FormFactor ACP40-GSG Series Manual de usuario

PN 153-231-B www.formfactor.com ACP40-GSG-xxx Probes • 1

Quick Reference Guide

ACP40-GSG-xxx Probes

The ACP40-GSG-xxx probe features include:

• Standard Pitch: 100, 125, 150, 200 and 250μm

• 40 GHz Ground-Signal-Ground footprint microwave probe with Air Coplanar tip and 2.92mm

(K™ compatible) precision coaxial connector

XXX defines the pitch (center-to-center spacing between adjacent probe fingers).

Your calibration kit coefficient definitions are found on the inside of the probe box lid.

Probe Handling/Installation

Before mounting, inspect the probe for signs of dirt or visible wear. Use a

positioner with a standard 3-pin microwave mount. Use the middle (guide)

pin to align the probe and two mounting screws to snug-tighten the probe

(use 9/64 Contact Substrate (PN 005-018) to planarize the probe using the

positioner planarization adjustment.

Use high-performance microwave cable with 2.92mm (K™ compatible)

connectors.

When connecting RF connectors, carefully mate the connectors and tighten them by rotating only the male connector nut.

Use an 8 in-lb calibrated torque wrench to tighten the connectors.

Use the positioner cable clamp to relieve cable strain on the probe. Do not overtighten the clamp.

When unused, always cover the probe precision connector with the plastic cap supplied with the probe.

Probe Viewing

Always observe the probe tips when making the contact with the DUT. With the microscope focused

on the DUT and the probe tips safely raised, the probe tips appear out of focus.

Use the x- and y-axis knobs to position the probe tip above the DUT contacts. Use the z-axis knob to

bring the probe tips down to the device.

Before making contact, make sure that the probe station chuck is in the contact position and that the

platen arm is fully down.

When contacting a device, watch the probe tips through the microscope. Do not use electrical

readout as a substitute for microscope viewing. Observe contact and skating, then look for electrical readout.

Positioner Arm Planarization

The probe tip itself is planarized with high precision. However, it may still be

necessary to planarize the positioner arm to conform the probe tip plane to the

plane of the device being probed.

CAUTION

Use care when installing or handling the probe. Do not touch, bump or snag the probe tip.

Do not bend or flex the microwave absorber.

Cable clamp

Positioner arm planarization

adjustment knob

PN 153-231-B www.formfactor.com ACP40-GSG-xxx Probes • 2

ACP40-GSG-xxx Probes

Observe the probe landing on the metal on the contact substrate. Raise the probe and adjust the planarization knob to

ensure that each finger in the probe tip leaves marks of the same size and depth.

Making Contact

The Air Coplanar probe is designed to be used with a nominal overtravel

(downward movement after initial touchdown) of 50-75μm. The resulting

skate (forward movement resulting from overtravel) is about 20-30μm.

To obtain contact on extremely non-planar surfaces, you can use up to

250μm of overtravel without damaging the tip, although increased

overtravel may reduce probe life.

Proper amount of overtravel for calibration on Impedance Standard

Substrates (ISS) can be set using alignment marks on the ISS.

Initial contact with the edge of the probe tips should be at the midpoint

between the outer flat edge and the internal apex. With proper skate the

probes will end up at the midpoint between the internal apex and the flag

points.

Accessories

Probe Verification

To verify the performance of the probe, you can use the Probe Test feature of FormFactor's WinCalTM software. An active

cable calibration in the VNA and measurements of ISS Short, Open and Load standards are used to provide insertion

and return loss for the probe.

PN 101-190 Calibration ISS

PN 101-162 Precision microwave cable with 2.92mm (K™ compatible) coaxial connectors

PN 005-016 Verification ISS

PN 005-018 Contact substrate

Properly PlanarizedNot Planarized

Probe in

the air

Probe at intial

touchdown

Probe

overtravel/skate

Overtravel

Skate

PN 153-231-B www.formfactor.com ACP40-GSG-xxx Probes • 3

ACP40-GSG-xxx Probes

Some network analyzers do not support lumped inductance model and require offset Z0

and offset Td. In this case, model your parasitic inductor for both Short and Load standards

as a short piece of transmission line. Assume the maximum impedance that the network

analyzer allows (typically 500 ohm) and calculate Tdusing the following equation:

For example:

L = -1.7 pH Z = 500 ohm

Td= -0.0034 ps

For verification of your calibration, measure S11 of an open standard and an open-ended transmission line located at the

bottom of the ISS (PN 101-190). Typical plots of such measurements with LRRM calibration are shown below.

Note that in the case of SOLT calibration the S11 of an Open standard will look perfect at 0dB (reflection coefficient of 1)

with variation due only to system repeatability; therefore, it is not a good choice for verification of your calibration accuracy.

(GHz)

07-27-1998 15:55:16

C-open = -9.7 fF L-short = 4.8 pH L-term = -1.70 pH

S21 max = -0.67 dB S11 min = -12.59 dB S22 min = -15.53 dB

VNA Calibration and Verification

To achieve best measurement accuracy when doing microwave on-wafer measurements above 10-15 GHz, use LRRM

calibration routine with automatic load inductance determination as implemented in FormFactor WinCal software.

If you choose to do SOLT calibration, Calibration Kit Definitions for your probes are found on the inside of the probe box lid.

Use 1ps for the delay of the Thru standard on the ISS 101-190.

ACP-GSG 150 Probe Test

S11, S22 (dB) S21 (dB)

Td= L/Z0

(GHz)

101-190 GSG, Virtual VNA, Summit - Nucleus 2.7

Frequency range: 1.000-40.000 GHz, 40

Magnitude - S11 Open

(dB)

09-07-2004 16:11:55 LRM open-load

(GHz)

Magnitude - S11 Open-Ended Transmission Line

(dB)

PN 153-231-B www.formfactor.com ACP40-GSG-xxx Probes • 4

Quick Reference Guide

ACP40-GSG-xxx Probes

Probe Cleaning

Clean the probe tips and connectors occasionally, or when you suspect contact problems. Follow your microwave cable or

network analyzer manufacturer instructions for cleaning the precision microwave connector.

For more information, visit www.formfactor.com.

Symptom Possible Causes Solution

Probe is pulled to the side when

trying to land on the device

Cable applies strain on the probe Use positioner cable clamp to strain-relieve the probe

Intermittent electrical contact Dirty/contaminated probe tip Clean the probe tip

Dirty RF connectors Clean the RF connectors

Probe overtravel is not sufficient Adjust the overtravel

Positioner arm is not planarized after

mounting the probe

Planarize the positioner arm

Poor calibration accuracy SOLT calibration is used above 10GHz Use LR(R)M calibration

Cal kit is not defined correctly Verify your cal kit definitions

Poor calibration repeatability Poor connection in the system Check and retighten your RF connections

Defective cable Check the cable using VNA transmission calibration

Large temperature variations in the lab Switch to controlled temperature lab

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Phone: 925-290-4000

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While the information contained herein is believed to be accurate as of the date hereof, no express or

implied representations or warranties are made with respect to its accuracy or completeness. FormFactor,

Inc., and its subsidiaries disclaim liability for any inaccuracies or omissions. All information is subject to

change without notice.

Users are required to read and follow carefully all safety, compliance and use instructions. Users assume all

loss and liability arising from the use of products in any manner not expressly authorized. The conditions and

methods of use of products and information referred to herein are the entire responsibility of the user and,

to the maximum extent permitted by applicable law, FormFactor, Inc., and its subsidiaries shall not be liable

for any damages, losses, costs or expenses arising out of, or related to, the use thereof.

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