TELEDYNE API 452 Manual de usuario
Teledyne API Model 452 Ozone Sensor User Manual, 02852G DCN8011
i
SAFETY MESSAGES
NOTE
The only user-serviceable part in the Model 452 is the lamp, which can
be adjusted or replaced; however, the cautionary safety measures
provided in this manual must be followed. For all other service, call
TAPI Technical Support.
CAUTION
There is risk of dangerous UV exposure when the cover is removed
from the sensor. Take necessary precautions to avoid exposure.
WARNING
High voltages exist inside the sensor. Please use caution when sensor
cover is removed.
Teledyne API Model 452 Ozone Sensor User Manual, 02852G DCN8011
ii
Notice of Copyright
© 2015-2018 Teledyne Advanced Pollution Instrumentation. All rights reserved.
Revisions to this Manual are intended to clarify existing descriptions and are not intended to infer any
changes to customers under copy exact requirements.
Trademarks
All trademarks, registered trademarks, brand names or product names appearing in this document are the
property of their respective owners and are used herein for identification purposes only.
Teledyne API Model 452 Ozone Sensor User Manual, 02852G DCN8011
iii
TABLE OF CONTENTS
SAFETY MESSAGES .....................................................................................................................................I
NOTICE OF COPYRIGHT.......................................................................................................................... II
TRADEMARKS............................................................................................................................................. II
TABLE OF CONTENTS..............................................................................................................................III
LIST OF FIGURES ......................................................................................................................................IV
LIST OF TABLES ........................................................................................................................................IV
WARRANTY POLICY ................................................................................................................................. V
1 PRODUCT DESCRIPTIONS..................................................................................................................1-1
1.1 MODEL 452 PROCESS OZONE SENSOR.................................................................................................1-1
1.2 MODEL 452 HIGH PURITY PROCESS OZONE SENSOR...........................................................................1-1
2 SPECIFICATIONS...................................................................................................................................2-1
2.1 MECHANICAL SPECIFICATIONS............................................................................................................2-1
2.2 PERFORMANCE SPECIFICATIONS..........................................................................................................2-2
2.3 OPERATING LIMITS..............................................................................................................................2-2
2.4 ELECTRICAL SPECIFICATIONS..............................................................................................................2-2
2.5 CALIBRATION REFERENCE ..................................................................................................................2-2
2.6 OPTIONS ..............................................................................................................................................2-2
2.7 PRESSURE DROP ..................................................................................................................................2-3
3 THEORY OF OPERATION....................................................................................................................3-1
4 INSTALLATION ......................................................................................................................................4-1
4.1 UNPACKING.........................................................................................................................................4-1
4.2 MECHANICAL INSTALLATION ..............................................................................................................4-1
4.3 ELECTRICAL CONNECTIONS ................................................................................................................4-1
4.3.1 Power Supply ...........................................................................................................................4-2
4.3.2 Analog Output..........................................................................................................................4-2
4.3.3 Zero Calibration Input.............................................................................................................4-2
4.3.4 Status Outputs ..........................................................................................................................4-3
4.3.5 RS232/485 Interface.................................................................................................................4-3
4.4 GAS CONNECTIONS .............................................................................................................................4-4
4.5 START-UP AND CALIBRATION PROCEDURE .........................................................................................4-4
5 MAINTENANCE......................................................................................................................................5-1
5.1 UV LAMP ADJUSTMENT AND REPLACEMENT ......................................................................................5-1
5.1.1 Measuring and Adjusting UV Lamp Reference and Measurement Voltages ...........................5-4
