Pfeiffer Vacuum HPT 200 Manual de usuario

OPERATING INSTRUCTIONS

Translation of the Original

HPT 200

Digital Pirani/Bayard Alpert gauge

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support

you in your individual application with maximum performance and without malfunctions. The

name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and

complete range of top-quality products and first-class service. From this extensive, practical

experience we have gained a large volume of information that can contribute to efficient

deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/54

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 7

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Stickers on product 8

1.3.4 Abbreviations 9

1.4 Trademark proof 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety precautions 12

2.4 Limits of use of the product 13

2.5 Proper use 13

2.6 Foreseeable improper use 13

3 Product description 15

3.1 Function 15

3.1.1 Gauge mode of operation 15

3.1.2 Measurement systems 15

3.1.3 Measuring range 15

3.1.4 Bayard-Alpert measurement system 16

3.1.5 Pirani measurement system 16

3.2 Identifying the product 17

3.3 Scope of delivery 17

4 Transport and storage 18

4.1 Transporting the product 18

4.2 Storing the product 18

5 Installation 19

5.1 Establishing vacuum connection 19

5.2 Creating "RS-485" connection 20

6 Interfaces 23

6.1 Interface RS-485 23

6.2 Pfeiffer Vacuum protocol for RS-485 interface 23

6.2.1 Telegram frame 23

6.2.2 Telegram description 24

6.2.3 Telegram example 1 24

6.2.4 Telegram example 2 24

6.2.5 Data types 25

7 Parameter set 26

7.1 General 26

7.2 Overview of parameters of HPT gauge 26

7.3 Control commands 27

7.4 Status requests 27

7.5 Pressure values and correction factors 27

8 Operation 29

8.1 Selecting switching ranges 30

8.2 Determining effective pressure with correction factors 31

Table of contents

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8.3 Switching HIMS filament on/off 32

8.4 Reading and setting relay and switch-points 33

8.5 Performing degassing 33

8.6 Baking out gauge 34

9 Disassembly 35

10 Maintenance 36

10.1 Cleaning of components 36

10.2 Calibrating gauge 37

10.3 Replacing measurement system 38

11 Malfunctions 39

12 Shipping 40

13 Recycling and disposal 41

13.1 General disposal information 41

13.2 Dispose of gauges 41

14 Service solutions by Pfeiffer Vacuum 42

15 Spare parts 44

16 Accessories 45

16.1 Accessory information 45

16.2 Ordering accessories 45

17 Technical data and dimensions 47

17.1 General 47

17.2 Technical data 47

17.3 Dimensions 49

EC Declaration of Conformity 51

UK Declaration of Conformity 52

Table of contents

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List of tables

Tbl. 1: Applicable documents 7

Tbl. 2: Variants 7

Tbl. 3: Abbreviations used 9

Tbl. 4: Permissible ambient conditions 13

Tbl. 5: Features of the RS-485 interface 23

Tbl. 6: Explanation and meaning of the parameters 26

Tbl. 7: Overview of parameters of HPT gauge 26

Tbl. 8: Parameter set | Control commands 27

Tbl. 9: Parameter set | Status requests 27

Tbl. 10: Parameter set | Pressure values and correction factors 28

Tbl. 11: Operating mode display via "device status" LED 29

Tbl. 12: Correction factor for Pirani-only operation 31

Tbl. 13: Correction factors for HIMS 32

Tbl. 14: Switch-on/-off conditions, using trans_HIGH switchover range 32

Tbl. 15: Malfunctions 39

Tbl. 16: Spare parts 44

Tbl. 17: Accessories 46

Tbl. 18: Conversion table: Pressure units 47

Tbl. 19: Conversion table: Units for gas throughput 47

Tbl. 20: Measured and pressure values 47

Tbl. 21: Electrical data 47

Tbl. 22: RS-485 interface 48

Tbl. 23: Connection flanges and weight 48

Tbl. 24: Ambient conditions 48

Tbl. 25: Temperatures 48

Tbl. 26: Substances in contact with media 48

List of tables

5/54

List of figures

Fig. 1: Structure of the HPT gauge 15

Fig. 2: Measuring configuration 15

Fig. 3: Design of the Bayard-Alpert measurement system 16

Fig. 4: Establishing vacuum connection 20

Fig. 5: Cross-link via connection RS-485 using connection cables and accessories 21

