Edwards SCU-801 Manual de usuario

MT-95E-001-A

SCU-801 Control Unit

Instruction Manual (C)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A):

STP pump generic Instruction Manual

Instruction Manual (B):

STP pump specific information

Instruction Manual (C):

(This Instruction Manual)

STP control unit Instruction Manual

2023.06

Description Voltage

SCU-801 Control Unit 100 - 120 Va.c.

200 - 240 Va.c.

Declaration of Conformity

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-95-001

This declaration of conformity is issued under the sole responsibility of the manufacturer:

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 276-8523

Japan

Documentation Officer

Jana Sigmunda 300

Lutín , 78349

Czech Republic

T: +42(0) 580 582 728

[email protected]

Product Name:

Control unit for turbomolecular pump

Model Number:

SCU-801 series

Is in conformity with the relevant requirements of European CE legislation:

2014/35/EU

Low voltage directive (LVD)

2014/30/EU

Electromagnetic compatibility (EMC) directive

Class A Emissions, Industrial Immunity

2011/65/EU

Restriction of certain hazardous substances (RoHS) directive

as amended by Delegated Directive (EU) 2015/863

Based on the relevant requirements of harmonised standards:

EN 61010-1:2010 +A1:2019

Safety requirements for electrical equipment for measurement, control and

laboratory use. General requirements

EN 61326-1:2013

Electrical equipment for measurement, control and laboratory use. EMC

requirements

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 13th-Apr-2023

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Signed for and on behalf of Edwards Ltd

Tanya Palmer

Vice President, Engineering, Semiconductor Chamber

Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

Declaration of Conformity

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-95-001

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 276-8523

Japan

Documentation Officer

Innovation Drive

Burgess Hill

West Sussex

RH15 9TW

[email protected]

This declaration of conformity is issued under the sole responsibility of the manufacturer.

Product Name:

Control unit for turbomolecular pump

Model Number:

SCU-801 series

The object of the declaration described above is in conformity with relevant statutory requirements:

Electrical Equipment (Safety) Regulations 2016

Electromagnetic Compatibility Regulations 2016

Class A Emissions, Industrial Immunity

Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012

Relevant designated standards or technical specifications are as follows:

EN 61010-1:2010 +A1:2019

Safety requirements for electrical equipment for measurement, control and

laboratory use. General requirements

EN 61326-1:2013

Electrical equipment for measurement, control and laboratory use. EMC

requirements. General requirements. Class A Emissions, Industrial Immunity

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 13th-Apr-2023

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Signed for and on behalf of Edwards Ltd

Tanya Palmer

Vice President, Engineering, Semiconductor Chamber

Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-95-001

ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION

RoHS (EU, UK):Material Exemption Information

This product is compliant with the following Exemptions

Annex III:

•6(a)-I Lead as an alloying element in steel for machining purposes containing up to 0,35 % lead by weight and in

batch hot dip galvanised steel components containing up to 0,2 % lead by weight

•6(b)-I Lead as an alloying element in aluminium containing up to 0,4 % lead by weight, provided it stems from lead

bearing aluminium scrap recycling

•6(c) Copper alloy containing up to 4 % lead by weight

•7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more

lead)

•7(c)-I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in

capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound

REACH (EU, UK)

This product is a complex article which is not designed for intentional substance release. To the best of our knowledge

the materials used comply with the requirements of REACH. The product manual provides information and instruction

to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.

Article 33.1 Declaration:

This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the

2015 European Court of Justice ruling in case C-106/14.

•Lead (Pb)

This substance is present in certain steel / aluminium / brass components.

•Imidazolidine-2-thione

This substance is present in certain rubber components.

