MKS 248A Manual de usuario
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SM
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Instra
107428-P1
Rev L, 8/06
MKS Type 248A/B/C
Control Valve
Copyright © 1996 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Cajon
®
and VCR
®
are registered trademarks of Cajon Company, Macedonia, OH
Kalrez
®
and Viton
®
are registered trademarks of E. I. DuPont de Nemours and Co. Inc.,
Wilmington, DE
Neoprene
®
is a registered trademark of Vibration, Mountings & Controls, Inc., Bloomingdale,
NJ
Swagelok
®
is a registered trademark of Crawford Fitting Company, Solon, OH
Table of Contents
iii
Table of Contents
Safety Procedures and Precautions..............................................................................................1
Chapter One: General Information.............................................................................................5
Introduction.....................................................................................................................5
How This Manual is Organized......................................................................................6
Customer Support...........................................................................................................6
Chapter Two: Installation...........................................................................................................7
How To Unpack the Type 248 Unit ...............................................................................7
Unpacking Checklist..........................................................................................7
Interface Cables..............................................................................................................8
Generic Shielded Cable Description .................................................................8
Setup...............................................................................................................................10
Dimensions........................................................................................................10
Mounting Instructions........................................................................................11
Cables ................................................................................................................11
Chapter Three: Operation...........................................................................................................13
General Information........................................................................................................13
Chapter Four: Maintenance ........................................................................................................15
General Information........................................................................................................15
Orifice Adjustment and Replacement.............................................................................15
Disassembly, Inspection, and Cleaning..........................................................................18
Assembly ........................................................................................................................19
Chapter Five: Repair...................................................................................................................21
General Information........................................................................................................21
Appendix A: Product Specifications ..........................................................................................23
Specifications..................................................................................................................23
Appendix B: Model Code Explanation.......................................................................................25
Model Code ....................................................................................................................25
Table of Contents
iv
Index ............................................................................................................................................27
List of Figures and Tables
v
List of Figures and Tables
Figures
Figure 1: Preferred Method To Connect a Shielded Cable ........................................................9
Figure 2: Alternate Method To Connect a Shielded Cable ........................................................9
Figure 3: Dimensions of a Type 248 Control Valve...................................................................10
Figure 4: Typical Valve Assembly.............................................................................................Error! Bookmark
n
Tables
Table 1: Type 248 Valve Components.........................................................................................17
List of Figures and Tables
vi
Safety Procedures and Precautions
1
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
Warning
Before performing mass flow controller valve adjustments,
you MUST purge your process equipment and the MFC with
an inert gas, such as argon or nitrogen, and isolate the MFC
from toxic and hazardous gases. Use an inert surrogate gas
while adjusting the valve preload as a safeguard against
inadvertent exposure to any toxic or hazardous gas. A release
of hazardous or toxic gas could cause serious injury. If
necessary, remove the MFC from the process equipment to
adjust the valve.
Questions concerning the safe handling of toxic or hazardous
gases may be answered by consulting your corporate policy,
a government agency such as OSHA or NIOSH, or experts
familiar with your process gas.
MKS assumes no liability for safe handling of toxic or
hazardous gases.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used
is compatible with sealing materials.
Safety Procedures and Precautions
2
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely
with a clean dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect
personnel.
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive atmosphere unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer's
directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the
instrument to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to
the product specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the
vacuum system to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination
such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit.
Safety Procedures and Precautions
3
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution
The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
Este manual sirve para los siguientes modelos
2
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