Fig. 6: Cross-link via RS-485 connection using OmniControl 21

Fig. 7: Connection assignment of RS-485 connecting socket 23

Fig. 8: Examples of reading current pressure values via [P:740] 29

Fig. 9: Selecting switching ranges 30

Fig. 10: Measurement curve for Pirani-only operation and when using the correction

factors

Fig. 11: Replacing measurement system 38

Fig. 12: HPT 200 with DN 25 ISO-KF 49

Fig. 13: HPT 200 with DN 40 ISO-KF 49

Fig. 14: HPT 200 with DN 40 CF-F 50

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This document describes the function of the products listed in the following and provides the most im-

portant information for safe use. The description is written in accordance with the valid directives. The

information in this document refers to the current development status of the products. The document

retains its validity assuming that the customer does not make any changes to the product.

1.1.1 Applicable documents

Designation Document

Operating instructions for “Control unit” OmniControl PT 0670

Declaration of conformity A component of these instructions

Tbl. 1: Applicable documents

You can find this document in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

This document applies to products with the following article numbers:

Article number Designation

PT R39 140 HPT 200, DN 25 ISO-KF

PT R39 150 HPT 200, DN 40 ISO-KF

PT R39 350 HPT 200, DN 40 CF-F

Tbl. 2: Variants

The part number is found on the rating plate of the product.

Pfeiffer Vacuum reserves the right to make technical changes without prior notification.

Information that relates to only one of the products is indicated accordingly.

The figures in this document are not to scale.

Graphics without a caption reflect the product featuring a DN 40 ISO-KF vacuum connection, however,

they also apply for the other vacuum connection accordingly.

Dimensions are in mm unless stated otherwise.

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

About this manual

7/54

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

The pictographs used in the document indicate useful information.

Note

Tip

Wear laboratory gloves

Perform a visual inspection

1.3.3 Stickers on product

This section describes all the stickers on the product along with their meanings.

D-35614 Asslar

Mod.

P/N

S/N

Input

HPT 200

PT R39 xxx

12345678

24 V DC 9 W

Made in Germany 2023/01

Range 5.0x10 - 1000 hPa

-10

Rating plate

The rating plate is located on the back of

the device.

About this manual

8/54

1.3.4 Abbreviations

Abbreviation Explanation

AR Analog/Relay

ATM Atmosphere

BA Bayard-Alpert

C Correction factor for calculating the pressure of gases other than air

Sensitivity of the Bayard-Alpert measurement system for nitrogen

EC Electron collector

F Filament

FKM Fluorinated rubber

HIMS Hot cathode ionization measurement system

HV High vacuum

IC Ion collector

LED Light emitting diode

LPS Limited power source

MSL Mean sea level

p Pressure

P Pirani

PE Protective earth (earthed conductor)

PELV Protective extra low voltage

U Measuring signal [V] (output voltage)

Tbl. 3: Abbreviations used

1.4 Trademark proof

●Binder® is a trademark of Franz Binder GmbH + Co. Elektrische Bauelemente KG.

About this manual

9/54

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

Safety instructions according to product life stages

All safety instructions in this document are based on the results of a risk assessment.

Pfeiffer Vacuum has taken into account all the relevant life stages of the product.

Risks during installation

DANGER

Risk to life due to electric shock

An improperly earthed product is potentially fatal in the event of a fault.

►Connect the product galvanically with the earthed vacuum chamber.

►Ensure that the connection complies with the requirements of a protective bonding according to

EN 61010. (CF and VCR connections comply with this requirement.)

►Use electrically conductive centering rings and circlips for KF connections.

Safety

10/54

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