Agilent Technologies TwisTorr 304 FS Manual de usuario

AGILENT TWISTORR 304 FS

QUICK REFERENCE GUIDE

Agilent TwisTorr 304FS

A quick, detailed reference guide to install and

operate the TwisTorr 304 FS.

1. Accessories and Conguration

2. Preparation for installation

3. Controller Connection and Start up sequence

4. Purge & Vent valve

5. How to enable the soft start

6. Troubleshooting: Pump and Controller

Vacuum Products

QUICK REFERENCE GUIDE

AGILENT TWISTORR 304FS

1. Accessories and Conguration

Accessories High Vacuum

Valve

Inlet Screen

Dry Scroll Technology

Rotary Vane Technology

Aluminium

Block Valves

Controller Unit

Suggested Agilent

Foreline pumps

SH 110

IDP 15

TS 300

DS 42

DS102/202/302

Active

Gauges

Vent Valve

Water Cooling

Air Cooling

Purge Valve

On board Navigator

24V - 110/220V

RACK 110/220 V

Available accessories and products to complete your perfect conguration. Images are for reference only

QUICK REFERENCE GUIDE

AGILENT TWISTORR 304FS

INLET SCREEN

Not supplied with the pump. The screen protects the pump

blades against solid particles.

Always use the appropriate inlet screen according to the

pump anges as shown in the table.

MECHANICAL FIXING

Pump can be installed in any position. However do not

operate the pump until it is safely and securely xed in a

stable position, mounting the inlet ange to the system

ange with a connection capable of withstanding a torque

of 1000 Nm around its axis.

All inlet ange bolts should be retightened once the system

is under vacuum.

Do not install/x the TMP through its base.

The safety condition in the table must be respected

COOLING REQUIREMENTS

TwisTorr 304FS can be water cooled or air cooled, according

to the pump model. The 304FS with the water cooling option

can also be air cooled but not the other way round.

Temperature requirements:

● Max forced cooling air temperature ≤ 35°C

● Max cooling water temperature ≤ 25°C

2. Preparation for Installation

ISO 100 X3500-68000

ISO 160 X3500-68001

CFF6’’ 9699302

CFF8’’ 9699304

ISO 100/160 4xM10 Claw-Clamps with xing torque 22Nm

CFF6’’ 16 screws with xing Torque 20Nm

CFF 8’’ 20 screws with xing torque 20Nm

For water cooling:

ow of 50 l/hr is mandatory if ambient temperature is

> 35°C or pumping high gas load.

If none of above conditions the air cooling can be used.

CONNECTION TO A FORELINE PUMP

As a backing pump use a dry scroll vacuum pump or a rotary

vane pump from the Agilent catalog.

Minimum requirement is SH110 (Dry)/DS102 (Wet). Backing

pump must have an ultimate pressure of < 5 mbar.

Connect the fore-vacuum line with small-ange components

or threaded hose couplings.

A valve can be also used in between the Turbo foreline and

the backing pump.

ACCESSORIES

A few accessories can be interfaced with turbopump and

controller:

Vent valve: different option available according to the

controller type, orice, with or without delay time and N.O.

or N.C. (see paragraph).

Purge: to be used in presence of heavy gases or Oxygen.

Wide 10 and 20 SCCM purge valves selection range is

available (see paragraph)

Gauges: only for 304AG RACK (contact Customer Care).

Valves: a complete series of valves can be interfaced witht

the 304FS for a full system compatibility. Check that the

accessories are well connected and xed properly and that

the vent screw is tightened properly.

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AGILENT TWISTORR 304FS

3. Controller Connection and Start up Sequence

ELECTRONIC CONNECTION

A Power supply (Controller) is necessary to drive and operate the Turbopump. Connect the controller cable to the pump connector.

If turbopump has been stored or not used for a long period of time (> 6 months), the soft start procedure might be necessary. To

enable the soft start refers to the dedicated «How to enable the soft start» paragraph.

SWITCH ON THE TURBO PUMP

1) Via RS232 - Tplus software

● Connect the controller to the pump

● Connect a RS232 cable from a PC to the controller Serial

Port.

● Power on the controller

● Launch theTPlus Software. Enable the Serial mode.

● Connect the 15 pin mating connector to J1 connector

● Start the primary backing pump and reach a vacuum

pressure of < 1 mbar

● Pump can be started by pressing the «Start» button.

● To stop the pump select the Stop button and decelerate

the rotor by opening the vent screw of about ¼ to ½ turn.

● To vent the pump see the «Vent procedure» paragraph

2) Plug and pump:

● Connect the power supply

● Connect the pump cable to controller.

