Pfeiffer Vacuum TPG 300 Manual de usuario

OPERATING INSTRUCTIONS

Translation of the Original

PLUG-IN BOARDS

for total pressure measuring and control units TPG 300/TPG 500

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new total pressure measuring and

control unit should support you in your individual application with full performance and without

malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. From this

extensive, practical experience we have gained a large volume of information that can

contribute to efficient deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 8

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Abbreviations 8

1.4 Trademark proof 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety precautions 11

2.4 Proper use 11

2.5 Foreseeable improper use 12

3 Product description 13

3.1 Function 13

3.1.1 Pirani measurement system 13

3.1.2 Cold cathode measuring system 13

3.2 Identifying the product 13

3.3 Structure of plug-in boards 13

3.3.1 Pirani measurement boards 13

3.3.2 Cold cathode measurement boards 13

3.3.3 Pirani/cold cathode measurement boards 13

3.3.4 Interface and relay boards 14

3.4 Interfaces 14

3.4.1 "OUTPUT" connection on PI 300 and CP 300 14

3.4.2 "CONTROL" connection on PE 300 DC9 14

3.4.3 "RELAY" connection on IF 300A/C/P 15

3.4.4 "RELAY" connection on IF 300B 15

3.4.5 "RS-232" connection on IF 300A 16

3.4.6 "RS-232" connection on IF 300B 16

3.4.7 "RS-422" connection on IF 300C 17

3.4.8 "Profibus" connection on IF 300P 17

3.4.9 "Profinet" connection on IF 500 PN 18

3.5 Scope of delivery 19

4 Transport and storage 20

4.1 Transporting product 20

4.2 Storing product 20

5 Installation 22

5.1 Installing/removing plug-in boards 22

5.2 Connecting gauges 22

5.2.1 Connecting Pirani gauges 22

5.2.2 Connecting the cold cathode gauge 23

5.3 Connecting interfaces and connections 24

5.3.1 Connecting the analog signal to the measurement boards 24

5.3.2 Connecting relays to the interface boards 24

5.3.3 Connecting "RS-232-C" interface of IF 300A 25

5.3.4 Connecting "RS-232-C" interface of IF 300B 25

5.3.5 Connecting "RS-422" interface of IF 300 C 25

5.3.6 Connecting "Profibus-DP" interface of IF 300 P 26

Table of contents

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5.3.7 Connecting "Profinet" interface of IF 500 PN 26

