Newport 850G Series Manual de usuario

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Section 1

850G Series Linear Actuator User Manual

1.0 Introduction

This manual describes the operation of Newport 850G Series Linear

Actuator. When purchased with a Newport controller, the 850G is fully

compatible with the ESP MotionMaster, and PMC200 series controllers. If

you have purchased the 850G for use with your existing Newport

controller, please read carefully the section below listing your controller

for compatibility and upgrade information.

2.0 Description

The 850G actuator incorporates a versatile design which can be

configured with travel limits from as little as approximately 1/32 inch to 2

inches (0.8mm – 50mm), enabling it to be used on a wide variety of

Newport translation stages and mirror mounts. Mechanical limit switches

cut motor power preventing accidental over-travel. The actuator

incorporates a manual actuation knob for coarse adjustment (with the

motor power off).

To provide accurate motion, the actuator’s 3/16 inch diameter plunger is

non-rotating. The standard gearbox ratio actuator can produce a maximum

thrust in excess of 25 pounds (11 kg); but, when operating continuously

over many cycles, the maximum load is rated at 18 pounds (8 kg).

The actuator’s internal structure is a precision-rolled leadscrew with a

0.8mm pitch. The pitch of the leadscrew has been chosen to provide the

same encoder resolution when combined with the standard gearbox ratio

(See table section 3.4). Production variations about this average figure can

be compensated by Newport controllers via software commands allowing

the user to limit cumulative, monotonic inaccuracies to within 0.005%. A

non-rotating low friction Turcite nut engages the leadscrew and pushes

the plunger. A Turcite half-nut is used to trigger a travel limit in the

extended position while the lead screw nut trips the limit at full retraction.

The limit switches are repeatable to approximately 40µm.

Section 2

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CAUTION

If the actuator encounters a hard stop within its range of travel (a

translation stage’s or mirror mount’s end of travel for example),

slip clutch releases to prevent damage to the gearhead. The clutch

is designed to slip just below the motor’s maximum torque. The

motor should be stopped as soon as possible to prevent

overheating in this high torque condition.

These actuators are powered by a low inertia DC motor to provide smooth

movement with low acoustic and mechanical noise. Submicron resolution

is obtained with a precision-rolled and electropolished stainless steel

leadscrew driven through a low backlash reduction gear. The overall drive

train backlash of approximately 15µm can be compensated by Newport

controllers. Bi-directional repeatability to 1.0µm can be achieved through

this feature.

The motor has an ironless-rotor to permit fast response due to its low

inertia. The brushes are precious-metal plated for long life. The factory

lubrication has a vapor pressure of 10-6 Torr at 25°C.

2.1 Controller Interfaces

The 850G Series actuators incorporate many new features, such as travel

limit switches and manual actuation, not found in previous Newport

actuators like the 850, 850A, and 850B Series. Additionally, since the 850G

use a higher torque motor, the servo parameters required for smooth

operation are different than for previous actuators. For these reasons,

controllers sold before the introduction of the 850G may not be

compatible and will require a special interface adapter. Some controllers

have been phased out and are not supported for the 850G.

2.1.1 MM1000DC/DCS750

The MM1000DC Controller/Driver (formerly DCS750) has been phased out

and is not supported to drive 850G Series actuators.

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2.1.2 MM2000 PC Card Motion Controller

The MM2000 controller drives up to four 850G actuators via Newport’s

Universal Interface box (UIB) P/N 21463-01 and using firmware version 1.5

or later. The controller firmware version may be displayed by using the VE

command. (Note that since the actuators are using the computer’s internal

power supply, there is a limitation of 2 axes that may move

simultaneously. Future versions of the UIB will incorporate an external

power supply for applications requiring 3 or more axes of simultaneous

movement.)

The UIB provides relays to cut motor power for manual knob use and

firmware version 1.5 or later provides commands to properly enable

manual positioning and keep track of encoder counts during a manual

move. The UIB may be purchased as an option when ordering an MM2000

controller and the proper version of the firmware is assured. To upgrade

an existing MM2000 controller with firmware version 1.4 or earlier, the UIB

must be purchased separately. The existing firmware may be used with

the following work around for manual actuation. When sending the

MOTOR OFF (MO) command, the I/O bits on the UIB which control the

power relays must be logged manually using the DEFINE BITS (BO), CLEAR

BITS (CB), and SET BITS (SB) commands. Refer to the MM2000 user

manual and the data sheet included with the UIB for more details.

CAUTION

Failure to manually toggle the I/O bits on the UIB for controllers with

firmware version 1.4 or earlier will leave power applied to the motor

after the MOTOR OFF command has been issued. Do not try to manually

adjust actuator position with power applied to the motor or damage will

result to the gearhead. Manual positioning should not require more

torque to turn the knob with the actuator cable attached than with it

unplugged. If you’re unsure about the effort required, unplug the

actuator to compare the feel of the knob before proceeding.

