Talon TP-40BA Manual de usuario
TP-40BA (Rev 1.0)
TALON TECH CO. LTD.
Excellent Dispense Volume Reliability Pump & Controller –Built-in type
TALON TECH CO. LTD.
MODEL : TP-40BA
TP-40BA (Rev 1.0)
TALON TECH CO. LTD.
1. System Configurations………………………………………………………………………………………………………………………….
1
2. System Specifications…………………………………………………………………………………………………………………………….
2
2-1. Pump [TP-40BA]…….………………………………………………………………………………………………………………………….
2
2-2. Control Board………..………………………………………………………………………………………………………………………….
3
2-3. Touch pad………………………………………………………………………………………………………………………………………….
3
3. System In/Exterior Names……………..……………………………………………………………………………………………………..
4
3-1. Pump In/Exterior Names...………………………………………………………………………………………….……………………
4
3-1-1. Pump Name Explanation....…………………………………………………………………………………….………………….
5
3-2. Touch Pad Exterior Names..……………………………………………………………………………………………………………..
6
3-2-1. Touch Pad Name Explanation…………………………………………………………………………………………………...
6
3-3. Touch Pad Connection Board Exterior Names………..……………………………..…….…………………………………..
7
3-3-1. Touch Pad Connection Board Name Explanation…….……………………………..………..……………………...
7
4. Wiring & Signal Interface……………………………………………………………………………………………………………………..
8
4-1. Track I/O Signal Timing Chart……………………………………………………...…………………………………………………..
8
4-2. Track Pin Assign………………………………………………………………………………………………………………………………..
9
4-3. COMM & ETC Pin Assign…………………………………………………………………………………………………………………
9
4-4. Touch Pad Pin Assign……………………………………………………………………………...………………………………………..
10
4-5. Dispense Trigger Select..…………………………………………………………………………………………………………………..
11
5. External Cable Length…………….……………………………………………………………………………………………………………..
12
5-1. Track Cable…………….……………………………………………………………………….…………………………………………………
12
5-2. COM Cable…………………………………………………………………………………….………………………………………………….
12
5-3. Touch Pad Cable…………………………….…………………………………………………………………………………………………
12
6. Touch Pad Operation……………………………………………………………………………………………………………………………..
13
6-1. Operation……………………………………………………………………………………….…………………………………………………
13
6-1-1. Initial Screen….……………………………………………………………………….………………………………………………….
13
6-1-2. Pump Condition Indicate In Use….……………………………………………………………………………………………
13
6-1-3. Select Function…….….………………………………………………..……………………………………………………………….
13
6-1-4. Dispense…………………………………………………………………………………………………………………………………….
14
6-1-5. Recipe…………………………………………………………………………………………………………………………………………
14
6-1-6. Degas…………….…………………………………………………………………………………………………………………………...
15
6-1-7. Configuration of Pump……..…………….………………………………………………………………………………………...
15
6-1-8. Calibration.………………………………………………………………..……………………………………………………………….
18
6-2. Example...………………………………………………………………………………………………………………………………………….
18
6-2-1. Dispense…………………………………………………………………………………………………………………………………….
18
CONTENTS
TP-40BA (Rev 1.0)
TALON TECH CO. LTD.
6-2-2. Recipe…………………………………………………………………………………………………………………………………………
19
6-2-3. ID Setting…………………………………………………………………………………………………………………………………...
20
6-2-4. Reset on Pump Error…………………………………………………………………………………………………………………
22
6-3. Touch Pad Menu Tree……………………………………………………………………………………………………………………….
23
6-4. Notice…….………………………………………………………………………………………………………………………………………….
24
6-4-1. Degas Function.……………..…………………………………………………………………………………………………………..
24
6-4-2. Dispense Cycle…………………………………………………………………………………………………………………………..
24
6-4-3. Pump ID Setting…..……………………………………………………………………………………………………………………
24
6-4-4. Recipe Setting………………………………………………………………………………………………….………………………...
24
7. Pump Operation Sequence………………………………………..……………………………………………….………………………...
25
7-1. Degas Pump……………………..…………………………………………………………………………………….………………………...
25
7-1-1. Degas Pump Role……….……..………………..……………………………………………………………………………………..
25
7-1-2. Degas Pump Operation Sequence…….………………………….………………………………………………………….
