BASF EXACTUS Manual de usuario
EXACTUS
®
OPTICAL THERMOMETER
Manufactured By BASF Corp
USER’S MANUAL
Sin le or Multi-Channel System
Version 5.04
BASF Corp
Temperature Sensing Group
46820 Fremont Blvd.
Fremont, CA 94 38-6 40
Phone: ( 10) 490-21 0
Fax: ( 10) 2 2-1871
http://www.catalysts.basf.com/Main/temperature_sensing
Additional support available:
BASF Temperature Sensing, Portland, Oregon
4011 SE International Way, Suite 604
Portland, OR 97222
Phone: ( 03) 794-4073
Fax: ( 03) 794- 91
Copyright© 2001 BASF Catalysts, LLC. All rights reserved.
Exactus is a registered trademark for which BASF Catalysts LLC has rights. The data contained in this publication are based on our
current knowledge and experience. In view of the many factors that may affect processing and application of our product, these data
do not relieve processors from carrying out their own investigations and tests; neither do these data imply any guarantee of certain
properties, nor the suitability of the product for a specific purpose. Any descriptions, drawings, photographs, data, proportions,
weights, etc. given herein may change without prior information and do not constitute the agreed contractual quality of the product. It
is the responsibility of the recipient of our products to ensure that any proprietary rights and existing laws and legislation are observed
(08/2007). BF-8807
Although all statements and information in this publication are believed to be accurate and reliable, they are presented gratis and for
guidance only, and risks and liability for results obtained by use of the products or application of the suggestions described are
assumed by the user. NO WARRANTIES OF ANY KIND, EITHER EXPRESS OR IMPLIED, INCLUDING WARRANTIES OF
MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, ARE MADE REGARDING PRODUCTS DESCRIBED
OR DESIGNS, DATA OR INFORMATION SET FORTH. Statements or suggestions concerning possible use of the products are
made without representation or warranty that any such use is free of patent infringement and are not recommendations to infringe any
patent. The user should not assume that toxicity data and safety measures are indicated or that other measures may not be required.
©2007 BASF Catalysts LLC.
This page blank.
Table of Contents
1.
Introduction
......................................................................................................... 1-3
Company Profile ..............................................................................................................1
Theory of Operation.........................................................................................................1
Overview of the BASF EXACTUS
®
Optical Thermometer ............................................2
Advantages of the BASF EXACTUS
®
Optical Thermometer ........................................3
2
.
System Description
........................................................................................... 4-6
Collection Optics..............................................................................................................
Probe Head.......................................................................................................................6
Interface Module, Analog and Digital Output .................................................................6
Power Supply:..................................................................................................................6
3
.
System Startup
.......................................................................................................7
Getting Started .................................................................................................................7
Mounting the probe..........................................................................................................7
4.
Soft are Interface
.......................................................................................... 8-18
Software Installation ........................................................................................................8
Starting up TemperaSure
®
................................................................................................8
Installation Troubleshooting ............................................................................................8
Using TemperaSure
®
Software Functions.................................................................. 9-12
Probe and TemperaSure
®
Software Setup............................................................... 12-16
Advanced Probe Features......................................................................................... 16-18
All Probes.......................................................................................................................18
Analog Output................................................................................................................18
Graph Setup....................................................................................................................20
Tips and Shortcuts.................................................................................................... 20-21
5.
Warnings
...............................................................................................................22
6.
Troubleshooting
..................................................................................................23
7.
Glossary of Terms
........................................................................................ 24-31
8.
Specifications
.................................................................................................. 31-32
9.
Appendices
...................................................................................................... 32-42
Appendix 1: Multi-Channel Interface Box Installation Guide................................. 36-4
Appendix 2: Probe Transmit Data Protocol ............................................................. 46- 7
Appendix 3: Analog Output Guide .......................................................................... 8-63
Table of Fi ures
Figure 1 Probe Head Conceptual Diagram .................................................................2
Figure 2A Single Channel System ................................................................................4
Figure 2B Multi Channel System ................................................................................5
Figure 3 TemperaSure
®
Graphical User Interface (Main Display Screen)..............9
Figure 6 Graph Setup Windo s .................................................................................12
Figure 7 Probe Setup Windo ....................................................................................13
Figure 10 Auto Calibration Feature............................................................................16
Figure 11 Advanced Probe Functions Tab .................................................................17
Figure 12 Menu for All Probes ...................................................................................19
Figure 13 Analog Output Setup..................................................................................19
Figure 14 Dra ing of Probe ith Lens Collection Optics (Pyrometer)..................33
Figure 15 Dra ing of Probe ith Lightpipe..............................................................34
Figure 16 Lightpipe Detail ..........................................................................................35
Appendices Figures
Figure A-15 Analog Output/ Digital Interface Module Connections ......................37
Figure A-16 External Po er Jumper .........................................................................38
Figure A-17 External Po er Wiring .........................................................................39
Figure A-18 Analog Output Scaling ..........................................................................40
Figure A-19 Analog Output Calibration...................................................................42
-1-
1 Introduction
BASF Temperature Sensing offers the EXACTUS
®
line of optical thermometers. EXACTUS
®
instruments provide the most advanced temperature measurement system available today. This
system is designed to provide you with very precise and stable temperature readings. With
numerous features and options, it can be customized for many different applications. Please
contact BASF Temperature Sensing if you have any questions regarding your temperature
measurement needs or the use of this instrument.
