Edwards STP Series Manual de usuario

MT-36E-101-I

Model name Voltage

STP-A803/A1303 series 200 - 240 Va.c.

STP Series Turbomolecular Pumps

STP-A803/A1303 Series

Pump Specific Information

Instruction Manual (B)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A):

STP pump generic Instruction Manual

Instruction Manual (B):

(This Instruction Manual)

STP pump specific information

Instruction Manual (C):

STP control unit Instruction Manual

2023.08

Declaration of Conformity

This product has been

manufactured under a quality management system certified to ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

This declaration of conformity is issued under the sole responsibility of the manufacturer:

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 76-85 3

Japan

Documentation Officer

Jana Sigmunda 300

Lutín , 78349

Czech Republic

T: +4 (0) 580 58 7 8

[email protected]

Product Name:

urbomolecular pump

Model Number:

STP

A803

A1303

series

Is in conformity with the relevant requirements of European CE legislation:

006/4 /EC

Machinery directive

Note: The safety objectives of the Low Voltage Directive 2014/35/ U were

complied with in accordance with Annex 1 No. 1.5.1 of this directive.

014/30/EU

Electromagnetic compatibility (EMC) directive

Class A Emissions, Industrial Immunity

011/65/EU

Restriction of certain hazardous s

ubstances (RoHS)

irective

as amended by Delegated Directive (EU) 015/863

Based on the relevant requirements of harmonised standards:

EN ISO 1 100: 010

Safety of machinery. General principles for design. Risk assessment and risk

reduction

EN 101

:1996 +A1: 009

Compressors and vacuum pumps. Safety requirements. Vacuum pumps

EN 613 6

1: 013

Electrical

equipment for measurement, control and laboratory use. EMC

requirements

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: : 11th-Oct- 0

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Martin Tollner

President, Semiconductor Chamber Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

Declaration of Conformity

This product has been

manufactured under a quality management system certified to ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 76-85 3

Japan

Documentation Officer

Innovation Drive

Burgess Hill

West Sussex

RH15 9TW

[email protected]

This declaration of conformity is issued under the sole responsibility of the manufacturer.

Product Name:

urbomolecular pump

Model Number:

STP

A803/A1303

series

The object of the declaration described above is in conformity with relevant statutory requirements:

Supply of Machinery (Safety) Regulations 008

The objectives of the lectrical quipment (Safety) Regulations 2016 are governed by Annex 1 1.5.1 of this regulation.

Electromagnetic Compatibility Regulations 016

Class A Emissions, Industrial Immunity

Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 01

Relevant designated standards or technical specifications are as follows:

EN ISO 1 100: 010

Safety of machinery. General principles for design. Risk assessment and risk

reduction

EN 101

:1996 +A1: 009

Compressors and vacuum pumps. Safety requirements. Vacuum pum

EN 613 6

1: 013

Electrical equipment for measurement, control and laboratory use. EMC

requirements. General requirements. Class A Emissions, Industrial Immunity

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 11th-Oct- 0

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Signed for and on behalf of Edwards Ltd

Martin Tollner

President, Semiconductor Chamber Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

This product has been manufactured under a quality management system certified to

ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION

RoHS (EU, UK): Material Exe ption Infor ation

This product is compliant with the following Exemptions

Annex III:

• 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight

• 6(c) Copper alloy containing up to 4% lead by weight

• 7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more lead)

• 7(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in

capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound

REACH (EU, UK)

This product is a complex article which is not designed for intentional substance release. To the best of our knowledge

the materials used comply with the requirements of REACH. The product manual provides information and instruction

to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.

Article 33.1 Declaration:

This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the

015 European Court of Justice ruling in case C-106/14.

• Lead (Pb)

This substance is present in certain steel / aluminium / brass / electrical or electronic components.

ASTE

RAMEWORK

IRECTIVE

(EU)

This product has been manufactured under a quality management system certified to

ISO9001: 015

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

DOC

材料成分声明

China Material Content Declaration

有害物质

Hazardous Substances

部件名称

Part name

铅

Lead

(Pb)

汞

Mercury

(Hg)

镉

Cadmium

(Cd)

六价铬

Hexavalent

Chromium

(Cr VI)

多溴联苯

Polybrominated

biphenyls

(PBB)

多溴二苯醚

Polybrominated

diphenyl ethers

(PBDE)

铸铝及铝合金制品

Aluminium alloys

× 〇〇〇〇〇

铜管管件

Brass pipe fitting

× 〇〇〇〇〇

电缆/电线/连接器

Cable/wire/connector

× 〇〇〇〇〇

电子元件和控件

Electronics and

Controls

× 〇〇〇〇〇

表示该有害物质在该部件的所有均质材料中的含量低于

GB/T 657

标准规定的限量要求

。

O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit

requirement in GB/T 657 .

表示该有害物质在该部件的至少一种均质材料中的含量超出

GB/T 657

标准规定的限量要求

。

X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is

above the limit requirement of GB/T 657 .

