LEYBOLD Turbovac TW 300 Manual de usuario

Vacuum Solutions Application Support Service LEYBOLD VACUUM

TURBOVAC

TW 300

TW 300 H

Wide-Range Turbomolecular

Pump with Integrated or External

Frequency Converter

Operating Instructions

GA05142_0902

GA05142_0902 - 12/2003

Contents

Page

Safety information . . . . . . . . . . . . . . . . . . . . . . . 3

1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Use and media compatibility . . . . . . . . . . . . . . . 5

1.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.2 Standard equipment. . . . . . . . . . . . . . . . . . . . . . 6

1.3 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.3.1 Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.3.2 Frequency converter and accessories

for the frequency converter . . . . . . . . . . . . . . . . 8

1.3.3 Accessories for the pump. . . . . . . . . . . . . . . . . 11

1.4 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . 12

1.4.1 TURBOVAC . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

1.4.2 TURBO.DRIVE 300 . . . . . . . . . . . . . . . . . . . . . 14

1.4.3 Power supply SITOP 24 V / 10 A. . . . . . . . . . . 14

2 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

2.1 Operating environment. . . . . . . . . . . . . . . . . . . 16

2.2 Attach the pump to the vacuum chamber . . . . 16

2.3 Forevacuum connection. . . . . . . . . . . . . . . . . . 19

2.4 Connect the cooling . . . . . . . . . . . . . . . . . . . . . 20

2.5 Connect the purge gas and venting valve . . . . 24

2.6 Electrical connection . . . . . . . . . . . . . . . . . . . . 26

2.6.1 Connecting pump and frequency converter. . . 26

2.6.2 Connecting the power supply. . . . . . . . . . . . . . 27

2.6.3 Mounting the frequency converter . . . . . . . . . . 28

2.6.4 Relay status . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

2.6.5 Installing the frequency converter (Optional) . . 32

2.7 Interface description. . . . . . . . . . . . . . . . . . . . . 33

2.7.1 RS 232/RS 422(485) interface (SERVICE X5) 34

2.7.2 RS 485 interface . . . . . . . . . . . . . . . . . . . . . . . 35

2.7.3 Parameter list. . . . . . . . . . . . . . . . . . . . . . . . . . 36

2.7.4 Warning codes for parameter 227 . . . . . . . . . . 39

2.7.5 Error codes for parameter P171. . . . . . . . . . . . 40

3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

3.1 Switching on. . . . . . . . . . . . . . . . . . . . . . . . . . . 42

3.2 Shutting down. . . . . . . . . . . . . . . . . . . . . . . . . . 43

Emergency shut down . . . . . . . . . . . . . . . . . . . 43

3.3 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

3.4 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

3.5 Removing the pump from the system . . . . . . . 45

4 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . 46

4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

4.2 Service by LEYBOLD. . . . . . . . . . . . . . . . . . . . 46

5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . 47

6Spare parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . 50

EEC Manufacturer’s Declaration . . . . . . . . . . . 51

EC Declaration by the Manufacturer . . . . . . . . 52

Index. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

Figures

The references to the diagrams, e.g. (2/10), consist of the figu-

re number and the item number, in that order.

Warning

Identifies working and operating procedures which must be

strictly observed to prevent hazards to persons.

Caution

Indicates working and operating procedures which must be

strictly observed to prevent damage to or destruction of the

appliance.

We reserve the right to alter the design or any data given in

these operating instructions.

The illustrations are approximations.

Safety Information

Electrical hazards

Warning Mains voltage may be present at the power

failure airing valve, the purge gas valve or

the venting valve.

The pump may be operated only with a sui-

table frequency converter and suitable

connector cables.

Route all cables so as to protect them from

damage.

Do not expose the pump, the frequency

converter or the connections to water.

The frequency converter must only be

connected to power supplies which meet

the requirements for functional extra low

voltage with positive isolation in accordance

with IEC 364 (VDE 0100, Part 410, or local

regulations) (SELV).

