SevenStar CS100D MFC Manual de usuario

CS100D MFC/MFM

User’s Manual

July. 2020

Contents

SECTION 1 INTRODUCTION

1.1 Declaration ...................................................

3.4 Customer Ground Correction(CGC)............

1.2 Attention.......................................................

3.5 Soft-Start .........................................................

1.3 The notice of safety ......................................

3.6 Delay................................................................

1.4 General .........................................................

3.7 Valve Command Mode ...................................

1.5 Specification .................................................

3.8 Valve Type........................................................

1.6 Calibration features.....................................

3.9 Multi-Gas and Multi-Flow.............................

SECTION 2 INSTALLATION

3.10 Total Flow Accumulator.................................

2.1 General .........................................................

3.11 Alarm .............................................................

2.2 Unpacking.....................................................

3.12 LED................................................................

2.3 Mechanical Installation ...............................

SECTION 4 MAINTENANCE

2.3.1 General........................................................

4.1 General ............................................................

2.3.2 Installation ..................................................

4.2 Caution ............................................................

2.3.2.1 1/4VCR Installation .................................

SECTION 5 TROUBLESHOOTING

2.3.2.2 Compression Fitting Installation..............

5.1 Initial check.....................................................

2.4 Electrical Installation...................................

5.2 Troubleshooting ..............................................

2.5 Checking Before Operation.......................

SECTION 6 WARRANTYAND SERVICES

6.1 Guarantee of Sevenstar..................................

SECTION3 FUNCTIONS

6.2 Product Warranty…………………………...

3.1 General...........................................................

6.3 Services............................................................

3.2 Control Mode ...............................................

6.4 Disclaimer........................................................

3.3 Zero...............................................................

APPENDIX I.........................................................

APPENDIXⅡ.......................................................

APPENDIXⅢ.......................................................

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Instruction of MFC/MFM

1.1 Declaration

The copy right of The user’s manual of mass flow controller and mass flow meter is

subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not

allowed to duplicate, store and distribute any part of this manual in mean of electric,

mechanical, photocopy, recording or other way without permission of Sevenstar. This

manual is not assured that there is no mistake and missing in which have been corrected

strictly, and the publisher is under no obligation to the mistake or missing, meanwhile the

publisher is not in charge of any loss that this manual leads to.

Beijing Sevenstar Flow Co. , Ltd

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1.2 Attention

Dear customer, thanks for using CS mass flow controller and mass flow meter. This

manual describes in detail important issues about correct and safe operations of the

product.

User of the product should read and comprehend this manual and pay attention to the

text with labels and notices.

Sevenstar assumes no liability for the customer’s failure to comply with this manual.

This manual is necessary for your installation and maintenance, please keep it carefully.

1.3 The notice of safety

Please pay attention to the below notices when reading this manual. We are not responsible

for any result without abiding by the below notices.

a) Do not replace any components or disassemble instrument.

Do not replace any components, or disassemble the instrument without any authorized

and make sure that the label or/and seal of product is not removed when returning for

reworking, recalibration and maintenance.

b) Please contact professional for technical service.

Do not replace any components. Any technical support is provided by professional who

must be authorized by Sevenstar.

c) Please pay more attention to use dangerous gas.

Instrument should be purged completely and keep safety if dangerous gas is used.

Meanwhile make sure that moist gas must not react with material of seal and

instrument.

d) Please pay attention to purging instrument.

The whole system should be purged by dry gas after and before the instrument is

installed.

e) Please abide by proper steps of purging.

Product should be purged and handled with gloves.

f) Do not use the instrument in explosive environment.

Do not use the instrument in explosive environment, unless the safety certificate is

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available.

g) Please use proper fittings and keep the rules.

All fittings of instrument must be matched according to the listing in manual. Please

read manual carefully before screwing tightly.

h) Please do leakage check.

Please check carefully all of vacuum parts and make sure that there is not leakage in

the system.

i) Please make sure that instrument is working under safe pressure.

Please make sure that the pressure of inlet gas is less than maximum working pressure

(referring to maximum working pressure in manual).

j) Please keep the whole system away from pollution.

When system running, do not use polluting gas, such as particle of dust, dirt, fibre,

glass or scrap iron.

k) Please do warm-up instrument before working.

Please do warm-up instrument, especially in using dangerous gas. Please close valve

completely to make sure that there is not error flow.

1.4 General

Mass flow controller (MFC) accurately measures and controls mass flow rates, which

is widely applied in the fields as: semiconductor and IC fabrication, special materials

science, chemical industry, petrolic industry, pharmaceutical industry, environmental

protecting and vacuum system researching, etc.. The typical applications include:

microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma

etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting,

micro-reaction equipment, mixing & matching gas system, capillary flow control system,

gas chromatograph and other analytical instruments.

The CS100D MFC/MFM are a latest generation MFC for use in semiconductor

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applications and demanding industrial uses where its high accuracy and flexibility in

interfacing are required.

The CS100D MFC/MFM incorporate a dual interface, voltage and RS-485. It is

possible to operate the instrument completely digitally or it can be operated in analog

mode .

