SRS Labs QMS 100 Series Manual de usuario

User’s Manual

QMS 100 Series

Gas Analyzer

1290-D Reamwood Avenue

Sunnyvale, CA 94089 U.S.A.

Phone: (408) 744-9040, Fax: (408) 744-9049

Email: [email protected] ▪www.thinkSRS.com

Version 3.2 (1/2012)

Certification

Stanford Research Systems certifies that this product met its published specifications at the time

of shipment.

Warranty

This Stanford Research Systems product is warranted against defects in materials and

workmanship for a period of one (1) year from the date of shipment.

Service

For warranty service or repair, this product must be returned to a Stanford Research Systems

authorized service facility. Some components may be serviceable directly from the supplier.

Contact Stanford Research Systems or an authorized representative before returning this product

for repair.

Trademarks

Ultra-Torr®and VCR®are registered trademarks of Swagelok Co.

Tygon®is a registered trademark of Norton Co.

All other brand and product names mentioned herein are used for identification purposes only,

and are trademarks or registered trademarks of the respective holders.

Information in this document is subject to change without notice.

Stanford Research Systems, Inc.

1290-D Reamwood Avenue

Sunnyvale, California 94089

408 744 9040

Printed in USA

iii

SRS QMS Gas Analyzer

Table of Contents

Safety ........................................................................................................................................................................... iv

Symbols .........................................................................................................................................................................v

Fast Start ...................................................................................................................................................................... vi

Specifications.............................................................................................................................................................. vii

Materials List ............................................................................................................................................................... ix

Calibration Log..............................................................................................................................................................x

Chapter 1. Introduction & Operation.........................................................................................................................1–1

Introduction ....................................................................................................................................................1–2

What’s Inside ?...............................................................................................................................................1–4

Operation........................................................................................................................................................1–7

Mass Spectrometry Basics............................................................................................................................1–16

Chapter 2. Windows Software................................................................................................................................... 2-1

Overview ........................................................................................................................................................ 2-3

System Requirements ..................................................................................................................................... 2-4

Getting Started................................................................................................................................................ 2-4

Features and Operation................................................................................................................................... 2-6

RGA Head and Scan Parameters.................................................................................................................. 2-13

Display Modes.............................................................................................................................................. 2-15

General Utilities ........................................................................................................................................... 2-17

Head Calibration and Security...................................................................................................................... 2-20

RGA On-line Help ....................................................................................................................................... 2-23

Chapter 3. Measurement Techniques......................................................................................................................... 3-1

Calibration...................................................................................................................................................... 3-2

Techniques ................................................................................................................................................... 3-16

Glossary

References

SRS QMS Gas Analyzer

Safety

WARNING

Hazardous voltages, capable of causing injury or death, are present in this

instrument. Use extreme caution whenever the instrument cover is removed.

Always unplug the unit while removing the cover.

Ventilation

The QMS system requires forced air cooling to operate at a reasonable

temperature. Do not block the air inlet or exhaust on the back of the unit.

Components will fail without this cooling.

Lifting

The QMS system is heavy; use care when lifting. Two people are recommended

for lifting the system. The handle is provided for occasional use and small

distances.

Line Voltage

The QMS system is specified for line power of either 110 V / 60 Hz or 220 V / 50 Hz. The

diaphragm pump will only operate on the specified voltage. Operating at other voltages will

damage the motor. For 110 V operation use one 3 A fuse. For 220 V operation, two 1½ A fuses

must be used in the power entry module.

Exhaust

As shipped, the QMS system exhausts to the atmosphere. If the system is analyzing hazardous

gases, the user must make provisions to handle the exhaust from the system. A standard 1/4 inch

connection is provided for this purpose.

Elastomer Seals

Silicone has been reported to react adversely and irreversibly with the glass contained in an

electron multiplier. In systems containing an electron multiplier, do not use silicone greases or

oils on seals; use only hydrocarbon based materials.

SRS QMS Gas Analyzer

Fast Start

• Connect the power cord to the QMS. Set the four switches on the control panel to off and turn

on the main power switch.

• Turn on the diaphragm pump switch and the turbo pump switch. The pumps should begin the

startup sequence, which takes several minutes. When both green lights on the display are bright

the system is ready to operate.

• Connect the serial cable between the RGA and an available COM port on the computer (typically

COM2).

• Install the QMS software on the computer by inserting the first disk and executing the SETUP

program.

• Start the QMS program. Under the Utilities menu, choose “RS232 Setup...”. In the dialog box

that appears, choose the COM Port that the QMS is connected to and then press the “Connect”

button. After a short initialization, the QMS is ready. To confirm communications, under the

“Head” menu choose “Get Head Info...”. A box will appear showing information about the QMS.