When the connector cable is attached, the

outputs at the frequency converter are not

free of voltage.

Thermal hazards

Warning During operation the pump can become so

hot that there is a danger of burns (up to

approx. 80 °C, 176 °F).

Provide protection against contact with the

hot components.

Hazards caused by materials and

substances

Warning The forevacuum line must be tight. Hazar-

dous gases can escape at leaks or the

gases being pumped can react with air or

humidity.

If the pump has previously handled hazar-

dous gases, implement the proper precau-

tionary measures before opening the intake

or exhaust connection.

If necessary, use gloves, a respirator and/or

protective clothing and work under an

exhaust hood.

GA05142_0902 - 12/2003

Safety information

Failure to observe the following precautions could

result in serious personal injury:

Warning The turbomolecular pump must only be

operated in the proper condition and under

the conditions described in the Operating

Instructions.

Mechanical hazards

Warning Never expose any parts of the body to the

vacuum.

The high-vacuum flange must be solidly

mounted to the vacuum chamber. If the

mounting is not sturdy enough, pump block-

age could cause the pump to break loose;

internal pump components could be thrown

in all directions. Never operate the pump (in

bench testing, for example) without proper

flanging to the vacuum chamber.

Under vacuum conditions the pump may

take up to one hour to run down, when ven-

ting to atmospheric pressure it may take up

to one minute. During the time the pump is

running down, the green LED at the fre-

quency converter will flash, indicating that

the rotor has not yet arrived at standstill.

When shutting down by switching off the

power supply voltage, there will be only

enough power for the LEDs down to a

speed of the pump of approximately 200

Hz. Thus the pump may still turn without a

LED being on. For this reason, when swit-

ching off without venting, wait for approxi-

mately 15 minutes after the LEDs have tur-

ned off until the pump has arrived at stand-

still.

After a mains power failure the pump can

run up automatically once more.

Safety Information

Failure to observe the following precautions could

result in damage to the pump:

Caution The pumps are not suitable for pumping

aggressive or corrosive media or those

which contain dust.

Install a micropore filter when pumping

media which contains dust.

Observe the information on media compati-

bility at the beginning of these operating

instructions.

Caution Never touch the rotor. Touching the rotor

may cause injury and damage the rotor

bearing.

Caution If foreign objects could pass from the vacu-

um chamber into the pump, install a wire

mesh splinter guard. Foreign objects which

enter the pump through the intake would

cause serious damage to the rotor. Dama-

ge resulting from foreign objects in the rotor

section are excluded from guarantee cover-

age.

Caution Ensure that the pump is sufficiently isolated

against resonances (vibrations) generated

by the forevacuum pump.

Caution Unplug any connectors only when the

mains voltage is switched off and the pump

does no longer turn (the green LED is off).

Separating the connections while the mains

power is still applied or while the pump is

still turning may destroy the TURBO.DRIVE

300.

Caution Ensure correct polarity when connecting

the frequency converter.

Caution Exposure of the pump to accelerating for-

ces must be avoided or reduced to such an

extent that the rotor unit will not be excited

by vibrations. In the case of critical applica-

tions you must consult our Applications

Dept. first.

Caution Avoid the influences of shock and vibration

when the pump is running.

Caution The rotor bearings must be changed after

1,500 starts or 10,000 operating hours.

Caution Pumps with integrated frequency converter

need to be shipped to the Leybold Service

with the frequency converter.

Caution The pump must only be opened by such

persons who have been authorised by Ley-

bold to do so.

4GA05142_0902 - 12/2003

GA05142_0902 - 12/2003

Description

1 Description

Use and media compatibility

The TURBOVAC TW 300 and TW 300 H are turbomole-

cular pumps with integrated or external frequency con-

verter. They are designed to evacuate vacuum cham-

bers down to pressure levels in the high vacuum range.

They are suitable for pumping air and clean gases. A

forevacuum pump is required for their operation.

The pumps have been manufactured according to the

state-of-the-art and approved safety regulations. Even

so in the case of improper installation or when impro-

perly used there can be risks or damage may be caused.