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2.1.3 MM2000RX Rack Mounted PC Card Controller

Existing MM2000RX controllers are incompatible with the 850G. Factory

upgrades may be done on a special request basis. New MM2000RX

controllers may be purchased to be compatible with the 850G on a special

request basis. Please call Newport for the latest information.

2.1.4 MM3000 Motion Controller/Driver

The MM3000 is completely compatible with the 850G Series actuators. All

that is required is to configure the controller with the proper driver card

and adjust the servo parameters per the specifications included in the

controller documentation.

2.1.5 MM4000/4005 Motion Controller

The MM4000/4005 are completely compatible with the 850G Series

actuators. All that is required is to configure the controller with the proper

driver card and adjust the servo parameters per the specifications

included in the controller documentation.

2.1.6 PMC100 Single Axis Controller

Existing PMC100 controllers are incompatible with 850G Series actuators.

Please call Newport for the latest information regarding upgrades for the

PMC100.

2.1.7 PMC200/PMC200-P Dual Axis Controller

PMC200 Series Controllers using version 3.1 or earlier firmware are

incompatible with 850G Series actuators and require an upgrade. The

firmware version is displayed on power up. Please call Newport for the

latest information regarding upgrades. PMC200 Series Controllers using

version 4.0 or later are compatible with the 850G Series actuators and

include the proper interface to handle the limit switches and manual knob.

Servo parameters may be set selecting type 850G in the controller setup

menu. There is also a menu to toggle motor power off for manual

positioning. An adapter cable (P/N 21731-01) must be ordered for each

850G actuator.

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CAUTION

Failure to toggle motor power off before attempting to manually position

the 850G will result in damage to the motor gearhead. Manually

positioning should not require more torque to turn the knob with the

actuator attached than with it unplugged. If you are unsure about the

effort required, unplug the actuator to compare the feel of the knob

before proceeding.

2.1.8 PMC400 Multi-Axis Controller/Driver

The PMC400 Controller/Driver has been phased out and is not supported

to drive 850G Series actuators.

2.1.9 ESP Series Controller/Driver

All ESP Series Motion Controller/Drivers are compatible with the 850G

Series actuator. The 850G actuator has an ESP smart chip inside, which

configures the ESP controller/driver, setting default parameters. Thus, the

850G actuator is ‘plug-and-play’ compatible with the ESP controller/driver.

2.1.10 Non-Newport Controllers

If you are using a non-Newport controller/driver please refer to the

connector pinout provided. Note that in order to utilize the manual knob

feature, power must be removed from the motor (open circuit). Failure to

do so properly may result in dynamic braking on the motor and cause

damage to the gearhead, invalidating your warranty.

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Notes

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Section 3

3.0 Installation, Set-up, and Operation

The actuators are shipped in sturdy, foam-cushioned boxes. Please inspect

the actuators and/or controllers immediately and notify the carrier if

damage is obvious. The actuator includes a wrench to access the travel

limit adjustment and a retaining nut for actuator mounting.

3.1 Setting the Travel Limits

Before mounting the 850G actuator, follow the directions below to adjust

the travel limits such that the actuator will trigger one of its limit switches

before encountering any external hard stop such as the end of travel of a

translation stage. Failure to do this may result in damage to the actuator

and/or the stage. Actuators are shipped with the travel limit set to less

than 1⁄2inch (12mm) to prevent accidental over-travel in most instances.

3.1.1 Remove the Coarse Travel Indicator Window

Find a clean flat surface to disassemble the actuator. (Tapped hole optical

tables are not recommended since many of the parts are small and may

drop into the table). Using the manual knob, adjust the actuator to the

zero position as read on the coarse position scale as shown in Figure 1.

Remove the four M2 flat head screws holding the cover, and place them to

the side. Gently pry off the cover as shown in Figure 2.

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Figure 1: Remove the cover with the Actuator in the zero position

Figure 2: Approximate travel range markings assist in

quick travel adjustment

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3.1.2 Reposition the Half-Nut to the Desired Travel

After removing the cover, laser marked lines indicating approximate travel

ranges can be seen. Remove the half-nut by lifting it from the lead-screw.

Note its orientation with respect to the lead-screw since it only fits one

way. (Figure 3). Approximate travel is set by replacing the half-nut onto

the lead-screw with its center scribe mark aligned to one of the markings

on the actuator body (Figure 4). These marks are only an aid to

determining travel.

The half-nut may be placed anywhere along the lead-screw. For full 2 inch

(50mm) travel, remove the half-nut completely and store it in a safe place

for future use in case shorter travel is desired.

Figure 3: The half-nut’s ramped corner triggers the

positive limit switch

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