Varian TriScroll 300 Series Manual de usuario

DRAFT 6/11/03

MODULE REPLACEMENT

MANUAL

vacuum technologies

TriScrollTM 300 Series

Dry Scroll

Vacuum Pump

Manual No. 699904285

Revision E

May 2003

(505)872-0037

idealvac.com

DRAFT 6/11/03

Varian Vacuum Technologies

Varian TriScroll™ 300

Dry Scroll Vacuum Pump

TriScroll is a trademark of Varian Vacuum Technologies.

Loctite and PST are registered trademarks of Loctite Corporation.

Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

iii

TriScroll 300 Dry Scroll Vacuum Pump

DRAFT 6/11/03

Contents

Declaration of Conformity

Preface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vi

Safety Considerations . . . . . . . . . . . . . . . . . . . . . . .vi

Related TriScroll Manuals . . . . . . . . . . . . . . . . . . .viii

Maintenance and Tool Kits . . . . . . . . . . . . . . . . . .viii

Factory Service Options . . . . . . . . . . . . . . . . . . . . .ix

Serial Numbers Notes . . . . . . . . . . . . . . . . . . . . . . .ix

Contacting Varian Vacuum Technologies . . . . . . . .ix

General Information . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Equipment Required to Install Pump Module . . . . . . 1

Tools Required to Install Pump Module . . . . . . . . . . 1

Maintenance Took Kit . . . . . . . . . . . . . . . . . . . . . . . . . 2

TriScroll Disassembly. . . . . . . . . . . . . . . . . . . . . . . . . . 4

TriScroll Reassembly . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Pump Conditioning and Performance Verification . 11

Request for Return Health and Safety Certification

declare under our sole responsibility that the product,

erklären, in alleniniger Verantwortung, daß dieses Produkt,

déclarons sous notre seule responsabilité que le produit,

declaramos, bajo nuestra sola responsabilidad, que el producto,

verklaren onder onze verantwoordelijkheid, dat het product,

dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity

Konformitätserklärung

Déclaration de Conformité

Declaración de Conformidad

Verklaring de Overeenstemming

Dichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents.

auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).

al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).

waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.

a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Wir

Nous

Nosotros

Wij

Noi

Varian, Inc.

Lexington, MA, 02421-3133 USA

121 Hartwell Avenue

Vacuum Technologies

Frederick C. Campbell

Operations Manager

Vacuum Technologies

March 2003

Lexington, Massachusetts, USA

Varian, Inc.

TriScroll Series Vacuum Pump

ara

on o

orm

ity

98/37/EEC, Machinery Directive

EN 1012-2:1996 Compressors and Vacuum pumps Safety Reqmts; Part 2 Vacuum Pumps

EN 1050:1996 Safety of machinery - principles for risk assessment

EN 60204-1 Electrical equipment of industrial machines; general requirements

73/023/EEC, Low Voltage Directive

EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance

89/336/EEC, Electromagnetic Compatibility Directive

EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test

TriScroll 300 Dry Scroll Vacuum Pump

Preface

This manual provides the information you need to successfully perform replacement of the entire

module of your Varian TriScrollTM Dry Vacuum Pump. Module replacement is performed as an

alternative to performing a complete overhaul and rebuild (Major Maintenance) and is sold as one of

the options recommended when the pump base pressure has risen to an unacceptably high level for

your application. If you have questions that are not addressed in this manual, please contact the nearest

Varian Vacuum Technologies service facility listed on the rear cover of this manual.

Safety Considerations

READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.

The following format is used in this manual to call attention to hazards:

Maintenance personnel must be aware of all hazards associated with this equipment. They must

know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them.

The consequences of work performed by unskilled or improperly trained maintenance personnel, or

careless operation of the equipment employed in the specified maintenance procedures can be serious.

Every maintenance person must read and thoroughly understand the materials discussed and the

instructions provided in this manual, as well as any additional information provided by Varian Vacuum

Technologies.

All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,

state/province, and national agencies regarding specific requirements and regulations. Address any

safety, operation, and/or maintenance questions to the nearest Varian Vacuum Technologies location.

WARNING The warning messages are for attracting

the attention of the operator to a partic-

ular procedure or practice which, if not

followed correctly, could lead to serious

injury.

CAUTION The caution messages are displayed

before procedures, which if not fol-

lowed, could cause damage to the

equipment.

NOTE The notes contain important informa-

tion taken from the text.

vii

TriScroll 300 Dry Scroll Vacuum Pump

WARNING Disconnect power from the

TriScroll 300 before performing any

maintenance procedure.

Allow the pump to cool before perform-

ing any maintenance procedure.

Approximate cool-down time is one to

two hours.

CAUTION Wipe all O-rings clean with a lint-free

cloth before installation to ensure that

no foreign matter is present to impair

the seal.

Do not use alcohol, methanol or other

solvents on O-rings. To do so causes

deterioration and reduces their ability to

hold a vacuum.