• Click the filament button ( ) on the toolbar to activate the ionizer. Click the GO button on the

tool bar and a scan will begin from 1 to 50 amu. The mass spectrum will show a rough

background spectrum.

• Click the filament button ( ) on the toolbar to deactivate the ionizer.

• Loosen the inlet fitting and remove the plug. Attach the capillary inlet and tighten the fitting

(finger tight; no tools are required).

• Turn off the Turbo Pump switch and wait for the green light to extinguish. Next, set the

Capillary Flow Valve to open. With the flow started, the Turbo Pump switch can be turned back

on. Initially, the pump will not start and the light will blink. The pump will start as soon as the

pressure falls below 5 mbar. When the pump and capillary flow are started, the first three lights

will be on and bright. In the software, select the Utilities|Pressure Reduction menu item and enter

the Pressure Reduction Factor for the capillary. Check the box to enable the factor.

• Set the sample flow switch on the control panel to open. Restart the filament and perform a scan.

The spectrum of air will be displayed, which can be compared to the example below.

1 4 7 10 13 16 19 22 25 28 31 34 37 40 43 46 49 52 55 58 61 64 67 70 73

-1

1.0x10

m/z

mBar Air Scan

vii

SRS QMS Gas Analyzer

Specifications

Inlet

Type capillary: available in stainless steel, PEEK, and glass

lined plastic

Flowrate 1 to 10 milliliter per minute at atmospheric pressure

Response time <400 ms

Pressure selectable from 10 mbar to 1 bar

Mass Spectrometer

Type quadrupole

Detector Faraday cup standard

electron multiplier optional

Range 1 to 200 atomic mass units (amu)

Resolution <0.5 amu at 10% of peak height

Detection limit <10 ppm with Faraday cup detector

<1 ppm with electron multiplier

Operating pressure 5 ×10-6 mbar

Connections

Inlet 1/4 inch Ultra-Torr®fitting

Exhaust 1/4 inch Swagelok tube adapter

Computer RS-232C, 28800 baud, DB9 connector

Power 3 pin grounded cable

System

Pumps hybrid turbomolecular/drag pump, 70 liter/s,

ultimate pressure 2 ×10-9 mbar

diaphragm pump with ultimate pressure less than 1 mbar

viii

SRS QMS Gas Analyzer

protection class IP44

Materials

(see full materials list for details)

construction: SS304 and SS316

insulators: alumina, ceramic

seals: Viton, buna-N, and nitrile butyl rubber

misc: aluminum, Tygon

General

Startup time 2 minutes from full stop

Max. Ambient Operating

Temperature

35 °C

Power requirement either 110 V / 60 Hz or 220 V / 50 Hz (not field

selectable) less than 600 W total

Dimensions 44 cm H ×20 cm W ×61 cm D ( 17 in H ×8 in W ×

24 in D )

Weight 34 kg (75 lb. )

SRS QMS Gas Analyzer

Materials List

SRS receives many requests for information about corrosion compatibility. It is our policy not to

state the compatibility of our system with various corrosive environments. We simply cannot

test the myriad combinations of environments that our customers use.

We do provide a list of all the materials exposed to the gas being introduced into the system.

Our expectation is that users who need to measure corrosive environments already have some

type of system that creates, handles and contains the corrosive gases. Given that they have

designed and operate said system, they are the best people to decide the compatibility of the

materials in our system with the specific corrosive environment.

The QMS system contains the following materials:

Body

•304 stainless steel - high vacuum tube

•316 stainless steel - quarter inch tube and fittings

•molybdenum - electrical feedthrough

•ceramic - electrical feedthrough

•AgCuIn - braze material on feedthroughs

•alumina - contained in the RGA

•aluminum - body of diaphragm pump

Replaceable Components

•glass - if an electron multiplier is installed in the RGA

•chromium - surface of the electron multiplier

•IrO2·ThO2- filament of RGA

Seals

•copper - seals in the CF high vacuum flanges

•316SS - major component of VCR®seals

•silver - a thin layer on the VCR®seals to prevent gauling

•Viton - o-ring seal in the KF flange

•buna-N - seal in the high conductivity valve

•neoprene - diaphragms in diaphragm pump

•nitrile butyl rubber(NBR) - diaphragm pump valves - backing line

•Tygon®- connections to diaphragm pump (can be substituted)

SRS QMS Gas Analyzer

Calibration Log

SRS serial number ___________

In the table below are the results of the factory calibration of the inlet and capillary. The factor

is entered in the pressure reduction factor dialog box (under the Utilities menu) in the RGA

software. Although the RGA software will store the value for you, a written record is

recommended.

performed

capillary

length P

high side test gas factor

FACTORY

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