The TW 300 has been designed for high gas through-

puts, the TW 300 H for high gas compression in the case

of lighter gases.

These pumps are not suitable for

- pumping liquids or gases containing dust or particu-

lates

-pumping corrosive, explosive or reactive gasses

- operation without a forevacuum pump.

If reactive gases in low concentrations must be pumped

please consult with Leybold.

During operation the pressure inside the pump is so low

that there is no danger of ignition (at pressures below

about 100 mbar). A hazardous condition will be created

if flammable mixtures enter the hot pump at pressures

above 100 mbar. During operation the pump can reach

temperatures as high as 110°C (230 °F). Ignition sparks

could occur in case of damage to the pump and these

could ignite explosive mixtures.

All seals are prone to leaks. In case a seal fails, there is

the risk that hazardous gases may escape. Introduce

the appropriate safety measures depending on the

media being pumped in each case.

We would be glad to consult with you as regards the

media which can safely be handled with this unit.

Description

1.1 Design

The pumps comprise essentially the pump housing, a

multi-stage rotor with the stator group, and the drive. The

design of a TURBOVAC TW 300 is depicted in Fig. 1.

The rotor consists of a turbomolecular pump stage and a

Holweck stage. The Holweck pumping stage increases

the permissible forevacuum pressure level markedly

when compared with the classical turbomolecular pump.

The rotor shaft runs in two ceramic ball bearings, lubri-

cated with grease.

The pump is driven by a split-cage DC motor. In this

motor the rotor and stator windings are separated by a

vacuum-tight can. Consequently the rotor runs inside the

vacuum while the stator is outside the vacuum. This eli-

minates any need of vacuum feedthroughs.

Standard pumps rely on convection cooling, but require

depending on the load, like increased gas throughput,

high ambient temperatures, additional air or water coo-

ling.

The pump has DN 16 KF connectors for forevacuum,

and venting/purge gas.

The pump is driven by an electronic frequency converter

TURBO.DRIVE 300. All functions like, for example,

speed control, pump sensing or temperature monitoring

are monitored by the TURBO.DRIVE 300. This unit is

1.2 Standard equipment

The pumps are shipped sealed in a PE bag with a desic-

cant to absorb moisture.The maximum useful life of the

desiccant is one year.

The flanges for forevacuum, venting, and purge gas are

blank-flanged with centering ring with FPM sealing ring

and a clamping yoke.

The high-vacuum connection elements are not part of

the standard equipment.

Asuitable DC coupling for the power supply is included:

In the case of pumps with integrated frequency conver-

ter it is supplied with the pump; in the case of pumps with

a separate frequency converter it is supplied with the fre-

quency converter.

————————————-

PE = Polyethylene

FPM = Fluororubber, resistant to temperatures up to 150°C (302 °F)