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-95-001

材料成分声明

China Material Content Declaration

有害物质

Hazardous Substances

部件名称

Part name

铅

Lead

(Pb)

汞

Mercury

(Hg)

镉

Cadmium

(Cd)

六价铬

Hexavalent

Chromium

(Cr VI)

多溴联苯

Polybrominated

biphenyls

(PBB)

多溴二苯醚

Polybrominated

diphenyl ethers

(PBDE)

铸铝及铝合金制品

Aluminium alloys

〇

电缆/电线/连接器

Cable/wire/connector

〇

印刷电路组件 (PCA)

Printed Circuit Assembly (PCA)

〇

电子元件和控件

Electronics and

Controls

〇

O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。

O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit

requirement in GB/T 26572.

X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。

X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is

above the limit requirement of GB/T26572.

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link

•EdCentra

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

 
SCU-801 Control Unit for Turbomolecular Pump 
 
MT-95E-001-A 
Page i 
PAGE 
i 
 
CONTENTS 
Section Title Page 
1INTRODUCTION 1 
1 Scope and definitions 1 
2 Electromagnetic compatibility 2 
3 Limited warranty 3 
3.1 Item warranted 3 
3.2 Disclaimer 3 
3.3 Spare parts 4 
4 Labels 4 
5 Label affixing positions 6 
6 General description 7 
6.1 Cable sets 8 
2TECHNICAL DATA 9 
1 SCU-801 specifications 9 
3INSTALLATION 13 
1 Unpacking 13 
2 Front panel 13 
3 Rear panel 16 
4 Precautions before installation 17 
4.1 Operating environment 17 
4.2 Insulation test 17 
4.3 Installation area 18 
5 Attaching the SCU-801 to a rack 19 
6 Cable connection 20 
6.1 STP connection cable 21 
6.2 TMS connection cable 22 
6.3 Power cable 23 
7 Connecting to semiconductor equipment 25 
7.1 Connecting to power 25 
7.2 Emergency off circuit (EMO circuit) 25 
8 Remote communication 26 
8.1 Parallel communication 26 
8.2 Serial communication 26 
9 Adjustment methods 27 
9.1 Tuning 27 
9.2 Tuning method 27 
9.3 Change of data after tuning 29 
10Confirmation mode 30 
10.1 Confirmation method 30 
11 Parameter set mode 33 
11.1Remote operation setting 33 
11.2 Rotational speed setting 33 
11.3 TMS setting 33 
11.4Rotational inhibit signal setting 33 
11.5 Emergency vent valve setting 33 

 
SCU-801 Control Unit for Turbomolecular Pump 
 
MT-95E-001-A 
Page ii 
PAGE 
ii 
 
CONTENTS (CONTINUED) 
Section Title Page 
11.6 Second Damage Limit setting 34 
11.7 Pump air-cooling fan output setting 34 
11.8 Warning function setting 35 
11.9 Serial port COM1 setting 36 
11.10 Serial port COM2 setting 36 
11.11 Serial port COM3 setting 36 
11.12 Date/Time setting 36 
11.13 EdCentra setting 36 
11.14 Factory setting 36 
11.15 Parameter setting procedure 37 
12 Manual operation mode 44 
4OPERATION 47 
1 Before starting the STP pump 47 
1.1 Confirmation before starting 47 
1.2 Confirmation of vacuum system 47 
2 Powering ON 48 
2.1 Self test 48 
2.2 "CAUTION" message in the self test state 48 
3 How to start/stop the STP pump 49 
4 Manual start/stop the STP pump 49 
4.1 Starting the STP pump 49 
4.2 Stopping the STP pump 49 
4.3 Starting the STP pump after stopping 49 
5 Remote operation 51 
5.1 Input signal pins 51 
5.2 Output signal pins 53 
5.3 Remote setting 56 
5.4 Starting/Stopping the STP pump 56 
5.5 Rotation INHIBIT signal 57 
5.6 Starting the STP pump after stopping 58 
5.7 Starting the STP pump after a safety function operates 58 
6 Powering OFF 58 
7 Operating the TMS unit (for use with the TMS unit) 59 
7.1 Before starting 59 
7.2 Starting/Stopping 59 
7.3 Setting the TMS unit function 59 
7.4 Temperature control 60 
5SERIAL COMMUNICATION PROTOCOL 61 
1 Introduction 61 
2 Connection and setting up 62 
2.1 Signal connection 62 
2.2 Connecting the RS485 64 
2.3 Communication parameter setting 66 
2.4 Recommended items about communication cable installation 67 
3 Protocol specifications 70 
3.1 General description 70 

