Ulvac G-20DA Manual de usuario
- 01 -
P8114-2-01-9
INSTRUCTION MANUAL
OIL ROTARY VACUUM PUMP
MODEL ： G-20DA
MODEL ： G-25SA
MODEL ： G-50DA
MODEL ： G-50SA
Before Use
For safe and efficient use of this pump, please read this manual
carefully before operation.
After reading the manual, keep it in your file for future reference.
Specifications in this manual are subject to change without notice
due to future improvement.
ULVAC KIKO,Inc.
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０．Preface
0.1 Before Using This Pump
We, ULVAC KIKO,Inc. thank you for purchasing our vacuum pump. When receiving our vacuum pump,
please confirm the product is the same Model No. as you ordered. Also, check to make sure there
are no damages.
To ensure a long life for this pump, read this manual carefully prior to
installation, operation, and maintenance. Also, pay attention to ascertain the
details of safety, specification, and operational precautions of this pump.
Copyright by ULVAC KIKO,Inc. All right reserved. All material in this manual shall
not be copied without permission by ULVAC KIKO,Inc. Printed in JAPAN.
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0.2 Safety precautions (General Expression)
Safety precautions are identified in this manual using headers DANGER, WARNING, CAUTION, and
NOTE.
"Danger" Indicates major hazardous situations, which present an immediate threat
of death or serious injury.
"Warning" Indicates hazardous situations, which may present a potential to death
or serious injury.
"Caution" Indicates hazardous situations where a potential hazard or unsafe
practice could cause personal injury or equipment damage.
"Note" Indicates undesirable situations where a potential hazard could cause
equipment damage or abnormal operation.
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0.3 Safety Precautions
When evacuating toxic or inflammable gas, there may be danger of leaking gas from
parts besides inlet port. Practice cautionary steps when working any kind of
gases.
After evacuating toxic gases, the inside of pump and pump oil is contaminated
and toxic. Therefore, handle pump with care during maintenance.
Do not overhaul or repair this pump.0nly authorized maintenance personnel should
handle this pump to avoid ignition, abnormal action, and electric shock.
Switch off power before checking or repairing the pump to avoid any problems
(electric shock or personal injury) caused by suddenly starting up.
Connect an electrical wire cord to ground potential terminal tightly to avoid
electric shock caused by mechanical trouble or electrical leakage.
Do not plug exhaust port or place any materials inside of exhaust port, because
it will reduce pumping speed during operation. Pump explosion, oil level gauge
bursting, or motor over loading are consequences of excessive pressure inside
the pump. This pump is not a compressor. The maximum pressure inside this pump
is 0.03 MPa (GAUGE).
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Do not use this pump in an explosive or flammable atmosphere. It may cause personal
injuries or fires.
Do not insert objects, fingers, or another pump body parts into the inlet port.
It may cause electric shock, personal injuries, or fires.
Do not touch the motor body, shaft, or shaft coupling joint during operation.
It may cause personal injuries.
Do not place flammable objects around the pump. It may cause fires. Also, do not
place obstacles around the pump so as to obstruct cooling air. Abnormal
temperature rising may cause burns or fires.
Electric wiring should be carried out in accordance with Electric Regulation and
Instructions. Miswriting may cause fires.
Switch off electric power right away in case of a malfunction to prevent any
troubles. In the case of a malfunction, contact your local agent or ULVAC
KIKO,Inc. Sales and Service Center immediately.
Do not start the pump without pump-oil. Failing to do so will lead to pump
destruction.
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0.4 Acceptance and Store of Product
0.4.1 Acceptance of Product
We delivered the pump with the utmost care. After unpacking, please check up and
confirm items as shown below，
(1) The pump is what you ordered.
(2) Spare parts (single use of pump oil, optional parts)
(3) Any damages during transportation.
(4) Any loose screws and nuts.
If you find any abnormal circumstances, please contact your local ULVAC KIKO,Inc.
Sales or Service Center.
0.4.2 Store of Product, Installation, Operating condition
This pump is a type of precision equipment; therefore, it is necessary to satisfy
the following items for store product.
(1) Operational temperature and humidity : 7～40°C , 85 % RH >
(2) Installation place should be at an altitude no higher than 1000m above sea levels
for storing or operation.
(3) Required conditions while storing or operating
a. Do not use corrosive or explosive gases.
b. No areas with high moisture.
c. No areas with dust particles.
d. Use indoors only.
e. Do not pile up, or lay on its side.
f. Keep out of direct sun light.
g. Keep away from heat source.
Do not treat with force, or lay on its side. It may cause damage.
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0.5 Protective Precautions
The pump is provided with a single-phase 100V (50/60Hz) motor.
An overload protector (manually reset thermal protector) is incorporated.
The use of another protective device (such as an earth leakage breaker) in addition to the
overload protector is recommended.