● Start the primary backing pump and reach a vacuum

pressure of < 1 mbar

● Connecting the 15 pin mating connector to J1 connector

the pump will start immediately.

● To stop the pump remove the J1 connector and

decelerate the rotor by opening the vent screw of about

¼ to ½ turn.

304 ON BOARD NAVIGATOR CONTROLLER

There are 2 ways to start the pump: using the

Tplus Software or by «plug and Pump»

304 AG RACK CONTROLLER

● Plug the 9 pin interlock connector (provided together

the controller) in the P1 IN connector. If not «waiting

interlock» message will appear and pump will not start).

Connect the main power cord.

● Start the primary pump and reach a vacuum pressure of

< 1 mbar

● Configure the controller to operate from the Front Panel

by pressing simultaneously the two upper buttons to

enter into the configuration menu and scroll till the

«configuration is displayed: select FRONT.

● Press again the two upper button simultaneously to exit

from configuration menu.

● Press the START button to run the pump. Press the

STOP button to stop the pump.

● To vent the pump please see the «vent Procedure»

paragraph.

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AGILENT TWISTORR 304FS

4. Purge and Vent Valve

How to vent the pump

Vent valve is Normally Open (N.O.)

● Available in 0.5 and 1.2 mm orice.

● Through Tplus (RS232)

● No setting available

● If the vent valve is connected to the controller

automatically at the stop button the vent valve will

open.

304 ON BOARD NAVIGATOR CONTROLLER

How to vent the pump (AG Rack Controller)

Vent valve is Normally Open (N.O.)

● Available in 0.5 and 1.2 mm orice.

● By using the Vent Valve (N.O)

● Opening delay and open valve time are both

selectable through front panel/via RS232

● Click on Stop button then the controller will

perform the procedure according to the settings.

304 AG RACK CONTROLLER

PURGE VALVE

There are several models of purge valve available with different inlet anges and orices (10 or 20 SCCM) to

protect the bearings from particulates, corrosive gases or O2that might be pumped.

Inert gas, such as Nitrogen or Argon must ow into the pump body around the upper bearing towards the fore

vacuum line.

To supply the inert purge gas (e. g. nitrogen) to the pump through the purge port, connect a gas purge valve

between the pressure regulator and the pump. Inlet ow rate should be 0.5 to 0.8 mbar l/s.

Unplug the purge screw and tight up the purge valve.

VENT VALVE

Vent valve is used to automatically vent the pump/vacuum system.

Connect the vent valve to the proper connector according to the controller model, J1 (Navigator) or J7 (Rack) and

follow the below instruction to vent the the pump throught the valve.

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AGILENT TWISTORR 304FS

5. How to enable the Soft Start

(FACTORY DISABLED)

● Check that the 15 pin Interlock mating connector

(provided with the controller) is installed into J1

connector (if not «waiting interlock» message will appear

and pump will not start).

●

Connect a RS232 cable from a PC to the controller Serial Port

● Power on the controller

● Launch theTPlus SW. And enable the SERIAL mode.

Select “Conguration” from the list / Select “Soft Start”

/ Select Enable

304 ON BOARD NAVIGATOR CONTROLLER

Controller is now ready to start in Soft Start mode.

● Connect the pump cable from the controller to Pump.

● Start the pump by clicking on START button

After the pump has reached the full speed it can be stopped

and then the Soft start can be disabled (it cannot be disabled

whilst the turbo is powered).

Please note that the Navigator controller is always congured

in Remote mode when powered on. To operate the pump via

SERIAL and activate the soft start click on Remote button.

If a PC is not available the soft start can be still be activated

by using the 15 pin mating connector, modifying the pin-out

7-9 and 8-15 through a jumper.

Check that the 9 pin interlock connector is properly

installed in the P1 IN connector, if not «check

connection» message will appear and pump will not

start).

● Power on the controller.

● Press simultaneously the two upper buttons to enter

into the conguration menu and scroll till the SOFT

START menu is displayed.

● Select YES and press the two upper buttons

simultaneously again to exit from conguration menu.

● Press the START button to run up the pump through

the Soft Start mode. During this phase the controller

will show «pump starting» message.

Once the rotor has reached the maximum speed the

soft start will need to be disabled after stopping the

pump by following the procedure in reverse mode.

If using a previous generation of controller (301 or

older) please contact Tech Support before starting the

pump.

