Edwards STP Series Manual de usuario

MT-91E-001-0

STP Series Turbomolecular Pumps

STP-iXA4507 Series

Instruction Manual

Read through the Safety Precautions and

each section of this Manual carefully before

using the STP pump.

Keep this Manual in a place where you can

quickly access it at any time.

2023.10

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

China Material Content Declaration

Hazardous Substances

Part name

Lead

(Pb)

Mercury

(Hg)

Cadmium

(Cd)

Hexavalent

Chromium

(Cr VI)

Polybrominated

biphenyls

(PBB)

Polybrominated

diphenyl ethers

(PBDE)

Aluminium alloys

×〇〇〇〇〇

Brass pipe fitting ×〇〇〇〇〇

Cable/wire/connector ×〇〇〇〇〇

(PCA)

Printed Circuit Assembly (PCA) ×〇〇〇〇〇

Electronics and

Controls

×〇〇〇〇〇

O: GB/T 26572 。

O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit

requirement in GB/T 26572.

X: GB/T26572 。

X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is

above the limit requirement of GB/T26572.

 
STP-iXA4507 series Turbomolecular Pump 
 
MT-91E-001-0 
 Page i 
 
PAGE 
i 
CONTENTS 
Section Title Page 
1INTRODUCTION 1 
1 Scope and definitions 1 
2 Electromagnetic compatibility 2 
3 Limited warranty 2 
3.1 Item warranted 2 
3.2 Disclaimer 3 
3.3 Spare parts 3 
4 Precautions for safe operation of the STP pump 4 
4.1 Usable gases 4 
5 Maintenance and inspection precautions 5 
6 Labels 5 
7 Operation principle of the STP pump 8 
8 STP pump specification 10 
2TECHNICAL DATA 13 
1 STP pump specifications 13 
2 Maximum gas flow-rate 15 
2.1 STP-iXA4507C/CV/CV3 15 
2.2 STP-iXA4507B/BV/BV3 16 
2.3 Water cooling use condition 17 
3 Control unit 18 
4 External appearance of the STP pump 19 
5 Label affixing positions 20 
3INSTALLATION OF THE STP PUMP 21 
1 Precautions before installation 21 
1.1 Operating environment 21 
1.2 Installation area 23 
1.3 Bench 24 
1.4 Insulation test 24 
2 Unpacking 25 
2.1 Unpacking the STP pump 25 
3 Name and function of each part 28 
3.1 Name and function of the pump 28 
3.2 Name and function of the control unit 29 
4 How to install the STP pump 31 
4.1 Cleaning the seal 32 
4.2 STP pump installation positions 33 
4.3 Secure the STP pump 34 
4.4 Screw holes for securing the base of the control unit 37 
4.5 Power cables 38 
4.6 How to connect the power cable 40 
5 Precautions for vacuum piping 41 
5.1 Vacuum piping method 41 
6 Connecting the purge port 42 
7 Connecting the water cooling pipes 43 
8 Attaching a baking heater 44 
 

 
STP-iXA4507 series Turbomolecular Pump 
 
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CONTENTS (CONTINUED) 
Section Title Page 
9 TMS unit 45 
9.1 TMS unit specification 45 
9.2 TMS heater 46 
9.3 Connecting the TMS heater cable 46 
9.4 TMS valve 46 
9.5 Configuration of the STP pump with the TMS 47 
9.6 Connecting the pump and TMS valve 48 
10 Connecting to semiconductor equipment 49 
10.1 Connecting to power 49 
10.2 Emergency off circuit (EMO circuit) 49 
4OPERATION 51 
1 Gas pumping, cooling and baking of the STP pump 51 
1.1 Gas pumping 51 
1.2 How to introduce a purge gas 52 
2 Cooling the STP pump 52 
2.1 Water-cooling method 52 
3 Baking the STP pump 53 
4 Before starting the STP pump 54 
4.1 Confirmation before starting 55 
4.2 Confirmation of vacuum system 55 
5 Powering ON/OFF 56 
5.1 Powering ON 56 
5.2 Powering OFF 56 
6 Pump operation 56 
6.1 Input operation port setting 56 
6.2 X5 STP-LINK socket 56 
7 "STATUS" LED 57 
8 Second speed option 58 
9 Operating the TMS unit (for use with the TMS unit) 59 
9.1 Before starting 59 
9.2 Starting/Stopping 59 
9.3 Setting the TMS unit function 59 
5SERIAL COMMUNICATION PROTOCOL 61 
1 Introduction 61 
2 Connection and setting up 62 
2.1 Signal connection 62 
2.2 Connecting the RS485 63 
2.3 Communication parameter setting 64 
2.4 Input operation port setting 64 
2.5 Serial communication timeout setting 65 
2.6 Recommended items about communication cable installation 66 
3 Protocol specifications 69 
3.1 General description 69 
3.2 Standard transmission frame 70 
3.3 Control command 
(in the RS232/RS485 single point connection) 70 
 

