Brooks Instrument 5850EM Manual de usuario
Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008 Brooks®Models 5964, 5850EM
Brooks®Models 5964, 5850EM
Mass Flow Controllers
Model 5850EM
Mass Flow Controller
with D-Connector
Model 5850EM Downported
Mass Flow Controller
with Card Edge
Model 5964
Mass Flow Controller
with D-Connector
Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number:541B121AHG
November, 2008
Brooks®Models 5964, 5850EM
ESD (Electrostatic Discharge)
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
• Section 1 of this manual contains important safety and operating instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
HandlingProcedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.
Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008 Brooks®Models 5964, 5850EM
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number:541B121AHG
November, 2008
Brooks®Models 5964, 5850EM
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Brooks®Models 5964, 5850EM
Contents
Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Paragraph Page
Number Number
Section 1 Introduction
1-1 How to Use This Manual ............................................................................................................1-1
1-2 Description .................................................................................................................................1-1
1-3 Specifications .............................................................................................................................1-2
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment.................................................................................................................2-1
2-3 Recommended Storage Practice ...............................................................................................2-1
2-4 Return Shipment ........................................................................................................................2-2
2-5 Transit Precaution ......................................................................................................................2-2
2-6 Removal from Storage ...............................................................................................................2-2
2-7 In-Line Filter ...............................................................................................................................2-3
2-8 Installation ..................................................................................................................................2-3
2-9 Electrical Interface......................................................................................................................2-4
2-10 Operation Procedure..................................................................................................................2-5
Section 3 Operation
3-1 Overview ....................................................................................................................................3-1
3-2 Connections and Controls ..........................................................................................................3-1
3-3 Theory of Operation ...................................................................................................................3-4
3-4 Features .....................................................................................................................................3-6
3-5 Adjustment Potentiometers .......................................................................................................3-15
3-6 ZeroAdjustment ........................................................................................................................3-16
3-7 Calibration Procedure ...............................................................................................................3-17
3-8 Response Adjustment ...............................................................................................................3-22
Section 4 Maintenance
4-1 Overview ....................................................................................................................................4-1
4-2 Troubleshooting..........................................................................................................................4-2
4-3 Gas Conversion Factors ............................................................................................................4-6
4-4 Orifice Sizing .............................................................................................................................4-10
4-5 Restrictor Sizing ........................................................................................................................4-15
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
ii
Brooks®Models 5964, 5850EM
Contents Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number:541B121AHG
November, 2008
Figures
Figure Page
Number Number
1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM
with D-Connector and VCR Fittings ........................................................................................ 1-5
1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM
with Card Edge and VCR Fittings............................................................................................ 1-6
1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector .... 1-7
1-4 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge ....... 1-8
2-1 Card Edge Connector ............................................................................................................. 2-6
2-2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram................................................ 2-7
2-3 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Version..................................... 2-6
2-4 D-Connector Shielded Cable Hookup Diagram - Current I/O Version..................................... 2-8
2-5 Maximum Allowable Loop Resistance-Current I/O version ..................................................... 2-8
2-6 Common Electrical Hookups Current I/O version ................................................................... 2-9
3-1 Model 5964/5850EM Components.......................................................................................... 3-2
3-2 ExternasllyAccessibleAdjustments ........................................................................................ 3-3
3-3 Flow Sensor Operational Diagram (VCRTM End Connections Shown) .................................... 3-4
3-4 Flow Controller System Block Diagram................................................................................... 3-4
3-5 Enhanced Response 20 Pin Card Edge PC Board Jumper location and Function ................. 3-6
3-6 Standard Response 20 Pin D-Connector PC Board Jumper location and Function................ 3-7
3-7 Enhanced Response 15 Pin D-Connector PC Board Jumper location and Function.............. 3-8
3-8 Standard Response 15 Pin D-Connector PC Board Jumper location and Function................ 3-9
3-9 Current I/O Version PC Board Jumper Location and Function.............................................. 3-10
3-10 Command Steps, Soft Start Disabled.................................................................................... 3-11
3-11 100% Command Steps, Soft Start Enabled........................................................................... 3-11
3-12 Adjustment Potentiometer Location ...................................................................................... 3-14
3-13 Bench Troubleshooting Circuit .............................................................................................. 3-16
3-14 ResponseAdjustment ........................................................................................................... 3-22
4-1 Model 5964/5850EM Orifice Sizing Nomograph ................................................................... 4-11
4-2 Example Nomograph ............................................................................................................ 4-14
Tables
Table Page
Number Number
2-1 Recommended Filter Size..........................................................................................................2-3
3-1 Cables, calibration Covers and PC Boards for Model 5964/5850EM.........................................3-3
4-1 BenchTroubleshooting ..............................................................................................................4-4
4-2 SensorTroubleshooting .............................................................................................................4-5
4-3 Conversion Factors (Nitrogen Base)..........................................................................................4-7
4-4 Model 5964/5850EM Standard Restrictors................................................................................4-16
1-1
Brooks®Models 5964, 5850EM
Section 1 IntroductionInstallation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
1-1 How to Use This Manual
This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the
Brooks®Models 5964 and 5850EM
This manual is organized into the following sections:
Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance
SectionA CE Certifications
Back Cover Warranty, Local Sales/Service Contact Information
1-2 Description
The Brooks Models 5964 and 5850EM Mass Flow Controllers is used in
gas flow handling systems where very low leakage and high performance
are required. The Models 5964 and 5850EM incorporates metal seals or
welded joints, insuring leak integrity for high purity and high vacuum
applications. Reducing the amount of internal threads makes the design
less prone to system contamination. The control electronics and flow
sensor designs utilized in the Models 5964 and 5850EM have been well-
proven in precision gas delivery systems. Standard features include:
• High leak integrity (less than 10-10 atm-cc/sec He)
• Enhanced process (7 Ra) internal surface finish (Optional 5850EM)
• Electropolished wetted surfaces (Optional 5850EM)
• High purity VAR 316LStainless Steel
• All metal seals
• Particulate free
• Wide flow range (0.06 sccm through 30,000 sccm)
• Insensitive to mounting attitude
• Negligibleflow overshoot/undershoot
• Fast response control permits rapid gas settling times with minimal
over/undershoot. Refer to Figure 1-1.
