Aerotech MPS75SL Manual de usuario

Revision: 1.03.00

MPS75SL/SLE

Hardware Manual

Global Technical Support

Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website

provides downloadable resources (such as up-to-date software, product manuals, and Help files), training schedules, and

PC-to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs

and spare or replacement parts. For immediate help, contact a service office or your sales representative. Have your

customer order number available before you call or include it in your email.

United States (World Headquarters)

Phone: +1-412-967-6440

Fax: +1-412-967-6870

Email: service@aerotech.com

101 Zeta Drive

Pittsburgh, PA 15238-2811

www.aerotech.com

United Kingdom Japan

Phone: +44 (0)1256 855055

Fax: +44 (0)1256 855649

Email: service@aerotech.co.uk

Phone: +81 (0)50 5830 6814

Fax: +81 (0)43 306 3773

Email: service@aerotechkk.co.jp

Germany China

Phone: +49 (0)911 967 9370

Fax: +49 (0)911 967 93720

Email: service@aerotechgmbh.de

Phone: +86 (21) 5508 6731

Email: service@aerotech.com

France Taiwan

Phone: +33 2 37 21 87 65

Email: service@aerotech.co.uk

Phone: +886 (0)2 8751 6690

Email: service@aerotech.tw

This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the

express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and

may be trademarks of their respective companies.

MPS75SL/SLE Hardware Manual Table of Contents

Table of Contents

MPS75SL/SLE Hardware Manual 1

Table of Contents 3

List of Figures 4

List of Tables 5

Safety Procedures and Warnings 7

EU Declaration of Incorporation 9

Chapter 1: Overview 11

1.1. Environmental Specifications 12

1.2. Accuracy and Temperature Effects 12

1.3. Basic Specifications 13

1.4. Vacuum Operation 15

Chapter 2: Installation 17

2.1. Unpacking and Handling the Stage 17

2.2. Dimensions 18

2.3. Securing the Stage to the Mounting Surface 22

2.3.1. For XYAssemblies and Special Cases 24

2.4. Attaching the Payload to the Stage 25

Chapter 3: Electrical Specifications and Installation 29

3.1. Motor and Feedback Connectors 30

3.2. Motor and Feedback Wiring 36

3.3. Motor and Feedback Specifications 38

3.4. Limits, Marker, and Machine Direction 41

3.5. Motor and Feedback Phasing 42

Chapter 4: Maintenance 43

4.1. Service and Inspection Schedule 43

4.2. Cleaning and Lubrication 44

4.2.1. Bellows Removal for Re-Lubrication 46

4.3. Bellows Installation 47

4.4. Troubleshooting 50

Appendix A: Warranty and Field Service 51

Appendix B: Revision History 53

Index 55

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Table of Contents MPS75SL/SLE Hardware Manual

List of Figures

Figure 2-1: MPS75SL/SLEDimensions 18

Figure 2-2: MPS75SL/SLEwith Bellows Dimensions 19

Figure 2-3: MPS75SL/SLE-025Mounting Plate Dimensions 20

Figure 2-4: MPS75SL/SLE-050Mounting Plate Dimensions 20

Figure 2-5: MPS75SL/SLE-075Mounting Plate Dimensions 20

Figure 2-6: MPS75SL/SLE-100Mounting Plate Dimensions 20

Figure 2-7: MPS75SL/SLEHDZ Angle Bracket Dimensions 21

Figure 2-8: MPS75SL/SLE Mounting Hole Locations 23

Figure 2-9: Access To All Mounting Holes 24

Figure 2-10: Load Capability of MPS75SL/SLE Series Stages 25

Figure 2-11: Stage Orientations 26

Figure 2-12: Torque Required to Turn Ball Screw in Vertical Orientation 27

Figure 3-1: Motor and Feedback Wiring (-M1 Option) 36

Figure 3-2: Motor and Feedback Wiring (-M2 Option) 37

Figure 3-3: Machine Direction 41

Figure 3-4: Analog Encoder Phasing Reference Diagram 42

Figure 3-5: Encoder Phasing Reference Diagram (Standard) 42

Figure 4-1: Remove the Bellows Bolts 46

Figure 4-2: Slide the Stage Carriage and Bellow Compression 46

Figure 4-3: Motor Cover Screw Location 47

Figure 4-4: Bellows Support Rods 47

Figure 4-5: Secure the Bellows Support Rods 48

Figure 4-6: Attach the Bellows 48

Figure 4-7: Attach the Bellows Cover 48

Figure 4-8: Attach the Bellows Tabletop 49

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MPS75SL/SLE Hardware Manual Table of Contents

List of Tables

Table 1-1: Model Numbers and Ordering Options 11

Table 1-2: Environmental Specifications 12

Table 1-3: MPS75SL Series Mechanical Specifications 13

Table 1-4: MPS75SLE Series Mechanical Specifications 14

Table 2-1: Stage to Mounting Surface Hardware 22

Table 3-1: 25-Pin D Motor and Feedback Connector Pinouts (-M1 / Motor only for SLE) 31

