Halma ALICAT IM Manual de usuario

OPERATING MANUAL

FOR MASS FLOW DEVICES

Models IM and IMC

2 Introduction



device.

If you have any questions, or if something is not working

as expected, please contact us. We are eager to help you in

any way possible.

Contact Information

World Headquarters,

Tucson, Arizona, USA

info@alicat.com

alicat.com

7641 N Business Park Dr.,

Tucson, AZ 85743 USA

+1 888-290-6060

Europe

[email protected]

Geograaf 24

6921 EW Duiven

The Netherlands

+31(0)262.031.651

China & SE Asia

info-cn@alicat.com

alicat.com.cn

3rd Floor, Building 18,

FAMILY Science and

Technology Innovation Park,

No. 155, Yuanke Road

Minhang District

Shanghai, PRC 201109

+86-021-61519020

India

info-in@alicat.com

Pvt. Ltd.

101, Hamilton A Bldg,

Near Hiranandani Hospital,

Hiranandani Estate, Patli

Pada, Ghodbunder Road,

Thane West-400607

Maharashtra, India

+91 022-41248010



Annual calibration is necessary to ensure the continued accuracy of

readings, and to extend the Limited Lifetime Warranty. Fill out the

Service Request Form at alicat.com/service, or contact us

directly when it is time to send in your device for recalibration.

For information about our limited lifetime warranty, visit

alicat.com/warranty.

Serial #:

Next Calibration:

This device comes with a NIST-



This device conforms to the European

Union’s Restriction of Use of Hazardous

Substances in Electrical and Electronic

Equipment (RoHS) Directive 2011/65/EU.

This device complies with the

requirements of the Low Voltage

Directive 2014/35/EU and the EMC

Directive 2014/30/EU and carries

the CE Marking accordingly.

This device complies with the

requirements of the European Union’s

Waste Electrical & Electronic Equipment

(WEEE) Directive 2002/96/EC

DOC-MANUAL-IMC Rev 0, 2023.11.09

IM FLOW METER

IM FLOW CONTROLLER

3 Introduction

Introduction



• High-accuracy performance for all your gases.

30 calibrated gases

• 1000 readings per second guarantees high resolution data

• Monitor live pressure and temperature 

• Change your STP to match any standard temperature and pressure reference

•

. Set the closed loop control algorithm to

pressure control

• Log data to your PC with a serial data connection to control the device and capture data

for logging and analysis.

• Totalize and batch dispense

• Monitor valve position to maintain your process and identify failures before they occur.

This manual covers the following instruments:

• 

• 

For support or questions regarding the use or operation of this device, please contact us

using the information on page 2.



These custom solutions can meet a variety of application challenges brought forth by users



challenging application, contact Alicat for specialized engineering and application support.

This manual covers the general operation of factory OEM devices. Custom setups may not

be covered by this document. If you need further assistance, please contact Alicat support.

4 Table of Contents

Contents

Introduction 3

Getting Started 5

Mounting 5

Filters 5

Gas Connections 6

Maximum Pressure 6

 6

 6

Control 8

 8

Establishing Communication 8

ASCII Serial Communication 9

Establishing Communication 9

Unit ID 9

Taring the Device 9

Collecting Data 9

Data Format 10

Changing the Setpoint 10

Totalizer 11

Batch Dispensing 11

Changing the Gas 11

Control Loop 11

Command Quick Reference 12

Advanced ASCII Commands 12

Modbus-RTU 13

Communicating Via Modbus-RTU 13

Analog Signals 13

Taring the Device (METERS ONLY) 13

Changing the Setpoint 14

Reading the Flow 14

Valve Overrides 14

Alarm Output Option 14

Troubleshooting 15

General Use 15

 15

Serial Communications 16

Maintenance 17

Cleaning 17

Recalibration 17

Reference 18

Gas List by Number 18

Engineering Units 19

5 Getting Started

Getting Started

The major device components are shown in the diagram below.

Most communication with the device is completed through digital communication or analog

signals, as described later in this manual. The LED on the top of device provides the following

feedback:

• Solid Green: Power is applied

• Flashing Green: Power is applied, serial activity is occurring

• Solid Red: Valve override command received

•

Flashing Red: Error state (mass overrange, temperature overrange, pressure overrange,

totalizer overrange, etc.)

Mounting





The dimensions of your device and positions of the mounting holes are detailed in the

alicat.com/imc.

Filters





follows:

• 5 micronsSCCM.

• SCCM and 1 SLPM.

• SLPM.

6 Getting Started

Gas Connections



downstream.

Devices ship with plastic plugs seated in the processing ports. To decrease the chance of



the device.

After removing the plugs, immediately connect the device to upstream and downstream





for connections include NPT, SAE, BSPP, and VCR®

have male connections).



prevent leakage around the port threads, but







Pipe dopes or sealants are not recommended on the process connections.

These compounds can cause permanent damage to the controller should they get into

the ow stream.

Maximum Pressure

The maximum common mode pressure is PSIA. Common mode pressure is the

maximum pressure that may be applied simultaneously to both sides of the instrument

without causing damage.

 Using the ow controller above the maximum specied common pressure

will permanently damage the internal pressure sensors. If the line pressure is above

these limits, use a pressure regulator upstream of the device to reduce the pressure

below 200 PSIA.

Maximum Flow





Commanding a non-zero setpoint prior to applying the pressure will cause the valve to be

fully open and will expose the sensor to any instantaneous changes in pressure, such as

from a snap-acting solenoid valve. For meters and controllers with downstream valves,



pressure.

Power and Signal Connections

Power is supplied to the controller through the DB9 connector on the top of the device.

