Celerity ACX3200 Series Manual de usuario
ACX3200/ACX3400 Series
Adaptive Pressure Controllers
User Guide
Celerity, Inc.
915 Enterprise Boulevard
Allen, TX 75013 USA
T +1 972 359 4000
F +1 972 359 4100
SD536577 REV 001 08/07
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SAFETY NOTICES 1
_0.1 SAFETY SYMBOLS 1
_0.2 GROUNDING 1
_0.3 EXPLOSIVE ATMOSPHERE 1
_0.4 PART SUBSTITUTIONS AND MODIFICATIONS 1
_0.5 GENERAL SAFETY GUIDELINES 1
_0.5.1 Unsafe Acts 2
_0.5.2 Recommended practices 2
_1.0 INTRODUCTION 3
_2.0 DESCRIPTION 4
_2.1 SYSTEM OVERVIEW 4
_2.2 ACX FEATURES 4
_2.3 CONTROLLING THE SYSTEM PRESSURE 5
_2.4 ADAPTIVE PRESSURE CONTROL 5
_2.5 PID PRESSURE CONTROL 6
_2.6 PID TUNING 6
_2.7 HYBRID ALGORITHM 7
_2.8 VALVE POSITIONING 7
_2.9 MANUAL VALVE OVERRIDE 7
_3.0 INSTALLATION 9
_3.1 MOUNTING - ACX3200 AND ACX3400. 9
_4.0 CONFIGURATION 10
_4.1 RS-232 INTERFACE 10
_4.2 RS-232C DCE DESCRIPTION 10
_4.3 HARDWARE HANDSHAKING 12
_4.4 RS-422 INTERFACE 13
_4.5 RS-485 INTERFACE 13
_4.6 SELECTING NUMBER OF CM INPUTS 14
_4.7 SELECTING INPUT AND OUTPUT VOLTAGE LEVELS 14
_4.8 FACTORY DEFAULT SWITCH POSITIONS 15
_4.9 OTHER INTERNAL CONFIGURATION SETTINGS 15
_4.9.1 RS-232 and RS-485 Communication 15
_4.9.2 Other Internal Connectors and Jumpers 16
_4.10 INTERFACING TO ACX REAR PANEL 16
_4.10.1 ACX3200 and ACX3400 Power Input 16
_CONTENTS
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_4.10.2 Device Port 16
_4.10.3 CM1 and CM2 Interfacing 17
_4.10.4 Throttle Valve 18
_4.10.5 Auxiliary Port 18
_4.10.6 Serial Interface Port 18
_5.0 LOCAL OPERATION 19
_5.1 ACX3400 FRONT PANEL KEYPAD OPERATION 19
_5.2 ACX3400 FRONT PANEL MENU FUNCTIONS 19
_5.2.1 Setpoints 19
_5.2.2 PID Gain 19
_5.2.3 PID Phase 20
_5.2.4 Trip Point 1 20
_5.2.5 Trip Point 2 20
_5.2.6 Sensor Range 20
_5.2.7 Lock High Sensor 20
_5.2.8 Release Sensor Lock 20
_5.2.9 Set Valve Angle 20
_5.2.10 Algorithm Select 21
_5.2.11 Units Select 21
_5.2.12 Software Version, Serial Port Configuration, Analog
Output Voltage Range 21
_5.2.13 Change Zero Offset 21
_5.2.14 Reset Zero 21
_5.2.15 Zero offset 21
_6.0 SERIAL INTERFACE 22
_6.1 INTRODUCTION 22
_6.1.1 Command Notation 22
_6.1.2 Command Strings 22
_6.2 COMMAND OVERVIEW 23
_7.0 FUNCTIONAL CONTROL COMMANDS 24
_7.1 SET PRESSURE CONTROL ALGORITHM 25
_7.2 SET PID ALGORITHM 25
_7.3 LEARN ALGORITHM 26
_7.4 OPEN VALVE COMMAND 26
_7.5 CLOSE VALVE COMMAND 26
_7.6 HOLD VALVE COMMAND 26
_7.7 GO TO VALVE ANGLE COMMAND 27
_7.8 ADJUST PRESSURE COMMAND (ZERO ADJUST) 27
_7.9 REMOVE ZERO OFFSET 27
_7.10 ZERO THE SENSOR 28
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_7.11 SET NUMBER OF CMS 28
_7.12 SET CM FULL SCALE 28
_7.13 CM SELECT 28
_7.14 ECHO SOFTWARE SWITCH 29
_7.15 HARDWARE HANDSHAKING 29
_7.16 INITIALIZE ACX 30
_7.17 LOCK TO HIGH SENSOR 30
_7.18 LOCK TO LOW SENSOR 30
_7.19 RELEASE SENSOR LOCK 30
_7.20 SETPOINT COMMAND 30