 
STP-iXA4507 series Turbomolecular Pump 
 
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iii 
CONTENTS (CONTINUED) 
Section Title Page 
3.4 Query command 
(in the RS232/RS485 single point connection) 72 
3.5 Transmission data format 73 
3.6 Frame control (checksum) 73 
3.7 Error control 73 
3.8 Transmission frame in RS485 multi-point connection 73 
3.9 Control command in RS485 multi-point connection 75 
3.10 Query command in RS485 multi-point connection 76 
3.11 Broadcasting command in RS485 multi-point connection 77 
3.12 Application note 78 
4 Command specifications 82 
4.1 Command list 82 
4.2 ReadMeas 83 
4.3 Command 83 
4.4 ReadFailMess 84 
4.5 ReadModFonct 88 
4.6 ReadVersion 90 
4.7 ReadCounters 91 
4.8 ReadSetPoint 92 
4.9 ReadMotorTemp 92 
4.10 ReadStatus 93 
4.11 ReadEvents 94 
4.12 SetSpeedSetPoint 95 
4.13 ReadSpeedSetPoint 96 
4.14 ReadModFonctWithWarning 97 
4.15 ReadMeasValue 100 
4.16 ReadOptionFunc 102 
4.17 SetOptionFunc 105 
4.18 ReadCondition 107 
4.19 ReadEventsWithTime 109 
4.20 SetOptions 114 
4.20.1 Second speed function setting 114 
4.20.2 Second speed selection 115 
4.21 ReadOptions 116 
4.21.1 Second speed function setting 116 
4.21.2 Second speed selection 117 
4.21.3 TMS temperature 118 
6STP-LINK AND DISPLAY UNIT 121 
1 STP-Link 121 
2 Display unit 121 
7SAFETY FUNCTIONS 123 
1 Safety functions 123 
1.1 Power Failure 123 
1.2 Operation after a power recovery 124 
1.3 Abnormal state of magnetic bearing (Disturbance) 124 
1.4 Excessive vibration (Disturbance) 124 
1.5 Motor driver overload (DRV Overload) 125 

 
STP-iXA4507 series Turbomolecular Pump 
 
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CONTENTS (CONTINUED) 
Section Title Page 
1.6 Overheating inside the STP pump (MOTOR Overheat) 125 
1.7 Overheating inside the control unit (CNT Overheat) 125 
1.8 Overspeed 125 
1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 125 
1.10 Safety feature of the rotor blade temperature 
warning sensor (Option) 126 
2 "WARNING" function 127 
2.1 "WARNING" function 127 
3 Contents of WARNING function 128 
3.1 First Damage limit 128 
3.2 Second Damage Limit 128 
3.3 Pump Run Time Over 128 
3.4 Pump Overload 129 
3.5 Imbalance 129 
3.6 Other Warning 130 
4 WARNING function setting 131 
5 Troubleshooting immediately after failure occurs 132 
5.1 After power failure 132 
5.2 After other abnormality/error 132 
6 Troubleshooting 133 
6.1 Indication of "STATUS" LED (red flash) 133 
6.2 Indication of "STATUS" LED (green and red alternately) 141 
6.3 No Indication of the "STATUS" LED (red) 141 
8MAINTENANCE AND INSPECTION 143 
1 Maintenance and inspection 143 
2 Cleaning 144 
3 Inspecting the deposit 144 
4 Maintenance 146 
4.1 Recommended overhaul intervals 146 
4.2 Standard replacement parts 146 
4.3 Recommended maintenance intervals for main parts 147 
5 Transporting for repair or overhaul 148 
9STORAGE AND DISPOSAL 149 
1 Storage of the STP pump 149 
2 Disposal 149 
SERVICE, SPARES AND ACCESSORIES 151 
1 Introduction 151 
2 Service 151 
3 Spares 151 
4 Accessories 152 
 