In addition, auto-alarm, change of operating gas and range available through the

digital interface. Customer Secondary Development of control and sample software is

available through the open protocol.

CS100D MFC default setting：

MAC address：32；

RS485 baud rate：19200；

Control mold：0-5V analog signal control.

For more information, please refer to www.mfcsevenstar.cn

Path: Service >> Downloads>>Software download>>Communication Protocol .

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1.5 Specification

CS100

Type

CS100D

Valve

Rest Position

Normally Closed

No Valve

Full scale range

(N2)

(0～10,20,30,50,100,200,300,500) SCCM

(0～1,2,3,5,10,20,30) SLM

Accuracy

±1.0% S.P. (≥35% F.S.)；±0.35% F.S.(＜35% F.S.)

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response

Time

≤ 1sec

Differential

Pressure

0.05～0.35MPa；FLOW≤10 SLM

0.1～0.35MPa；10＜FLOW≤30 SLM

＜0.02 MPa

Temperature

Coefficient

Zero: ≤±0.05% F.S/℃； Span: ≤±0.1% F.S/℃

Max

Pressure

3MPa

10MPa

Leak integrity

1×10-9 Pa·m3/ sec He（1×10-8 atm·cc / sec He）

Wetted

Materials

Metal

maximum

operating

pressure

0.45MPa

Operation

Temperature

（5～45）℃

Input Signal

Analog:

(0～5)VDC

Digital: RS485

N/A

Output

Signal

Analog:

(0～5)VDC

Digital: RS485

Analog:

(0～5)VDC

Digital: RS485

Electronic

Connector

9 pin male

sub-D；

15 pin

male

sub-D

15 pin

male

sub-D

9 pin male

sub-D；

15 pin

male

sub-D

9 pin

male

sub-D；

3 pin

male O

15 pin

male

sub-D

Power

Supply

±15V

+24V

ATUO ZERO

SUPPORT

Surface

Finish

25μinch Ra

Fittings

VCR1/4″male

Weight

1.2Kg

1Kg

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Notes :

MFC/MFM is calibrated by N2as a standard gas.

Units: SCCM (Standard Cubic Centimeter/Min);

SLM (Standard Liter/Min)

Standard Situation: Tem —273.15K ( 0 ºC );

Air Pressure —101325 Pa (760mm Hg)

For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM

is identical to “L/min, 0 ºC ,1atm”.

F.S. : Full Scale

1.6 Calibration Features

Normally, the MFC are calibrated close to customer’s requirement ( the requirement

should be accorded with the specification). Without customer’s information, the MFC are

calibrated under standard conditions.

1.6.1 Standard conditions

Without special conditions specified by the customer, the MFC is calibrated under the

following standard conditions:

Pressure Outlet: Atmospheric.

Normally gas mass flow rate is transferred to gas volume flow rate at standard state.

Mass flow rate unit:

SCCM——standard cubic centimeter per minute.

SLM——standard liter per minute.

Standard state：Temperature —— 0ºC (273.15K)

Pressure —— 101325Pa (760mmHg)

At standard state, the gas density will be constant. The multiplication of density and

volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume

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flow rate can represent mass flow rate.

The standard mounting position is horizontal, And other positions such as

vertical(inlet up or down)，flatwise or customized position are optional. The mounting

position should be specified by the customer to ensure the best accuracy.

1.6.2 Manufacturing Environment

The MFC are assembled in a class 100 clean room, calibrated, packaged and

controlled in class 1000 environment. The temperature is 22±2 ℃.

1.6.3 Precision Adjustment

Each MFC is accurately controlled for 24 hours after manufacturing on a different

calibration bench. The accuracy, the dynamic response, the stability to pressure

variations is double checked, only qualified product available for sale.

SECTION 2 INSTALLATION

2.1 General

WARNING: Toxic, corrosive or explosive gases must be handled with extreme care.

After installing the MFC, the system should be thoroughly checked to ensure it is leak-free.

Purge the MFC with a dry inert gas for one hour before using corrosive gases.

IMPORTANT: When installing the MFC, ensure that the arrow on the back of the unit

in the same direction as the gas flow.

2.2 Unpacking

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The CS100D MFC/MFM are assembled，calibrated and clean packaged under clean

room conditions. These series products are packaged with two separately sealed plastic

bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be

removed in the entrance to the clean room. In order to minimize the contamination, the

second clean bag should be removed in the clean room when MFC installed in the system.

2.3 Mechanical Installation

2.3.1 General

Most applications will require a positive shutoff valve in line with the MFC.

Pressurized gas trapped between the two devices can cause purge effects, and consideration

must be given to the sitting of the shutoff valve (upstream or downstream) in relation to the

process sequencing. It is recommended that you install an in-line filter upstream to the

controller in order to prevent MFC from contamination.

CS100D should be mounted in the position accord with the requirement in the

purchase order. The gas should be clean and dry. The mounting should be free from shock

or vibration. The dimensions of the product are shown in figure2-1. Different

fittings(Compression Fittingφ6, Compression Fitting1/4″, VCR1/4″M,) are optional

for customer, The length of the product L are shown in Table 2-1. Do not remove the

protective end caps of the fittings until installation.

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