MKS Baratron 122A Series Manual de usuario

110448-P1

Rev E, 6/96

MKS Baratron®

Type 122A

Absolute Pressure Gauge

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means, electronic or mechanical, including photocopying and recording, or by any information

storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,

Inc.

Baratron®is a registered trademark of MKS Instruments, Inc., Andover, MA

Cajon®, VCR®, VCO®, and Ultra-Torr®are registered trademarks of Cajon Company,

Macedonia, OH

Inconel®is a registered trademark of Inco Alloys International, Inc., Huntington, WV

Table of Contents

iii

Table of Contents

Safety Procedures and Precautions.......................................................................................... 1

Chapter One: General Information......................................................................................... 3

Introduction............................................................................................................... 3

How This Manual is Organized.................................................................................. 4

Customer Support...................................................................................................... 4

Chapter Two: Installation ......................................................................................................5

How To Unpack the Type 122 Unit............................................................................ 5

Unpacking Checklist ..................................................................................... 5

Dimensions................................................................................................................ 6

Setup ......................................................................................................................... 7

Mounting Instructions ................................................................................... 7

Electrical Installation..................................................................................... 7

Cables........................................................................................................... 8

Chapter Three: Overview....................................................................................................... 11

Sensor........................................................................................................................ 11

Signal Conditioner Electronics................................................................................... 13

Chapter Four: Operation........................................................................................................15

How To Adjust the Zero ............................................................................................ 15

Lowest Recommended Pressure Reading....................................................... 16

Lowest Recommended Pressure Control........................................................ 16

Highest Base Pressure for Proper Zero Adjust ............................................... 16

Chapter Five: Maintenance.................................................................................................... 17

General Information................................................................................................... 17

Signal Conditioner Electronics................................................................................... 17

Sensor........................................................................................................................ 17

Table of Contents

Appendix A: Product Specifications.......................................................................................19

Appendix B: Product Code.....................................................................................................21

Index ......................................................................................................................................23

List of Fi

ures

List of Tables

List of Figures

Figure 1: Dimensions of a 122 Transducer............................................................................. 6

Figure 2: Electrical Connections............................................................................................ 7

Figure 3: Interface Cables for the 122 Transducer.................................................................. 9

Figure 4: Type 122 Transducer.............................................................................................. 11

Figure 5: Cross Sectional View of a 122 Transducer.............................................................. 12

Figure 6: Block Diagram of the 122 Transducer..................................................................... 13

List of Tables

Table 1: Cable Color Codes........................................................................................................8

Table 2: Suggested Pressures for Zero Adjustment....................................................................16

List of Figures

List of Tables

Safety Procedures and Precautions

DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Do not install substitute parts or perform any unauthorized modification to the instrument.

Return the instrument to an MKS Calibration and Service Center for service and repair to ensure

that all safety features are maintained.

SERVICE BY QUALIFIED PERSONNEL ONLY

Operating personnel must not remove instrument covers. Component replacement and internal

adjustments must be made by qualified service personnel only.

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

If hazardous materials are used, users must take responsibility to observe the proper safety

precautions, completely purge the instrument when necessary, and ensure that the material used is

compatible with sealing materials.

PURGE THE INSTRUMENT

After installing the unit, or before its removal from a system, be sure to purge the unit completely

with a clean dry gas to eliminate all traces of the previously used flow material.

USE PROPER PROCEDURES WHEN PURGING

This instrument must be purged under a ventilation hood, and gloves must be worn to protect

personnel.

DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES

To avoid explosion, do not operate this product in an explosive atmosphere unless it has been

specifically certified for such operation.

USE PROPER FITTINGS AND TIGHTENING PROCEDURES

All instrument fittings must be consistent with instrument specifications, and compatible with the

intended use of the instrument. Assemble and tighten fittings according to manufacturer's

directions.

CHECK FOR LEAK-TIGHT FITTINGS

Before proceeding to instrument setup, carefully check all plumbing connections to the

instrument to ensure leak-tight installation.

Safet

Procedures and Precautions

OPERATE AT SAFE INLET PRESSURES

This unit should never be operated at pressures higher than the rated maximum pressure (refer to

the product specifications for the maximum allowable pressure).

