MKS E-Vision+ Manual de usuario

e-Vision®& e-Vision+®

User Manual

LP101013.100

01 January 2004

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products

As part of our continuous product improvement policy, we are always pleased to

receive your comments and suggestions about how we should develop our product

range. We believe that the manual is an important part of the product and would

welcome your feedback, particularly relating to any omissions or inaccuracies you

may discover.

You can send your comments to:-

MKS Instruments Spectra Products

Cowley Way

Weston Road

Crewe

Cheshire

CW1 6AG

U.K.

+44 (0)1270 250150 Tel. International

+44 (0)1270 251939 Fax. International

Email: [email protected]

e-Vision®, e-Vision+® and EasyView are registered trademarks of MKS Instruments,

Spectra Products.

Conflat® is a registered trademark of Varian Associates.

Viton® is a registered trademark of E.I. Dupont de Nemours & Co., Inc.

Windows® is a trademark of the Microsoft Corporation.

All other brand or product names are trademarks or registered trademarks of their

respective companies and as such are fully recognised

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products 3

EC DECLARATION OF CONFORMITY

Spectra SensorTech Ltd.

Cowley Way

Crewe

Cheshire

CW1 6AG

United Kingdom

DECLARES THAT THE FOLLOWING PRODUCTS:

LM62, LM10 VACSCAN 100

LM63, LM10, LM4 VACSCAN PLUS 100, 200

LM61, LM10, LM4, LM9 SATELLITE 100, 200, 300

LM56 MICROVISION

LM70, LM76 MICROVISION PLUS

LM77 VISION 1000P

LM79 VISION 1000I

LM89 VISION 1000B

LM90 VISION 1000 C / E

LM78 VAC CHECK

LM80 MINILAB

LM98 e-Vision

LM102 e-Vision+

ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES:

89/336/EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE

73/23/EEC LOW VOLTAGE DIRECTIVE AS AMMENDED 93/68 EEC

THE APPLICABLE STANDARDS ARE:

EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT,

CONTROL & LABORATORY USE

EN 61010-1:2001 SAFETY REQUIREMENTS FOR ELECTRICAL

EQUIPMENT FOR MEASUREMENT,

CONTROL & LABORATRY USE.

SIGNED:

T.R.ROBINSON

GENERAL MANAGER

DATE: 23rd February 2004

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products

Warning

The control unit must not be powered

up when not connected to the analyser

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products 5

Additional Installation Maintenance and Operating Instructions

In order to comply with European regulations, the following procedures must be

followed:

A) INSTALLATION

1. The installation procedures given in the operating and technical manuals must be

followed in addition to these instructions.

2.The mains power cable must conform to local regulations and must have a

protective earth (PE) conductor securely connected to the power plug protective

earth contact.

3. The short earthing braid supplied with some products, must be fitted between

the terminal on the RF head and one of the CF40 vacuum flange bolts.

4. Only cables supplied with the equipment may be used for interconnections. If

extension cables are required to obtain a greater separation between control unit

and RF head, or if longer serial communications cables are required, they must be

supplied by MKS Instruments Ltd.

5. Cables attached to all other ancillary signal and control ports must have a length

of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be

contacted for technical guidance on possible EMC and safety issues.

6. The vacuum system on which the analyser/RF head is mounted must be

earthed, to a protective earth, preferably to the same protective earth as the

control unit.

B) OPERATION

1. The equipment is not authorised for use as a critical component in a life support

or safety critical system without the express written approval of MKS Instruments

Ltd.

2. All instructions given in the operating manual must be followed.

3. Adjustments are strictly limited to those accessible from the control panel and

computer keyboard and only when running software supplied by MKS Instruments

Ltd.

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products

C) MAINTENANCE

WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT

1. Maintenance functions must only be carried out by competent persons.

2. During the warranty period, faulty equipment must be returned to MKS

Instruments, Spectra Products Ltd., unless special arrangements are made.

