Agilent Technologies VacIon Plus 500 Manual de usuario

acIon Plus 500 pumps

Models

919-1710/1720/1740

919-1711/1721/1741

919-1712/1722/1742

919-1750/1760/1780

919-1751/1761/1781

919-1752/1762/1782

Manuale di Istruzioni

Bedienungshandbuch

Notice de Mode D’Emploi

User Manual

87-900-104-01 (F)

05/2011

Notices

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Manual Part Number

Publication Number: 87-900-104-01 (F)

Edition

Edition 05/2011

Printed in ITALY

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to

the maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein,

including but not limited to the

implied warranties of merchantability

and fitness for a particular purpose.

Agilent shall not be liable for errors

or for incidental or consequential

damages in connection with the

furnishing, use, or performance of

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contained herein. Should Agilent and

the user have a separate written

agreement with warranty terms

covering the material in this

document that conflict with these

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The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance

with the terms of such license.

Restricted Rights Legend

If software is for use in the

performance of a U.S. Government

prime contract or subcontract,

Software is delivered and licensed as

“Commercial computer software” as

defined in DFAR 252.227-7014 (June

1995), or as a “commercial item” as

defined in FAR 2.101(a) or as

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defined in FAR 52.227-19 (June 1987)

or any equivalent agency regulation or

contract clause. Use, duplication or

disclosure of Software is subject to

Agilent Technologies’ standard

commercial license terms, and non-

DOD Departments and Agencies of the

U.S. Government will receive no

greater than Restricted Rights as

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will

receive no greater than Limited Rights

as defined in FAR 52.227-14 (June

1987) or DFAR 252.227-7015 (b)(2)

(November 1995), as applicable in any

technical data.

Trademarks

Windows and MS Windows are U.S.

registered trademarks of Microsoft

Corporation.

Safety Notices

CAUTION

A CAUTION notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

WARNING

A WARNING notice denotes a

hazard. It calls attention to an

operating procedure, practice, or the

like that, if not correctly performed

or adhered to, could result in

personal injury or death. Do not

proceed beyond a WARNING notice

until the indicated conditions are

fully understood and met.

VacIon Plus 500 pumps User Manual / 87-900-104-01 (F)

VacIon Plus 500

VacIon Plus 500 pumps User Manual / 87-900-104-01 (F) 3/92

VacIon Plus 500

4/92 VacIon Plus 500 pumps User Manual / 87-900-104-01 (F)

Contents

1Procedura per l’installazione 9

Informazioni Generali 10

Preparazione per l’installazione 11

Installazione 13

Uso15

Procedure di uso 16

Manutenzione 18

Smaltimento 18

2Anleitung zur Installation 19

Allgemeine Hinweise 20

Vor der Installation 21

Installation 23

Gebrauch 25

Bedienungsschritte 26

Wartung 28

Entsorgung 28

3Procédure pour l’installation 29

Indications Generales 30

Préparation de l'installation 31

VacIon Plus 500 pumps User Manual / 87-900-104-01 (F) 5/92

Contents

Installation 33

Utilisation 35

Procédure d’utilisation 36

Maintenance 38

Mise au rebut 38

4Installation Procedure 39

General Information 40

Preparation for Installation 41

Installation 43

Use 45

Operating Procedure 46

Maintenance 48

Disposal 48

5Technical Information 49

Vacion Plus Pump Replacement Parts and Accessories 50

Description of the VacIon Pump 51

Technical Specification 53

Vaclon Plus 500 Starcell 55

Vaclon Plus 500 Diode 57

Vaclon Plus 500 Noble Diode58

Outline Drawing 60

Stray Magnetic Field 61

6/92 VacIon Plus 500 pumps User Manual / 87-900-104-01 (F)

Contents

VacIon Plus Pump Installation 65

Typical Installation 68

Inlet Flange Connection 69

Control Unit Connection 72

Safety Interlock 73

Heater Installation 73

Heater Replacement 75

Bakeout Operation 75

Operating Procedure 77

Maintenance 78

Exchange of the High Voltage Feedthrough 80

Pump Troubleshooting 83

Vaclon Plus Pump Replacement Parts and Accessories 84

Vacion Plus Pump Controllers 85

VacIon Plus 500 pumps User Manual / 87-900-104-01 (F) 7/92

Contents

8/92 VacIon Plus 500 pumps User Manual / 87-900-104-01 (F)

VacIon Plus 500 pumps User Manual

Procedura per l’installazione

Informazioni Generali 10

Preparazione per l’installazione 11

Installazione 13

Uso 15

Procedure di uso 16

Manutenzione 18

Smaltimento 18

Traduzione delle istruzioni originali

9/92

1Procedura per l’installazione

Informazioni Generali

Questa apparecchiatura è destinata ad uso professionale.

L'utilizzatore deve leggere attentamente il presente manuale di

istruzioni ed ogni altra informazione addizionale fornita dalla Agilent

prima dell'utilizzo dell'apparecchiatura. La Agilent si ritiene sollevata

da eventuali responsabilità dovute all'inosservanza totale o parziale

delle istruzioni, ad uso improprio da parte di personale non

addestrato, ad interventi non autorizzati o ad uso contrario alle

normative nazionali specifiche.

Le pompe della serie VacIon Plus sono pompe ioniche utilizzate

comunemente per applicazioni di ultra alto vuoto, grazie alla loro

pulizia, capacità di pompare qualsiasi tipo di gas, e del loro

funzionamento senza vibrazioni e necessità di manutenzione.

Nei paragrafi seguenti sono riportate tutte le informazioni necessarie

a garantire la sicurezza dell'operatore durante l'utilizzo

dell'apparecchiatura. Informazioni dettagliate sono fornite

nell'appendice “Technical Information”.

Questo manuale utilizza le seguenti convenzioni:

AVVERTENZA!

I messaggi di avvertenza attirano l'attenzione dell'operatore su una procedura

o una pratica specifica che, se non eseguita in modo corretto, potrebbe

provocare gravi lesioni personali.

ATTENZIONE! I messaggi di attenzione sono visualizzati prima di procedure che, se non

osservate, potrebbero causare danni all'apparecchiatura.

NOTA Le note contengono informazioni importanti estrapolate dal testo.

10/92 VacIon Plus 500 pumps User Manual / 87-900-104-01 (F)

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