The table below indicates how to connect the device to power and communication. If your



found at alicat.com/pinouts.





 Do not power the device until all necessary pins have been properly

connected.

 Only connect power to pin 7. Connecting power to other pins can permanently

damage the device.

A mass flow controller with male

VCR®-compatible connections.

7 Getting Started



Power requirements vary based on analog conguration and valve type. Please

reference to the Factory OEM Mass Flow Devices specication sheet at alicat.com/imc for

power requirements.

Pin Function

1Ground to force the valve to close

Ground to force the valve to open

3Rx or B (+): Receives RS-232 (Rx) or RS-485 B (+) signals

4Analog Setpoint Input (meters: Ground to tare)

5Tx or A (-): Sends RS-232 (Tx) or RS-485 A (-) signals

6Analog Signal Output: 0-5 Vdc output signal.

7Power in: Powers the device

8Ground: Common ground for power, digital,

communications, analog signals and alarms

9Ground by default; alarm signal if unit has optional alarm page 14

* The above pinout is applicable to all factory OEM devices with the DB9

connector. The availability of dierent output signals depends on the options

ordered. Optional congurations are noted on the unit’s calibration sheet.

8 Control

Control

IM Series controllers and meters can be operated using digital or analog communication.

Digital communication can be performed using Alicat FlowVision™ 2.0 software, ASCII

serial commands, Modbus-RTU, or analog signals.

• FlowVision 2.0: page 8

• ASCII Serial Communication: page 9

• Modbus RTU: page 13

• Analog Signals: page 13

FlowVision 2.0

FlowVision™ 2.0 is Windows-based software that enables easy collection and analysis

of data from Alicat controllers and meters. FlowVision controls the device, runs scripts,

and logs and charts data. It also provides easy access to select the gas, amount of



applications.

Establishing Communication

To connect your device to FlowVision 2.0:

 Download FlowVision 2.0 from alicat.com/owvision and install.

 With the device turned on and connected to the computer, start FlowVision 2.0.

 Click Devices in the top left corner.

 Click the green plus sign to add your controller/meter.

 Select Wired for the connection type.



Specify the connection settings. By default, the Device ID is A, and the Baud Rate

is 19200. The Port is dependent on which COM port the device is connected to.

 

 Click Add to complete the process.

Please see the FlowVision 2.0 manual at alicat.com/owvision for detailed instructions

on operating your device through FlowVision.

9 Control

ASCII Serial Communication



DB9 port. Download Serial Terminal for free at alicat.com/drivers.

The section below outlines several common commands. For more detailed information

on using the ASCII interface, please see the Serial Primer manual at alicat.com/manuals.

Establishing Communication

Connect the device to a computer through a COM port or virtual COM port, noting the

COM port number. Up to 26 devices can be connected to a single COM port.

The following are the default connection settings:

• Baud: 19200

• Data bits: 8

• Parity: none

• Stop bits: 1

• Unit ID: A

Unit ID

Each device has a unique, single-letter ID using the standard 26-letter English alphabet

(e.g., A, B, C, etc.). The default ID is “A”. If more than one device on a COM port has the

same ID, data and commands become corrupted and do not report or execute properly.

When connecting multiple devices on the same COM port, connect one device at a time.

Provide a unit ID command for each device before connecting the next device.

To give the most recently connected device an unused ID:

 ( unit_id @ desired_id )

Taring the Device



provides its most accurate measurements. It is recommended to tare the device:

• After installation

• When changing the device’s orientation

• 

• 

 (unit_id V)

It is possible for the sensor zero to shift with changes in temperature and pressure. This



algorithm will automatically zero the device any time a 0 setpoint is given, after a small



less after receiving a 0 setpoint. See the Serial Primer at alicat.com/manuals for more on

autotare.

Collecting Data





Before collecting ow data, be sure to tare your controller. If autotare is enabled,

this can be accomplished by providing a setpoint of 0 and waiting for the ow readings

to reach zero.

Polling Mode

Polling the device returns a single line of data each time you request it. Your device was

shipped in polling mode with a unit ID of A, unless requested otherwise. To poll your device,

10 Control

simply enter its unit ID (see the Data Format on page 10).

 unit_id

  a (polls unit A)

You can change the unit ID of a polling device by typing:

 current_unit_id @=desired_unit_id

  a@=b (changes unit A to unit B)

Streaming Mode

In streaming mode, your device automatically sends a line of live data at regular intervals.

(see the Data Format on page 10).

Only one unit on a given COM port may be in streaming mode at a time. To put your device

into streaming mode, type:

 unit_id @=@

  a@=@(puts device A into streaming mode)

This is equivalent to changing the unit ID to “@”.



 @@=desired_unit_id

 @@=a8 (stops and assigns unit ID of A)



while the user is typing. This may make the commands you type unreadable. If the device

does not receive a valid command, it will ignore it. If in doubt, hit and start again.

The default streaming interval is 50 ms. This can be increased by changing Register 91

while the device is in polling mode:

 unit_id W91=number_of_ms

  aW91=500(streams new data every 500 ms)

Data Format



is not present in streaming mode.

Controller

        

ID Abs. Pressure Temp. Vol. Flow Mass Flow Setpoint Valve Drive Totalizer Gas

Meter

      

ID Abs. Pressure Temp. Vol. Flow Mass Flow Totalizer Gas

Single spaces separate each parameter, and each value is displayed in the chosen device

engineering units. You can query the engineering units of the serial data frame by typing:

 unit_id ??D*

 a??D* (returns the data frame descriptions)

Additional columns may be present to the right of the Gas Label column.

Changing the Setpoint



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