Edwards Barocel 7025M Manual de usuario

W601100880_A Original Instructions

Barocel 7025M Gauge

INSTRUCTION MANUAL

edwardsvacuum.com

W601100880_A - Copyright notice

Page 2

Trademark credits

Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive,

Burgess Hill, West Sussex, RH15 9TW, UK.

VCR®Swagelok Marketing Co.

Disclaimer

The content of this manual may change from time to time without notice. Edwards accepts no

liability for any errors that may appear in this manual nor does it make any expressed or

implied warranties regarding the content. So far as is reasonably practicable Edwards has

ensured that its products have been designed and constructed so as to be safe and without

risks when properly installed and used in accordance with Edwards operating instructions.

Edwards accepts no liability for loss of profit, loss of market or any other indirect or

consequential loss whatsoever.

Product warranty and limit of liability are dealt with in Edwards standard terms and conditions

of sale or negotiated contract under which this document is supplied.

You must use the Barocel 7025M as described in this manual. Read this manual before you

install, operate and maintain the Barocel 7025M.

P20010230A

CE Declaration of Conformity

The following product

List products here including –

•Barocel 7025m Series Capacitance Manometer W6011*

•Barocel 7025 Series Capacitance Manometer W6021*

•Barocel 7045 Series Capacitance Manometer W6032*

•Barocel 7100 Series Capacitance Manometer W6033*

Is in conformity with the relevant requirements of European CE legislation:

2014/30/EU

Electromagnetic compatibility (EMC) directive

2011/65/EU

Restriction of certain hazardous substances (RoHS) directive

as amended by Delegated Directive (EU) 2015/863

Based on the relevant requirements of harmonised standards:

EN 61010-1:2010

Safety requirements for electrical equipment for measurement, control and laboratory

use. General requirements

EN 60529:1991 +

A2:2013

Specification for degree of protection provided by enclosures (IP code)

– IP code 30

EN 61326-1:2013

Electrical equipment for measurement, control and laboratory use. EMC requirements.

General requirements

Class B Emissions, Industrial Immunity

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 6th June 2019.

Larry Marini – Senior Technical Manager

Eastbourne

Andy Marsh – General Manager

Eastbourne

Edwards Ltd

Innovation Drive

Burgess Hill

West Sussex

RH15 9TW

This product has been manufactured under a quality management system certified to ISO 9001:2015

Additional Legislation and Compliance Information

EU RoHS Directive: Material Exemption Information

This product is compliant with no Annex III or IV Exemptions

EU REACH Regulation Compliance

This product is a complex article which is not designed for intentional substance release. To the best of our knowledge

the materials used comply with the requirements of REACH. The product manual provides information and instruction to

ensure the safe storage, use, maintenance and disposal of the product including any substance-based requirements.

Article 33 Declaration

This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0.1%ww

by article as clarified under the 2015 European Court of Justice ruling in case C-106/14.

ADDITIONAL INFORMATION

材料成分声明

China Material Content Declaration

表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。

Indicates that the hazardous substance contained in all of the homogeneous materials for this part is

below the limit requirement in GB/T 26572.

Page 3

W601100880_A - Contents

Introduction 7

Product identification .................................................................................................... 7

Intended use .................................................................................................................. 7

Function ......................................................................................................................... 7

Before using this gauge .................................................................................................. 7

Safety symbols ............................................................................................................... 8

Safety precautions .........................................................................................................8

Liability and warranty .................................................................................................... 8

Technical data 9

Dimensions ................................................................................................................... 11

Analogue measurement signal versus pressure .......................................................... 12

Installation 13

Vacuum connection ..................................................................................................... 13

Electrical connection .................................................................................................... 15

FCC68, 8-pin connector ...................................................................................... 16

D-Sub, 9-pin connector ...................................................................................... 17

Operation 18

To zero the gauge ........................................................................................................ 18

<ZERO> Adjustment ........................................................................................... 18

Uninstallation 20

Maintenance and repair 21

Return the equipment for service 21

Disposal 22

Separating the components ......................................................................................... 22

Contents

This page has been intentionally left blank.

Page 4

W601100880_A - Contents

Page 5

W601100880_A - List of Figures

Figure 1: Dimensions (mm) .................................................................................................... 11

Figure 2: Analogue measurement signal versus pressure ...................................................... 12

Figure 3: Connect the gauge to the system ............................................................................ 15

Figure 4: FCC69 8-pin sensor cable ........................................................................................ 16

Figure 5: D-Sub 9-pin sensor cable ......................................................................................... 17

List of Figures

Page 6

W601100880_A - List of Tables

Table 1: General ....................................................................................................................... 9

Table 2: Output signal .............................................................................................................. 9

Table 3: Gauge identification ................................................................................................... 9

Table 4: Electrical ..................................................................................................................... 9

Table 5: Materials exposed to vacuum .................................................................................. 10

Table 6: Environmental .......................................................................................................... 10

List of Tables

Page 7

W601100880_A - Introduction

Introduction

Product identification

Specify the information given on the gauge nameplate in all communications with Edwards.

Intended use

The Barocel 7025M gauge is intended for absolute pressure measurement of gases in their

respective pressure ranges, see Installation on page 13. The unit is clean room compliant and

double protected against contamination.

The gauge can be operated in connection with an Edwards TIC controllers or another

applicable unit.

Function

The Barocel 7025M gauge has a capacitive sensor element made of aluminium oxide ceramics

and electronics which convert the capacitance into a direct current (d.c.) voltage output

signal.

The output signal is linear to the measured pressure and independent of the gas type.

Before using this gauge

Make sure that the model is the same as you ordered and no damage occurred during

shipment.

Read this instruction manual before you install, operate, inspect, or service this gauge to

familiarize yourself with safety precautions, specifications and operations.

Page 8

W601100880_A - Introduction

Safety symbols

Important safety information is highlighted as WARNING and CAUTION instructions. Obey the

safety instructions.

The use of warnings and cautions is defined as:

Safety precautions

Obey the applicable regulations and follow the necessary precautions for the process

media used. Reactions with the gauge materials are possible.

Obey the applicable regulations and follow the necessary precautions for the work

you do. Obey the safety instructions in this document.

Before you start work, find out if any vacuum components are contaminated. Obey

the applicable regulations and the necessary precautions when you handle

contaminated parts.

Ensure all other users are aware of the safety instructions.

Liability and warranty

Edwards accepts no liability and the warranty becomes non applicable if the end user or third

parties:

Ignore the information in this document

Use the gauge in a non-agreeable manner

Make any kind of interventions (modifications, alterations, etc.) on the gauge

Use the gauge with accessories not listed in this instruction manual.

The customer assumes the responsibility along with the process media used.

Gauge failures because of contamination are not included in the warranty.

WARNING:

Warnings are given where failure to obey the instruction could result in injury or death to

people. The symbol shown will change and refer to the applicable hazard.

CAUTION:

Cautions are given where failure to obey the instruction could result in minor injury or

damage to the equipment, associated equipment or process.

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