_7.21 CONTROL TO SETPOINT 31
_7.22 SET GAIN 32
_7.23 SET GAIN COMPENSATION FACTOR 32
_7.24 SET PHASE 33
_7.25 SET PHASE COMPENSATION FACTOR 34
_7.26 SET TRIP POINT 34
_8.0 RAMP FUNCTION COMMANDS 36
_8.1 RAMP FUNCTION BEHAVIOR 36
_8.2 SET RAMP FUNCTION 37
_8.3 SET PRIMARY RAMP SETPOINT 38
_8.4 SET PRIMARY SETPOINT DELAY TIME 38
_8.5 SET SECONDARY RAMP SETPOINT 38
_8.6 SET SECONDARY SETPOINT RAMP TIME 38
_8.7 SET SECONDARY RAMP SETPOINT DELTA TIME 38
_9.0 REPORT (STATUS) COMMANDS 39
_9.1 INITIATE DIAGNOSTIC ROUTINE 40
_9.2 REPORT ALGORITHM TYPE 40
_9.3 REPORT CM RANGE 40
_9.4 REPORT COMMAND 40
_9.5 REPORT DIAGNOSTIC STATUS WORD 41
_9.6 REPORT GAIN 42
_9.7 REPORT GAIN COMPENSATION FACTOR 43
_9.8 REPORT MODEL ID 43
_9.9 REPORT OPERATIONAL STATUS WORD 43
_9.10 REPORT PHASE 45
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_9.11 REPORT PHASE COMPENSATION FACTOR 46
_9.12 REPORT PRIMARY RAMP SETPOINT 46
_9.13 REPORT PRIMARY SETPOINT DELAY TIME 46
_9.14 REPORT RAMP FUNCTION STATUS 46
_9.15 REPORT SECONDARY RAMP SETPOINT 46
_9.16 REPORT SECONDARY SETPOINT DELTA TIME 47
_9.17 REPORT SECONDARY SETPOINT RAMP TIME 47
_9.18 REPORT SETPOINT 47
_9.19 REPORT SOFTWARE ID 47
_9.20 REPORT SYSTEM PRESSURE 48
_9.21 REPORT TRIP POINT 48
_9.22 REPORT VALVE ANGLE 48
_9.23 REPORT VENDOR ID 49
_9.24 HELP SCREEN 49
_10.0 RS-485 SERIAL INPUT/OUTPUT 50
_10.1 THEORY OF OPERATION 50
_10.2 UNIQUE DEVICE ADDRESS 50
_10.3 RS-485 DATA LINK 50
_10.4 MODIFYING THE RS-485 ADDRESS 51
_10.5 GENERAL OPERATION 51
_10.6 COMMAND RESPONSE AND ACKNOWLEDGEMENT 51
_11.0 AUXILIARY INTERFACE 54
_11.1 AUXILIARY PORT FUNCTIONS 56
_11.1.1 Trip Point Relays 56
_11.2 CONTROL INPUTS 57
_11.2.1 Hold/Control Select 57
_11.2.2 Close Input 57
_11.2.3 Open Input 57
_11.2.4 Remote Zero 57
_11.2.5 Pressure/Valve Input Select 58
_11.2.6 CM Select 58
_11.2.7 Digital Ground 58
_11.3 STATUS OUTPUTS 58
_11.3.1 Valve Open Status 58
_11.3.2 Valve Closed Status 58
_11.3.3 Valve Status Output Common 58
_11.3.4 CM Out 59
_11.4 ANALOG SIGNALS 59
_11.4.1 Analog Ground 59
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_11.4.2 Analog Setpoint/Valve Angle Input 59
_11.4.3 Pressure Signal Output 59
_11.4.4 Valve Angle Signal Output 59
_12.0 MAINTENANCE AND TROUBLESHOOTING 61
_12.1 CLEANING AND ROUTINE MAINTENANCE 61
_12.2 TROUBLESHOOTING GUIDE 61
_12.3 ACX3400 ERROR MESSAGES 61
_13.0 ASCII CHARACTER CODES 62
_14.0 SERIAL PORT ADAPTORS 63
_15.0 WARRANTY 64
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0.0 SAFETY NOTICES
This manual provides information for the installation and operation of the Celer-
ity ACX3200 and ACX3400 Series Downstream Pressure Controllers. It is
imperative that this manual be reviewed prior to installation and operation of the
device. Failure to comply with the warnings, cautions, and hazard notes will void
the product’s warranty. Use of these instruments in a manner other than those