INSTALL A SUITABLE BURST DISC

When operating from a pressurized gas source, a suitable burst disc should be installed in the

vacuum system to prevent system explosion should the system pressure rise.

KEEP THE UNIT FREE OF CONTAMINANTS

Do not allow contaminants of any kind to enter the unit before or during use. Contamination

such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit.

Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.

Warning The WARNING sign denotes a hazard. It calls attention to a

procedure, practice, condition, or the like, which, if not

correctly performed or adhered to, could result in injury to

personnel.

Caution The CAUTION sign denotes a hazard. It calls attention to an

operating procedure, practice, or the like, which, if not correctly

performed or adhered to, could result in damage to or destruction of

all or part of the product.

Note The NOTE sign denotes important information. It calls attention to a

procedure, practice, condition, or the like, which is essential to highlight.

Chapter One: General Information Introduction

Chapter One: General Information

Introduction

The MKS Baratron®Type 122A Absolute Pressure Transducer marks the beginning of a new era

in low cost pressure measurement. Using a latest-generation single-sided dual-electrode Inconel®

sensor coupled with a new fixed-frequency bridge signal conditioner, the 122 provides operation

which is inherently temperature stable at zero pressure, capable of withstanding high overpressure

conditions with minimal or no shifts in output over its range, and high resistance to corrosive

environments.

The variable-capacitance sensor is the result of over 25 years of research, development and

customer experience in total pressure measurement. The design incorporates a tensioned metal

diaphragm (Inconel), one side of which is exposed to the gas whose pressure is to be measured.

The other (reference) side of the diaphragm contains a dual electrode assembly (previously found

in premium transducers only) sealed in a high vacuum reference cavity which is maintained by a

chemical getter system.

The signal conditioning electronics board contains a fixed-frequency oscillator, balance-sensing

circuit, linearization circuitry and amplifiers which provide a 0 to 10 Volt DC full scale output.

The signal conditioner is inherently temperature stable at balance (pressure = 0 Torr) and is self-

compensating with temperature changes at other pressures.

A drawn aluminum can forms the protective cover for the transducer and a PC board mounted

removable terminal block allows connections to be easily made for ± 15 VDC power inputs and

the 0 to 10 VDC pressure signal output. In addition, the aluminum cover works in conjunction

with an inner PC shield board with RF bypass capacitors to virtually eliminate RFI and EMI.

Refer to Figure 5, page 12, for a cross sectional view of the 122 transducer.

How This Manual is Organized Cha

ter One: General Information

How This Manual is Organized

This manual is designed to provide instructions on how to set up, install, and operate a Type 122

unit.

Before installing your Type 122 unit in a system and/or operating it, carefully read and

familiarize yourself with all precautionary notes in the Safety Messages and Procedures

section at the front of this manual. In addition, observe and obey all WARNING and

CAUTION notes provided throughout the manual.

Chapter One: General Information, (this chapter) introduces the product and describes the

organization of the manual.

Chapter Two: Installation, explains the environmental requirements and describes how to mount

the instrument in your system.

Chapter Three: Overview, gives a brief description of the instrument and its functionality.

Chapter Four: Operation, describes how to operate the instrument.

Chapter Five: Maintenance, describes repair and return policies for the 122 transducer.

Appendix A: Product Specifications, lists the specifications of the instrument.

Appendix B: Product Code, describes the instrument’s product code.

Customer Support

Standard maintenance and repair services are available at all of our regional MKS Calibration and

Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other

manufacturers for recalibration using the Primary and Transfer Standard calibration equipment

located at all of our regional service centers. Should any difficulties arise in the use of your Type

122 instrument, or to obtain information about companion products MKS offers, contact any

authorized MKS Calibration and Service Center. If it is necessary to return the instrument to

MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS

Calibration and Service Center before shipping. The ERA Number expedites handling and

ensures proper servicing of your instrument.

Please refer to the inside of the back cover of this manual for a list of MKS Calibration and

Service Centers.

Warning All returns to MKS Instruments must be free of harmful,

corrosive, radioactive, or toxic materials.

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