Siargo MF5000 Series Manual de usuario

Gas Mass Flow Meter VD.1

Model MF5000

Gas Mass Flow Meter

with MEMS calorimetric sensing technology

MF5000 Series

User Manual

Document No. 03-2021-M3 EN

Issue date: 2021.03

Revision: VD.1

Siargo Ltd.

3100 De La Cruz Boulevard, Suite 210

Santa Clara, CA 95054

USA

Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or

descriptions without prior notice.

For further information and updates, please visit: www.siargo.com

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Attention!

Use with caution!

•Please carefully read this manual prior to operating this product.

•Do not open or modify any hardware which may lead to irrecoverable

damage.

•Do not use this product if you suspect any malfunctions or defection.

•Do not use this product for corrosive media or in a strong vibration

environment.

•Use this product according to the specified parameters.

•Only the trained or qualified personnel shall be allowed to perform

product services.

•Be cautious for the electrical safety, even it operates at a low voltage,

any electrical shock might lead to some unexpected damages.

•The gas to be measured should be clean and free of particles. Do not apply

this meter for liquid medium.

•Do not apply for any unknown or non-specified gases that may

damage the product.

•For remote data, please be sure the meter is properly configured.

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Table of Contents

1. Overview ......................................................................................................................................................5

2. Receipt / unpack of the products ...............................................................................................................6

3. Knowing the products.................................................................................................................................7

3.1. Product description.............................................................................................................................7

3.2. LCD description ...................................................................................................................................7

3.3. Power and data cable description......................................................................................................8

3.4. Mechanical dimensions.......................................................................................................................9

4. Installation.....................................................................................................................................................10

5. Operation and MENU description................................................................................................................13

5.1. Check the product specifications .........................................................................................................13

5.2. Check the leakage .................................................................................................................................13

5.3. Power the meter and digital data connection ....................................................................................13

5.4. Meter MENU descriptions....................................................................................................................14

5.4.1. Starting the measurement............................................................................................................14

5.4.2. MENU entry with a verified password..........................................................................................14

5.4.3. Set the unit for accumulated flow rate ........................................................................................15

5.4.4. Set the unit for instant flow rate ..................................................................................................15

5.4.5. Set the response time....................................................................................................................16

5.4.6. Set Gas conversion factor (GCF) for different gas measurement ..............................................16

5.4.7. Set the communication protocol..................................................................................................17

5.4.8. Set the meter address ...................................................................................................................17

5.4.9. Change the default password .......................................................................................................17

5.4.10. Reset the offset............................................................................................................................18

5.4.10. Reset the totalizer or accumulated flow rate ............................................................................18

5.4.11. Exit the MENU..............................................................................................................................18

5.4.12. MENU key sequence for the settings .........................................................................................19

5.5. RS485 Modbus communication protocol (Mode P2)..........................................................................20

5.5.1. Hardware connection..........................................................................................................................20

5.5.2. Communication parameters ..............................................................................................................20

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5.5.3. Frame ...................................................................................................................................................21

5.5.4. Function codes ....................................................................................................................................21

5.5.5. Registers ..............................................................................................................................................21

5.6. Analog output ........................................................................................................................................23

5.6.1. 4~20mA output ...............................................................................................................................23

6. Product selection and order information....................................................................................................24

6.1. Product selection ...................................................................................................................................24

6.2. Order contact and customer support ..................................................................................................24

7. Technical specifications ................................................................................................................................25

8. Technical notes for the product performance ............................................................................................26

8.1. Measurement principle..........................................................................................................................26

8.2. Precautions for the best performance of the product .......................................................................26

8.2.1. Comparison with a third party reference meter...........................................................................26

8.2.2. Particle contamination and fluidic cleanness...............................................................................27

8.2.3. Apply to a different gas medium...................................................................................................27

9. Troubleshooting............................................................................................................................................28

10. Warranty and Liability ................................................................................................................................29

11. Service contact ............................................................................................................................................31

Appendix I: Product evaluation kit..................................................................................................................32

Appendix II: Document history........................................................................................................................33

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1. Overview

All contact information can be found at the end of this manual.