304 AG RACK CONTROLLER

QUICK REFERENCE GUIDE

AGILENT TWISTORR 304FS

CONTROLLER MESSAGE CAUSE RESOLUTION

NO MESSAGE

The controller does not turn on

No voltage to the unit ● Check for cable connection between mains power and

the controller.

● Check for cable integrity.

WAITING INTERLOCK

Navigator: LED is fast ashing*

T-Plus: pump status 205

Rack AG: message on display

The interlock jumper on remote I/O connector

is missing or faulty

J1 on Navigator

P1 on Rack AG

Navigator controller: short pin 3-9 and 4-15.

Rack controller, short pin 3-8.

A mating connector with interlock contact is provided

inside the accessory bag.

AUTOTUNING

Navigator: LED?

T-Plus: pump status 205

Rack AG: message on display

Autotuning is not an error condition but a

specic working condition when pump is not

able to reach/maintain the full speed, due to:

● Excessive gas load

● System leak

● Bad foreline pressure (> 15 mbar)

● Bearing issue or rotor sized.

After 15 minute of AUTOTUNING, an error

message is displayed.

● Check the foreline pressure (<15mbar).

● Check for leak in the system.

● Verify vent and purge screws/valves to be closed or

properly working.

● Check the gas load in the chamber.

● Check if rotor spins freely; if not, replace the pump.

PUMP OVERTEMPERATURE

Navigator: LED is fast ashing*

T-Plus: error code 2

Rack AG: message I displayed

Controller has measured a temperature at the

upper bearing > 60°C

Wait till the pump temperature has decreased, then if,

after restarting the pump the message is still present:

● Check if power and current consumption have

increased, there may be a bearing issue.

● Check if cooling fan/water is working properly.

● Check if the rotor spins freely. If not, replace the pump.

CONTROLLER OVERTEMPERATURE

Navigator: LED is fast ashing*

T-Plus: error code 4

Rack AG: message I displayed

The temperature inside the control unit has

increased >60°C

Temperature of the MOS > 60°C

Temperature transformer > 90°C

Internal Fan fault

Ambient temperature too high

Wait till the controller temperature has decreased.

Then after restarting the controller the message is still

present:

● Check if the internal cooling fan is working properly.

● Check if ambient temperature is according to

requirements.

6. Troubleshooting - Pump and Controller

* Fast ashing : 400 msec / ** Slow Flashing: 200 msec

QUICK REFERENCE GUIDE

AGILENT TWISTORR 304FS

* Fast ashing : 400 msec / ** Slow Flashing: 200 msec

CONTROLLER MESSAGE CAUSE RESOLUTION

POWER FAIL

Navigator: LED is fast ashing*

T-Plus: error code 8

Rack AG: message I displayed

Internal bus voltage is too low Replace the controller.

VERIFY LINE SELECT

Navigator: LED is fast ashing*

T-Plus: error code 16

Rack AG: message I displayed

The main voltage is out of range

(100-240 V or 24V)

Check the main voltage, there could be spikes in the

main power or it’s not regular

OVERVOLTAGE/UNDERVOLTAGE

Navigator: LED is fast ashing*

T-Plus: error code 32

Rack AG: message I displayed

Vbus > fail threshold

Vbus < fail threshold

Check if error is duplicated without the pump (put

10 KOHM between pins A and F on the pump cable

connector)

Yes à replace the controller;

No à error is not in the controller; check for

external electrical noise.

SHORT CIRCUIT

Navigator: LED is fast ashing*

T-Plus: error code 64

Rack AG: message I displayed

Loss of insulation motor windings in relation to

ground

Ramp currents too high (Vbus control not correct)

One or more Mosfet is/are faulty, shorted (after

start) or in some cases interrupted (during ramp)

Connection of a phase interrupted (controller/cable/

pump), generally displayed during the ramp up.

Contact Agilent Customer Care and ask for dedicated

“Short Circuit” Test Procedure.

TOO HIGH LOAD

Navigator: LED is fast ashing*

T-Plus: error code 128

Rack AG: message I displayed

There is a too high load.

Gas load in the chamber is too high, or exceeds the

pump’s specications.

Friction in the pump rotor; it does not rotate freely.

● Check the foreline pressure, < 15 mbar.

● Check for pump parameters (current-power-

temperature) with no gas load.

● Check for leak in the system.

● Check if the rotor spins freely; if not, replace the

pump.

Pump remains at 100 HZ

Navigator: slow ashing

T-plus: pump is starting

Rack AG: 100 Hz is displayed

Large leak

Vent screw is open

Rotor is seized

Check the system for leaks.

Check the vent valve to be closed.

Check if the rotor spins freely.

If not, replace the pump.

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