specified by Celerity may result in injury or death and will void the product’s war-
ranty. Celerity assumes no liability for any damage resulting from the improper
use of its products.
0.1 SAFETY SYMBOLS
The following safety symbols are used throughout the system documentation:
CAUTION !!
Damage to equipment or software could result if stated or local procedures are not
followed.
WARNING
!!
Injury to user or other personnel could result if stated or local procedures are not
followed.
DANGER
Severe injury or injury resulting in death could result if stated or local procedures
are not followed.
0.2 GROUNDING
All devices must be properly grounded to reduce the risk of an electrical shock.
0.3 EXPLOSIVE ATMOSPHERE
The ACX family of products are NOT intended for use in explosive atmospheres.
0.4 PART SUBSTITUTIONS AND MODIFICATIONS
Modifying an instrument in any way not only voids the warranty but could cause
a safety hazard and should be avoided. Repair work should be done at the fac-
tory or by a factory-authorized service center.
0.5 GENERAL SAFETY GUIDELINES
Always follow established industrial safety practices when operating any produc-
tion equipment.
Safety is designed into every product. When followed, these minimum guide-
lines provide an acceptable level of safety for operating and maintaining your
system. They are not, however, a substitute for determining your own internal
safety procedures.
Use of controls, adjustments, or procedures other than those specified in this
manual without consulting a competent safety professional may result in expo-
sure to potential hazards. Always follow established industrial safety practices
when operating production equipment.
DANGER
SHOCK HAZARD. All devices
must be properly grounded to
reduce the risk of electrical
shock. The 3-conductor power
cord supplied the AXC3200
and ACX3400 pressure
controllers provides the
required grounding when
connected to a properly
grounded main circuit. See
Figure 9, Rear Panels, on
Page 16 for further details.
DANGER
Do not use equipment in an
explosive atmosphere. The
ACX family of products are
NOT intended for use in
explosive atmospheres.
CAUTION !!
Do not substitute parts or
modify equipment.
0.0
_SAFETY
AXC3200
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0.5.1 Unsafe Acts
• NEVER defeat a safety interlock unless you are certified to perform the proce-
dure and have been specifically directed to defeat the interlock.
• NEVER operate or service this system without a thorough knowledge of the
dangers involved and the precautions to be followed for safe and efficient
operation.
• NEVER disregard instructions to lockout/tagout the system.
• NEVER permit unauthorized or untrained personnel to use the system.
• NEVER STAND IN WATER OR ON A WET SURFACE WHILE OPERATING
ANY ELECTRICALLY POWERED EQUIPMENT.