26
7-2. Dispense Pump………………………………...…………..…………………………………………………………………………………..
27
7-2-1. Dispense Pump Role….…….……………………………..…………………………………………………………………………
27
7-2-2. Dispense Pump Operation Sequence….…………………………………………………………….……………………..
27
8. Maintenance…………………………………………………………………………………………………………………………………………...
29
8-1. Pump Parts Dis/Assembly………………………………………………………………………………………………………………...
29
8-1-1. Degas Pump Cover Dis/Assembly….…..……………………………………………………………………………………..
29
8-1-2. Buffer Tank Empty Sensor’s Sensitivity Adjustment……...………………………………………………………….
29
8-1-3. Driving Shaft Condition Check & Grease up on Ball Screw………...………..…………………………………
30
9. Recommended Spares/Mechanical Dimensions…………………………………………………………………………………
31
9-1. TP-40BA Spare Parts………………………………………………………………………….……………………………………………..
31
9-2. Pump Dimensions…………………………………………………………………………………………………………………………….
32
9-2-1. Front View……………………………………………………………………………………………………………………………….…
32
9-2-2. Side View……………………………………………………………………………………………………………………………………
32
9-3. Touch Pad Dimensions……………………………………………………………………………………………………………………..
33
9-3-1. Front View………………………………………………………………………………………………………………………………….
33
9-3-2. Rear View……………………………………………………………………………………………………………………………………
33
9-3-3. Side View……………………………………………………………………………………………………………………………………
33
9-4. Touch Pad Connection Board Dimensions……………………………………………..………………………………………..
34
9-4-1. Top View……………………………………..…………………………………...………………………………………………………..
34
9-5. Installation Method…………………………………………………………………………………………………………………………..
35
9-5-1. Pump Installation Sequence……………………………………………………………………………………………………..
35
9-5-2. Piping Method……………..……………………………………………………………………………………………………………
35
9-5-3. Touch Pad Installation Method………………………………………………………………………………………………...
36
9-5-4. Touch Pad Connection Board Bracket Installation Method.…………………………………………………….
37
TP-40BA (Rev 1.0)
- 1 -
TALON TECH CO. LTD.
TP-40BA pump can be used as the above configuration and has been developed for the semiconductor
system’s automation by operating RS422 communication. Especially, the adoption of servo motor is good
for the high degree of PR dispense. The basic communication between the touch pad and the pump is
RS422 Multi Drop method. By synchronizing with Windows CE Operating System, Touch Pad MMI 2.0
Software operates TP-40BA pump.
Be careful to use the pump by following this manual or Talon Tech’s acceptance. Or, other defects
should be paid even under the warranty period.
※Features & Merits
1. All the PR contacting points are made by Teflon.
2. Driving Method : Outer type Bellows / Ball screw equipped with serve motor.
3. Automatic bubble removal system / Automatic degasing function.
4. Touch pad has the same function of controller & it can control upto16 pumps.
5. Normal trigger signal.
System Configurations
1
Wafer
Dispense Nozzle
Suck-Back V/V
Filter
PR Bottle
Touch Pad
Max 16ea
Pump Control
TP-40BA Pump1
Main Air 6Ø
Suck-Back 4Ø
TP-40BA Pump16
Touch Pad
Connection B/D
(Max 8ea Ch)
TP-40BA (Rev 1.0)
- 2 -
TALON TECH CO. LTD.
2-1 Pump [TP-40BA]
ITEM
SPEC
REMARKS
Dispense Volume Range
0.5cc ~ 7.0cc
Suck-Back Volume Range
0.0cc ~ 3.5cc
Dispense / Reload Rate
0.1cc/sec ~ 7.0cc/sec
Suck-Back Rate
0.1cc/sec ~ 7.0cc/sec
Dispense Volume Resolution
0.0025cc
Dispense Repeatability
≤±0.02(2.2cp, 23℃)
Viscosity
Max : 150cp
Pump Driving Type
DC Servo Motor
1-Cycle Step
4-Dispense Step
Suck-Back Step
Reload Step
Pump Power Source
DC 24VDC (current consumption : 1A)
Ambient Temperature
5 ~ 40 ℃
Air
0.35Mpa
Weight
4.48kg
Pump Dimension
W : 80mm, L : 210mm, H : 309mm
System Specifications
2
TP-40BA (Rev 1.0)
- 3 -
TALON TECH CO. LTD.