 
SCU-801 Control Unit for Turbomolecular Pump 
 
MT-95E-001-A 
Page iii 
PAGE 
iii 
 
CONTENTS (CONTINUED) 
Section Title Page 
3.2 Standard transmission frame 
(in the RS232/RS485 single point connection) 71 
3.3 Control command 
(in the RS232/RS485 single point connection) 72 
3.4 Query command 
(in the RS232/RS485 single point connection) 73 
3.5 Transmission data format 74 
3.6 Frame control (checksum) 74 
3.7 Error control 75 
3.8 Transmission frame in the RS485 multi-point connection 76 
3.9 Control command in the RS485 multi-point connection 77 
3.10 Query command in the RS485 multi-point connection 79 
3.11 Broadcasting command in the RS485 multi-point connection 80 
3.12 Application note 81 
4 Command specifications 85 
4.1 Command list 85 
4.2 ReadMeas 86 
4.3 Command 86 
4.4 ReadFailMess 87 
4.5 ReadModFonct 90 
4.6 ReadVersion 92 
4.7 ReadCounters 93 
4.8 ReadSetPoint 94 
4.9 ReadMotorTemp 94 
4.10 ReadStatus 95 
4.11 ReadEvents 96 
4.12 SetSpeedSetPoint 97 
4.13 ReadSpeedSetPoint 98 
4.14 ReadModFonctWithWarning 99 
4.15 ReadMeasValue 102 
6STP-LINK 105 
7EDCENTRA 107 
8MAINTENANCE 109 
1 Safety functions 109 
1.1 Power failure 109 
1.2 Operation after a power recovery 110 
1.3 Abnormal state of magnetic bearing 110 
1.4 Excessive vibration 111 
1.5 Motor driver overload 111 
1.6 Overheating inside the STP pump 111
1.7 Overheating inside the SCU-801 111 
1.8 Overspeed 111 
1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 112 
1.10 Failure of the air-cooling fan 112 

 
SCU-801 Control Unit for Turbomolecular Pump 
 
MT-95E-001-A 
Page iv 
PAGE 
iv 
 
CONTENTS (CONTINUED) 
Section Title Page 
2 "WARNING" message function 113 
2.1 "WARNING" message display function 113 
3 "WARNING" message description 114 
3.1 Damage point function 114 
3.2 First damage limit 114 
3.3 Second damage limit 114 
3.4 Imbalance X_H, X_B, Z 115 
3.5 Pump run time over 115 
3.6 Pump overload 115 
3.7 Low RTC battery 115 
4 "WARNING" function setting 116 
5 Error at self test state 117 
5.1 Error after self test 118 
5.2 Error messages 118 
5.3 Troubleshooting immediately after power failure occurs 118 
5.4 Troubleshooting immediately 
after other abnormality/errors occur 119 
6 When error message is not displayed on LCD 128 
6.1 Abnormalities when powering ON 128 
6.2 Abnormalities when performing rotational operation 128 
6.3 Other abnormalities 129 
7 "Error Record" message display function 129 
8 Maintenance and inspection 130 
8.1 Cleaning 131 
8.2 Maintenance 131 
9STORAGE, TRANSPORTATION AND DISPOSAL 133 
1 Storage of the SCU-801 133 
2 Transporting for repair or overhaul 133 
3 Disposal 134 
SERVICE, SPARES AND ACCESSORIES 135 
1 Introduction 135 
2 Service 135 
3 Spares 135 
4 Accessories 136 
 
 
 