LN0575E2202A1
High Response
Mass Flow Controller for DeviceNet™
Instruction Manual
MC-7000D Series
Safety Precautions
Incorrect handling may cause death or injury
(1) Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereinafter, the fluid used is referred as “gas” or “fluid”).
(2) DO NOT apply any corrosive fluid tomaterials exposed to gas. Corrosion may
cause gas to leakinto the atmosphere. Checkthegas type to be used in advance.
(3) Thisdeviceisnotdesignedasan explosionproofstructure.DONOTusethisdeviceina
placewhereexplosion-proofstructuresarerequired.Doingsomaycausefireorexplosion.
Incorrecthandlingmay leadtomediumorslightinjury or may
causedamageto,orlossof,facilitiesorequipment
(1) Observe the precautions listed in the WARNING (above).
(2) Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may besplashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. It may cause fire or other problems.
(5) This device is notdesigned to handle hot swap. Please avoid attaching and removingthe
powersupplyconnectorandinterfaceconnectorwiththe powerswitchedon. Attachment
and/orremovalwiththepoweronmayresultinfailureofthedevice.
(6) This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while moving
or setting the device.
(7) Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-7000D series (Hereinafter referred
as "MFC"). MFC is equipped with a network interface, and can be operated by
connecting to a network environment of DeviceNet ™.
Since MFC is a slave device, please prepare a master device of DeviceNet ™
network interface.
The device profile follows the MFC profile in ODVA specification.
Please go through the ODVA specification and MC-7000D device profile manual
for proper use.
2. Summary
The MFC is high performance mass flow controller for gas using high response
thermal flow sensor and high response piezoelectric valve. Valve operation mode
is normally closed type. Also, MFC interface employs Device Net™ network, so
MFC is compatible with other makers.
3. Features
The MFC is the following features.
(1)
LINTEC’s proprietary ambient temperature compensation type flow sensor is carried.
· Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
·The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
·Steady temperature distribution of sensor and high-speed response.
(2) Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried.
· High functionality.
·By setting of device number (address), multiple devices can be controlled
through a single interface.
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function.
(3) MFC employs DeviceNet™ network protocol.
(4) Small dead space structure using a diaphragm valve.
(5) Single power supply 24VDC (Recommended).
(6) Superiorcorrosion resistant sealing materials make maintenance easy. Metal seals (Au).
(7) Particle-free structure.
(8) By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(9) Based on RoHS.
4. Structure
The MFC consists of sensors, valves, and a microcomputer for signal processing.
A digital PID feedback control system controls the valve action so that flow rate
output from the sensor agrees with flow rate setting value.
5. Specification / Dimensions
(1) Specification