BASF Temperature Sensing has technical support staff with extensive experience in all aspects
of temperature measurement and temperature control, and will be happy to provide assistance in
solving your temperature measurement challenges.
1.1 Company Profile
BASF is the worlds leading chemical company with over 100 production sites worldwide. Some
facts about BASF:
•
Over 90,000 employees
•
Business contacts in 170 countries
•
8000 product manufactured
•
Sales of over 6 Billion Euro in 2007
EXACTUS
®
optical thermometers are developed, manufactured and supported at BASF facilities
in Portland Oregon, Fremont California, and Rome Italy.
1.2 Theory of Operation
The following is a quick introduction to the field of Optical Thermometry, also known as
Pyrometry or Radiation Thermometry. An optical thermometer is a device that measures light
and is calibrated to indicate temperature. An optical thermometer detects the radiant flux from a
hot object and utilizes an algorithm to calculate the surface temperature of the object. The
algorithm used is based on the Planck Blackbody Radiation Equation. In 1860, Gustav
Kirchhoff conceived of the ideal emitter known as a Blackbody, and then in 1900 Maxwell
Planck mathematically described how a blackbody emits light as a function of its own
temperature and wavelength.
Please see the recommended references at the end of the Glossary for further reading on
pyrometry and wafer temperature measurement.
-2-
1.3 Overview of the EXACTUS
®
Optical Thermometer
The main components of the EXACTUS
®
optical thermometers are:
1. Collection Optics: The collection optics acquire light emitted from a hot object and directs it
to the filter and photo detector. Many standard and custom options for collection optics,
including lens systems (small spot size), lightpipes, and flexible fiber optic cables.
2. Wavelength Selective Filters: These select which wavelengths of light are measured. Care
must be taken that these filters are kept clean and dry.
3. Photo Detector: Photo detectors convert light (photons) into an electrical signal. BASF uses
only high efficiency (D*) solid-state photo detectors of either silicon, InGaAs, or a new
patented 900nm narrow band detector.
4. Amplifier: The amplifier takes the small electrical signal from the photo detector and
amplifies it before sending it to the signal processor. The amplifier circuit is extremely
sensitive and allows signals as small as 10
-1
amps to be detected and measured.
. Signal Processor: The signal processor converts the amplified signal into a temperature
reading. This processing is a combination of electrical conditioning, including Analog-to-
Digital conversion, and software algorithms, including the Planck equation.
6. Output: Several types of data output are available from the instrument:
• Direct digital data to a host computer or process controller.
• Viewed using BASF’s TemperaSure
®
data acquisition and graphing software.
• Analog output via 4-20mA or 0 – 10 VDC analog output.
• Specialized processed measurement modes such as peak, valley, or process standard
deviation.
Figure 1: Probe Head Conceptual Diagram
-3-
1.4 Advanta es of the BASF Optical Thermometer
The EXACTUS
®
line of optical thermometers provides many advantages for optically based
temperature measurement. These include:
1.
The ability to measure small signals and lo er temperatures at short avelengths
Careful design and use of an advanced amplifier circuit enables measurement of signals as
small as 10
-1
amps from the photo detector. The ability to measure smaller signals enables
the measurement of lower temperatures while using short wavelengths. Short wavelengths
significantly reduce emissivity errors and are ideal for many applications such as the
measurement of silicon wafers in the semiconductor industry. (See Resolution in Section 7.)
2. High resolution, ith measurements to 0.01°C
Precise amplification also means less electrical noise, and therefore lowers noise in the
temperature measurements. This enables measurement and control of smaller changes in the
process temperatures, leading to more stable process control and higher yields.
3. High speed, digital readings at up to 1,000 readings per second
EXACTUS
®
instruments can provide temperature readings ranging from one reading per
minute all the way up to 1,000 readings per second. In addition, the instrument performs all
the A/D conversions internally, so each instrument provides a digital signal output. BASF
also offers an analog output module for applications where a proportional to temperature
current or voltage output is desired.