• NEVER place your hands near moving parts or energized parts or sub-
systems. Components can move rapidly.
• NEVER remove a warning label from the equipment.
• NEVER operate damaged equipment.
• NEVER permit unauthorized or untrained personnel access to the system.
0.5.2 Recommended practices
• USE THE BUDDY SYSTEM: ALWAYS perform maintenance procedures in
teams of two or more people; one to monitor the controls and indicators, and
one to watch the system operation.
• ALWAYS observe all warning labels.
• ALWAYS avoid all unsafe acts.
The safety procedures described in this manual are minimum guidelines. It is
believed that these guidelines will provide an acceptable level of safety. These
guidelines, however, should not be considered a substitute for determining your
own internal safety procedures in consultation with a competent safety profes-
sional.
DANGER
Use of controls, adjustments,
or procedures other than those
specified in this manual
without consulting a
competent safety professional
may result in exposure to
potential hazards
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1.0 INTRODUCTION
This manual provides the necessary information to configure, install andoperate
ACX Downstream Pressure Controllers. These include:
The Installation section presents the information on physical dimensions,
mounting considerations, performance and electrical specifications, power sup-
ply requirements and interfacing pinout tables for connecting devices to the
ACX. Serial port interfacing and configuration of externally selectable dip
switches are also included.
The Operation section describes the options for interfacing to the ACX. The
Serial port and Auxiliary port considerations, advantages and limitations are dis-
cussed. The ACX provides multiple control algorithms for controlling pressure.
The uses of each are described along with sensor input configurations, valve
positioning and control options.
The Auxiliary Interface section describes in detail the requirements for electri-
cally controlling and monitoring the ACX using contact closure and analog sig-
nals.
All commands and functions of the ACX may be performed using the RS-232 or
RS-485 communications port. The Serial Interface and RS-485 Serial Input/Out-
put sections provide syntax and descriptions of the available commands.
The Appendices provide information on the ASCII character set for use with the
serial port. Also shown is wiring information for using the RS-232 adaptor for 9
and 25 pin “D” type connectors to RJ-12 type connectors.
Model Communication Additional Features
RS-232 RS-485
ACX3201 √auxiliary port
AC powered
ACX3211 √
ACX3401 √auxiliary port front panel
AC powered
ACX3411 √
1.0
_INTRODUCTION
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2.0 DESCRIPTION
2.1 SYSTEM OVERVIEW
The ACX provides precision control of process chamber pressures through a
closed-loop systems approach: pressure control is achieved by controlling the
rotation of a specially designed throttle plate in the exhaust line. One or more
capacitance manometers (CMs) provide pressure feedback. A typical system
block diagram is shown below.
Figure 1: System Block Diagram
The ACX is available in two basic configurations:
• with front panel rack mount
• with a display/control panel
The ACX3200 Series includes a contact closure and analog input/output signal
interface and a full-featured communications port.
The ACX3400 Series provides the same features as the ACX3200 Series and
includes a front-panel keypad and display for full system control and monitoring.
The ACX3200 and ACX3400 are configured with internal AC-operated power
supplies. See Table 1 on page 8 for details.
2.2 ACX FEATURES
• User-selectable pressure control algorithms.
Adaptive control - no phase lead or gain adjustments are necessary. The sys-
tem automatically adapts to changes in operating parameters in real time.
Proportional Integral Differential (PID) algorithm.
Learning algorithm automatically selects PID parameters.
Hybrid algorithm using both PID and Adaptive features.
• The ACX can monitor two CMs with complementary ranges to extend the con-
trol range up to 5 decades of pressure.
Exhaust
MDVX
Gas
Flow
CM(s)
Process
Chamber
Pressure Controller
RS-232 (RS-485)
control from system
controller
TTL/Analog
control system
controller
2.0
_DESCRIPTION
Este manual sirve para los siguientes modelos
1
Tabla de contenidos