6 Operation 27

7 Calibrating Pirani measuring circuit 28

8 Malfunctions 29

9 Shipping 31

10 Recycling and disposal 32

10.1 General disposal information 32

10.2 Disposing of plug-in boards 32

11 Service solutions by Pfeiffer Vacuum 33

12 Accessories 35

12.1 Accessory information 35

12.2 Ordering accessories 35

13 Technical data and dimensions 39

13.1 Technical data 39

13.2 Dimensions 43

14 Appendix 45

14.1 Units of pressure 45

14.2 Gas throughputs 45

14.3 Converting measuring signal and pressure 46

14.4 Gas type dependence 47

Table of contents

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List of tables

Tbl. 1: Applicable documents 7

Tbl. 2: Variants 7

Tbl. 3: Abbreviations used 9

Tbl. 4: Switch functions on IF 300A/C/P 15

Tbl. 5: Switching functions on IF 300B 16

Tbl. 6: Disturbances during installation 29

Tbl. 7: Interference during operation and calibration 29

Tbl. 8: Disturbances as a result of defects 29

Tbl. 9: Disturbances with the RS-232-C interface 30

Tbl. 10: Disturbances with the RS-422 interface 30

Tbl. 11: Disturbances with the Profibus-DP interface 30

Tbl. 12: Disturbances with the Profinet interface 30

Tbl. 13: Pirani gauges 35

Tbl. 14: Cold cathode gauges 35

Tbl. 15: Measuring cable for TPR 010 36

Tbl. 16: Measuring cable for TPR 017 and TPR 018 36

Tbl. 17: Extension cable for TPR 010, TPR 017 and TPR 018 37

Tbl. 18: Measuring cable for IKR 050 and IKR 060 37

Tbl. 19: Measuring cable for IKR 070 37

Tbl. 20: Plugs and interface cable 37

Tbl. 21: Dummy plates 38

Tbl. 22: Technical data, PI 300 D / PI 300 DN 39

Tbl. 23: Technical data, PE 300 DC9 39

Tbl. 24: Technical data, CP 300 C9/C10/T11/T11L 41

Tbl. 25: Technical data IF 300A 41

Tbl. 26: Technical data IF 300B 42

Tbl. 27: Technical data, IF 300 C 42

Tbl. 28: Technical data, IF 300 P 43

Tbl. 29: Technical data, IF 500 PN 43

Tbl. 30: Units of pressure and their conversion 45

Tbl. 31: Gas throughputs and their conversion 45

List of tables

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List of figures

Fig. 1: "OUTPUT" connection with 2 sockets 14

Fig. 2: "CONTROL" connection on PE 300 DC9 14

Fig. 3: Switch and logic on the "CONTROL" connection 15

Fig. 4: "RELAY" connection on IF 300A/C/P 15

Fig. 5: "RELAY" connection on IF 300B 15

Fig. 6: "RS-232" connection on IF 300A 16

Fig. 7: "RS-232" connection on IF 300B 16

Fig. 8: "RS-422" connection on IF 300C 17

Fig. 9: "Profibus" connection on IF 300P 18

Fig. 10: "Profinet" connection on IF 500 PN 18

Fig. 11: "RJ-45" connection on IF 500 PN 18

Fig. 12: Coax cable and triax cable 23

Fig. 13: Locking the triax plug 24

Fig. 14: Folding ferrite for IF 300B 24

Fig. 15: Connecting interface cable to IF 300B 25

Fig. 16: ATM and HIGH VAC trimming potentiometers 28

Fig. 17: Pirani measuring cable connection diagram 36

Fig. 18: Pirani extension cable connection diagram 36

Fig. 19: Dimensions of measurement boards 43

Fig. 20: Dimensions of interface and relay boards 44

Fig. 21: Relationship between measuring signal and pressure for TPR gauges 46

Fig. 22: Relationship between measuring signal and pressure for IKR gauges 47

Fig. 23: Displayed pressure for TPR gauges 48

Fig. 24: Displayed pressure for IKR gauges 48

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This document describes the function of the products listed in the following and provides the most im-

portant information for safe use. The description is written in accordance with the valid directives. The

information in this document refers to the current development status of the products. The document

retains its validity assuming that the customer does not make any changes to the product.

1.1.1 Applicable documents

Designation Document

"Total Pressure Measuring and Control Unit" operating instructions

TPG 300

BG 5970

"Profibus" communication instructions

TPG 300 / TPG 500

BG 5973

"Total Pressure Measuring and Control Unit" operating instructions

TPG 500

BG 6008

"Serial interface" communication instructions

TPG 500

BG 6009

"Profinet" communication instructions

TPG 500

BG 6014

"Gauges" operating instructions

ModulLine gauges

(depending on the gauge used)

Tbl. 1: Applicable documents

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

This document applies to the products with the following part numbers:

Article number Type Designation

PT 546 920-T Measurement board (Pirani) PI 300 D

PT 549 214-T PI 300 DN

PT 441 375-T Measurement board (cold cathode) PE 300 DC9

PT 441 000-T Measurement board (Pirani/cold cathode) CP 300 C9

PT 441 114-T CP 300 C10

PT 441 080-T CP 300 T11

PT 441 120-T CP 300 T11L

PT 441 130-T Interface and relay board (RS-232-C) IF 300 A

PT 441 250-T IF 300B

PT 441 390-T Interface and relay board (RS-422) IF 300 C

PT 441 395-T Interface and relay board (Profibus) IF 300 P

PT 441 595-T Interface board (Profinet) IF 500 PN

Tbl. 2: Variants

You can find the part number on the rating plate of the product.

Pfeiffer Vacuum reserves the right to make technical changes without prior notification.

About this manual

7/50

The figures in this document are not to scale.

Dimensions are in mm unless stated otherwise.

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Abbreviations

Abbreviation Explanation

ASCII American Standard Code for Information Interchange

ATM Atmosphere

C Calibration factor for calculating pressure for gases other than air

CNTR-P Repeater direction control signal (Profibus)

ESD Electrostatic discharge

IF Interface

GND Ground

HV High vacuum

MHV Coax high voltage connector in miniature design (miniature high voltage)

MSL Mean sea level

PE Penning

About this manual

8/50

Abbreviation Explanation

P GND Protective ground

Profibus DP Profibus distributed periphery

RS-232 Standard for a serial interface often available on computers (Recommended Stand-

ard 232)

RS-422 Interface standard for a wired differential serial data transfer (Recommended Stand-

ard 422)

RxD Incoming data line (Received eXchange Data)

Rx+ Received data

Rx- Received data

S GND Signal ground

SHV Connector assembly for coaxial cable (safe high voltage)

TPG Total pressure measuring and control unit (total pressure gauge)

TxD Outgoing data line (Transmitted eXchange Data)

Tx+ Transmission data

Tx- Transmission data

Tbl. 3: Abbreviations used

1.4 Trademark proof

●Profibus® is a registered trade name of Profibus Nutzerorganisation e.V.

●Profibus® is a registered trade name of Profibus Nutzerorganisation e.V. (Profibus user organiza-

tion).

About this manual

9/50

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

Safety instructions according to product life stages

All safety instructions in this document are based on the results of a risk assessment.

Pfeiffer Vacuum has taken into account all the relevant life stages of the product.

Risks during installation

DANGER

Danger to life due to dangerous contact voltage

Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. If

you come into contact with dangerous contact voltage, this can result in injury through electric shocks

or even death.

►Only connect the gauge to professionally grounded devices.

►Take additional safety measures on the system-side if processes in the vacuum system (e.g.

flashovers) can result in dangerous voltages at the gauge connections.

►Secure the line to the gauge.

Safety

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