Balzers TPG 300 Manual de usuario
Operating manual
BG 800 300 BE / A (0105) 1
Total pressure gauge and controller
TPG 300
Configuration
Installation
Operation
Technical data
Program,pg48
BG 800 300 BE / A (0105) TPG 300 2
Product identification
When communicating with Balzers, the information given on the
product nameplate is required. Transfer therefore that information
to this manual.
Typ:
No:
F-No:
If your unit is supplied with the plug-in boards already installed,
there is an additional nameplate on it. Transfer that information
also to this manual.
Typ:
No:
F-No:
Validity
This manual applies to products with part number
BG 546 900 -T
The part number can be taken from the nameplate.
This manual is based on firmware version
BG 509 780 -F
Proceed according to paragraph 4.7.10 to check that your unit is
equipped with this or a higher firmware version (–F or higher).
Enter the firmware version number of your unit here:
BG 509 780 – .......
The functions described as well as the illustrations and data con-
tained in this manual are subject to change without notice.
Intended use
Depending on which options have been chosen for it, the
TPG 300 can measure total pressure from atmosphere to
10-11 mbar. It can trigger a number of pressure-dependent func-
tions to control and monitor vacuum devices and processes. The
instructions contained in this document must be strictly followed.
BG 800 300 BE / A (0105) TPG 300 3
Contents
Product identification 2
Validity 2
Intended use 2
1 Safety 5
1.1 Safety information 5
1.2 Explanation of symbols 5
1.3 General stipulations 6
2 System overview 7
3 Installation 9
3.1 Mains power connection 9
3.2 Plug-in boards 10
3.2.1 Factory configuration 10
3.2.2 Installing / removing plug-in boards 10
3.3 Connecting plug-in boards 10
3.4 Installation in a 19" rack 10
3.5 Use as bench top unit 11
4 Operation 12
4.1 Measuring with the TPG 300 12
4.1.1 Power on procedure 12
4.1.2 Gas type dependence 12
4.1.3 Validity of displayed data 12
4.1.4 Accuracy of measurement 12
4.1.5 Alignment 12
4.2 Front panel 13
4.3 Operating modes 14
4.4 Overview of key entries 15
4.5 »sensor« mode 16
4.5.1 Switching the measuring circuit on / off 16
4.5.2 Measurement range violation 17
4.5.3 Automatic measuring circuit switchover 18
4.5.4 Self-monitoring 18
4.5.5 Plug-in board identification 19
4.6 »set point« mode 20
4.7 »set up« mode 21
4.7.1 Parameter inquiry / modification 21
4.7.2 Parameter overview 21
4.7.3 Default parameters 24
4.7.4 »Switching functions« group 26
4.7.5 »PE measurement underrange control« group 28
4.7.6 »Measurement unit« group 28
4.7.7 »Filter« group 29
4.7.8 »Interface« group 29
4.7.9 »Parameter storage« group 30
4.7.10 »Test programs« group 32
5 Technical data 34
5.1 Mains power connection 34
5.2 Ambiance conditions 34
5.3 Basic unit 34
5.4 Dimensions and weight 35
5.5 Plug-in boards 35
BG 800 300 BE / A (0105) TPG 300 4
6 Error messages, troubleshooting 36
6.1 Error messages 36
6.1.1 Contact setting of the relays in the event of a fault 38
6.2 Troubleshooting 38
6.2.1 Installation problems 38
6.2.2 Operating and calibration problems 39
6.2.3 Failures 40
6.2.4 Replacing the apparatus fuses 41
7 Maintenance 42
7.1 Aligning the Pirani measurement circuits 42
7.2 Changing the EPROM 43
8 RS-232-C interface 44
8.1 Installation and connection diagram 44
8.2 Data transmission 44
8.2.1 Definitions 44
8.2.2 Flow control 45
8.2.3 Communication protocol 45
8.3 Mnemonics 47
8.3.1 Measured values 48
8.3.2 Switching functions 50
8.3.3 Display 52
8.3.4 Filter time constants 53
8.3.5 Baud rate 54
8.3.6 Storing 54
8.3.7 Auxiliary functions 55
8.3.8 Error messages 56
8.4 Examples of programs 59
9 Accessories, Spare parts 62
9.1 Basic unit TPG 300 62
9.2 Plug-in boards 62
9.3 Mains cables 62
9.4 Gauges 62
9.5 Gauge cables 63
9.6 Accessories for installation in a rack 63
Appendix 64
A: Information main display 64
B: Literature 65
C: Index 66
BG 800 300 BE / A (0105) TPG 300 5
1 Safety
1.1 Safety information
a) Take into account the relevant safety regulations when in-
stalling the product (→ 9).
b) Take into account the relevant safety regulations when in-
stalling the product and putting it into operation.