This manual provides essential information for the operation of the MF5000 series of gas mass flow

meters for general-purpose gas metrology applications. The product performance, maintenance,

and trouble-shooting as well as the information for product order, technical support, and repair are

also included.

MF5000 mass flow meters are designed for general purpose precise industrial gas measurement,

monitor, or control. The meter series cover a wide dynamic flow range with a working pressure rating

of up to 1.5MPa, and a temperature ranging from -20 to 60°C.

The meters are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together

with the smart control electronics. The sensor surface is passivated with silicon nitride ceramic

materials together with a water/oil proof nano-coating for performance and reliability. The meter

body is made of stainless steel that is available for applications of most of the gases.

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2. Receipt / unpack of the products

Upon receipt of the products, please check the packing box before the dismantlement of the packing

materials. Ensure no damages during shipping. If any abnormality is observed, please contact and

notify the carrier who shipped the product and inform the distributors or sales representatives if the

order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed

as well. For any further actions, please refer to the return and repair section in this manual.

If the packing box is intact, proceed to open the packing box, and you shall find the product (either

the meter or the meter with valve per the actual order). The power adapter and/or data cable as

shown below may also be found according to your actual order.

Flow meter data cable

Please check immediately for the integrity of the product as well as the power and data cable, if any

abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as

you can. If any defects are confirmed, an exchange shall be arranged immediately via the original

sales channel. (Note: the LCD screen shall not be lighted until the power cable is plugged in). This

user manual shall also either be included in the packing box or via an online request for an electronic

version. In most cases, this manual shall be made available to the customer before the actual order.

The cable is a standard one with a DB9 connector.

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3. Knowing the products

3.1. Product description

3.2. LCD description

The LCD provides all information that the product measures. Some symbols are reserved for

future upgrades, and will not be lighted during the operation. The following table details the

meaning of each of the symbols.

USER

The top row, only displayed when communication or other user-

defined function is in process.

Total

The middle row displays the totalizer or accumulated flow rate in SL

(standard liters) or Nm3(Normalized cubic meters). Here the

standard (normalized) conditions refer to 20°C, 101.325kPa.

Meter body

LCD display

MENU keys

NPT or other

connectors

Flow direction

Electrical interface, DB9

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Flowrate

The bottom row displays the instant flow rate in SLPM (Standard

Liters per minute)

Error 1 –Sensor error

Error 2 –ADC error

Error 3 –RTC error

Error 4 –EEPROM error

Error 5 –Oscillator (crystal) error

Temperature, for models with temperature option

Pressure, for models with pressure option

*Note: Both the pressure and temperature sensors can be integrated with the current product

but not with the default models. Please contact the manufacturer for further

information.

3.3. Power and data cable description

Table 3.3: MF5o00 wire assignments.

Wire

Color

Definition

Purple

4~20 mA, output

Brown

RS485B

Transparent

4~20mA, ground

Yellow

Pulse, output

White

Pulse, ground

Blue

N.C.

Green

RS485A

Black

Ground, common

Red

Power supply, 12-24Vdc

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3.4. Mechanical dimensions

Figure 3.4.1. MF5000 meter dimensions

Model

DN (mm)

D (NPTM)

MF5003

3.00

1/8”

118.0

144.0

28.0

38.0

Φ3.0

36.0

MF5006

6.00

1/4”

124.0

144.0

28.0

38.0

Φ6.0

36.0

MF5008

8.00

3/8”

124.0

151.0

35.0

38.0

Φ8.0

50.0

MF5012

12.00

1/2”

150.0

156.0

40.0

Φ12.0

50.0

MF5019

19.00

3/4”

182.5

156.0

40.0

Φ19.0

70.0

SMERI S.r.l.

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