LEYBOLD LEYSPEC view Series Manual de usuario

LEYSPEC Residual

Gas Analyzer (RGA)

Hardware Manual 300781172_002_C0

Part Numbers

220010V01

220011V01

220012V01

220013V01

220020V01

220021V01

3 300781172_002_C0 - 01/2019 - © Leybold

Contents

Page

0 Before using this instrument 5

0.1 Safety symbols 5

0.2 Safety precautions 5

1 Introduction 11

1.1 Compliance statements 11

2 Specifications and configurations 12

2.1 Technical data and specifications 12

2.2 Standard configuration 14

3 Buttons and connections 17

3.1 Front panel buttons and displays 17

3.2 Rear panel 18

3.3 EXT-I/O connector 19

3.4 DIP switch 20

4 Installation 22

4.1 Preparation 22

4.2 Installation 22

5 Turning on (supplying power) 28

6 Operation 29

6.1 Measurement with software (remote) 29

6.2 Measurement with the sensor unit (Local mode) 30

7 Front panel operation 31

7.1 Operating and error states 31

7.2 If pressure is lower than measurement range 32

7.3 If filament fault has occurred 32

7.4 If RF fault has occurred 33

7.5 If secondary electron multiplier (SEM) fault has occurred 33

7.6 If interlock signal is input and total pressure interlock in on 33

8 External inputs and outputs (I/O) 35

8.1 Pressure and error outputs 35

8.2 Interlock input 35

8.3 Analogue input 36

9 Cautions in operation 37

9.1 Operating pressure range 37

9.2 Degassing 37

9.3 Secondary electron multiplier (SEM) tube 37

9.4 Baking 39

9.5 Calibration 40

9.6 Converting to partial pressure 42

9.7 Storage 43

10 Options 44

10.1 AC adaptor 44

10.2 USB 3.0 wired LAN adaptor 47

10.3 Switching hub 47

11 Maintenance 51

11.1 Life expectancy of the ion source 51

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Contents

Page

11.2 Replace consumable components 51

11.3 Calibrate 57

11.4 Replacing the secondary electron multiplier (SEM) 71

11.5 Consumable parts list 71

11.6 List of Materials 72

12 Troubleshooting 75

13 Appendix 78

13.1 Theory of operation 78

13.2 Principles of operation 78

13.3 Handling of quadrupole spectrometer 81

13.4 Interpretation of measurement value 81

13.5 Peaks of major residual gases 83

13.6 Setting the IP address of the sensor unit 84

13.7 Set up the RGA PC network 86

14 Return the equipment or components for service 91

5 300781172_002_C0 - 01/2019 - © Leybold

Before using this instrument

0 Before using this instrument

Upon receipt of this product, make sure that the model is the same as you ordered

and there is no damage during shipment.

0.1 Safety symbols

Important safety information is highlighted as WARNING and CAUTION instructions;

these instructions must be obeyed.

The use of Warnings and Cautions is defined below.

0.2 Safety precautions

Before using the Residual Gas Analyzer, read this manual and the following safety

precautions. Leybold is not liable for any accidents, damages or injuries caused by

negligence of these safety precautions.

WARNING:

Read this instruction manual before installing, operating, inspecting, or servicing

this product to familiarize yourself with safety precautions, specifications and

operations.

CAUTION:

No part of this manual shall be copied for a third party without consent by Leybold

in writing.

WARNING:

Warnings are given where failure to observe the instruction could result in injury or

death to people. The actual symbol shown varies according to the hazard.

CAUTION:

Cautions are given where failure to obey the instruction could result in damage to

the equipment, associated equipment or process.

NOTICE:

Emphasizes additional application information and other useful information

provided within these operating instructions.

300781172_002_C0 - 012/2019 - © Leybold 6

Before using this instrument

0.2.1 Analyzer tube and sensor unit

WARNING:

Risk of burns. Read this manual before replacing the ion source of the analyzer

tube and the secondary electron multiplier (SEM) tube. Before replacement,

make sure that the filament is turned off and the ion source has cooled down

because the ion source is very hot immediately after use.

WARNING:

If the analyzer tube or its components have been used in an environment that

can be hazardous to the human health, dispose of them using an accredited

disposal service.

WARNING:

Risk of fire or explosion. The analyzer tube contains a hot cathode (about 1400

°C). If the gas to be introduced into the analyzer tube is combustible or

inflammable, check its limit density and the amount of gas before use.

WARNING:

Risk of burns. The surroundings of the ion source are hot during operation

because of the hot cathode element. You can be burned if you touch immediately

after turning it off. Allow the heaters and pipes to cool to a safe temperature. Do

not touch the intermediate pipe during operation or immediately after shut-down

because it can be heated to a high temperature by the hot cathode.

WARNING:

Do not disassemble the analyzer tube, sensor unit and cable.

WARNING:

Do not modify the analyzer tube, sensor unit or cable. If modified, any operation

and performance are not guaranteed. It could also cause fire or electric shock.

WARNING:

Connect the product to A-class grounding to prevent electrical leakage.

WARNING:

For safety reason, do not touch the metal parts of a terminal, which could be

energized with a voltage. Touching the metal parts could cause electric shock.