Pass on the safety information to other users.
1.2 Explanation of symbols
DANGER:
Information on preventing any kind of personal injury or
extensive equipment damage.
CAUTION:
Special information on damage prevention.
NOTE:
Special information on cost-effective use.
Specialists:
This work may only be carried out by persons with suit-
able technical training and the necessary experience.
Press this key briefly.
=Press these keys simultaneously.
<....> Marking
«....» Display, response
»....« Operating mode, effect
→2See page
→&See document
Tip, recommendation
... please contact your nearest Balzers Service
Center.
1.3 General stipulations
Since the individual electronic components are delicate, appropri-
ate measures must be taken to protect them from static electricity.
Store plug-in modules in antistatic bags or containers.
Damage resulting from disregard of the above warning may lead
to a revocation of the warranty.
BG 800 300 BE / A (0105) TPG 300 6
Balzers accepts no responsibility nor warranty if the user or third
parties
• utilize the product not according to the defined use
• make any kind of changes (modifications, alterations, etc.) to
the product
• use the product with accessories not listed in the product
documentation.
BG 800 300 BE / A (0105) TPG 300 7
2 System overview
Information for correct installation of the plug-in boards
→&[3].
A list of all plug-in boards suited for the TPG 300 can be found in
section 5.3. For detailed information on the plug-in boards →&[3].
Interface plug-in boards
Relay and
RS-232-C (RS-422)
interface
e.g.
IF 300A
IF 300C
Relay and
RS-232-C interface
e.g.
IF 300B
BG 800 300 BE / A (0105) TPG 300 8
Measurement plug-in boards
Dual Pirani
e.g.
PI 300D
Cold cathode
e.g.
PE 300C9
PE 300T10
PE 300DC10
Pirani / cold cathode
combined
e.g.
CP 300C9
TPR 010
TPR 017 / TPR 018
IKR 050 / IKR 060
IKR 070
TPR 010
TPR 017 / TPR 018
IKR 050 / IKR 060
IKR 070
BG 800 300 BE / A (0105) TPG 300 9
3 Installation
If for any reason you can assume that the unit it not safe
to operate, shut it down and secure it so that it cannot be
inadvertently turned on again.
You can assume that the unit is not safe to operate when
• it has sustained visible damage
• it no longer functions
• it has been stored for a longer period under unfavor-
able conditions
• it has been subjected to severe transport stress
• when the screws of the plug-in boards are loose or
missing.
3.1 Mains power connection
You can connect the TPG 300 without voltage adaptation to any
conventional supply system (→section 5.1).
The power connector may only be plugged into a socket
with a protective ground. Only three-pin mains cables with
a correctly connected protective ground may be used.
This protection must not be nullified by an extension cable
without ground conductor.
To assure continuous grounding protection, connect the
mains power cable before connecting any other cables. In
the same way, disconnect all other cables before discon-
necting the mains power cable.
If the unit is installed in a rack, the mains voltage should
be supplied by and turned on via a central distributor.
BG 800 300 BE / A (0105) TPG 300 10
3.2 Plug-in boards
3.2.1 Factory configuration
In most cases, the TPG 300 is supplied ready for operation, (with
the plug-in boards already installed). In addition, in units for
combined measurement of medium and high vacuum, the high
vacuum measuring circuit is controlled automatically according to
pressure. This is because switching function A and / or B is
factory assigned to a medium vacuum measuring circuit
(→section 4.7.3).
There are two types of configuration:
• Units with CP 300 measurement plug-in board(s)
The cold cathode measuring circuit is controlled by the Pirani
measuring circuit which is on the same measurement plug-in
board.
• Units with PI 300D and PE 300 measurement plug-in boards
The cold cathode measuring circuit is controlled by the Pirani
measuring circuit <TPR 2>.
The controlling Pirani gauge and the controlled cold cathode
gauge must both be connected to the same vacuum chamber to
guarantee efficient operation.
No measuring circuit assignment is activated by all other factory
configurations.
3.2.2 Installing / removing plug-in boards
For safety reasons, empty slots should always be covered
with blank plates.
Installing / removing plug-in boards →&[3].
3.3 Connecting plug-in boards
→&[3]
3.4 Installation in a 19" rack
If the unit is to be installed in a rack, it must not lower the
protection class of the rack (protection against foreign
objects and water) e.g. DIN VDE 0113 regulations for
switch cabinets when in place.
Take into account the ambiance conditions
(→section 5.2).
Este manual sirve para los siguientes modelos
1
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