Aerotech ALS130H Manual de usuario

Revision: 1.00.00

ALS130H Hardware Manual

Global Technical Support

Go to www.aerotech.com/global-technical-support for information and support about your Aerotech, Inc. products. The

website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If

necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.

To get help immediately, contact a service office or your sales representative. Include your customer order number in your

email or have it available before you call.

United States (World Headquarters)

Email: Support@aerotech.com

Phone: +1-412-967-6440

Fax: +1-412-967-6870

101 Zeta Drive

Pittsburgh, PA 15238-2811

www.aerotech.com

United Kingdom China

Email: Support@aerotech.com

Phone: +44 (0)1256 855055

Fax: +44 (0)1256 855649

Email: Support@aerotech.com

Phone: +86 (21) 5508 6731

Germany Taiwan

Email: Support@aerotech.com

Phone: +49 (0)911 967 9370

Fax: +49 (0)911 967 93720

Email: Support@aerotech.com

Phone: +886 (0)2 8751 6690

France

Email: Support@aerotech.com

Phone: +33 2 37 21 87 65

This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the

express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and

may be trademarks of their respective companies.

ALS130H Hardware Manual Table of Contents

Table of Contents

ALS130H Hardware Manual 1

Table of Contents 3

List of Figures 4

List of Tables 5

Safety Procedures and Warnings 6

EU Declaration of Incorporation 7

Chapter 1: Overview 9

1.1. Environmental Specifications 10

1.2. Accuracy and Temperature Effects 10

1.3. Basic Specifications 11

1.4. Vacuum Operation 12

Chapter 2: Installation 13

2.1. Unpacking and Handling the Stage 13

2.2. Dimensions 15

2.3. Securing the Stage to the Mounting Surface 16

2.4. Attaching the Payload to the Stage 17

Chapter 3: Electrical Installation 19

3.1. Motor and Feedback Connectors 20

3.2. Motor and Feedback Wiring 22

3.3. Motor and Feedback Specifications 23

3.4. Limits, Marker, and Machine Direction 25

3.5. Motor and Feedback Phasing 26

Chapter 4: Maintenance 29

4.1. Service and Inspection Schedule 29

4.2. Cleaning and Lubrication 30

4.3. Troubleshooting 31

Appendix A: Warranty and Field Service 33

Appendix B: Revision History 35

Index 37

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Table of Contents ALS130H Hardware Manual

List of Figures

Figure 2-1: ALS130H Shipping Bracket Location 14

Figure 2-2: ALS130H Dimensions 15

Figure 3-1: Motor and Feedback Wiring 22

Figure 3-2: Machine Direction 25

Figure 3-3: Hall Phasing 26

Figure 3-4: Analog Encoder Phasing Reference Diagram 27

Figure 3-5: Encoder Phasing Reference Diagram (Standard) 27

4 www.aerotech.com

ALS130H Hardware Manual Table of Contents

List of Tables

Table 1-1: ALS130H Model Numbering System 9

Table 1-2: Environmental Specifications 10

Table 1-3: ALS130H Series Specifications 11

Table 2-1: Stage to Mounting Surface Hardware 16

Table 3-1: Motor and Feedback Pinouts 21

Table 3-2: Mating Connector Pinouts 21

Table 3-3: Feedback Specifications 23

Table 3-4: ALS130H Motor Specifications 24

Table 4-1: Troubleshooting 31

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Table of Contents ALS130H Hardware Manual

Safety Procedures and Warnings

This manual tells you how to carefully and correctly use and operate the ALS130H. Read all parts of this

manual before you install or operate the ALS130H or before you do maintenance to your system. To prevent

injury to you and damage to the equipment, obey the precautions in this manual. The precautions that follow

apply when you see a Danger or Warning symbol in this manual. If you do not obey these precautions, injury

to you or damage to the equipment can occur. If you do not understand the information in this manual,

contact Aerotech Global Technical Support.

This product has been designed for light industrial manufacturing or laboratory environments. The protection

provided by the equipment could be impaired if the product is used in a manner not specified by the

manufacturer.

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any

time. All drawings and illustrations are for reference only and were complete and accurate as of this

manual’s release. Refer to www.aerotech.com for the most up-to-date information.

D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of

electrical shock, bodily injury, or death the following precautions must be followed.

1. Access to the ALS130H and component parts must be restricted while connected to a

power source.

2. Do not connect or disconnect any electrical components or connecting cables while

connected to a power source.

3. Disconnect electrical power before servicing equipment.

4. All components must be properly grounded in accordance with local electrical safety

requirements.

5. Operator safeguarding requirements must be addressed during final integration of the

product.