7 300781172_002_C0 - 01/2019 - © Leybold

Before using this instrument

WARNING:

Before turning on power, make sure that the operating voltage and supply

voltage are the same. If incorrect power is applied, damage or fire could result.

WARNING:

Whenever replacing a fuse, turn off the power. If a fuse is replaced with power

turned on, you can receive an electric shock.

WARNING:

Risk of fire. The specified fuses protect this equipment against fire. Only use the

specified fuses and never short circuit the fuse holder.

WARNING:

If the product is damaged, turn off power immediately. Continued use can result in

fire or electric shock.

WARNING:

If the product is overheated or produces smoke or an unusual smell, turn off the

power immediately. Continued use can result in fire or electric shock.

WARNING:

Do not use this product in a place where it can be splashed with water. If it is

splashed, failure, electrical leakage or fire could result.

WARNING:

If the unit malfunctions, the pressure output may be incorrect. If such a failure could

cause injury to people or damage equipment, install a suitable control system to

indicate the failure and, if necessary, to close down the process system.

WARNING:

When using an EXT I/O connector, make sure that there is no error in the wiring. If

you use this product with incorrect wiring the product can be damaged.

WARNING:

Before you switch on the power, make sure that the sensor unit and analyzer tube

are correctly connected. If power is turned on without connecting the analyzer

tube, components could be damaged.

300781172_002_C0 - 012/2019 - © Leybold 8

Before using this instrument

CAUTION:

There is a discharge fan at the top and a blow fan on the side (opposite the LED

display) to cool the sensor unit interior. Provide a space of 100 mm or more on all

sides. If the air vent is blocked, heat will build up in the unit which could be a cause

of failure.

CAUTION:

Keep the product free from vibration or impact. It could damage the product.

CAUTION:

Aluminium electrolytic capacitors are used for the electric circuit in the sensor unit.

Generally, the life expectancy of the aluminium electrolytic capacity is limited and

the higher the surrounding temperature, the shorter the life. We recommend that

you replace the aluminium electrolytic capacitors once every three years or during

repair and overhaul to prevent this product from being damaged.

CAUTION:

If a foreign object like a metal or combustible object is admitted into the sensor

unit, you must remove it. Continuing to use the product with a foreign object inside

can cause it to fail.

CAUTION:

Use this product within the scope of specifications. Use outside the scope of this

manual will void the warranty.

CAUTION:

Items in the consumable parts list are not covered under the warranty.

CAUTION:

Risk of damage. Sensitive equipment. Do not allow any shock impacts to this

product.

CAUTION:

When returning the product, repack it as originally shipped from the factory. If it is

shipped without packing, it could be damaged.

WARNING:

When disposing of this product, dispose of it according to your local government

regulations. If the analyzer tube or its parts were used in an environment that can

affect the human health or the environment, dispose of them through an approved

method.

9 300781172_002_C0 - 01/2019 - © Leybold

Before using this instrument

14.2.2 For AC adaptor

CAUTION:

Risk of filament burnout or unknown states. If the PC software crashes, switch off

the sensor unit and restart the software immediately to avoid leaving the analyzer

tube in an unknown state.

CAUTION:

Keep the product free from vibration or impact from its surrounding. It could

damage the product.

CAUTION:

If there is the isolation valve for this product, turn off the filament and stop

measurement. If the filament is kept on in vacuum for an extended time, the ion

source and electrode in the analyzer tube could be contaminated or insulation

failure could occur.

WARNING:

Risk of electric shock. When installing and removing this product or its parts, make

sure the power to the sensor unit is off. Contact with a terminal when power is on

could cause electric shock. The secondary electron multiplier (SEM) terminal is

energized with a voltage of -0.5 kV to -3 kV when the SEM is turned on.

WARNING:

Do not disassemble the AC adaptor.

WARNING:

Do not modify the AC adaptor. If modified, any operation and performance are not

guaranteed. It could be a cause of fire or electric shock.

WARNING:

Connect the product to A-class grounding to prevent electrical leakage.

WARNING:

Before turning on power, make sure that the operating voltage and supply voltage

are the same. If incorrect power is applied, damage or fire could result.

300781172_002_C0 - 012/2019 - © Leybold 10

Before using this instrument

WARNING:

Use a correctly rated plug to connect to the mains power. Incorrect usage could

lead to damage or fire.

WARNING:

If the AC adaptor fails, immediately turn off the power. Otherwise, fire or electric

shock can result.

WARNING:

If the AC adaptor is overheated, gives out smoke or an unusual smell, immediately

turn off the power. Otherwise, fire or electric shock could result if it is kept using.

WARNING:

Do not use the AC adaptor in a place where it may be splashed with water. If the

adaptor is splashed with water, failure, electric leak or fire can result.

CAUTION:

Use this AC adaptor within the scope of specifications.

CAUTION:

Repack this AC adaptor as originally shipped from the factory. If it is shipped

without packing, it could be damaged.

CAUTION:

When disposing this AC adaptor, dispose it according to your local government

regulations. If the analyzer tube or its parts were used in an environment that can

affect the human body, dispose of them through an approved method.

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