Table 3-2: 25-Pin D Motor Mating Connector (-M1) 31

Table 3-3: 25-Pin D Motor and Feedback Connector Pinouts (-M1 with -HV Option / SL Only) 32

Table 3-4: 25-Pin D Motor and Feedback Connector Pinouts (-M2 / Motor only for SLE) 33

Table 3-5: 25-Pin D Motor Mating Connector (-M2) 33

Table 3-6: 25-Pin D Motor and Feedback Connector Pinouts (-M2 with -HV Option / SL Only) 34

Table 3-7: 15-Pin D Feedback Connector Pinouts (MPS75SLE) 35

Table 3-8: 15-Pin D Feedback Mating Connector 35

Table 3-9: Feedback Specifications 38

Table 3-10: DC Motor Specifications 39

Table 3-11: Stepper Motor Specifications 39

Table 3-12: Encoder Specifications (MPS75SL) 40

Table 3-13: Encoder Specifications (MPS75SLE) 40

Table 4-1: Troubleshooting 50

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Table of Contents MPS75SL/SLE Hardware Manual

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MPS75SL/SLE Hardware Manual Electrical Safety

Safety Procedures and Warnings

Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand

the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to

the statements given in this section and other handling, use, and operational information given throughout

the manual to avoid injury to you and damage to the equipment.

This manual tells you how to carefully and correctly use and operate the MPS75SL/SLE. Read all parts of

this manual before you install or operate the MPS75SL/SLE or before you do maintenance to your system.

To prevent injury to you and damage to the equipment, obey the precautions in this manual. The precautions

that follow apply when you see a Danger or Warning symbol in this manual. If you do not obey these

precautions, injury to you or damage to the equipment can occur. If you do not understand the information in

this manual, contact Aerotech Global Technical SupportThis product has been designed for light industrial

manufacturing or laboratory environments. The protection provided by the equipment could be impaired if the

product is used in a manner not specified by the manufacturer.

W A R N I N G : This product uses electrical supplies and signals. To minimize possible

electrical damage to the stage or injury to the operator, obey the electrical precautions that

follow.

1. Access to the MPS75SL/SLE and component parts must be restricted while connected to

a power source.

2. Do not connect or disconnect any electrical components or connecting cables while

connected to a power source.

3. Disconnect electrical power before servicing equipment.

4. All components must be properly grounded in accordance with local electrical safety

requirements.

5. Operator safeguarding requirements must be addressed during final integration of the

product.

6. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts

must be restricted while connected to a power source.

7. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid

potential hazards.

8. Do not expose this product to environments or conditions outside of the listed

specifications. Exceeding environmental or operating specifications can cause damage to

the equipment.

9. The MPS75SL/SLE stage must be mounted securely. Improper mounting can result in

injury and damage to the equipment.

10. Use care when moving the MPS75SL/SLE stage. Lifting or transporting the MPS75SL/SLE

stage improperly can result in injury or damage to the MPS75SL/SLE.

11. This product is intended for light industrial manufacturing or laboratory use. Use of this

product for unintended applications can result in injury and damage to the equipment.

12. If the product is used in a manner not specified by the manufacturer, the protection

provided by the product can be impaired and result in damage, shock, injury, or death.

13. The motor case temperature may exceed 75°C.

14. Operators must be trained before operating this equipment.

15. All service and maintenance must be performed by qualified personnel.

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Electrical Safety MPS75SL/SLE Hardware Manual

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MPS75SL/SLE Hardware Manual Declaration of Conformity

EU Declaration of Incorporation

Manufacturer:

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

herewith declares that the product:

MPS75SL/SLE Stage

is intended to be incorporated into machinery to constitute machinery covered by the Directive

2006/42/EC as amended;

and that the following harmonized European standards have been applied:

EN ISO 12100:2010

Safety of machinery - Basic concepts, general principles for design

EN 60204-1:2010

Safety of machinery - Electrical equipment of machines - Part 1:General requirements

and further more declares that

it is not allowed to put the equipment into service until the machinery into which it is to

be incorporated or of which it is to be a component has been found and declared to be in

conformity with the provisions of the Directive 2006/42/EC and with national

implementing legislation, i.e., as a whole, including the equipment referred to in this

Declaration.

This is to certify that the aforementioned product is in accordance with the applicable requirements of the

following Directive(s):

2011/65/EU RoHS2 Directive

Authorized Representative:

Simon Smith, European Director

Address:

Aerotech Ltd

The Old Brick Kiln, Ramsdell, Tadley

Hampshire RG26 5PR

Name

/ Alex Weibel

Position

Engineer Verifying Compliance

Location

Pittsburgh, PA

Date

1/2/2019

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Declaration of Conformity MPS75SL/SLE Hardware Manual

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