Do not apply any voltages other than specifically rated for the motor of this
pump. The over-load protector does not operate normally, consequently it may
cause burning the motor or firing.
Contents‐1
CONTENTS
0.Preface ・・・・・・・・・01
0.1 Before Using This Pump ・・・・・・・・・01
0.2 Safety Precautions (General Expression) ・・・・・・・・・02
0.3 Safety Precautions ・・・・・・・・・03
0.4 Acceptance and Store of Product ・・・・・・・・・05
0.4.1 Acceptance of Product ・・・・・・・・・05
0.4.2 Store of Product, Installation, Operating condition ・・・・・・・・05
0.5 Protective Precautions ・・・・・・・・・06
1.For Safety Operation ・・・・・・・・・ 1
1.1 Hazardous of Product and Safety Precautions ・・・・・・・・・ 1
1.1.1 DANGER Leakage of hazardous gases and materials ・・・・・・・・・ 1
1.1.2 WARNING Electric shock ・・・・・・・・・ 1
1.1.3 WARNING Explosion ・・・・・・・・・ 2
1.1.4 CAUTION High Temperature ・・・・・・・・・ 2
1.2 Material Safety Data Sheet(MSDS) ・・・・・・・・・ 2
2. General Description of the Pump ・・・・・・・・・ 3
2.1 Principal Features ・・・・・・・・・ 3
2.2 Dimensional Drawings(G-20DA,25SA,50DA,50SA) ・・・・・・・・・ 4
3. Setting up ・・・・・・・・・ 6
3.1 Installation ・・・・・・・・・ 6
3.2 Oil charging ・・
・・・・・・・ 6
3.3 Vacuum Tubing ・・
・・・・・・・ 8
3.4 Electric wiring ・・
・・・・・・・ 9
3.5 Fluctuations in the power voltage and frequency ・・・・・・・・・10
Contents‐2
4. Operational Instructions ・・・・・・・・・11
4.1 Operational Precautions ・・・・・・・・・11
4.2 Start up Operation ・・
・・・・・・・12
4.3 Shut down Operation ・・
・・・・・・・13
4.4 Oil shut off valve ・・・
・・・・・・13
4.5 Start up procedures in cold climate ・・・・・・・・・14
4.6 Set up oil mist trap (option) ・・・・・・・・・14
4.7 Restriction in an operation of the oil mist trap (option) ・・・・・・・14
5. Specification ・・・・・・・・・15
5.1 Ultimate Pressure ・・・・・・・・・15
5.2 Pumping Speed ・・・
・・・・・・15
5.3 Required Electricity ・・・・
・・・・・15
6. Maintenance, Inspection, Repair ・・・・・・・・・17
6.1 Maintenance ・・・・・・・・・17
6.2 Scheduled Inspection ・・・
・・・・・・17
6.3 Oil Change ・・・
・・・・・・19
6.4 Replacement of Spider in Coupling ・・・
・・・・・・21
6.5 Trouble Check List ・・・
・・・・・・22
7. Product Disposal ・・・・・・・・・24
8. Main Expendable parts ・・・・・・・・・25
8.1 Main Expendable Parts List ・・・・・・・・・25
8.2 Disassembly Drawings(G-20DA,25SA,50DA,50SA) ・・・・・・・・・26
Warranty
Material Safety Data Sheet(MSDS)
Check sheet for repair
Sales and Service Centers
Contents‐3
DRAWING AND TABLE LIST
Fig- 1 General Assembly Drawing of G-20DA ・・・・・・・・・ 4
Fig- 2 General Assembly Drawing of G-25SA ・・・・・・・・・ 4
Fig- 3 General Assembly Drawing of G-50DA･50SA ・・・・・・・・・ 5
Fig- 4 Oil Charge to Rotary Vacuum Pump ・・・・・・・・・ 7
Fig- 5 Vacuum Pumping System Diagram ・・・・・・・・・ 8
Fig- 6 Change region of the voltage and frequency ・・・・・・・・・10
Fig- 7 Characteristics of Vacuum pumping speed ・・・・・・・・・16
Fig- 8 Characteristics of Motor power ・・・・・・・・・16
Fig- 9 Replacement of Spider in Coupling ・・・・・・・・・21
Fig-10 Disassembly Drawing of G-20DA･50DA ・・・・・・・・・26
Fig-11 Disassembly Drawing of G-25SA ・・・・
・・・・・27
Fig-12 Disassembly Drawing of G-50SA ・・・・・・・・・28
Table-1 Specification ・・・・・・・・・ 3
Table-2 Scheduled Inspection ・・・・・・・・・18
Table-3 Trouble Check List ・・・・・・・・・22
Table-4 Main Expendable Parts List ・・・・・・・・・25
Attached table: Material Safety Data Sheet for Vacuum Pump Oil SMR-100
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