MKS 107B Manual de usuario

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CONTENTS

SECTION 1 GENERAL INFORMATION

1.1 Description

1.2 Specifications

SECTION 2 INSTALLATION

2.1 Unpacking and Inspection

2.2 107B Transducer Installation

2.3 Cabling and Interconnections

SECTION 3 OPERATION

3.1 General

3.2 Theory of Operation

SECTION 4 MAINTENANCE

4.1 General

4.2 Troubleshooting

SECTION 1

GENERAL INFORMATION

1.1 DESCRIPTION

The MKS Type 107B Transducer is the result of over twenty five years

experience with capacitance manometers and the addition of a new sensor design

(Patent Pending). This design marks the first time that six decades of

pressure measurement are available using a single capacitance manometer. When

coupled with MKS Type 116 or 146 Power Supply/Readouts, the 107B can replace

two or more pressure instruments in applications such as data logging or

process control, where environmental and process conditions are particularly

demanding. Only Inconel is exposed to the process, which permits use of

corrosive or dirty gases, and eliminates contamination of the process with

gauge materials.

Measurements are independent of gas composition; the 107B measures true

total pressure, regardless of gas species or mixtures.

The Type 107B is the first MKS transducer to be digitally linearized.

Linearization constants are stored inside EEPROM memory located in each

transducer, and thus a 107B is usable with any 116 or 146 readout.

In normal operation, the 107B Transducer heater circuit warms the sensor to

45°C for good stability and to reduce process condensation.

1-1

1.2 SPECIFICATIONS

ELECTRICAL

Power Requirements

Circuit: ±15 VDC ±5% @ 30 mA

Heater: ±15 VDC ±5% @ 300 mA OR

24 VAC ±5% @ 325 mA

Range: 1 mTorr - 1000 Torr

Accuracy: see Table 1-1*

Media Compatibility: any gas compatible with Inconel

Maximum pressure: 1800 Torr

Warmup time: 4 hours

Mechanical: see Figure 1-1

Cable length: 10 feet standard.

Environmental:

Operating ambient Temperature: 15-40°C.

Humidity: 0-95% non-condensing.

* Accuracy is the system accuracy when used with either

a 116 or 146 Power Supply/ Readout.

1-2

TABLE 1-1

Pressure Specification

1-3

Figure 1-1

Mechanical Outline 107B

1-4

SECTION 2

INSTALLATION

2.1 UNPACKING AND INSPECTION

Reasonable care has been taken to pack the Type 107B in a manner that it

reach you in perfect operating condition. However, upon receiving these units

you should check for defects, cracks, broken connectors, etc. to be certain

that damage has not occurred during shipment. If you find any damage, notify

your carrier and MKS immediately. If return of the instrument is necessary, an

Equipment Return Authorization (ERA) number is required from MKS Customer

Service to accept, expedite, repair, and return.

2.2 TYPE 107B TRANSDUCER INSTALLATION

The Type 107B comes with fitting options identical to all other 100

Series Transducers (Cajon 8 VCR, Cajon 8VCO, KF16, and

1/2" diameter tublation.) The sensor port will easily carry the weight of

the transducer. It is always suggested that chamber pressure measurement ports

be located such that the capacitance manometer is vertical with its port facing

downward. In this way process products which may appear in the sensor will

fall out into the chamber where they can be pumped, preserving the integrity of

the pressure measurement. The pressure transducer should be mounted such that

it is firmly supported and isolated from any vibration.

Note that temperature controlled transducers, such as the 107B, need a

minimum of four hours to achieve best thermal stability. After warmup, all

newly installed sensors should be zeroed. For a 107B, this means pumping the

unit to below 5x10-5 Torr and Remote Zeroing the 116 or 146 display. Refer to

the instruction manual of either unit for the appropriate procedure to follow

when remote zeroing.

The 107B/readout combination comes with MKS cable #CB107-1 or #CB107-2 which

is used between the transducer and readout.

The -1 cable is the standard 10 foot version. The -2 version

is a special cable of longer length. The connectors are male and female

type "D" and come complete with captive mounting hardware (Reference Figure 2-

1). With power off, insert connectors into their respective 107B or readout

sockets and tighten the connector screws, two on either end of the cable.