3. There are no user serviceable parts in the electronic equipment. Certain

components are EMC and safety critical and must not be substituted. Replacement

parts are available from MKS Instruments, Spectra Products Ltd.

4. Equipment enclosures embody certain special fastenings and bonding devices

that affect EMC and safety performance. These must be correctly re-fitted after

servicing.

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products 7

1. Specification...........................................................................10

1.1 Mechanical .......................................................................10

1.2 Electrical ..........................................................................10

1.3 Environmental...................................................................10

1.4 Safety ..............................................................................11

1.5 Connectors .......................................................................11

1.6 Warning labels ..................................................................11

1.7 Ventilation ........................................................................12

2. Introduction ...........................................................................13

3. Connections............................................................................14

3.1 The rear panel ..................................................................14

3.2 Power connector ...............................................................14

3.3 Power indicator.................................................................15

3.4 Ethernet connector............................................................15

3.5 External trip......................................................................15

3.6 Reset switch .....................................................................16

3.7 Mode switch .....................................................................16

4. Analyser Installation ..............................................................17

4.1 Unpacking ........................................................................17

4.2 Inspecting the analyser .....................................................17

4.3 Installing the analyser .......................................................18

4.4 Checking the system pressure ............................................18

4.5 Mounting the analyser .......................................................19

5. e-Vision Installation...............................................................20

5.1 Installation .......................................................................20

5.2 Electrical connections ........................................................20

5.3 IP Address........................................................................21

5.4 Re-setting the IP address...................................................21

6. Baking ....................................................................................22

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products

7. Analyser Maintenance ........................................................... 23

7.1 Overview ......................................................................... 23

7.2 Ohmmeter analyser checks................................................ 25

7.3 Checking filaments ........................................................... 26

7.4 Changing filaments ........................................................... 27

7.4.1 Removing the filaments.................................................. 27

7.4.2 Fitting new filaments...................................................... 28

7.5 Ion Source cleaning .......................................................... 29

7.6 Cleaning or replacing the ion source................................... 30

7.6.1 Removing the ion source ................................................ 31

7.6.2 Dismantling the source assembly .................................... 31

7.6.3 Source Re-assembly....................................................... 32

8. Exploded Views...................................................................... 33

8.1 Analyser Flange pin-outs ................................................... 33

8.2 Exploded view of the Analyser ........................................... 34

8.3 Filament Plate .................................................................. 35

8.4 Source Assembly .............................................................. 36

8.6 Source Alignment Jig ........................................................ 37

8.5 Extract Plate .................................................................... 38

9. Returning Your Unit for Service ............................................ 39

Support Contact Numbers ....................................................... 39

10. FTP Mode ............................................................................. 42

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products 9

e-Vision and e-Vision+ LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products

1. Specification

1.1 Mechanical

e-Vision & e-Vision+

Size: 127mm wide x 127mm deep x 159mm deep, plus 34mm over analyser

connector.

Weight: 2.0 kg

24VDC Power Supply

Size: 75mm wide x 45mm high x 170mm deep plus 30mm over strain relief.

Weight: 0.6 kg

Analyser

e-Vision - 2 inch single mass filter, 1 – 100amu, Faraday detector.

Max. Operating pressure 5x10-4 Torr (6.5x10-4 mbar)

e-Vision+ - 4 inch single mass filter, 1 -100amu & 1 – 200amu, Faraday and SEM

detector.

Max. Operating pressure 7.6x10-5 (1x10-4 mbar)

1.2 Electrical

Power Inlet: 100 to 120, 200 to 240 VAC rms 47- 63Hz 2.1A rms

Installation category (overvoltage category) II to IEC664

Fuses Internal, not user replaceable

Insulation Class I to IEC536

1.3 Environmental

Temperature range 0 to 400C, 80%RH non-condensing, operating and storage.

Pollution degree 2 to EN61010

Enclosure IP20 to EN60529

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