4. The ability to read a ide range of temperatures - from 25°
°°
°C to 4,000°
°°
°C
The electronics design also allows a wider range of temperatures to be measured. Typically,
hot objects from about room temperature (2 °C) to 4,000°C can be measured. Contact your
sales technician for more specific details.
5. Lo -drift electronics
Special care has been taken in the selection and design of components to minimize drift in
the electronics. This has resulted in electronics drift of only 0.10ºC or less per year.
6. A highly compact design hich provides flexibility in placement and eliminates the
need for fiber-optic cables
The small (1” diameter x 4. ” length / 2 .4mm x 11 mm) package with world-class
performance allows the EXACTUS
®
instrument to be placed close enough to hot objects to
eliminate the need for long flexible fiber-optic elements required by other systems. This is
critical since about 80% of the light (and therefore about 80% of the signal) can be lost when
fiber-optic cables are used to transmit light to the photo detector. In applications where fiber
optic cables are required, BASF’s sensitive electronics still provide a significant advantage
and we offer a full line of flexible quartz fiber-optic cables for those situations where they are
needed.
-4-
2 System Description
A single channel EXACTUS
®
system is composed of four parts:
• Collection optics: either a lightpipe or lens assembly
• Probe head: a stainless steel tube (0.998" diameter × 4. " long / 2 .4mm × 114.3mm)
• Interface module: for conditioning power and communicating with a PC.
Single Channel: (4.6" × 2.8" × 1" / 118mm × 72mm × 2 mm)
Multi-Channel (10 Channel): (17.62 ” x 12. ” × 2” / 447.7mm × 317. mm × 0.8mm)
Optional analog output, 0 to 10 volts or 0 to 20ma (4 to 20ma) analog output (same size as
Single Channel)
• Po er supply: 12 volt (4" × 2" × 1.4" / 101.6mm × 0.8mm × 3 .6mm)
Figure 2A: Single Channel System
-5-
A multi-channel EXACTUS
®
system:
Figure 2B: Multi Channel System provides Ethernet communication to a PC along
with up to eight analog outputs and two latching relays.
2.1 Collection Optics
There are two basic types of collection optics: lightpipes and lenses. The advantage of the
lightpipe is its small diameter, which only requires a small access hole into the process being
measured, and its ability to collect light from a wide range of angles, which can help decrease
emissivity or roughness errors. Lens systems allow the user to view a small collection spot
on a hot object from greater distances and they can be used to look through a window or view
port when direct access to the hot object is not available. Lightpipes are more efficient at
collecting light than lens systems, therefore they are better suited for low temperature
measurements. BASF manufactures custom collection optics for specific user needs and
measurement applications. Lightpipes and lenses can be coupled directly to the measurement
electronics or coupled via fiber optic transmission cables.
-6-
2.2 Probe Head
The probe head comes with either a lightpipe or a lens assembly. The wavelength of the detector
is chosen based on the temperature and nature of the application, and is defined by the
combination of a bandpass filter and photo detector. BASF offers three photo detector options:
Si, InGaAs and a proprietary, patented detector specifically designed for looking at silicon
wafers. The output is a high-speed digital temperature measurement with up to 1,000 readings
per second. The probe head can be placed up to 1 meters from the interface module.
See Figures 14 - 16 for detailed probe and lightpipe drawings.
2.3 Di ital and Analo Interface Modules
Sin le Channel System
The Digital Interface Module allows the probe head to be connected to any PC. This box also
isolates the probe head from any electrical noise, and supplies a “clean” 6 VDC to the probe.
There are three connections on the single channel box: on one side of the box is an RJ4
connector for the probe cable and a female DB9 connector for the host computer. On the other
side of the box is the connection for power from the power supply. The interface box has a green
LED that indicates when power is being supplied.
The probe can communicate with a host computer using either RS-232 or RS-422 serial
communication. If it is configured for RS-232 than the interface box should be placed within 2
meters of the PC or digital data logger.
BASF also offers an Analog Output Option, which can be configured to either a voltage or
current output. The value of the analog output can be scaled as needed using the TemperaSure
software from 0 to 10 volts or 0 to 20 mA to any temperature range.
See Figure 9 and Appendix 3 for analog output details.
Multi-Channel System
The multi-channel interface box (Mux) allows one or many probes to be connected to a PC. This
box, like the single channel system, isolates the probes from electrical noise and supplies power
to the probes. The probes plug into the interface box with RJ4 connectors. The interface box
connects to the PC with an Ethernet cable.
2.4 Power Supply
A single channel system is powered with a 12VDC Power Supply Module through the Digital
Interface Module as shown in Figure 2A; the Digital Interface Module may be powered by any
DC voltage between 10 and 12 volts. The multi-channel system is powered via 24VDC.
Tabla de contenidos