2-1

NOTE:

DUE TO THE FAILURE OF MANY USERS TO FOLLOW THE

PROPER TIGHTENING PROCEDURES FOR SINGLE OR DOUBLE

METAL FERRULE COMPRESSION TYPE VACUUM FITTINGS

AND THE RESULTING DAMAGE CAUSED TO THE PRESSURE

SENSOR, MKS DOES NOT WARRANTY THIS PRODUCT WHEN

SUCH FITTINGS ARE USED.

2.3 CABLING AND INTERCONNECTIONS

GROUNDING

Power, Analog, and Digital commons are all tied together in the power

supply; and transducer Signal common and Power common are tied together in the

transducer. Even though these commons are connected together internally, it is

important that each ground be used only for its stated purpose; otherwise

ground noise and loops can cause significant errors. These commons are

connected to chassis by a 10K ohm 1/4 W resistor, shunted by several 50 volt

capacitors totalling more than 2uF. Maximum potential difference must be

limited to avoid introducing noise.

CABLING

Since each 107B transducer comes with its own linearity correction data

stored in EEPROM memory on board, a 107B may be used with any 116 or 146

readout. The cable supplied with the 107B is a CB107-1 or CB107-2 which

requires that two screws be tightened on each end. Table 2-1 shows the

transducer cable connections.

2-2

Figure 2-1

* Heater Power: AC or DC not polarity sensitive.

TABLE 2-1

Transducer Connector

2-3

SECTION 3

OPERATION

3.1 GENERAL

The Type 107B Transducer consists of a new-technology capacitance manometer

(Patent Pending) enclosed by a heated chamber with two printed circuit (PC)

boards which provide signal conditioning, heating control and memory for

calibration constants.

3.2 THEORY OF OPERATION

SENSOR

The new sensor technology employed by the Type 107B maintains rugged

construction of previous MKS pressure transducers with their Inconel stretched

diaphragm and enclosure. A new electrode arrangement allows the transducer to

develop useful output over a six decade pressure range. Minimum resolvable

readings are 1 milliTorr and the 107B's full scale is 1000 Torr.

The variable capacitance sensor has rigidly attached electrodes located in

an evacuated chamber behind the metal diaphragm. This reference chamber is

permanently evacuated, sealed and gettered thus making the pressure measurement

totally independent of the gas type or composition.

The sensor and signal conditioning PC board are housed in a

temperature-controlled thermal chamber which is heated to 45°C. This allows the

107B to operate in many systems without effects due to condensation. Also it

improves the effective sensor and electronics temperature coefficients by at

least 30:1.

ELECTRONICS

The electronics package consists of three distinct circuits. These are (1)

the signal conditioner, (2) the heater control and (3) the calibration constant

memory circuit.

Signal conditioning is shown in the block diagram (Fig. 3-1).

A precision constant frequency oscillator is used to excite a

diode bridge arrangement. Through the bridge the excitation reaches two

capacitances, one of which is a highly stable fixed capacitor and the other is the

sensor. With the transducer held to zero pressure (high vacuum) the two

capacitances will be equal and the bridge arrangement will have zero output. (For

calibration purposes, at zero the 107B really develops between -50 millivolts and

-125 millivolts output.) As the pressure increases, the sensor capacitance will

increase and the bridge circuit will be unbalanced causing a DC voltage across the

bridge. This signal is then filtered and amplified by subsequent stages such that

at full scale pressure of 1000 Torr the output will be between 9.5 volts and 10.0

volts.

3-1

Figure 3-1

107B Block Diagram

3-2

Setting the output for a specific value is not needed since the transducer's

complete output curve is described by the data stored in EEPROM on board the

transducer. The circuitry needed to perform this task consists of a 5 volt

regulator to drop the supply +15 VDC line down to logic power levels, the

serial EEPROM memory IC, and Schmitt trigger inverters for extra noise

immunity. During calibration or power-on of a Type 116 or 146, clocking is

provided by the interfacing power supply/readout while data is either sent or

received by the EEPROM. Up to 60 pressure/voltage pairs are stored in the

memory and these are used by the readouts to construct linearization look-up

tables used in finding any given pressure.

The third circuit section is the heater control circuit, located on

the PC board which is outside of the heated shell. This circuit is a

balanced-resistor-bridge arrangement which provides analog PID control which is

optimized for this particular application. Two thermistors sense the heater

temperature and the ambient as seen by the inner enclosure to provide "lead"

and "lag" thermal signals to an integrator which controls the duty-cycle

oscillator. This oscillator will run over a large frequency range, with 33Khz

being nominal, and an enhancement

mode FET provides the heater switching.

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