2-2 Control Board
ITEM
SPEC
REMARKS
Power Source
DC 24V (current consumption : 1A)
Drive Pump No.
1 Pumps
Pump Operation Mode
Fixed Mode
Main CPU
80c296 (16bit Processor)
Input Signal
1. Pump Driving Signal From Track M/C-Pump
Start Signal(3ea)
Output Signal
1. Home Signal & Pump Driving Finish
Signal To Track M/C.
2. Suck-Back V/V control Sol V/V Signal
3. On Pump Operation Error, Alarm Signal
4. Outside Communication (RS422)
2-2 Touch Pad
ITEM
SPEC
REMARKS
Main CPU
32Bit ARM920T
Ram
64Mb (OS:32Mb/App:32Mb)
Flash
NAND Flash 64Mb (OS:32Mb/App:32Mb)
LCD Size
4.3 Inch TFT Wide (480*272)
RTC Function Built-in
Exchangeable Coin Battery
Max connect Pump
16 Pumps
Communication
RS422
Touch Pad Power
DC 12~24V, current consumption 5W (400~700mA)
Ambient Temperature
- 10 ~ 55C
Weight
0.64kg
Dimension
W : 140mm, D : 44mm, H : 88mm
TP-40BA (Rev 1.0)
- 4 -
TALON TECH CO. LTD.
3-1 Pump In/Exterior Names
System In/Exterior Names
3
⑤Degas Pump
⑥Dispense Pump
④Buffer Tank
③Air Sol Block Ass’y
②Main Control Board
①Cylinder
TP-40BA (Rev 1.0)
- 5 -
TALON TECH CO. LTD.
3-1-1 Pump Name Explanation
①Cylinder
- Function of containing PR and dispensed by bellows
②Main Control Board
- Main Control Board for all pump controls
③Air Sol Block Ass’y
- Sol Block Ass’y for Degas Pump & Air V/V operation. (2 channel Sol Block)
④Buffer Tank
- Bubble removal and buffering function of about 30cc PR
⑤Degas Pump
- Air Cylinder Type Pump for charging PR into Buffer Tank
⑥Dispense Pump
- Pump for the accurate PR dispense
⑦Vent
- Drain bubbles made by PR. (¼Inch Teflon)
⑧Empty
- Empty sensor to check the emptiness inside the buffer Tank. Automatically & manually charge
⑨S/Back
- Air outlet to operate suck-back valve. (4Ø Air Tube)
⑩PR In
⑦Vent
⑪PR Out
⑨S/Back
⑧Empty
⑩PR In
⑫Track
⑬COM
⑭Air In
TP-40BA (Rev 1.0)
- 6 -
TALON TECH CO. LTD.
- Chemical Supply. (¼Inch Teflon)
⑪PR Out
- Chemical Dispense. (¼Inch Teflon)
⑫Track
- Track cable connector from pump to machine. (D-SUB Male 15P)
⑬COM
- Communication Cable Connector from pump to touch pad. (D-SUB Male 15P)
⑭Air In
- Main air supply outlet to operate degas pump & air valve. (6Ø Air Tube)
3-2 Touch Pad Exterior Names
3-2-1 Touch Pad Name Explanation
①Touch Panel
- Touching area
②Power In
- Touch Pad Power DC12~24V Connector
③Com Port
- Touch Pad RS422 communication Connector (D-SUB 9P Male)
④Com Port
- Touch Pad RS422 communication Connector
②Power Source
(DC12~24V)
③Com Port (RS422)
④Com Port (RS422)
①Touch Panel
TP-40BA (Rev 1.0)
- 7 -
TALON TECH CO. LTD.
3-3 Touch Pad Connection Board Exterior Names
3-3-1 Touch Pad Connection Board Name Explanation
①Touch Pad
- Touch Pad Communication Connector. (Molex 6P)
②Main COM
- In case the machine controls the pump, use this Communication Connector. (Molex 4P)
③Switching I/O
- Switching Connector to exchange Touch Pad & Main COM’s communication. (Molex 5P)
④RS422 Communication
- Pump1 ~ Pump8 COM Cable Connection Connector. (Molex 4P)
④RS422 comm.
(J1 ~ J8)
①Touch Pad
②Main COM
③Switching I/O
[Switching I/O Circuit]
[Main COM Circuit]
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