 
STP-iXA4507 series Turbomolecular Pump 
 
MT-91E-001-0 
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v 
ILLUSTRATIONS 
Figure Title Page 
Warning label of STP pump installation and Caution label 
for Heavy product 5 
Caution label of Heater removing prohibition and 
Warning label for hot surface 6 
Caution label for the high voltage devices 6 
Label for the rotational direction 6 
Notice label urging to use water-cooling 7 
Label related to connecting the water-cooling lines 7 
Warning label of urging overhaul the pump 7 
Cross sectional view of the STP pump 8 
External appearance of STP-iXA4507 series 19 
Label affixing positions 20 
Space around the STP pump* 23 
Example of lifting the STP pump 25 
Jacking up the STP pump 26 
Control unit bottom face 27 
Configuration of the STP pump 28 
Control unit (Front panel) 29 
Installation of the STP pump to the vacuum equipment 31 
STP pump installation positions 33 
Positions of the outlet port on the horizontally 
or slanted installed STP pump (view from bottom) 33 
Methods of securing the STP pump 36 
Screw holes for securing the control unit base 37 
Power cable (straight type connector) 38 
Connecting method of the power cable 39 
Connecting the purge port 42 
Positions of the cooling water port 43 
Baking heater installation position 44 
Configuration of the STP pump with the TMS 47 
TMS valve connection 48 
Example of cable installation in metallic duct 54 
The flash patterns of STATUS 57 
Serial port 61 
X2 connector (D-Sub 9pin) 62 
RS485 connections 63 
Grounding example (Both ends grounding) 66 
Grounding example (single-point grounding) 66 
Example of ring ferrite core installation 67 
Example of cable installation in metallic duct 67 
Example of a differential signal waveform 68 
PC to SIM communication 69 
Block diagram of communication process example 78 
Example of answer resending process 79 
Example of response when the command is sent continuously 79 
Example of command sending during answer data reply 79 
Example of the communication cycle process 80 
Example of the command sending process 81 
Example of the answer receiving process 81 
 

 
STP-iXA4507 series Turbomolecular Pump 
 
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TABLES 
Table Title Page 
Maximum gas flow-rate (STP-iXA4507C) 15 
Maximum gas flow-rate (STP-iXA4507CV) 15 
Maximum gas flow-rate (STP-iXA4507CV3) 15 
Maximum gas flow-rate (STP-iXA4507B) 16 
Maximum gas flow-rate (STP-iXA4507BV) 16 
Maximum gas flow-rate (STP-iXA4507BV3) 16 
Environmental requirements for installation 22 
Eye nut / Eye bolt size 25 
Pump functions 28 
Control unit front panel functions 30 
Tightening torque of the bolt 34 
Destructive torque and recommended securing bolt 
for inlet port flange 35 
Power cable 38 
TMS unit specification 45 
Second speed function 58 
X2 pin assign 62 
Communication parameters 64 
Input operation port 64 
Serial communication time out setting 65 
Transmission control characters 69 
Pump operation commands 77 
Command list 82 
Pump operation commands 84 
Error message values 86 
Error message values (continued) 87 
Pump operation mode 89 
Remote mode 94 
Warning value bit assign 98 
Parameter setting value 104 
Option function number and parameter list 114 
Option function number and parameter list 116 
Functions of STP-Link 121 
STATUS LED and X4 REMOTE output signals 
at power failure 123 
WARNING function 127 
Default setting of WARNING function 131 
Factory Setting and Variable Range 131 
Error List 134 
Error List (continued) 135 
Error List (continued) 136 
Error List (continued) 137 
Error List (continued) 138 
Error List (continued) 139 
Error List (continued) 140 
Troubleshooting with no indication of the "STATUS" LED 141 
 
 