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link

•EdCentra (for SCU-801 series only）

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

STP-A803/A1303 Series Turbomolecular Pump

MT-36E-101-I

Page i

PAGE

CONTENTS

Section Title Page

1 TECHNICAL DATA 1

1.1 Applicable pump specifications 1

1.1.1 STP pump specifications 2

1.1.2 Condition for the water-cooling unit 3

1.2 External appearance of the STP pump 4

1.3 Label affixing positions 12

1.4 Accessories 13

2HOW TO SECURE THE STP PUMP 15

2.1 When securing the inlet port with bolts 16

2.2 When securing the inlet port flange with claw clamps 19

2.3 When installing the damper in the inlet port flange 20

3TEMPERATURE MANAGEMENT SYSTEM (TMS) 21

3.1 Configuration of the STP pump with the TMS 21

3.2 TMS connection cable 23

3.3 TMS heater 24

3.4 TMS valve 24

3.5 TMS sensor cable 24

3.6 Installation of the TMS unit 25

3.6.1 Connecting the TMS connection cable to the STP control unit 25

3.6.2 Connecting the pump and TMS heater,

TMS sensor cable, TMS valve 25

3.6.3 Connecting TMS connection cable to STP pump 26

3.7 Replacing the fuses in the TMS connection cable 26

3.8 Condition for the TMS unit 27

3.9 Accessories 27

STP-A803/A1303 Series Turbomolecular Pump

MT-36E-101-I

Page ii

PAGE

ILLUSTRATIONS

Figure Title Page

1 STP-A803 series: ICF203/VG150 4

2 STP-A803 series: ISO160/ISO160F 6

3 STP-A1303 series: ICF253/VG200 8

4 STP-A1303 series: ISO200/ISO200F 10

5 Label affixing positions for the STP pump 12

6 Example of securing the STP pump

(when securing the inlet port with bolts) 17

7 Shape of reduced diameter shank bolts 18

8 Example of securing the STP pump

(when securing the inlet port flange with claw clamps) 19

9 Example of securing the STP pump

(when installing the damper in the inlet port flange) 20

10 Configuration of the STP pump with the TMS 21

11 External view of TMS connection cable 23

12 TMS heater 24

13 TMS sensor cable 24

TABLES

Table Title Page

1 Tightening torque of bolt 15

2 Destructive torque predicted and recommended securing bolt

for inlet port flange 16

3 Shape of reduced diameter shank bolts 18

4 Number of claw clamps for flange size 19

5 Service parts specification 26

STP-A803/A1303 Series Turbomolecular Pump

MT-36E-101-I

Page 1

TECHNICAL DATA

1 TECHNICAL DATA

1.1 Applicable pump specifications

Model Name

Specification

Applicable Control unit

STP-A803/A1303 series

Advanced high-throughput type

SCU-800/801

Naming convention:

•"C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-A803C).

•"CV" indicates an enhanced corrosion resistant type with TMS*2 (e.g. STP-A1303CV).

*1 Corrosion resistant: STP pump with anti-corrosive treatment.

*2 Temperature Management System: TMS unit (optional accessory) maintains the temperature at the base of the

turbomolecular pump by monitoring the temperature with the temperature sensor in

the base of the turbomolecular pump, and performing the TMS valve and base heater

ON/OFF control.

STP-A803/A1303 Series Turbomolecular Pump

MT-36E-101-I

Page 2

TECHNICAL DATA

1.1.1 STP pump specifications

The values shown below are typical. They are not guaranteed.

Item

A803 series

A1303 series

Flange size

Inlet port flange

ICF203/VG150/

ISO160K/ISO160F

ICF253/VG200/

ISO200K/ISO200F

Outlet port flange

KF40

Pumping speed

L/s

800

1,300

L/s

520

800

Compression ratio

>108

103

Ultimate pressure

Pa (Torr)

10-7 (10-9) order [after baking]

Maximum gas flow-rate*1

Pa·m3/s

(SCCM)

2.5 (1,500): Water cooling

1.7 (1,000):TMS unit used (60 °C)

Pa·m3/s

(SCCM)

1.4 (800): Water cooling

1.0 (600):TMS unit used (60 °C)

Allowable backing pressure*1

Pa (Torr)

270 (2): Water cooling/ TMS unit used

Flow rate of purge gas <N2>

Pa·m3/s (SCCM)

3.4×10-2 (20)

Rated speed

rpm

32,500

Backup rotational speed*2

rpm

Approximately 8,000

Starting time

min

Stopping time

min

Noise

<50 (at 32,500 rpm)

Temperature Management System (TMS)

Available

Baking temperature

°C

<120

Lubricating oil

Not necessary

Installation position

Free

Cooling method

Water cooling

Recommended backing-pump

L/min

>1,300

Mass*3

Ambient temperature range

°C

0 to 40

Storage temperature range

°C

-25 to 55

Applicable control unit

SCU-800/801

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