6GA05142_0902 - 12/2003

Fig. 1 Section through a TURBOVAC TW 300

High-vacuum flange

Rotor

Stator

Bearing

Holweck stage

Motor

Bearing

1.3 Ordering data

1.3.1 Pumps

TURBOVAC TW 300

DN 100 ISO-K, no forced cooling,

without frequency converter, without splinter guard 800170V2101

DN 100 ISO-K, air cooling,

without frequency converter, without splinter guard 800011V0003

DN 100 ISO-K, air cooling, with TURBO.DRIVE 300

with RS 485, without splinter guard 800170V2105

DN 100 ISO-K, water cooling, with TURBO.DRIVE 300

with RS 232/422, with splinter guard 800170V2106

DN 100 CF, water cooling, with TURBO.DRIVE 300

with RS 232/422, without splinter guard 800170V2103

DN 160 ISO-K, water cooling, with TURBO.DRIVE 300

with RS 485, without splinter guard 800170V2108

TURBOVAC TW 300 H

DN 100 ISO-K, air cooling, with TURBO.DRIVE 300

with RS 485, without splinter guard 800170V2107

DN 100 CF, air cooling, with TURBO.DRIVE 300

with RS 485, without splinter guard 800170V2102

DN 100 CF, air cooling, with TURBO.DRIVE 300

with RS 232/422, without splinter guard 800170V2104

Description

GA05142_0902 - 12/2003

Description

8GA05142_0902 - 12/2003

1.3.2 Frequency converter and accessories for the frequency converter

Frequency converter

Basic unit with RS 232/422 interface 800072V0001

with RS 485 interface 800072V0003

Connecting cable pump - frequency converter

1.0 m long 152 47

2.5 m long 864 49

3.0 m long 864 40

5.0 m long 864 50

SITOP 24 V / 10 A 152 50

• supplies the TURBO.DRIVE 300 with 24 V DC

24 V DC cable

(TURBO.DRIVE 300 – OEM power supply)

3 m 200 12 732

5 m 200 12 733

10 m 200 12 734

20 m 200 12 735

Mains cable for power supply, 2 m long

with EURO plug / conductor ferrules 800102V0001

with US plug 5-15P / conductor ferrules 800102V1001

OEM power supply (with screw terminals)

TURBO.POWER 300 800100V0002

• supplies the TURBO.DRIVE 300 with 24 V DC

• plug & play cables

• desktop unit or rack mountable

24V DC Power cable

(TURBO.DRIVE 300 – TURBO.POWER 300)

1 m 800094V0100

3 m 800094V0300

5 m 800094V0500

10 m 800094V1000

20 m 800094V2000

Mains cable for TURBO.POWER 300, 3 m long

with EURO plug / IEC mains plug 800102V0002

with US plug 6-15P / IEC mains plug 800102V1002

Power supply unit - plug and play

TURBO.POWER 300

T5A~250V

100-240VAC

Description

GA05142_0902 - 12/2003

Plug for connector REMOTE with integrated

ON/OFF switch for the pump

(Sub-D plug, 9 way) 152 48

Heat sink for frequency converter 800110V0001

Top hat rail adaptor (mounting aid for

TURBO.DRIVE 300 and TURBO.POWER 300) 800110V0003

off

Mechanical accessories

TURBO.CONTROL 300 800100V0001

• supplies the TURBO.DRIVE 300 with 24 V DC

• plug & play cables

• desktop unit or rack mountable

• with power switch

• with start/stop switch for the turbomolecular pump

• remote control

• status LEDs and status relays

24V DC Control cable

(TURBO.DRIVE 300 – TURBO.CONTROL 300)

1 m 800091V0100

3 m 800091V0300

5 m 800091V0500

10 m 800091V1000

20 m 800091V2000

Mains cable for TURBO.CONTROL 300,

3 m long

with EURO plug / IEC mains plug 800102V0002

with US plug 6-15P / IEC mains plug 800102V1002

START

NORMAL

POWER

ERROR

START

STOP

TURBO.CONTROL 300

Power supply and control unit

Heat sink 200 11 628

Adaptor cable 200 12 703

4 screws M4x12 201 03 204

2 screws M4x25 201 03 209

(see Section 2.6)

Mounting the frequency converter to the pump

Description

10 GA05142_0902 - 12/2003

Display PDA* (display unit for

parameters, requires the software

"Turbo.Drive Panel”) upon request

data cable and adaptor

Required "Turbo.Drive Panel" software

for the display PDA with operating system OS

4.0 to 4.x, 3.5" floppy 800110V0104

PC software "Turbo.Drive Server" for Windows 95

and higher, CD-ROM*

• Soft panel

• Display, change, save and compare

parameter lists

• Integration of customer’s software

• Record parameter data 800110V0102

Adaptor RS232/RS485 for 220 V/Euro plug 800110V0101

GSD file for Profibus DP upon request

*Can be used in connection with the following

interfaces:

- For frequency converters with RS232 interface.

- For frequency converters with RS485 interface,

a RS232/RS485 adaptor is required.

Accessories for serial interfaces

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