If applicable, apply a small amount of

Krytox®GPL 224 grease and wipe the

O-rings “shiny” dry.

NOTE Varian Vacuum Technologies recom-

mends replacing all O-rings during rou-

tine maintenance or during any

maintenance procedure requiring that

O-rings be removed.

Unless otherwise stated, apply

Loctite®242 or Loctite PST®567 to the

first few threads only. Apply just enough

to obtain a seal.

WARNING The TriScroll 300 weighs 26.4 kg

(58 lbs). To avoid injury, use proper lift-

ing techniques when moving the pump.

TriScroll 300 Dry Scroll Vacuum Pump

viii

Related TriScroll Manuals

Manuals related to the installation and operation, tip seal replacement, and major maintenance for the

TriScroll 300 series pumps are listed in the following table:

Maintenance and Tool Kits

Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A

description of each kit and ordering information is provided in the following table:

Title Applicable TriScroll Model Part Number

Major Maintenance Manual All TriScroll 300 Series Models 699904260

Tip Seal Replacement Manual All TriScroll 300 Series Models 699904280

Installation and Operation Manual All TriScroll 300 Series Models 699904265

Description Contents Applicable TriScroll

Model

Part Number

Major Maintenance Kit All bearings, bearing seals, bearing

lubricant, O-rings, and tip seals

required to rebuild TriScroll 300

Series pumps.

All TriScroll 300 Series

models

PTSS0300MK

Maintenance Tooling Kit All fixtures and tools required to

perform any maintenance on

TriScroll 300 Series pumps.

All TriScroll 300 Series

models

PTSS0300TK

Replacement Tip Seal Set Replacement tip seals and static

O-rings for TriScroll 300 Series

pumps.

All TriScroll 300 Series

models

PTSS0300TS

NOTE: The Maintenance Tool Kit is also required for tip seal replacement.

TriScroll 300 Dry Scroll Vacuum Pump

Factory Service Options

Varian offers factory-rebuild service or advance exchange of complete TriScroll Pumps or TriScroll

Pump Modules. Contact your nearest Varian Vacuum Technologies sales office for price and availability

information. Select your preferred service option from the table below.

Serial Numbers Notes

This manual applies to TriScroll 300 series with serial numbers beginning with LP, and ascending from

LPB80124. For service on TriScroll series pumps with serial numbers J7000001 to A8000108, contact

your nearest Varian Vacuum Technologies office.

TriScroll 300 series pumps with serial number above LPC80250 have 1/4-18 National Pipe Threads in

the bearing purge, gas ballast, and exhaust ports. Pumps with serial numbers below LPC80250 were

manufactured with 1/4-19 British Standard Pipe Threads. Contact your nearest Varian Vacuum

Technologies office if mating hardware is required.

Contacting Varian Vacuum Technologies

In the United States, you can contact Varian Vacuum Technologies Customer Service at

1-800-8VARIAN. See the back cover of this manual for a listing of our sales and service offices.

Internet users:

❑Send email to Customer Service & Technical Support at vpl.customer.support@varianinc.com

❑Visit our web site at www.varianinc.com/vacuum

❑Order on line at www.evarian.com

Factory Service Options Part Number

Advance Exchange TriScroll 300 Single Phase EXPPTS03001

Advance Exchange TriScroll 300 Three Phase EXPPTS03003

Advance Exchange TriScroll 310 Single Phase EXPPTS03101

Advance Exchange TriScroll 310 Three Phase EXPPTS03103

Advance Exchange TriScroll 300 Pump Module Only EXPTS0300SC

Advance Exchange TriScroll 310 Pump Module Only EXPTS0310SC

Service/Rebuild TriScroll 300 Pump (Single or Three Phase) PTS0300KMA

Service/Rebuild TriScroll 310 Pump (Single or Three Phase) PTS0310KMA

Service/Rebuild TriScroll 300 Pump Module Only PTS0300SCRP

Service/Rebuild TriScroll 310 Pump Module Only PTS0310SCRP

TriScroll 300 Dry Scroll Vacuum Pump

DRAFT 6/11/03

General Information

Varian TriScroll 300 series pumps are designed to provide years of trouble-free service if maintenance

procedures and intervals are observed. Bearing grease replenishment and tip seal replacement is

recommended when the pump base pressure has risen to an unacceptably high level for your

application. Bearings, rotary seals and O-rings should also be replaced if the pump exhibits humming

or grinding noises from the bearings. Main bearing life may be shortened if your application requires

the pumping of high quantities of water vapor. Use of the bearing purge will keep this water from

impacting bearing life.

Equipment Required to Install Pump Module

❑Pump Module

Tools Required to Install Pump Module

❑4 MM Hex key

❑5 MM Hex key

❑6 MM Hex key

Included in Maintenance Tool Kit: #PTSS0300TK (page 2)

TriScroll 300 Dry Scroll Vacuum Pump

DRAFT 6/11/03

Maintenance Took Kit

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