5.1.2 Adjusting the Lamp ..................................................................................................................5-4
5.1.3 Replacing the Lamp .................................................................................................................5-5
6 SENSOR AND SYSTEM TROUBLESHOOTING ...............................................................................6-1
6.1 STATUS LED’S....................................................................................................................................6-1
6.2 STATUS OUTPUTS................................................................................................................................6-1
6.3 SENSOR O.K........................................................................................................................................6-2
6.4 INVALID READING...............................................................................................................................6-2
6.5 LAMP LOW ..........................................................................................................................................6-2
6.6 CELL DIRTY ........................................................................................................................................6-3
6.7 STATUS OUTPUT SUMMARY TABLE.....................................................................................................6-3
6.8 TECHNICAL ASSISTANCE .....................................................................................................................6-3
Teledyne API Model 452 Ozone Sensor User Manual, 02852G DCN8011
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LIST OF FIGURES
FIGURE 2-1: MODEL 452 HIGH PURITY OZONE SENSOR .................................................................................. 2-1
FIGURE 2-2: PRESSURE DROP VS.FLOW (HIGH PURITY VERSION)................................................................... 2-3
FIGURE 4-1: ELECTRICAL CONNECTIONS ......................................................................................................... 4-1
FIGURE 4-2: DIGITAL OUTPUT CONNECTIONS ................................................................................................. 4-3
FIGURE 5-1. COVER ASSEMBLY SCREWS ......................................................................................................... 5-2
FIGURE 5-2. UV LAMP ORIENTATION .............................................................................................................. 5-2
FIGURE 5-3. VOLTAGE ADJUSTMENT LOCATIONS............................................................................................ 5-3
LIST OF TABLES
TABLE 6-1: STATUS OUTPUTS.......................................................................................................................... 6-1
TABLE 6-2: STATUS OUTPUT TRUTH TABLE .................................................................................................... 6-3
Teledyne API Model 452 Ozone Sensor User Manual, 02852G DCN8011
v
WARRANTY POLICY
(02024J)
Teledyne API (TAPI), a business unit of Teledyne Instruments, Inc., provides that:
Prior to shipment, TAPI equipment is thoroughly inspected and tested. Should equipment failure occur, TAPI
assures its customers that prompt service and support will be available. (For the instrument-specific warranty
period, please refer to the “Limited Warranty” section in the Terms and Conditions of Sale on our website at
the following link: http://www.teledyne-api.com/terms_and_conditions.asp).
COVERAGE
After the warranty period and throughout the equipment lifetime, TAPI stands ready to provide on-site or in-
plant service at reasonable rates similar to those of other manufacturers in the industry. All maintenance and
the first level of field troubleshooting are to be performed by the customer.
NON-TAPI MANUFACTURED EQUIPMENT
Equipment provided but not manufactured by TAPI is warranted and will be repaired to the extent and
according to the current terms and conditions of the respective equipment manufacturer’s warranty.
Product Return
All units or components returned to Teledyne API should be properly packed for handling and returned freight
prepaid to the nearest designated Service Center. After the repair, the equipment will be returned, freight
prepaid.
The complete Terms and Conditions of Sale can be reviewed at http://www.teledyne-
api.com/terms_and_conditions.asp
CAUTION – Avoid Warranty Invalidation
Failure to comply with proper anti-Electro-Static Discharge (ESD) handling
and packing instructions and Return Merchandise Authorization (RMA)
procedures when returning parts for repair or calibration may void your
warranty. For anti-ESD handling and packing instructions please refer to the
manual, Fundamentals of ESD, PN 04786, in its “Packing Components for
Return to Teledyne API’s Customer Service” section. The manual can be
downloaded from our website at http://www.teledyne-api.com. RMA
procedures can also be found on our website.
Teledyne API Model 452 Ozone Sensor User Manual, 02852G DCN8011
1-1
1 Product Descriptions
1.1 Model 452 Process Ozone Sensor
The Teledyne API Model 452 is a microprocessor-based sensor for measuring the concentration of
gaseous ozone in processes such as semiconductor wafer fabrication, water treatment, and ozone
research. The Model 452 can be used as a full flow process sensor or as a sensor to monitor a small
flow of gas diverted from a process stream.
The Model 452 features a standard 0-5 volt analog signal for reporting process concentration as
well as 4 digital status outputs for sensor diagnostics. A bi-directional serial interface is also
provided for computer control.
The Model 452 operates from an external +15 vdc power source.
1.2 Model 452 High Purity Process Ozone Sensor
The Model 452 High Purity Process Ozone Sensor includes a 316L manifold with a 10Ra finish.
¼” stainless steel compression fittings are standard.
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