. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

5.1 Installaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

5.2 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

5.3 Install the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

6. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

6.1 Maintenance safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

6.2 Maintenance plan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

7. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

7.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . . 15

8. Legal declaraons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

09/2021 - ©Edwards Limited

Page 3B80000860_A

List of Figures

Figure 1: General view of the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Figure 2: Axial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Figure 3: Radial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Figure 4: Installaon orientaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

09/2021 - ©Edwards Limited

Page 4B80000860_A

1. Safety and compliance

1.1 Denion of Warnings and Cauons

NOTICE:

For safe operaon from the start, read these instrucons carefully before you install

or commission the equipment and keep them safe for future use.

Read all the safety instrucons in this secon and the rest of this manual carefully

and make sure that you obey these instrucons. The equipment must only be

operated and maintained by trained personnel in the proper condion and as

described in this instrucon manual.

Obey local and state requirements and regulaons. If you have any quesons about

safety, operaon or maintenance of the device, please contact our nearest subsidiary.

Important safety informaon is highlighted as warning and cauon instrucons. Obey

these instrucons.

WARNING:

If you do not obey a warning, there is a risk of injury or death. Dierent symbols are

used according to the type of hazard.

CAUTION:

If you do not obey a cauon, there is a risk of minor injury, damage to equipment,

related equipment or process.

NOTICE:

Informaon about properes or instrucons for an acon which, if ignored, will

cause damage to the equipment.

We reserve the right to change the design and the stated data. The illustraons are not

binding.

Keep the instrucons for future use.

09/2021 - ©Edwards Limited

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B80000860_A - Safety and compliance

1.2 Safety symbols

The safety symbols on the products show the areas where care and aenon is

necessary.

The safety symbols that follow are used on the product or in the product

documentaon.

Warning/Cauon

An appropriate safety instrucon must be followed or cauon to a po-

tenal hazard exists.

Warning - Dangerous voltage

Idenes possible hazards from dangerous voltages.

Warning - Heavy object

Idenes a possible hazard from a heavy object.

Warning - Moving parts present

Idenes parts that move. You must let the parts that turn stop before

you remove the electrical power.

Warning - Read the manual

Warning - Use protecve equipment

Use appropriate protecve equipment for the task.

1.3 Trained personnel

“Trained personnel” for the operaon of this pump are

▪ skilled workers with knowledge in the elds of mechanics, electrical engineering

and vacuum technology and

▪ personnel specially trained for the operaon of vacuum pumps.

09/2021 - ©Edwards Limited

Page 6B80000860_A

B80000860_A - Safety and compliance

2. Introducon

This manual provides installaon, operaon and maintenance instrucons for the

Vibraon Isolator which is an accessory for the nEXT pump.

If you use the vibraon isolator with any other item or isolators from dierent supplier,

the eciency of the equipment can not be guaranteed.

2.1 Overview

The Vibraon Isolator is used to reduce the transmission of the small amount of

vibraon generated by the pump to the vacuum system. You can install the Vibraon

Isolator to the inlet ange of the nEXT pump.

It consists of two anges and a damping mass between the anges. The anges and the

mass are separated by special O‑rings and rubber washers which manage the sealing

and also the damping.

The Vibraon isolator is designed for use only with the vercal oriented pumps.

Figure 1 General view of the Vibraon Isolator

1. Damping and sealing O-ring 2. Spacer

3. Damping block 4. ISO100 Flange

5. Screw 6. Damping mass

1. Damping and sealing O-ring 2. Spacer

3. Damping block 4. ISO100 Flange

5. Screw 6. Damping mass

09/2021 - ©Edwards Limited

Page 7B80000860_A

B80000860_A - Introducon

3. Technical data

Table 1

General technical data

Parameter Value

Item number B58053400

Flange size DN100ISO-K

Inside diameter (mm) 100

Overall length (mm) 145

Weight (kg) 10.7

Maximum tensile load (kg) 8

Minimum number of claw clamps 4

Table 2

Operang and storage condions

Parameter Value Units

Ambient operang temperature range 12 to +35 * °C

Ambient storage temperature range -10 to +60 C

Maximum operang humidity maximum 90

condensing at 40 °C % RH

Maximum operang altude No limit m

*Damping properes could be aected by operang temperature

Figure 2 Axial transmission funcon of isolator

09/2021 - ©Edwards Limited

Page 8B80000860_A

B80000860_A - Technical data

Figure 3 Radial transmission funcon of isolator

09/2021 - ©Edwards Limited

Page 9B80000860_A

B80000860_A - Technical data

4. Storage

To store the vibraon isolator, do the steps that follows:

1. Put the protecve covers over the inlet and outlet anges.

2. Store the vibraon isolator in cool and dry condions unl required for use. Refer

to Table: Operang and storage condions for recommended storage

environment.

09/2021 - ©Edwards Limited

Page 10B80000860_A

B80000860_A - Storage

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