W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the

following precautions must be followed.

1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts

must be restricted while connected to a power source.

2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid

potential hazards.

3. Do not expose this product to environments or conditions outside of the listed

specifications. Exceeding environmental or operating specifications can cause damage to

the equipment.

4. The ALS130H stage must be mounted securely. Improper mounting can result in injury and

damage to the equipment.

5. Use care when moving the ALS130H stage. Lifting or transporting the ALS130H stage

improperly can result in injury or damage to the ALS130H.

6. This product is intended for light industrial manufacturing or laboratory use. Use of this

product for unintended applications can result in injury and damage to the equipment.

7. If the product is used in a manner not specified by the manufacturer, the protection

provided by the product can be impaired and result in damage, shock, injury, or death.

8. Operators must be trained before operating this equipment.

9. All service and maintenance must be performed by qualified personnel.

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ALS130H Hardware Manual Table of Contents

EU Declaration of Incorporation

Manufacturer:

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

herewith declares that the product:

ALS130H Stage

is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC

as amended;

and that the following harmonized European standards have been applied:

EN ISO 12100:2010

Safety of machinery - Basic concepts, general principles for design

EN 60204-1:2010

Safety of machinery - Electrical equipment of machines - Part 1:General requirements

and further more declares that

it is not allowed to put the equipment into service until the machinery into which it is to be

incorporated or of which it is to be a component has been found and declared to be in

conformity with the provisions of the Directive 2006/42/EC and with national

implementing legislation, for example, as a whole, including the equipment referred to in

this Declaration.

This is to certify that the aforementioned product is in accordance with the applicable requirements of the

following Directive(s):

EU 2015/863 RoHS3 Directive

Authorized Representative:

Simon Smith, European Director

Address:

Aerotech Ltd

The Old Brick Kiln, Ramsdell, Tadley

Hampshire RG26 5PR

Name

/ Alex Weibel

Position

Engineer Verifying Compliance

Location

Pittsburgh, PA

Date

2/12/2020

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Table of Contents ALS130H Hardware Manual

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ALS130H Hardware Manual Overview

Chapter 1: Overview

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any

time. All drawings and illustrations are for reference only and were complete and accurate as of this

manual’s release. Refer to www.aerotech.com for the most up-to-date information.

Table 1-1: ALS130H Model Numbering System

ALS130H Mechanical-Bearing Direct-Drive Linear Stage

Travel (Required)

-025 25 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin connector

-050 50 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin connector

-100 100 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin

connector

-150 150 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin

connector

NOTE: The 25-pin connector is not valid for systems using bus voltages greater than 80 V.

Cable Management (Optional)

-CMS1 External CMSfor lower-axis of XY assembly, right-side

-CMS2 External CMSfor lower-axis of XY assembly, left-side

NOTE: CMSoption is not avaialble with 25 mm travel stages. Order CMS with lower axis stage only.

Metrology (Required)

-PL1 Metrology, uncalibrated with performance plots

-PL2 Metrology, calibrated (HALAR) with performance plots

www.aerotech.com Chapter 1 9

Overview ALS130H Hardware Manual

1.1. Environmental Specifications

W A R N I N G : Do not expose this product to environments or conditions outside of the listed

specifications. Exceeding environmental or operating specifications can cause damage to the

equipment.

Table 1-2: Environmental Specifications

Ambient

Temperature

Operating: 10° to 35° C (50° to 95° F)

The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the

operating temperature deviates from 20° C, degradation in performance could occur.

Storage: 0° to 40° C (32° to 104° F) in original shipping packaging

Humidity Operating: 20% to 60% RH

Storage: 10% to 70% RH, non-condensing in original packaging.

Altitude

Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level

Contact Aerotech if your specific application involves use above 2,000 m or below sea

level.

Vibration

Use the system in a low vibration environment. Excessive floor or acoustical vibration

can affect system performance. Contact Aerotech for information regarding your spe-

cific application.

Protection

Rating

The ALS130H stages are not suited for dusty or wet environments. This equates to an

ingress protection rating of IP00.

Use Indoor use only

1.2. Accuracy and Temperature Effects

The accuracy specification of ALS130H series stages is measured 25 mm above the table with the stage in

an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or

exceeding the specification in Section 2.3.

Extreme temperature changes could cause a decrease in performance or permanent damage to the stage.

Aerotech stages are designed for and built in a 20°C (68°F) environment. Any deviation from standard

operating temperature will affect stage accuracy. The severity of temperature effects on all stage

specifications depends on many different environmental conditions, including how the stage is mounted.

Contact the factory for more details.

10 Chapter 1 www.aerotech.com

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