• Helium leak check ports
• Class 100 Clean Room assembly and calibration (Optional 5850EM)
• Available with all popular process connections
1-2
Brooks®Models 5964, 5850EM
Section 1 Introduction Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
1-3 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges*
Any range from 0 - 3 sccm to 0 - 30,000 sccm Nitrogen equivalent. Lower
flows available, consult factory.
*Standard: 0°C and 101 kPa (760 Torr). Per SEMI Guideline E12-96.
Control Range
2 - 100% with elastomeric valve seat
3 - 100% with metal or Teflon®valve seat
Accuracy
1% Full Scale including linearity, at calibration conditions
1.5% Full Scale including linearity, for flow ranges greater than 20 slpm
Repeatability
0.25% of rate
Settling Time
Model 5964: Enhanced response PCB's less than 1 sec to within 2% of
Full Scale of final value for a 0-100% command step with Normally Closed
Valve. (Optional on 5850EM).
Model 5850EM: Less than 3 seconds to within 2% of Full Scale of final
value for a 0-100% command step with Normally Closed Valve.*
*Per SEMI Guideline E17-91.
MountingAttitude Sensitivity
Available in any position
0.5% maximum full scale deviation after rezeroing
Temperature Sensitivity
Zero: Less than ±0.075% full scale per °C
Span: Less than ±1.0% full scale shift over 10-50°C range
Pressure Equipment Directive (PED) 97/23/EC
Sound Engineering Practice
Pressure Sensitivity
0.008% per psi Nitrogen
RATINGS:
Operating Pressure
1,500 psi (10.342 MPa) max.
Note: 150 psi for enhanced response
500 psi for stainless steel fasteners option.
1-3
Brooks®Models 5964, 5850EM
Section 1 IntroductionInstallation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Differential Pressure
Valve orifice sized for any pressure drop between 5 to 50 psi (Minimum
pressure drop depends on gas and range).
Ambient Temperature Limits
Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to 212°F (-25°C to 100°C)
Leak Integrity
Inboard to outboard 1 x 10-10 atm. cc/sec. Helium max.
PHYSICAL CHARACTERISTICS:
Materials of Construction
316L VAR (VacuumArc Remelt), 316L, and high alloy ferritic stainless
steel.
External seals: Nickel.
Internal seals: Nickel.
Valve Seat: 316L, Viton®fluoroelastomers, Buna-N, Kalrez®or Teflon®.
Dimensions
Refer to Figures 1-1 thru 1-4
Process Connections
1/4" Tube VCRTM
Downport C-Seal
Downport W-Seal
Surface Finish
5850EM: 32Ra, Passivated
5964: 7Ra, Electropolished
ELECTRICAL CHARACTERISTICS:
Electrical Connections
Card Edge: 30 microinch gold over low stress nickel-plated copper
D-Connector: 15 Pin (DA-15P)
Command Input
Voltage Option: 0-5 Vdc (Input resistance 40 k ohm min.)
Current Option: 4-20 mAdc (Input resistance 75 ohm)
Output Signal
Voltage Option: 0 to 5 Vdc into 2,000 ohms minimum
Current Option: Jumper selectable 4-20 mAdc or 0-20 mAdc, refer to
Figure 2-6 for maximum total loop resistance
1-4
Brooks®Models 5964, 5850EM
Section 1 Introduction Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
ELECTRICAL CHARACTERISTICS (continued):
5 Volt Reference Output
5 Volts, ±0.01 Vdc into 2,000 ohms minimum
Power Requirements
VoltageOption:
N.C. Valve (or N.O. Valve with flow less than 2.5 slpm):
3.25 watts max., + 15 Vdc @ 35 mA-15 Vdc @ 180 mA
N.O. Valve with flow rate greater than 2.5 slpm:
10.5 watts max.,+15 Vdc @ 350 mA, -15 Vdc @ 350 mA
Current Option:
+15 Vdc to +28 Vdc: 3.68 Watts min, +15 Vdc @ 245 mA
10.36 Watts max., +28 Vdc @ 370 mA
Power Supply Sensitivity
None within ±5% of specified voltage (See Power Requirements)
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